loadpatents
Patent applications and USPTO patent grants for Van Santen; Helmar.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Method and device for irradiating spots on a layer Grant RE48,515 - Neijzen , et al. April 13, 2 | 2021-04-13 |
Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Lithographic apparatus and device manufacturing method Grant 10,768,538 - Van Santen , et al. Sep | 2020-09-08 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,705,432 - Kolesnychenko , et al. | 2020-07-07 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic apparatus and device manufacturing method Grant 10,620,545 - Lof , et al. | 2020-04-14 |
Lithographic apparatus and device manufacturing method Grant 10,613,447 - Van Santen , et al. | 2020-04-07 |
Lithographic Apparatus And Device Manufacturing Method App 20200057392 - Van Santen; Helmar ;   et al. | 2020-02-20 |
Lithographic apparatus and device manufacturing method Grant 10,527,955 - Hoogendam , et al. J | 2020-01-07 |
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
Lithographic Apparatus And Device Manufacturing Method App 20190265596 - LOF; Joeri ;   et al. | 2019-08-29 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190227444 - HOOGENDAM; Christiaan Alexander ;   et al. | 2019-07-25 |
Lithographic Apparatus And Device Manufacturing Method App 20190212662 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2019-07-11 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic apparatus and device manufacturing method Grant 10,248,034 - Hoogendam , et al. | 2019-04-02 |
Lithographic apparatus and device manufacturing method Grant 10,234,768 - Kolesnychenko , et al. | 2019-03-19 |
Lithographic apparatus and device manufacturing method Grant 10,222,706 - Lof , et al. | 2019-03-05 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Method Of Removing Co2 From A Contaminated Hydrocarbon Stream App 20180259251 - POORTE; Raimo Edwin Gregor ;   et al. | 2018-09-13 |
Lithographic Apparatus And Device Manufacturing Method App 20180246418 - Kolesnychenko; Aleksey Yurievich ;   et al. | 2018-08-30 |
Lithographic apparatus and device manufacturing method Grant 9,989,861 - Kolesnychenko , et al. June 5, 2 | 2018-06-05 |
Lithographic Apparatus And Device Manufacturing Method App 20180081282 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2018-03-22 |
Lithographic Apparatus And Device Manufacturing Method App 20180046094 - VAN SANTEN; Helmar ;   et al. | 2018-02-15 |
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic apparatus and device manufacturing method Grant 9,829,799 - Kolesnychenko , et al. November 28, 2 | 2017-11-28 |
Lithographic apparatus and device manufacturing method Grant 9,817,321 - Van Santen , et al. November 14, 2 | 2017-11-14 |
Lithographic Apparatus And Device Manufacturing Method App 20170255111 - VAN SANTEN; Helmar ;   et al. | 2017-09-07 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Lithographic apparatus and device manufacturing method Grant 9,684,250 - Van Santen , et al. June 20, 2 | 2017-06-20 |
Method and device for irradiating spots on a layer Grant RE46,433 - Neijzen , et al. June 13, 2 | 2017-06-13 |
Lithographic Apparatus And Device Manufacturing Method App 20170153557 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2017-06-01 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic Apparatus And Device Manufacturing Method App 20170045830 - HOOGENDAM; Christiaan Alexander ;   et al. | 2017-02-16 |
Lithographic apparatus and device manufacturing method Grant 9,568,840 - Kolesnychenko , et al. February 14, 2 | 2017-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20170023871 - VAN SANTEN; Helmar ;   et al. | 2017-01-26 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic apparatus and device manufacturing method Grant 9,482,962 - Hoogendam , et al. November 1, 2 | 2016-11-01 |
Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ;   et al. | 2016-09-29 |
Process and apparatus for removing gaseous contaminants from gas stream comprising gaseous contaminants Grant 9,396,854 - Geers , et al. July 19, 2 | 2016-07-19 |
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Imprint lithography Grant 9,341,944 - Kolesnychenko , et al. May 17, 2 | 2016-05-17 |
Lithographic Apparatus And Device Manufacturing Method App 20160085161 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2016-03-24 |
Lithographic Apparatus And Device Manufacturing Method App 20150362844 - LOF; Joeri ;   et al. | 2015-12-17 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid Grant 9,207,543 - Kolesnychenko , et al. December 8, 2 | 2015-12-08 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet Grant 9,091,940 - Derksen , et al. July 28, 2 | 2015-07-28 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20140368799 - Van Santen; Helmar ;   et al. | 2014-12-18 |
Lithographic apparatus and device manufacturing method Grant 8,860,923 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
Lithographic Apparatus And Device Manufacturing Method App 20140253890 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2014-09-11 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure Grant 8,797,503 - Lof , et al. August 5, 2 | 2014-08-05 |
Lithographic apparatus and device manufacturing method Grant 8,767,171 - Van Santen , et al. July 1, 2 | 2014-07-01 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,755,033 - Kolesnychenko , et al. June 17, 2 | 2014-06-17 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,704,998 - Kolesnychenko , et al. April 22, 2 | 2014-04-22 |
Lithographic apparatus Grant 8,638,418 - Hoogendam , et al. January 28, 2 | 2014-01-28 |
Lithographic Apparatus And Device Manufacturing Method App 20130301017 - Derksen; Antonius Theodorus Anna Maria ;   et al. | 2013-11-14 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic apparatus Grant 8,542,343 - Hoogendam , et al. September 24, 2 | 2013-09-24 |
Lithographic apparatus and device manufacturing method Grant 8,542,344 - Hoogendam , et al. September 24, 2 | 2013-09-24 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Imprint lithography Grant 8,241,550 - Van Santen , et al. August 14, 2 | 2012-08-14 |
Lithographic apparatus and device manufacturing method Grant 8,208,120 - Lof , et al. June 26, 2 | 2012-06-26 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Cyclonic liquid degassing separator and method for degassing a fluid mixture Grant 8,105,422 - Betting , et al. January 31, 2 | 2012-01-31 |
Lithographic Apparatus And Device Manufacturing Method App 20120013867 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method App 20120013869 - HOOGENDAM; Christiaan Alexander ;   et al. | 2012-01-19 |
Process And Apparatus For Separating A Gaseous Product From A Feed Stream Comprising Contaminants App 20120006055 - Van Santen; Helmar ;   et al. | 2012-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic apparatus and device manufacturing method Grant RE42,849 - Duineveld , et al. October 18, 2 | 2011-10-18 |
Lithographic Apparatus And Device Manufacturing Method App 20110228241 - LOF; Joeri ;   et al. | 2011-09-22 |
Immersion lithographic apparatus and device manufacturing method with gas supply Grant 7,982,850 - Lof , et al. July 19, 2 | 2011-07-19 |
Process And Apparatus For Removing Gaseous Contaminants From Gas Stream Comprising Gaseous Contaminants App 20110167869 - Geers; Henricus Abraham ;   et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Lithographic Apparatus App 20110157570 - Hoogendam; Christiaan Alexander ;   et al. | 2011-06-30 |
Lithographic Apparatus And Device Manufacturing Method App 20110116061 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2011-05-19 |
Non-leaching adhesive system and its use in a liquid immersion objective Grant 7,935,213 - Verstegen , et al. May 3, 2 | 2011-05-03 |
Lithographic Apparatus App 20110090473 - Hoogendam; Christiaan Alexander ;   et al. | 2011-04-21 |
Imprint lithography Grant 7,922,474 - Kruijt-Stegeman , et al. April 12, 2 | 2011-04-12 |
Imprint lithography Grant 7,906,059 - Loopstra , et al. March 15, 2 | 2011-03-15 |
Lithographic apparatus and device manufacturing method Grant 7,898,642 - Kolesnychenko , et al. March 1, 2 | 2011-03-01 |
Lithographic apparatus Grant 7,868,998 - Hoogendam , et al. January 11, 2 | 2011-01-11 |
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ;   et al. | 2011-01-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100182576 - VAN SANTEN; Helmar ;   et al. | 2010-07-22 |
Imprint Lithography App 20100139862 - KOLESNYCHENKO; Aleksey Yurievich ;   et al. | 2010-06-10 |
Lithographic apparatus and device manufacturing method Grant 7,710,541 - Van Santen , et al. May 4, 2 | 2010-05-04 |
Imprint lithography Grant 7,708,924 - Kolesnychenko , et al. May 4, 2 | 2010-05-04 |
Imprint Lithography App 20100084565 - VAN SANTEN; Helmar ;   et al. | 2010-04-08 |
Imprint lithography Grant 7,692,771 - Kolesnychenko , et al. April 6, 2 | 2010-04-06 |
Imprint lithography Grant 7,686,970 - Kolesnychenko , et al. March 30, 2 | 2010-03-30 |
Non-leaching Adhesive System And Its Use In A Liquid Immersion Objective App 20100071848 - Verstegen; Emile Johannes Karel ;   et al. | 2010-03-25 |
Aberration Correcting Apparatus App 20100008196 - Van Santen; Helmar ;   et al. | 2010-01-14 |
Non-leaching adhesive system and its use in a liquid immersion objective Grant 7,642,297 - Verstegen , et al. January 5, 2 | 2010-01-05 |
Imprint lithography Grant 7,618,250 - Van Santen , et al. November 17, 2 | 2009-11-17 |
Imprint lithography Grant 7,611,348 - Van Santen , et al. November 3, 2 | 2009-11-03 |
Device for directing radiation to a layer, apparatus with such device and method using such apparatus Grant 7,605,979 - Neijzen , et al. October 20, 2 | 2009-10-20 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Cyclonic Liquid Degassing Separator And Method For Degassing A Fluid Mixture App 20090205488 - Betting; Marco ;   et al. | 2009-08-20 |
Imprint Lithography App 20090174115 - LOOPSTRA; ERIK ROELOF ;   et al. | 2009-07-09 |
Imprint lithography method and apparatus Grant 7,523,701 - Loopstra , et al. April 28, 2 | 2009-04-28 |
Method and device for irradiating spots on a layer Grant 7,514,699 - Neijzen , et al. April 7, 2 | 2009-04-07 |
Imprint lithography Grant 7,490,547 - Van Santen , et al. February 17, 2 | 2009-02-17 |
Lithographic apparatus App 20080278696 - Hoogendam; Christiaan Alexander ;   et al. | 2008-11-13 |
Optical Element App 20080252960 - Hendriks; Bernardus H.W. ;   et al. | 2008-10-16 |
Imprint lithography including alignment Grant 7,418,902 - Kruijt-Stegeman , et al. September 2, 2 | 2008-09-02 |
Optical Element App 20080198438 - Kuiper; Stein ;   et al. | 2008-08-21 |
Variable Focus Lens App 20080198473 - Ruigrok; Jaap ;   et al. | 2008-08-21 |
Objective System for an Optical Scanning Device for Ultraviolet and/or Deep-Ultraviolet Wavelengths App 20080192334 - Neijzen; Jacobus Hermanus Maris ;   et al. | 2008-08-14 |
Lithographic apparatus Grant 7,411,653 - Hoogendam , et al. August 12, 2 | 2008-08-12 |
Device for Directing Radiation to a Layer, Apparatus with Such Device and Method Using Such Apparatus App 20080186549 - Neijzen; Jacobus Hermanus Maria ;   et al. | 2008-08-07 |
Method and device for irradiating spots on a layer Grant 7,399,978 - Van Santen , et al. July 15, 2 | 2008-07-15 |
Lithographic apparatus and device manufacturing method Grant 7,394,521 - Van Santen , et al. July 1, 2 | 2008-07-01 |
Lithographic projection apparatus Grant 7,388,648 - Lof , et al. June 17, 2 | 2008-06-17 |
Imprint lithography Grant 7,377,764 - Kruijt-Stegeman , et al. May 27, 2 | 2008-05-27 |
Lithographic apparatus and device manufacturing method Grant 7,372,541 - Lof , et al. May 13, 2 | 2008-05-13 |
Liquid removal in a method and device for irradiating spots on a layer Grant 7,358,507 - Van Santen April 15, 2 | 2008-04-15 |
Imprint lithography Grant 7,354,698 - Van Santen , et al. April 8, 2 | 2008-04-08 |
Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Method and device for irradiating spots on a layer App 20070052936 - Neijzen; Jacobus Hermanus Maria ;   et al. | 2007-03-08 |
Imprint lithography App 20060267231 - Van Santen; Helmar ;   et al. | 2006-11-30 |
liquid removal in a method an device for irradiating spots on a layer App 20060261288 - Van Santen; Helmar | 2006-11-23 |
Photolithographic process, stamper, use of said stamper and optical data storage medium App 20060246378 - Neijzen; Jacobus Hermanus Maria ;   et al. | 2006-11-02 |
Non-leaching adhesvie system and its use in a liquid immersion objective App 20060225840 - Verstegen; Emile Johannes Karel ;   et al. | 2006-10-12 |
Lithographic apparatus and device manufacturing method Grant 7,119,874 - Cox , et al. October 10, 2 | 2006-10-10 |
Method and device for irradiating spots on a layer App 20060209414 - Van Santen; Helmar ;   et al. | 2006-09-21 |
Method of manufacturing a replica, as well as a replica obtained by carring out a uv light-initiated or thermal curing treatment of a reactive mixture App 20060157875 - Van Santen; Helmar ;   et al. | 2006-07-20 |
Imprint lithography App 20060150849 - Van Santen; Helmar ;   et al. | 2006-07-13 |
Imprint lithography App 20060154179 - Van Santen; Helmar ;   et al. | 2006-07-13 |
Imprint lithography App 20060144275 - Kolesnychenko; Aleksey Yurievich ;   et al. | 2006-07-06 |
Optical record carrier for use with uv radiation beam App 20060110571 - Van Santen; Helmar ;   et al. | 2006-05-25 |
Lithographic apparatus and device manufacturing method Grant 7,050,146 - Duineveld , et al. May 23, 2 | 2006-05-23 |
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ;   et al. | 2005-12-01 |
Lithographic apparatus App 20050263068 - Hoogendam, Christiaan Alexander ;   et al. | 2005-12-01 |
Lithographic apparatus and device manufacturing method Grant 6,952,253 - Lof , et al. October 4, 2 | 2005-10-04 |
Lithographic apparatus and device manufacturing method App 20050174549 - Duineveld, Paulus Cornelis ;   et al. | 2005-08-11 |
Lithographic apparatus and device manufacturing method App 20050134815 - Van Santen, Helmar ;   et al. | 2005-06-23 |
Lithographic apparatus and device manufacturing method App 20040207824 - Lof, Joeri ;   et al. | 2004-10-21 |
Image display device Grant 6,686,689 - Roest , et al. February 3, 2 | 2004-02-03 |
Method of manufacturing an optically scannable information carrier Grant 6,649,093 - Van Santen , et al. November 18, 2 | 2003-11-18 |
Luminaire Grant 6,550,941 - Keuper , et al. April 22, 2 | 2003-04-22 |
LCD projection device App 20030058373 - Roest, Wouter ;   et al. | 2003-03-27 |
Image display device and method of manufacturing a light conductor for such an image display device Grant 6,396,637 - Roest , et al. May 28, 2 | 2002-05-28 |
Method of manufacturing an optically scannable information carrier App 20020020821 - Van Santen, Helmar ;   et al. | 2002-02-21 |
Image display device App 20020014829 - Roest, Wouter ;   et al. | 2002-02-07 |
Image display device and method of manufacturing a light conductor for such an image display device App 20010055142 - Roest, Wouter ;   et al. | 2001-12-27 |
Illumination unit for a device having a multi-color reflective liquid crystal display App 20010046142 - Van Santen, Helmar ;   et al. | 2001-11-29 |
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