Vaartstra; Brian A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vaartstra; Brian A..The latest application filed is for "flow-fill spacer structures for flat panel display device".

Company Profile

0.133.94

Vaartstra; Brian A. - Nampa ID
Vaartstra; Brian A - Nampa ID
Vaartstra; Brian A. - Boise ID
Vaartstra; Brian A. - Idaho CA
Vaartstra; Brian A. - Brookfield CT
Vaartstra; Brian A. - Bethel CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods for forming zirconium and/or hafnium-containing layers Grant 9,184,061 - Vaartstra November 10, 2	2015-11-10
Dielectric layers and memory cells including metal-doped alumina Grant 8,653,573 - Vaartstra February 18, 2	2014-02-18
Systems and methods for forming layers that contain niobium and/or tantalum Grant 8,617,312 - Vaartstra , et al. December 31, 2	2013-12-31
Ruthenium silicide diffusion barrier layers and methods of forming same Grant 8,461,682 - Vaartstra , et al. June 11, 2	2013-06-11
Systems and methods for forming metal oxide layers Grant 8,394,725 - Vaartstra , et al. March 12, 2	2013-03-12
Flow-fill Spacer Structures For Flat Panel Display Device App 20130004655 - Vaartstra; Brian A.	2013-01-03
Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition Grant 8,299,286 - Gardiner , et al. October 30, 2	2012-10-30
Flow-fill spacer structures for flat panel display device Grant 8,282,985 - Vaartstra October 9, 2	2012-10-09
Systems and Methods for Forming Metal Oxide Layers App 20120067283 - Vaartstra; Brian A. ; et al.	2012-03-22
Systems and methods for forming metal oxide layers Grant 8,114,219 - Vaartstra , et al. February 14, 2	2012-02-14
Systems and Methods for Forming Metal Oxide Layers App 20120021587 - Vaartstra; Brian A. ; et al.	2012-01-26
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines Grant 8,034,728 - Vaartstra October 11, 2	2011-10-11
Dielectric Layers and Memory Cells Including Metal-Doped Alumina App 20110121376 - Vaartstra; Brian A.	2011-05-26
Systems and methods of forming tantalum silicide layers Grant 7,943,501 - Vaartstra May 17, 2	2011-05-17
Dielectric layers and memory cells including metal-doped alumina Grant 7,902,099 - Vaartstra March 8, 2	2011-03-08
Systems and methods for forming tantalum oxide layers and tantalum precursor compounds Grant 7,858,815 - Vaartstra , et al. December 28, 2	2010-12-28
Methods of forming a phosphorus doped silicon dioxide-comprising layer Grant 7,790,632 - Vaartstra September 7, 2	2010-09-07
Flow-Fill Spacer Structures for Flat Panel Display Device App 20100199486 - Vaartstra; Brian A.	2010-08-12
Dielectric Layers And Memory Cells Including Metal-doped Alumina App 20100171089 - VAARTSTRA; Brian A.	2010-07-08
Systems And Methods For Forming Metal Oxide Layers App 20100147218 - VAARTSTRA; Brian A. ; et al.	2010-06-17
Flow-fill spacer structures for flat panel display device Grant 7,723,907 - Vaartstra May 25, 2	2010-05-25
Systems And Methods For Forming Metal Oxides Using Metal Diketonates And/or Ketoimines App 20100099272 - Vaartstra; Brian A.	2010-04-22
Dielectric layers and memory cells including metal-doped alumina Grant 7,683,001 - Vaartstra March 23, 2	2010-03-23
Systems and methods for forming metal oxide layers Grant 7,678,708 - Vaartstra , et al. March 16, 2	2010-03-16
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands Grant 7,666,801 - Vaartstra , et al. February 23, 2	2010-02-23
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines Grant 7,648,926 - Vaartstra January 19, 2	2010-01-19
Ruthenium Silicide Diffusion Barrier Layers And Methods Of Forming Same App 20090278232 - Vaartstra; Brian A. ; et al.	2009-11-12
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines Grant 7,576,378 - Vaartstra August 18, 2	2009-08-18
Systems and methods of forming refractory metal nitride layers using disilazanes Grant 7,560,393 - Vaartstra July 14, 2	2009-07-14
Device structures including ruthenium silicide diffusion barrier layers Grant 7,560,815 - Vaartstra , et al. July 14, 2	2009-07-14
Systems And Methods For Forming Metal Oxide Layers App 20090149033 - Vaartstra; Brian A. ; et al.	2009-06-11
Systems and methods of forming refractory metal nitride layers using organic amines Grant 7,544,615 - Vaartstra June 9, 2	2009-06-09
Dielectric Layers And Memory Cells Including Metal-doped Alumina App 20090109731 - Vaartstra; Brian A.	2009-04-30
Methods and apparatus for removing conductive material from a microelectronic substrate Grant 7,524,410 - Lee , et al. April 28, 2	2009-04-28
Systems And Methods For Forming Metal Oxides Using Metal Compounds Containing Aminosilane Ligands App 20090042406 - Vaartstra; Brian A. ; et al.	2009-02-12
Atomic layer deposition methods and chemical vapor deposition methods Grant 7,488,386 - Vaartstra February 10, 2	2009-02-10
Deposition methods for forming silicon oxide layers Grant 7,482,284 - Vaartstra , et al. January 27, 2	2009-01-27
Metal-doped alumina and layers thereof Grant 7,473,662 - Vaartstra January 6, 2	2009-01-06
Atomic Layer Deposition Methods, Methods of Forming Dielectric Materials, Methods of Forming Capacitors, And Methods of Forming DRAM Unit Cells App 20080274615 - Vaartstra; Brian A.	2008-11-06
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands Grant 7,439,195 - Vaartstra , et al. October 21, 2	2008-10-21
Systems And Methods For Forming Tantalum Oxide Layers And Tantalum Precursor Compounds App 20080227303 - Vaartstra; Brian A. ; et al.	2008-09-18
Systems and methods for forming strontium-and/or barium-containing layers App 20080210157 - Vaartstra; Brian A. ; et al.	2008-09-04
Systems and methods for forming metal oxides using alcohols Grant 7,410,918 - Vaartstra August 12, 2	2008-08-12
Atomic layer deposition methods and chemical vapor deposition methods Grant 7,374,617 - Vaartstra May 20, 2	2008-05-20
Systems and methods for forming tantalum oxide layers and tantalum precursor compounds Grant 7,368,402 - Vaartstra , et al. May 6, 2	2008-05-06
Systems And Methods Of Forming Tantalum Silicide Layers App 20080102629 - Vaartstra; Brian A.	2008-05-01
Systems And Methods Of Forming Refractory Metal Nitride Layers Using Organic Amines App 20080064210 - Vaartstra; Brian A.	2008-03-13
Precursor mixtures for use in preparing layers on substrates Grant 7,332,032 - Vaartstra February 19, 2	2008-02-19
Systems and methods for forming metal oxide layers Grant 7,332,442 - Vaartstra , et al. February 19, 2	2008-02-19
Compositions for planarization of metal-containing surfaces using halogens and halide salts Grant 7,327,034 - Vaartstra February 5, 2	2008-02-05
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines App 20070295273 - Vaartstra; Brian A.	2007-12-27
Systems and methods of forming refractory metal nitride layers using organic amines Grant 7,300,870 - Vaartstra November 27, 2	2007-11-27
Method of forming trench isolation in the fabrication of integrated circuitry Grant 7,294,556 - Vaartstra November 13, 2	2007-11-13
Methods for forming phosphorus- and/or boron-containing silica layers on substrates Grant 7,273,525 - Vaartstra September 25, 2	2007-09-25
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines Grant 7,253,122 - Vaartstra August 7, 2	2007-08-07
Deposition methods using heteroleptic precursors Grant 7,250,367 - Vaartstra , et al. July 31, 2	2007-07-31
Systems and methods of forming refractory metal nitride layers using disilazanes App 20070166999 - Vaartstra; Brian A.	2007-07-19
Methods of forming a phosphorus doped silicon dioxide-comprising layer App 20070161260 - Vaartstra; Brian A.	2007-07-12
Systems and methods for forming metal oxide layers App 20070155190 - Vaartstra; Brian A. ; et al.	2007-07-05
Systems and methods of forming refractory metal nitride layers using disilazanes App 20070144438 - Vaartstra; Brian A.	2007-06-28
Flow-fill structures App 20070138930 - Vaartstra; Brian A.	2007-06-21
Systems and methods of forming refractory metal nitride layers using disilazanes Grant 7,196,007 - Vaartstra March 27, 2	2007-03-27
Mixed metal nitride and boride barrier layers App 20070045856 - Vaartstra; Brian A. ; et al.	2007-03-01
Systems and methods for forming strontium-and/or barium-containing layers App 20070006798 - Vaartstra; Brian A. ; et al.	2007-01-11
Systems and methods of forming refractory metal nitride layers using disilazanes App 20060292788 - Vaartstra; Brian A.	2006-12-28
Systems and methods for forming zirconium and/or hafnium-containing layers App 20060261389 - Vaartstra; Brian A.	2006-11-23
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands App 20060258175 - Vaartstra; Brian A. ; et al.	2006-11-16
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines App 20060252279 - Vaartstra; Brian A.	2006-11-09
Systems and methods for forming metal oxide layers App 20060252244 - Vaartstra; Brian A. ; et al.	2006-11-09
Methods of forming a phosphorous doped silicon dioxide comprising layer Grant 7,125,815 - Vaartstra October 24, 2	2006-10-24
Atomic layer deposition methods and chemical vapor deposition methods App 20060231017 - Vaartstra; Brian A.	2006-10-19
Systems and methods of forming refractory metal nitride layers using disilazanes Grant 7,122,464 - Vaartstra October 17, 2	2006-10-17
Systems and method for forming silicon oxide layers Grant 7,115,528 - Vaartstra , et al. October 3, 2	2006-10-03
Systems and methods for forming strontium- and/or barium-containing layers Grant 7,115,166 - Vaartstra , et al. October 3, 2	2006-10-03
Flow-fill structures Grant 7,116,042 - Vaartstra October 3, 2	2006-10-03
Systems and methods for forming zirconium and/or hafnium-containing layers Grant 7,112,485 - Vaartstra September 26, 2	2006-09-26
Methods and apparatus for removing conductive material from a microelectronic substrate Grant 7,112,122 - Lee , et al. September 26, 2	2006-09-26
Method of forming barrier layers Grant 7,101,779 - Vaartstra , et al. September 5, 2	2006-09-05
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands Grant 7,087,481 - Vaartstra , et al. August 8, 2	2006-08-08
Systems and methods for forming metal oxides using alcohols App 20060172485 - Vaartstra; Brian A.	2006-08-03
Atomic layer deposition methods Grant 7,077,902 - Vaartstra July 18, 2	2006-07-18
Mold for forming spacers for flat panel displays App 20060139561 - Hofmann; James J. ; et al.	2006-06-29
Systems and methods for forming metal oxides using alcohols Grant 7,041,609 - Vaartstra May 9, 2	2006-05-09
Systems and methods for forming tantalum oxide layers and tantalum precursor compounds Grant 7,030,042 - Vaartstra , et al. April 18, 2	2006-04-18
Systems and methods of forming tantalum silicide layers App 20060048711 - Vaartstra; Brian A.	2006-03-09
Deposition methods using heteroleptic precursors App 20060046521 - Vaartstra; Brian A. ; et al.	2006-03-02
Methods, complexes, and system for forming metal-containing films App 20060030163 - Vaartstra; Brian A.	2006-02-09
Systems and methods for forming tantalum silicide layers Grant 6,995,081 - Vaartstra February 7, 2	2006-02-07
Systems and methods for forming metal-doped alumina Grant 6,984,592 - Vaartstra January 10, 2	2006-01-10
Systems and methods of forming refractory metal nitride layers using organic amines App 20050287804 - Vaartstra, Brian A.	2005-12-29
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides App 20050287819 - Vaartstra, Brian A. ; et al.	2005-12-29
Methods, complexes, and system for forming metal-containing films Grant 6,979,370 - Vaartstra December 27, 2	2005-12-27
Systems and methods for forming refractory metal nitride layers using organic amines Grant 6,967,159 - Vaartstra November 22, 2	2005-11-22
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides Grant 6,958,300 - Vaartstra , et al. October 25, 2	2005-10-25
Metal-doped alumina and layers thereof App 20050221006 - Vaartstra, Brian A.	2005-10-06
Systems and methods for forming zirconium and/or hafnium-containing layers App 20050160981 - Vaartstra, Brian A.	2005-07-28
Compositions for planarization of metal-containing surfaces using halogens and halide salts App 20050148182 - Vaartstra, Brian A.	2005-07-07
Systems and methods for forming metal oxides using alcohols App 20050136689 - Vaartstra, Brian A.	2005-06-23
Method of forming trench isolation in the fabrication of integrated circuitry App 20050124171 - Vaartstra, Brian A.	2005-06-09
Method for making sol gel spacers for flat panel displays App 20050112298 - Hofmann, James J. ; et al.	2005-05-26
Methods for preparing ruthenium and osmium compounds and films Grant 6,872,420 - Uhlenbrock , et al. March 29, 2	2005-03-29
Methods And Apparatus For Removing Conductive Material From A Microelectronic Substrate App 20050059324 - Lee, Whonchee ; et al.	2005-03-17
Methods and apparatus for removing conductive material from a microelectronic substrate App 20050056550 - Lee, Whonchee ; et al.	2005-03-17
Method of forming a Ta2O5 comprising layer Grant 6,863,725 - Vaartstra , et al. March 8, 2	2005-03-08
Methods for planarization of metal-containing surfaces using halogens and halide salts Grant 6,861,353 - Vaartstra March 1, 2	2005-03-01
Systems and methods of forming refractory metal nitride layers using disilazanes App 20050032360 - Vaartstra, Brian A.	2005-02-10
Systems and methods of forming refractory metal nitride layers using disilazanes App 20050028733 - Vaartstra, Brian A.	2005-02-10
Precursor mixtures for use in preparing layers on substrates App 20050022738 - Vaartstra, Brian A.	2005-02-03
Systems and methods for forming tantalum oxide layers and tantalum precursor compounds App 20050019978 - Vaartstra, Brian A. ; et al.	2005-01-27
Systems and methods for forming refractory metal oxide layers App 20050009266 - Vaartstra, Brian A.	2005-01-13
Methods of forming a phosphorus doped silicon dioxide comprising layer, and methods of forming trench isolation in the fabrication of integrated circuitry App 20050009368 - Vaartstra, Brian A.	2005-01-13
Methods for forming metal-containing films using metal complexes with chelating O- and/or N-donor ligands Grant 6,828,256 - Vaartstra December 7, 2	2004-12-07
Precursor for use in preparing layers on substrates Grant 6,821,341 - Vaartstra November 23, 2	2004-11-23
Systems and methods for forming metal oxide layers App 20040219746 - Vaartstra, Brian A. ; et al.	2004-11-04
Method for making sol gel spacers for flat panel displays Grant 6,812,990 - Hofmann , et al. November 2, 2	2004-11-02
Systems and methods for forming strontium-and/or barium-containing layers App 20040197946 - Vaartstra, Brian A. ; et al.	2004-10-07
Atomic layer deposition methods App 20040187968 - Vaartstra, Brian A.	2004-09-30
Systems and methods for forming refractory metal nitride layers using disilazanes Grant 6,794,284 - Vaartstra September 21, 2	2004-09-21
Methods, complexes, and systems for forming metal-containing films on semiconductor structures Grant 6,786,936 - Vaartstra September 7, 2	2004-09-07
Method for forming refractory metal oxide layers with tetramethyldisiloxane Grant 6,784,049 - Vaartstra August 31, 2	2004-08-31
Methods for planarization of metal-containing surfaces using halogens and halides salts App 20040157458 - Vaartstra, Brian A.	2004-08-12
Solutions of metal-comprising materials Grant 6,773,495 - Uhlenbrock , et al. August 10, 2	2004-08-10
Method of forming a Ta2O5 comprising layer App 20040152254 - Vaartstra, Brian A. ; et al.	2004-08-05
Supercritical compositions for removal of organic material and methods of using same Grant 6,770,426 - Vaartstra August 3, 2	2004-08-03
Method For Forming Metal-containing Films Using Metal Complexes With Chelating O- And/or N-donor Ligands App 20040147138 - Vaartstra, Brian A.	2004-07-29
Methods for planarization of metal-containing surfaces using halogens and halide salts Grant 6,730,592 - Vaartstra May 4, 2	2004-05-04
Systems and methods for forming strontium- and/or barium-containing layers Grant 6,730,164 - Vaartstra , et al. May 4, 2	2004-05-04
Aluminum-containing material and atomic layer deposition methods Grant 6,730,163 - Vaartstra May 4, 2	2004-05-04
Method of forming flow-fill structures Grant 6,716,077 - Vaartstra April 6, 2	2004-04-06
Method of forming barrier layers App 20040053495 - Vaartstra, Brian A. ; et al.	2004-03-18
Method of forming flow-fill structures App 20040046492 - Vaartstra, Brian A.	2004-03-11
Systems and methods for forming refractory metal oxide layers App 20040043633 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming metal oxides using alcohols App 20040043632 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming zirconium and/or hafnium-containing layers App 20040040501 - Vaartstra, Brian A.	2004-03-04
Systems And Methods For Forming Strontium- And/or Barium-containing Layers App 20040040494 - Vaartstra, Brian A. ; et al.	2004-03-04
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides App 20040043630 - Vaartstra, Brian A. ; et al.	2004-03-04
Systems and methods for forming metal-doped alumina App 20040043634 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming refractory metal nitride layers using disilazanes App 20040043604 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming refractory metal nitride layers using organic amines App 20040043600 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands App 20040043625 - Vaartstra, Brian A. ; et al.	2004-03-04
Systems and methods for forming metal oxides using metal diketonates and/or ketoimines App 20040043635 - Vaartstra, Brian A.	2004-03-04
Systems and methods for forming tantalum oxide layers and tantalum precursor compounds App 20040043636 - Vaartstra, Brian A. ; et al.	2004-03-04
Systems and methods for forming tantalum silicide layers App 20040043151 - Vaartstra, Brian A.	2004-03-04
Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands Grant 6,682,602 - Vaartstra January 27, 2	2004-01-27
Supercritical etching compositions and method of using same Grant 6,666,986 - Vaartstra December 23, 2	2003-12-23
Mixed metal nitride and boride barrier layers Grant 6,664,159 - Vaartstra , et al. December 16, 2	2003-12-16
Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials Grant 6,656,839 - Uhlenbrock , et al. December 2, 2	2003-12-02
Methods for preparing ruthenium and osmium compounds and films App 20030212285 - Uhlenbrock, Stefan ; et al.	2003-11-13
Methods for forming phosphorus- and/or boron-containing silica layers on substrates App 20030200925 - Vaartstra, Brian A.	2003-10-30
Atomic layer deposition methods and chemical vapor deposition methods App 20030200917 - Vaartstra, Brian A.	2003-10-30
Organometallic compound mixtures in chemical vapor deposition Grant 6,624,072 - Vaartstra September 23, 2	2003-09-23
Aluminum-containing material and atomic layer deposition methods App 20030176065 - Vaartstra, Brian A.	2003-09-18
Solutions of metal-comprising materials App 20030134465 - Uhlenbrock, Stefan ; et al.	2003-07-17
Methods for planarization of metal-containing surfaces using halogens and halide salts App 20030119304 - Vaartstra, Brian A.	2003-06-26
Methods, complexes, and system for forming metal-containing films App 20030119312 - Vaartstra, Brian A.	2003-06-26
Methods, complexes and system for forming metal-containing films Grant 6,548,683 - Vaartstra April 15, 2	2003-04-15
Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands App 20030003722 - Vaartstra, Brian A.	2003-01-02
Solutions of metal-comprising materials, methods of forming metal-comprising layers, methods of storing metal-comprising materials, and methods of forming capacitors Grant 6,495,459 - Uhlenbrock , et al. December 17, 2	2002-12-17
Mixed metal nitride and boride barrier layers App 20020163025 - Vaartstra, Brian A. ; et al.	2002-11-07
Methods, Complexes, And System For Forming Metal-containing Films App 20020151159 - Vaartstra, Brian A.	2002-10-17
Chemical vapor deposition apparatus App 20020146902 - Vaartstra, Brian A.	2002-10-10
Metal complexes with chelating O-and/or N-donor ligands Grant 6,455,717 - Vaartstra September 24, 2	2002-09-24
Mixed metal nitride and boride barrier layers Grant 6,445,023 - Vaartstra , et al. September 3, 2	2002-09-03
Methods for forming iridium and platinum containing films on substrates Grant 6,426,292 - Vaartstra July 30, 2	2002-07-30
Processing compositions and methods of using same App 20020092543 - Vaartstra, Brian A.	2002-07-18
Method and apparatus for vaporizing liquid precursors and system for using same Grant 6,402,126 - Vaartstra , et al. June 11, 2	2002-06-11
Solutions of metal-comprising materials, methods of forming metal-comprising layers, methods of storing metal-comprising materials, and methods of forming capacitors App 20020055242 - Uhlenbrock, Stefan ; et al.	2002-05-09
Methods for removing rhodium- and iridium-containing films Grant 6,368,518 - Vaartstra April 9, 2	2002-04-09
Method of depositing films by using carboxylate complexes Grant 6,368,398 - Vaartstra April 9, 2	2002-04-09
Organometallic compound mixtures in chemical vapor deposition App 20020028570 - Vaartstra, Brian A.	2002-03-07
Organometallic compound mixtures in chemical vapor deposition Grant 6,350,686 - Vaartstra February 26, 2	2002-02-26
Organometallic compound mixtures in chemical vapor deposition Grant 6,348,412 - Vaartstra February 19, 2	2002-02-19
Metal complexes with chelating C-, N-donor ligands for forming metal-containing films App 20020016065 - Uhlenbrock, Stefan ; et al.	2002-02-07
Methods, complexes, and system for forming metal-containing films App 20020009864 - Vaartstra, Brian A.	2002-01-24
Methods, complexes, and systems for forming metal-containing films on semiconductor structures App 20010055877 - Vaartstra, Brian A.	2001-12-27
Methods, complexes, and system for forming metal-containing films Grant 6,326,505 - Vaartstra December 4, 2	2001-12-04
Precursor mixtures for use in preparing layers on substrates App 20010042505 - Vaartstra, Brian A.	2001-11-22
Methods of making semiconductor devices Grant 6,319,832 - Uhlenbrock , et al. November 20, 2	2001-11-20
Metal complexes with chelating C-,N-donor ligands for forming metal-containing films Grant 6,306,217 - Uhlenbrock , et al. October 23, 2	2001-10-23
Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials App 20010031539 - Uhlenbrock, Stefan ; et al.	2001-10-18
Method and apparatus for vaporizing liquid precursors and system for using same App 20010020448 - Vaartstra, Brian A. ; et al.	2001-09-13
Electrostatic method and apparatus for vaporizing precursors and system for using same Grant 6,280,793 - Atwell , et al. August 28, 2	2001-08-28
Methods for preparing ruthenium oxide films Grant 6,281,125 - Vaartstra , et al. August 28, 2	2001-08-28
Methods and systems for forming metal-containing films on substrates Grant 6,281,124 - Vaartstra August 28, 2	2001-08-28
Precursor mixtures for use in preparing layers on substrates Grant 6,273,951 - Vaartstra August 14, 2	2001-08-14
Method of depositing films by using carboxylate complexes App 20010008111 - Vaartstra, Brian A.	2001-07-19
Methods for forming iridium-containing films on substrates App 20010007793 - Vaartstra, Brian A.	2001-07-12
Method and apparatus for vaporizing liquid precursors and system for using same Grant 6,244,575 - Vaartstra , et al. June 12, 2	2001-06-12
Supercritical compositions for removal of organic material and methods of using same Grant 6,242,165 - Vaartstra June 5, 2	2001-06-05
Methods for forming iridium-containing films on substrates Grant 6,239,028 - Vaartstra May 29, 2	2001-05-29
Method for forming metal-containing films using metal complexes with chelating O- and/or N-donor ligands Grant 6,225,237 - Vaartstra May 1, 2	2001-05-01
Metal complexes with chelating C-, N-donor ligands for forming metal-containing films Grant 6,214,729 - Uhlenbrock , et al. April 10, 2	2001-04-10
Processing compositions and methods of using same Grant 6,207,630 - Vaartstra March 27, 2	2001-03-27
Ruthenium silicide diffusion barrier layers and methods of forming same Grant 6,197,628 - Vaartstra , et al. March 6, 2	2001-03-06
Organometallic compound mixtures in chemical vapor deposition Grant 6,159,855 - Vaartstra December 12, 2	2000-12-12
Supercritical etching compositions and method of using same Grant 6,149,828 - Vaartstra November 21, 2	2000-11-21
Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands Grant 6,133,161 - Uhlenbrock , et al. October 17, 2	2000-10-17
Methods for preparing ruthenium oxide films Grant 6,133,159 - Vaartstra , et al. October 17, 2	2000-10-17
Methods, complexes and system for forming metal-containing films Grant 6,130,160 - Vaartstra October 10, 2	2000-10-10
Methods for preparing ruthenium and osmium compounds Grant 6,114,557 - Uhlenbrock , et al. September 5, 2	2000-09-05
Method of forming metal films on a substrate by chemical vapor deposition Grant 6,110,529 - Gardiner , et al. August 29, 2	2000-08-29
Method of patterning substrates Grant 6,087,270 - Reinberg , et al. July 11, 2	2000-07-11
Methods for preparing ruthenium metal films Grant 6,074,945 - Vaartstra , et al. June 13, 2	2000-06-13
Precursor chemistries for chemical vapor deposition of ruthenium and ruthenium oxide Grant 6,063,705 - Vaartstra May 16, 2	2000-05-16
Methods, complexes, and systems for forming metal-containing films Grant 6,020,511 - Vaartstra , et al. February 1, 2	2000-02-01
Method of depositing films on semiconductor devices by using carboxylate complexes Grant 6,010,969 - Vaartstra January 4, 2	2000-01-04
Methods for preparing ruthenium and osmium compounds Grant 5,962,716 - Uhlenbrock , et al. October 5, 1	1999-10-05
Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom Grant 5,948,322 - Baum , et al. September 7, 1	1999-09-07
Methods, complexes, and system for forming metal-containing films Grant 5,924,012 - Vaartstra July 13, 1	1999-07-13
Growth of BaSrTiO.sub.3 using polyamine-based precursors Grant 5,919,522 - Baum , et al. July 6, 1	1999-07-06
Difunctional amino precursors for the deposition of films comprising metals Grant 5,908,947 - Vaartstra June 1, 1	1999-06-01
CVD method for forming metal-containing films Grant 5,874,131 - Vaartstra , et al. February 23, 1	1999-02-23
Process for titanium nitride deposition using five- and six-coordinate titanium complexes Grant 5,866,205 - Vaartstra , et al. February 2, 1	1999-02-02
Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer Grant 5,856,236 - Lai , et al. January 5, 1	1999-01-05
Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same Grant 5,820,664 - Gardiner , et al. October 13, 1	1998-10-13
Metal carboxylate complexes for formation of metal-containing films on semiconductor devices Grant 5,763,633 - Vaartstra June 9, 1	1998-06-09
Metal carboxylate complexes for formation of metal-containing films on semiconductor devices Grant 5,695,815 - Vaartstra December 9, 1	1997-12-09
Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same Grant 5,679,815 - Kirlin , et al. October 21, 1	1997-10-21
Chemical vapor deposition of tantalum- or niobium-containing coatings Grant 5,677,002 - Kirlin , et al. October 14, 1	1997-10-14
Five- and six-coordinate precursors for titanium nitride deposition Grant 5,659,057 - Vaartstra August 19, 1	1997-08-19
Process for titanium nitride deposition using five-and six-coordinate titanium complexes Grant 5,607,722 - Vaartstra , et al. March 4, 1	1997-03-04
Bimetallic alkoxide reagents and method of making the same Grant 5,326,892 - Vaartstra July 5, 1	1994-07-05