Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ;   et al. | 2016-09-29 |
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ;   et al. | 2011-01-06 |
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ;   et al. | 2009-11-26 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Substrate holder for lithographic apparatus App 20010022652 - van Schaik, Frank ;   et al. | 2001-09-20 |