Venkatasubramanian; Eswaranand
Patent Applications and Registrations
Patent applications and USPTO patent grants for Venkatasubramanian; Eswaranand.The latest application filed is for "multicolor approach to dram sti active cut patterning".
Company Profile
25.18.37
- Venkatasubramanian; Eswaranand - Santa Clara CA
- Venkatasubramanian; Eswaranand - Sant Clara CA
- Venkatasubramanian; Eswaranand - Sunnyvale CA
- Venkatasubramanian; Eswaranand - Chennai IN
Patent Activity
| Patent | Date |
|---|---|
| Low temperature high-quality dielectric films Grant 11,430,655 - Venkatasubramanian , et al. August 30, 2 | 2022-08-30 |
| Multicolor Approach To DRAM STI Active Cut Patterning App 20220238531 - Singh; Tejinder ; et al. | 2022-07-28 |
| Diamond-like carbon film Grant 11,332,376 - Venkatasubramanian , et al. May 17, 2 | 2022-05-17 |
| Multicolor approach to DRAM STI active cut patterning Grant 11,335,690 - Singh , et al. May 17, 2 | 2022-05-17 |
| Depositing Low Roughness Diamond Films App 20220127721 - Sahmuganathan; Vicknesh ; et al. | 2022-04-28 |
| Modulating film properties by optimizing plasma coupling materials Grant 11,270,905 - Venkatasubramanian , et al. March 8, 2 | 2022-03-08 |
| Tribological Properties Of Diamond Films App 20220068643 - Sahmuganathan; Vicknesh ; et al. | 2022-03-03 |
| In-situ High Power Implant To Relieve Stress Of A Thin Film App 20220037154 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2022-02-03 |
| Methods For Producing High-density Doped-carbon Films For Hardmask And Other Patterning Applications App 20210407801 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-12-30 |
| Plasma Cleaning Methods For Processing Chambers App 20210384015 - WANG; Huiyuan ; et al. | 2021-12-09 |
| Doped And Undoped Vanadium Oxides For Low-K Spacer Applications App 20210358744 - Venkatasubramanian; Eswaranand ; et al. | 2021-11-18 |
| In-situ high power implant to relieve stress of a thin film Grant 11,158,507 - Venkatasubramanian , et al. October 26, 2 | 2021-10-26 |
| High Bias Deposition of High Quality Gapfill App 20210327752 - Gottheim; Samuel E. ; et al. | 2021-10-21 |
| Doped and undoped vanadium oxides for low-k spacer applications Grant 11,094,533 - Venkatasubramanian , et al. August 17, 2 | 2021-08-17 |
| High bias deposition of high quality gapfill Grant 11,062,939 - Gottheim , et al. July 13, 2 | 2021-07-13 |
| High-density low temperature carbon films for hardmask and other patterning applications Grant 11,043,372 - Venkatasubramanian , et al. June 22, 2 | 2021-06-22 |
| Plasma deposition of carbon hardmask Grant 11,043,375 - Yang , et al. June 22, 2 | 2021-06-22 |
| Bottom-up gap-fill by surface poisoning treatment Grant 11,028,477 - Saly , et al. June 8, 2 | 2021-06-08 |
| Multicolor Approach To DRAM STI Active Cut Patterning App 20210134807 - Singh; Tejinder ; et al. | 2021-05-06 |
| Diamond-like carbon as mandrel Grant 10,954,129 - Koshizawa , et al. March 23, 2 | 2021-03-23 |
| Tuneable Uniformity Control Utilizing Rotational Magnetic Housing App 20210050189 - GOTTHEIM; Samuel E. ; et al. | 2021-02-18 |
| Low Temperature High-Quality Dielectric Films App 20210043450 - Venkatasubramanian; Eswaranand ; et al. | 2021-02-11 |
| Pulsed Plasma (dc/rf) Deposition Of High Quality C Films For Patterning App 20210040618 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-02-11 |
| Carbon Hard Masks For Patterning Applications And Methods Related Thereto App 20210043449 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-02-11 |
| Multicolor approach to DRAM STI active cut patterning Grant 10,910,381 - Singh , et al. February 2, 2 | 2021-02-02 |
| Modulating Film Properties By Optimizing Plasma Coupling Materials App 20210005500 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-01-07 |
| Substrate Processing Chamber App 20200370177 - FRANKLIN; Timothy Joseph ; et al. | 2020-11-26 |
| Low temperature high-quality dielectric films Grant 10,840,088 - Venkatasubramanian , et al. November 17, 2 | 2020-11-17 |
| Diamond-Like Carbon Film App 20200331762 - Venkatasubramanian; Eswaranand ; et al. | 2020-10-22 |
| Diamond-like carbon film Grant 10,745,282 - Venkatasubramanian , et al. A | 2020-08-18 |
| Magnetic Housing Systems App 20200144029 - GANDIKOTA; Srinivas ; et al. | 2020-05-07 |
| High Density Carbon Films For Patterning Applications App 20200135466 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2020-04-30 |
| Multicolor Approach To DRAM STI Active Cut Patterning App 20200043932 - Singh; Tejinder ; et al. | 2020-02-06 |
| Doped And Undoped Vanadium Oxides For Low-K Spacer Applications App 20200035486 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-30 |
| Low Temperature High-Quality Dielectric Films App 20200027726 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-23 |
| Carbon Gapfill Films App 20190393030 - Jiang; Shishi ; et al. | 2019-12-26 |
| In-situ High Power Implant To Relieve Stress Of A Thin Film App 20190393034 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2019-12-26 |
| High Bias Deposition of High Quality Gapfill App 20190385907 - Gottheim; Samuel E. ; et al. | 2019-12-19 |
| Thick tungsten hardmask films deposition on high compressive/tensile bow wafers Grant 10,504,727 - Wang , et al. Dec | 2019-12-10 |
| Doped and undoped vanadium oxides for low-k spacer applications Grant 10,475,642 - Venkatasubramanian , et al. Nov | 2019-11-12 |
| Boron doped tungsten carbide for hardmask applications Grant 10,403,502 - Venkatasubramanian , et al. Sep | 2019-09-03 |
| Hardmask layer for 3D NAND staircase structure in semiconductor applications Grant 10,312,137 - Venkatasubramanian , et al. | 2019-06-04 |
| Plasma Deposition Of Carbon Hardmask App 20190057862 - YANG; Yang ; et al. | 2019-02-21 |
| Diamond-Like Carbon Film App 20180354804 - Venkatasubramanian; Eswaranand ; et al. | 2018-12-13 |
| High-density Low Temperature Carbon Films For Hardmask And Other Patterning Applications App 20180358222 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-12-13 |
| Diamond-Like Carbon As Mandrel App 20180358229 - Koshizawa; Takehito ; et al. | 2018-12-13 |
| Alternating Between Deposition And Treatment Of Diamond-like Carbon App 20180274100 - Yang; Yang ; et al. | 2018-09-27 |
| Plasma Reactor With Electron Beam Of Secondary Electrons App 20180277340 - Yang; Yang ; et al. | 2018-09-27 |
| Boron Doped Tungsten Carbide For Hardmask Applications App 20180218902 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-08-02 |
| Thick Tungsten Hardmask Films Deposition On High Compressive/tensile Bow Wafers App 20180076032 - WANG; Jiarui ; et al. | 2018-03-15 |
| Hardmask Layer For 3d Nand Staircase Structure In Semiconductor Applications App 20170352586 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2017-12-07 |
| Doped And Undoped Vanadium Oxides For Low-K Spacer Applications App 20170309476 - Venkatasubramanian; Eswaranand ; et al. | 2017-10-26 |
| Bottom-Up Gap-Fill by Surface Poisoning Treatment App 20170114459 - Saly; Mark ; et al. | 2017-04-27 |
| Selective Silicon Dioxide Deposition Using Phosphonic Acid Self Assembled Monolayers As Nucleation Inhibitor App 20170092533 - Chakraborty; Tapash ; et al. | 2017-03-30 |
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