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Selective Carbon Deposition
App 20220235464 - GUPTA; Awnish ; et al. | 2022-07-28 |
Modulated Atomic Layer Deposition
App 20220208543 - Soe; Chan Myae Myae ; et al. | 2022-06-30 |
Etch Stop Layer
App 20220181141 - van Schravendijk; Bart J. ; et al. | 2022-06-09 |
Method For Providing Doped Silicon
App 20220165563 - KUMAR; Purushottam ; et al. | 2022-05-26 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20220145459 - VARADARAJAN; Bhadri N. ; et al. | 2022-05-12 |
Low Stress Films For Advanced Semiconductor Applications
App 20220068636 - Bayati; Reza ; et al. | 2022-03-03 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20220059348 - Kang; Hu ; et al. | 2022-02-24 |
Film Stack Simplification For High Aspect Ratio Patterning And Vertical Scaling
App 20220051938 - Wu; Hui-Jung ; et al. | 2022-02-17 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20220005694 - Smith; David Charles ; et al. | 2022-01-06 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 11,183,383 - Smith , et al. November 23, 2 | 2021-11-23 |
Method To Create Air Gaps
App 20210343579 - van Cleemput; Patrick A. ; et al. | 2021-11-04 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 11,133,180 - Kang , et al. September 28, 2 | 2021-09-28 |
Method to create air gaps
Grant 11,088,019 - Van Cleemput , et al. August 10, 2 | 2021-08-10 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20210242019 - Smith; David Charles ; et al. | 2021-08-05 |
Radical source design for remote plasma atomic layer deposition
Grant 11,053,587 - van Schravendijk July 6, 2 | 2021-07-06 |
Gap fill using carbon-based films
Grant 11,049,716 - Tang , et al. June 29, 2 | 2021-06-29 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 11,031,245 - Smith , et al. June 8, 2 | 2021-06-08 |
Apparatus and method for deposition and etch in gap fill
Grant 10,957,514 - Singhal , et al. March 23, 2 | 2021-03-23 |
Selective inhibition in atomic layer deposition of silicon-containing films
Grant 10,804,099 - Henri , et al. October 13, 2 | 2020-10-13 |
Methods of encapsulation
Grant 10,763,107 - van Schravendijk , et al. Sep | 2020-09-01 |
Geometrically selective deposition of a dielectric film
Grant 10,763,108 - Hausmann , et al. Sep | 2020-09-01 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20200219725 - Smith; David Charles ; et al. | 2020-07-09 |
Method To Create Air Gaps
App 20200219758 - van Cleemput; Patrick ; et al. | 2020-07-09 |
Selective atomic layer deposition with post-dose treatment
Grant 10,679,848 - Kumar , et al. | 2020-06-09 |
Methods Of Encapsulation
App 20200152452 - van Schravendijk; Bart J. ; et al. | 2020-05-14 |
Selective deposition of SiN on horizontal surfaces
Grant 10,615,169 - van Schravendijk , et al. | 2020-04-07 |
Staircase encapsulation in 3D NAND fabrication
Grant 10,580,690 - Yu , et al. | 2020-03-03 |
Methods of encapsulation
Grant 10,566,186 - van Schravendijk , et al. Feb | 2020-02-18 |
Apparatus And Method For Deposition And Etch In Gap Fill
App 20190385820 - Singhal; Akhil ; et al. | 2019-12-19 |
Pecvd Apparatus For In-situ Deposition Of Film Stacks
App 20190376186 - Haverkamp; Jason Dirk ; et al. | 2019-12-12 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20190311897 - Kang; Hu ; et al. | 2019-10-10 |
Radical Source Design For Remote Plasma Atomic Layer Deposition
App 20190301013 - van Schravendijk; Bart J. | 2019-10-03 |
Apparatus and method for deposition and etch in gap fill
Grant 10,373,806 - Singhal , et al. | 2019-08-06 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 10,361,076 - Kang , et al. | 2019-07-23 |
Gap Fill Using Carbon-based Films
App 20190181004 - Tang; Wei ; et al. | 2019-06-13 |
Radical source design for remote plasma atomic layer deposition
Grant 10,316,409 - van Schravendijk | 2019-06-11 |
Methods Of Encapsulation
App 20190157078 - van Schravendijk; Bart J. ; et al. | 2019-05-23 |
PECVD apparatus for in-situ deposition of film stacks
Grant 10,214,816 - Haverkamp , et al. Feb | 2019-02-26 |
Geometrically Selective Deposition Of A Dielectric Film
App 20190057858 - Hausmann; Dennis M. ; et al. | 2019-02-21 |
SELECTIVE DEPOSITION OF SiN ON HORIZONTAL SURFACES
App 20190043876 - van Schravendijk; Bart J. ; et al. | 2019-02-07 |
Image reversal with AHM gap fill for multiple patterning
Grant 10,192,759 - Shamma , et al. Ja | 2019-01-29 |
Methods of encapsulation
Grant 10,157,736 - van Schravendijk , et al. Dec | 2018-12-18 |
Staircase Encapsulation In 3d Nand Fabrication
App 20180330985 - Yu; Yongsik ; et al. | 2018-11-15 |
Integrated direct dielectric and metal deposition
Grant 10,128,116 - Lee , et al. November 13, 2 | 2018-11-13 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180323057 - Kumar; Purushottam ; et al. | 2018-11-08 |
Densifying Films In Semiconductor Device
App 20180308690 - van Schravendijk; Bart J. ; et al. | 2018-10-25 |
Selective atomic layer deposition with post-dose treatment
Grant 10,062,563 - Kumar , et al. August 28, 2 | 2018-08-28 |
Method To Create Air Gaps
App 20180233398 - Van Cleemput; Patrick A. ; et al. | 2018-08-16 |
Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor
Grant 10,049,921 - Draeger , et al. August 14, 2 | 2018-08-14 |
Staircase encapsulation in 3D NAND fabrication
Grant 10,002,787 - Yu , et al. June 19, 2 | 2018-06-19 |
Staircase Encapsulation In 3d Nand Fabrication
App 20180144977 - Yu; Yongsik ; et al. | 2018-05-24 |
Selective Inhibition In Atomic Layer Deposition Of Silicon-containing Films
App 20180138028 - Henri; Jon ; et al. | 2018-05-17 |
Method of densifying films in semiconductor device
Grant 9,966,255 - van Schravendijk , et al. May 8, 2 | 2018-05-08 |
Integrated Direct Dielectric And Metal Deposition
App 20180108529 - Lee; William T. ; et al. | 2018-04-19 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20180044791 - Varadarajan; Bhadri N. ; et al. | 2018-02-15 |
Selective inhibition in atomic layer deposition of silicon-containing films
Grant 9,875,891 - Henri , et al. January 23, 2 | 2018-01-23 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20180012759 - Smith; David Charles ; et al. | 2018-01-11 |
Apparatus And Method For Deposition And Etch In Gap Fill
App 20180005801 - Singhal; Akhil ; et al. | 2018-01-04 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180005814 - Kumar; Purushottam ; et al. | 2018-01-04 |
Method Of Densifying Films In Semiconductor Device
App 20170372895 - van Schravendijk; Bart J. ; et al. | 2017-12-28 |
Treatment for flowable dielectric deposition on substrate surfaces
Grant 9,847,222 - Reilly , et al. December 19, 2 | 2017-12-19 |
Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
Grant 9,828,672 - Varadarajan , et al. November 28, 2 | 2017-11-28 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 9,824,893 - Smith , et al. November 21, 2 | 2017-11-21 |
Methods Of Encapsulation
App 20170323803 - van Schravendijk; Bart J. ; et al. | 2017-11-09 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20170323786 - Kang; Hu ; et al. | 2017-11-09 |
Method To Deposit Conformal And Low Wet Etch Rate Encapsulation Layer Using Pecvd
App 20170323785 - Singhal; Akhil ; et al. | 2017-11-09 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 9,793,110 - Kang , et al. October 17, 2 | 2017-10-17 |
Apparatus and method for deposition and etch in gap fill
Grant 9,773,643 - Singhal , et al. September 26, 2 | 2017-09-26 |
Selective Inhibition In Atomic Layer Deposition Of Silicon-containing Films
App 20170117134 - Henri; Jon ; et al. | 2017-04-27 |
Selective inhibition in atomic layer deposition of silicon-containing films
Grant 9,564,312 - Henri , et al. February 7, 2 | 2017-02-07 |
Gap Fill Using Carbon-based Films
App 20160314964 - Tang; Wei ; et al. | 2016-10-27 |
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating With Intermittent Restoration Plasma
App 20160281230 - Varadarajan; Bhadri N. ; et al. | 2016-09-29 |
Image Reversal With Ahm Gap Fill For Multiple Patterning
App 20160254171 - Shamma; Nader ; et al. | 2016-09-01 |
Sacrificial pre-metal dielectric for self-aligned contact scheme
Grant 9,379,210 - Mountsier , et al. June 28, 2 | 2016-06-28 |
Selective Inhibition In Atomic Layer Deposition Of Silicon-containing Films
App 20160148800 - Henri; Jon ; et al. | 2016-05-26 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20160118246 - Kang; Hu ; et al. | 2016-04-28 |
Sacrificial Pre-metal Dielectric For Self-aligned Contact Scheme
App 20160071953 - Mountsier; Thomas Weller ; et al. | 2016-03-10 |
Flowable Dielectric For Selective Ultra Low-k Pore Sealing
App 20160056071 - Draeger; Nerissa Sue ; et al. | 2016-02-25 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
Grant 9,257,274 - Kang , et al. February 9, 2 | 2016-02-09 |
Plasma activated conformal film deposition
Grant 9,230,800 - LaVoie , et al. January 5, 2 | 2016-01-05 |
Sacrificial pre-metal dielectric for self-aligned contact scheme
Grant 9,190,489 - Mountsier , et al. November 17, 2 | 2015-11-17 |
Post-deposition soft annealing
Grant 9,165,788 - Fox , et al. October 20, 2 | 2015-10-20 |
Treatment For Flowable Dielectric Deposition On Substrate Surfaces
App 20150118862 - Reilly; Patrick ; et al. | 2015-04-30 |
Methods And Apparatus For Forming Flowable Dielectric Films Having Low Porosity
App 20150118863 - Rathod; Megha ; et al. | 2015-04-30 |
In-situ Deposition Of Film Stacks
App 20150013607 - Haverkamp; Jason Dirk ; et al. | 2015-01-15 |
Multi-plenum Showerhead With Temperature Control
App 20140235069 - Breiling; Patrick G. ; et al. | 2014-08-21 |
Plasma Activated Conformal Film Deposition
App 20140209562 - LaVoie; Adrien ; et al. | 2014-07-31 |
Radical Source Design For Remote Plasma Atomic Layer Deposition
App 20140179114 - van Schravendijk; Bart J. | 2014-06-26 |
Plasma activated conformal film deposition
Grant 8,728,956 - LaVoie , et al. May 20, 2 | 2014-05-20 |
Gapfill Of Variable Aspect Ratio Features With A Composite Peald And Pecvd Method
App 20140106574 - Kang; Hu ; et al. | 2014-04-17 |
Plasma activated conformal dielectric film deposition
Grant 8,637,411 - Swaminathan , et al. January 28, 2 | 2014-01-28 |
Post-deposition Soft Annealing
App 20130267081 - Fox; Keith ; et al. | 2013-10-10 |
Silicon Nitride Films For Semiconductor Device Applications
App 20130157466 - Fox; Keith ; et al. | 2013-06-20 |
Plasma Activated Conformal Dielectric Film Deposition
App 20120028454 - Swaminathan; Shankar ; et al. | 2012-02-02 |
Plasma Activated Conformal Film Deposition
App 20110256726 - LaVoie; Adrien ; et al. | 2011-10-20 |
Silicon Nitride Films And Methods
App 20110256734 - Hausmann; Dennis M. ; et al. | 2011-10-20 |
Treatment of low k films with a silylating agent for damage repair
Grant 7,541,200 - van Schravendijk , et al. June 2, 2 | 2009-06-02 |
Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper
Grant 6,764,952 - Yu , et al. July 20, 2 | 2004-07-20 |
Plasma clean for a semiconductor thin film deposition chamber
Grant 6,716,765 - Hanprasopwattana , et al. April 6, 2 | 2004-04-06 |
Chemical vapor deposition system including dedicated cleaning gas injection
Grant 6,200,412 - Kilgore , et al. March 13, 2 | 2001-03-13 |
Device for removing dissolved gas from a liquid
Grant 5,772,736 - van Schravendijk , et al. June 30, 1 | 1998-06-30 |
Device for removing dissolved gas from a liquid
Grant 5,645,625 - van Schravendijk , et al. July 8, 1 | 1997-07-08 |
Device for removing dissolved gas from a liquid
Grant 5,425,803 - van Schravendijk , et al. June 20, 1 | 1995-06-20 |
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