Usami; Tatsuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Usami; Tatsuya.The latest application filed is for "semiconductor device and method of manufacturing the same".

Company Profile

7.116.112

Usami; Tatsuya - Tokyo JP
USAMI; Tatsuya - Ibaraki JP
Usami; Tatsuya - Hitachinaka JP
USAMI; Tatsuya - Hitachinaka-shi JP
Usami; Tatsuya - Kanagawa JP
Usami; Tatsuya - Kawasaki JP
Usami; Tatsuya - Kawasaki-shi JP
Usami; Tatsuya - Nakahara-ku JP
Usami; Tatsuya - Toyko JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor device Grant 11,302,596 - Usami , et al. April 12, 2	2022-04-12
Semiconductor Device And Method Of Manufacturing The Same App 20220013481 - USAMI; Tatsuya	2022-01-13
Semiconductor Device And Its Manufacturing Method App 20210184054 - MIYAMOTO; Hironobu ; et al.	2021-06-17
Semiconductor Device App 20210028082 - USAMI; Tatsuya ; et al.	2021-01-28
Semiconductor device and method of manufacturing the same Grant 10,901,152 - Usami January 26, 2	2021-01-26
Method of manufacturing semiconductor device Grant 10,734,541 - Usami	2020-08-04
Semiconductor device and method for manufacturing the same Grant 10,734,336 - Usami	2020-08-04
Method for manufacturing a semiconductor device having a step of performing ion implantation using a resist pattern as a mask Grant 10,714,330 - Nakayama , et al.	2020-07-14
Semiconductor device and manufacturing method thereof Grant 10,490,517 - Usami Nov	2019-11-26
Semiconductor device and method of manufacturing the same Grant 10,401,565 - Usami Sep	2019-09-03
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20190237361 - USAMI; Tatsuya	2019-08-01
Semiconductor Device And Method For Manufacturing The Same App 20190198468 - USAMI; Tatsuya	2019-06-27
Optical semiconductor device, and method for producing the same Grant 10,295,743 - Kunishima , et al.	2019-05-21
Method Of Manufacturing Semiconductor Device App 20190123233 - USAMI; Tatsuya	2019-04-25
Method of manufacturing semiconductor device Grant 10,256,133 - Usami	2019-04-09
Semiconductor device and method of manufacturing semiconductor device Grant 10,256,135 - Usami	2019-04-09
Semiconductor Device And Method For Manufacturing Same App 20190018187 - USAMI; Tatsuya	2019-01-17
Semiconductor device and method for manufacturing same Grant 10,180,538 - Usami Ja	2019-01-15
Semiconductor Device And Method Of Manufacturing The Same App 20180372950 - USAMI; Tatsuya	2018-12-27
Semiconductor device and method for manufacturing the same Grant 10,162,110 - Usami , et al. Dec	2018-12-25
Method For Manufacturing A Semiconductor Device App 20180366321 - NAKAYAMA; Tomoo ; et al.	2018-12-20
Semiconductor device and its manufacturing method Grant 10,158,036 - Usami Dec	2018-12-18
Semiconductor device and manufacturing method of the same Grant 10,151,881 - Usami , et al. Dec	2018-12-11
Semiconductor Device And Manufacturing Method Thereof App 20180350760 - USAMI; Tatsuya	2018-12-06
Semiconductor device and method for manufacturing same Grant 10,120,129 - Usami November 6, 2	2018-11-06
Semiconductor device and manufacturing method thereof Grant 10,002,883 - Usami June 19, 2	2018-06-19
Semiconductor Device And Method Of Manufacturing The Same App 20180149812 - USAMI; Tatsuya	2018-05-31
Method Of Manufacturing Semiconductor Device App 20180151410 - USAMI; Tatsuya	2018-05-31
Semiconductor device and method of manufacturing the same Grant 9,985,149 - Usami , et al. May 29, 2	2018-05-29
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20180130900 - USAMI; Tatsuya	2018-05-10
Semiconductor Device And Method For Manufacturing Same App 20180039021 - USAMI; Tatsuya	2018-02-08
Semiconductor device and method of manufacturing the same Grant 9,885,829 - Usami February 6, 2	2018-02-06
Semiconductor device and method for manufacturing same Grant 9,829,627 - Usami November 28, 2	2017-11-28
Semiconductor Device And Its Manufacturing Method App 20170317221 - USAMI; Tatsuya	2017-11-02
Semiconductor Device And Manufacturing Method Of The Same App 20170307824 - USAMI; Tatsuya ; et al.	2017-10-26
Semiconductor Device And Manufacturing Method Thereof App 20170287934 - USAMI; Tatsuya	2017-10-05
Semiconductor device and manufacturing method of the same Grant 9,739,943 - Usami , et al. August 22, 2	2017-08-22
Semiconductor Device And Manufacturing Method Of The Same App 20170110399 - Usami; Tatsuya ; et al.	2017-04-20
Semiconductor Device And Method Of Manufacturing The Same App 20170069769 - USAMI; Tatsuya ; et al.	2017-03-09
Semiconductor Device And Method For Manufacturing The Same App 20170068047 - USAMI; TATSUYA ; et al.	2017-03-09
Semiconductor device Grant 9,583,441 - Ogura , et al. February 28, 2	2017-02-28
Semiconductor Device And Method For Manufacturing Same App 20170045683 - USAMI; Tatsuya	2017-02-16
Semiconductor device and manufacturing method of the same Grant 9,559,052 - Usami , et al. January 31, 2	2017-01-31
Semiconductor device Grant 9,559,175 - Usami January 31, 2	2017-01-31
Semiconductor Device And Method Of Manufacturing The Same App 20170012143 - USAMI; Tatsuya ; et al.	2017-01-12
Semiconductor Device And Method Of Manufacturing The Same App 20160370542 - USAMI; Tatsuya	2016-12-22
Optical semiconductor device Grant 9,508,662 - Kunishima , et al. November 29, 2	2016-11-29
Semiconductor Device And Manufacturing Method Of The Same App 20160293481 - USAMI; Tatsuya ; et al.	2016-10-06
Semiconductor Device And Method Of Manufacturing Same App 20160260772 - USAMI; Tatsuya ; et al.	2016-09-08
Semiconductor Device And Manufacturing Method Of The Same App 20160172298 - Usami; Tatsuya ; et al.	2016-06-16
Semiconductor device and manufacturing method of the same Grant 9,281,276 - Usami , et al. March 8, 2	2016-03-08
Optical Semiconductor Device, And Method For Producing The Same App 20160054521 - Kunishima; Hiroyuki ; et al.	2016-02-25
Optical Semiconductor Device App 20160056115 - Kunishima; Hiroyuki ; et al.	2016-02-25
Semiconductor Device App 20160043036 - OGURA; Takashi ; et al.	2016-02-11
Method of manufacturing semiconductor device Grant 9,236,291 - Usami January 12, 2	2016-01-12
Semiconductor Device App 20150372102 - USAMI; Tatsuya	2015-12-24
Method Of Manufacturing Semiconductor Device App 20150318201 - Usami; Tatsuya	2015-11-05
Method of manufacturing semiconductor device including forming trench pattern in a mask film Grant 9,123,537 - Usami September 1, 2	2015-09-01
Semiconductor Device And Manufacturing Method Of The Same App 20150228586 - Usami; Tatsuya ; et al.	2015-08-13
Semiconductor device and manufacturing method thereof Grant 8,749,058 - Usami , et al. June 10, 2	2014-06-10
Method of manufacturing a semiconductor device Grant 8,748,314 - Usami June 10, 2	2014-06-10
Semiconductor device and manufacturing method thereof Grant 8,736,051 - Usami , et al. May 27, 2	2014-05-27
Semiconductor device and a method for manufacturing a semiconductor device Grant 8,722,532 - Usami , et al. May 13, 2	2014-05-13
Method Of Manufacturing Semiconductor Device App 20140113438 - Usami; Tatsuya	2014-04-24
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method Grant 8,642,467 - Ohto , et al. February 4, 2	2014-02-04
Semiconductor device and method of manufacturing semiconductor device Grant 8,624,399 - Usami January 7, 2	2014-01-07
Method of forming semiconductor device having seal ring structure Grant 8,617,914 - Usami December 31, 2	2013-12-31
Method of fabricating a semiconductor device Grant 8,598,044 - Usami , et al. December 3, 2	2013-12-03
Wiring structure and method for manufacturing the same Grant 8,592,303 - Tada , et al. November 26, 2	2013-11-26
Semiconductor Device And Manufacturing Method Thereof App 20130249084 - Usami; Tatsuya ; et al.	2013-09-26
Semiconductor device and method of manufacturing semiconductor device Grant 8,466,055 - Usami June 18, 2	2013-06-18
Method of manufacturing semiconductor device Grant 8,435,828 - Yamamoto , et al. May 7, 2	2013-05-07
Semiconductor Device And A Method For Manufacturing A Semiconductor Device App 20130069238 - USAMI; Tatsuya ; et al.	2013-03-21
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20120315751 - USAMI; Tatsuya	2012-12-13
Semiconductor device and method of manufacturing the same Grant 8,293,637 - Usami October 23, 2	2012-10-23
Semiconductor device and method of manufacturing semiconductor device Grant 8,274,155 - Usami September 25, 2	2012-09-25
Method for manufacturing a semiconductor device having an interconnect structure and a reinforcing insulating film Grant 8,242,014 - Usami August 14, 2	2012-08-14
Semiconductor Device And Manufacturing Method Thereof App 20120181694 - Usami; Tatsuya ; et al.	2012-07-19
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method App 20120108060 - OHTO; Koichi ; et al.	2012-05-03
Method For Manufacturing A Semiconductor Device Having An Interconnect Structure And A Reinforcing Insulating Film App 20120083115 - USAMI; Tatsuya	2012-04-05
Semiconductor device and method of manufacturing the same App 20120080805 - Ohto; Chikako ; et al.	2012-04-05
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method Grant 8,115,318 - Ohto , et al. February 14, 2	2012-02-14
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20120032344 - USAMI; Tatsuya	2012-02-09
Semiconductor device having seal ring structure and method of forming the same App 20120009789 - Usami; Tatsuya	2012-01-12
Semiconductor device having seal ring structure Grant 8,039,963 - Usami October 18, 2	2011-10-18
Semiconductor device and method of manufacturing the same App 20110207318 - Usami; Tatsuya	2011-08-25
Method Of Manufacturing A Semiconductor Device App 20110183518 - USAMI; Tatsuya	2011-07-28
Method Of Manufacturing Semiconductor Device App 20110171775 - YAMAMOTO; Hironori ; et al.	2011-07-14
Semiconductor device and manufacturing process therefor Grant 7,969,010 - Usami June 28, 2	2011-06-28
Semiconductor device and method of manufacturing the same Grant 7,956,467 - Usami June 7, 2	2011-06-07
Semiconductor device having an interconnect structure and a reinforcing insulating film Grant 7,936,068 - Usami May 3, 2	2011-05-03
Method of manufacturing a semiconductor device Grant 7,910,474 - Usami , et al. March 22, 2	2011-03-22
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method Grant 7,842,602 - Ohto , et al. November 30, 2	2010-11-30
Method for manufacturing a semiconductor device having a multi-layered insulating structure of SiOCH layers and an SiO.sub.2 layer Grant 7,833,901 - Ohto , et al. November 16, 2	2010-11-16
Semiconductor device and method of manufacturing semiconductor device App 20100270677 - Usami; Tatsuya	2010-10-28
Semiconductor device and method of manufacturing semiconductor device App 20100270683 - Usami; Tatsuya	2010-10-28
Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer Grant 7,816,280 - Usami October 19, 2	2010-10-19
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method App 20100224995 - Ohto; Koichi ; et al.	2010-09-09
Organic insulating film, manufacturing method thereof, semiconductor device using such organic insulating film and manufacturing method thereof Grant 7,763,979 - Ohto , et al. July 27, 2	2010-07-27
Semiconductor device and method of manufacturing the same Grant 7,745,937 - Usami , et al. June 29, 2	2010-06-29
Wiring Structure And Method For Manufacturing The Same App 20100151675 - TADA; Munehiro ; et al.	2010-06-17
Semiconductor method having silicon-diffused metal wiring layer Grant 7,737,555 - Ohto , et al. June 15, 2	2010-06-15
Semiconductor device and method of manufacturing the same App 20100117234 - Usami; Tatsuya	2010-05-13
Wiring structure and method for manufacturing the same Grant 7,701,060 - Tada , et al. April 20, 2	2010-04-20
Single damascene structure semiconductor device having silicon-diffused metal wiring layer Grant 7,687,917 - Ohto , et al. March 30, 2	2010-03-30
Semiconductor device, semiconductor wafer, and methods of producing same device and wafer Grant 7,674,721 - Usami March 9, 2	2010-03-09
Semiconductor Device Having An Interconnect Structure And A Reinforcing Insulating Film And Method Of Manufacturing Such Device App 20100032845 - USAMI; Tatsuya	2010-02-11
Semiconductor device Grant 7,649,258 - Usami , et al. January 19, 2	2010-01-19
Method of manufacturing a semiconductor device Grant 7,615,498 - Sasaki , et al. November 10, 2	2009-11-10
Semiconductor device having an interconnect structure and a reinforcing insulating film Grant 7,612,453 - Usami November 3, 2	2009-11-03
Semiconductor device and semiconductor wafer having a multi-layered insulation film Grant 7,602,048 - Usami October 13, 2	2009-10-13
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,582,970 - Ohnishi , et al. September 1, 2	2009-09-01
Manufacturing method of semiconductor device Grant 7,563,705 - Tonegawa , et al. July 21, 2	2009-07-21
Semiconductor chip Grant 7,564,132 - Ohto , et al. July 21, 2	2009-07-21
Semiconductor device and method for manufacturing same Grant 7,557,447 - Usami , et al. July 7, 2	2009-07-07
Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer App 20090137108 - Usami; Tatsuya	2009-05-28
Semiconductor device Grant 7,531,891 - Ohto , et al. May 12, 2	2009-05-12
Semiconductor device having seal ring structure and method of forming the same App 20090051011 - Usami; Tatsuya	2009-02-26
Semiconductor device and manufacturing method thereof Grant 7,488,674 - Usami February 10, 2	2009-02-10
Semiconductor device and method for manufacturing the same Grant 7,482,263 - Usami , et al. January 27, 2	2009-01-27
Semiconductor device and method for manufacturing same Grant 7,473,630 - Usami , et al. January 6, 2	2009-01-06
Carbon Containing Silicon Oxide Film Having High Ashing Tolerance And Adhesion App 20080290522 - Ohnishi; Sadayuki ; et al.	2008-11-27
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,420,279 - Ohnishi , et al. September 2, 2	2008-09-02
Semiconductor Device And Manufacturing Method Thereof App 20080194102 - USAMI; Tatsuya ; et al.	2008-08-14
Semiconductor device and manufacturing method thereof Grant 7,391,115 - Usami , et al. June 24, 2	2008-06-24
Semiconductor device and manufacturing method thereof App 20080070400 - Usami; Tatsuya	2008-03-20
Semiconductor device and manufacturing method thereof Grant 7,291,911 - Usami November 6, 2	2007-11-06
Organic Insulating Film, Manufacturing Method Thereof, Semiconductor Device Using Such Organic Insulating Film And Manufacturing Method Thereof App 20070246804 - Ohto; Koichi ; et al.	2007-10-25
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method App 20070212809 - Ohto; Koichi ; et al.	2007-09-13
Manufacturing method of semiconductor device Grant 7,268,087 - Aoki , et al. September 11, 2	2007-09-11
Semiconductor device, semiconductor wafer, and methods of producing same device and wafer App 20070207610 - Usami; Tatsuya	2007-09-06
Semiconductor device and method for manufacturing same App 20070182014 - Usami; Tatsuya ; et al.	2007-08-09
Method of producing a semiconductor device having a multi-layered insulation film Grant 7,229,910 - Usami June 12, 2	2007-06-12
Semiconductor device including ladder-shaped siloxane hydride and method for manufacturing same Grant 7,230,337 - Usami , et al. June 12, 2	2007-06-12
Method of manufacturing a semiconductor device App 20070117405 - Sasaki; Yoichi ; et al.	2007-05-24
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method App 20070108620 - Ohto; Koichi ; et al.	2007-05-17
Semiconductor device and method of manufacturing the same Grant 7,217,654 - Nagahara , et al. May 15, 2	2007-05-15
Semiconductor device and method of manufacturing the same App 20070096331 - Nagahara; Seiji ; et al.	2007-05-03
Semiconductor apparatus and manufacturing method thereof App 20070052101 - Usami; Tatsuya	2007-03-08
Semiconductor device, and production method for manufacturing such semiconductor device App 20070045861 - Ohto; Koichi ; et al.	2007-03-01
Semiconductor device and method of manufacturing a semiconductor device Grant 7,180,191 - Sasaki , et al. February 20, 2	2007-02-20
Semiconductor device and method for manufacturing same App 20070032070 - Usami; Tatsuya ; et al.	2007-02-08
Wiring structure and method for manufacturing the same App 20070013069 - Tada; Munehiro ; et al.	2007-01-18
Semiconductor device and method of manufacturing the same Grant 7,148,571 - Usami December 12, 2	2006-12-12
Semiconductor device and method for manufacturing same App 20060276029 - Usami; Tatsuya ; et al.	2006-12-07
Carbon containing silicon oxide film having high ashing tolerance and adhesion App 20060255466 - Ohnishi; Sadayuki ; et al.	2006-11-16
Semiconductor device and method for manufacturing same Grant 7,135,776 - Usami , et al. November 14, 2	2006-11-14
Semiconductor device having two distinct sioch layers Grant 7,132,732 - Ohto , et al. November 7, 2	2006-11-07
Method of fabricating a semiconductor device App 20060216946 - Usami; Tatsuya ; et al.	2006-09-28
Semiconductor device and manufacturing process therefor App 20060211235 - Usami; Tatsuya	2006-09-21
Semiconductor chip App 20060208361 - Ohto; Koichi ; et al.	2006-09-21
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,102,236 - Ohnishi , et al. September 5, 2	2006-09-05
Semiconductor device and method of manufacturing the same App 20060186549 - Usami; Tatsuya ; et al.	2006-08-24
Semiconductor device and method for manufacturing the same App 20060166488 - Usami; Tatsuya ; et al.	2006-07-27
Method of fabricating semiconductor device using plasma-enhanced CVD Grant 7,074,698 - Morita , et al. July 11, 2	2006-07-11
Manufacturing method of semiconductor device App 20060141778 - Tonegawa; Takashi ; et al.	2006-06-29
Semiconductor device and method of manufacturing the same Grant 7,057,286 - Usami June 6, 2	2006-06-06
Semiconductor device and manufacturing method thereof Grant 7,045,898 - Usami May 16, 2	2006-05-16
Semiconductor device and method for manufacturing the same Grant 7,045,895 - Usami , et al. May 16, 2	2006-05-16
Semiconductor device and method for manufacturing same App 20060060975 - Usami; Tatsuya ; et al.	2006-03-23
Semiconductor device App 20060038297 - Usami; Tatsuya ; et al.	2006-02-23
Semiconductor device with improved reliability and manufacturing method of the same Grant 6,984,875 - Usami January 10, 2	2006-01-10
Dual damascene circuit with upper wiring and interconnect line positioned in regions formed as two layers including organic polymer layer and low-permittivity layer Grant 6,977,438 - Usami December 20, 2	2005-12-20
Semiconductor device having copper damascene interconnection and fabricating method thereof App 20050179137 - Usami, Tatsuya	2005-08-18
Semiconductor device and method of manufacturing the same Grant 6,930,036 - Usami August 16, 2	2005-08-16
Semiconductor device and method of manufacturing a semiconductor device App 20050170633 - Sasaki, Yoichi ; et al.	2005-08-04
Semiconductor device and manufacturing method thereof App 20050167805 - Usami, Tatsuya	2005-08-04
Semiconductor device App 20050167844 - Ohto, Koichi ; et al.	2005-08-04
Semiconductor device and method of manufacturing the same App 20050124168 - Nagahara, Seiji ; et al.	2005-06-09
Carbon containing silicon oxide film having high ashing tolerance and adhesion App 20050006665 - Ohnishi, Sadayuki ; et al.	2005-01-13
Manufacturing method of semiconductor device App 20040266171 - Aoki, Hidemitsu ; et al.	2004-12-30
Method of fabricating semiconductor device using Plasma-Enhanced CVD App 20040185668 - Morita, Noboru ; et al.	2004-09-23
Semiconductor device, and production method for manufacturing such semiconductor device App 20040183162 - Ohto, Koichi ; et al.	2004-09-23
Semiconductor device with improved reliability and manufacturing method of the same App 20040183164 - Usami, Tatsuya	2004-09-23
Semiconductor device having copper damascene interconnection and fabricating method thereof App 20040183202 - Usami, Tatsuya	2004-09-23
Semiconductor device and method for manufacturing same App 20040173910 - Usami, Tatsuya ; et al.	2004-09-09
Manufacturing method of semicondcutor device Grant 6,787,480 - Aoki , et al. September 7, 2	2004-09-07
Semiconductor device and method of manufacturing the same App 20040166666 - Usami, Tatsuya	2004-08-26
Semiconductor device and manufacturing method thereof App 20040155342 - Usami, Tatsuya ; et al.	2004-08-12
Organic insulating film, manufacturing method thereof, semiconductor device using such organic insulating film and manufacturing method thereof App 20040152334 - Ohto, Koichi ; et al.	2004-08-05
Semiconductor device and method for manufacturing the same App 20040150110 - Usami, Tatsuya ; et al.	2004-08-05
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method App 20040046261 - Ohto, Koichi ; et al.	2004-03-11
Semiconductor device and method of manufacturing the same Grant 6,670,709 - Usami December 30, 2	2003-12-30
Semiconductor device having silicon-including metal wiring layer and its manufacturing method App 20030209738 - Ohto, Koichi ; et al.	2003-11-13
Semiconductor device and manufacturing method thereof App 20030205810 - Usami, Tatsuya	2003-11-06
Semiconductor device and method of manufacturing the same App 20030170993 - Nagahara, Seiji ; et al.	2003-09-11
Manufacturing method of semiconductor device App 20030155657 - Tonegawa, Takashi ; et al.	2003-08-21
Semiconductor device and manufacturing method thereof Grant 6,589,863 - Usami July 8, 2	2003-07-08
Semiconductor device and method of manufacturing the same App 20030089990 - Usami, Tatsuya	2003-05-15
Semiconductor device and manufacturing method thereof for realizing high packaging density App 20030085473 - Usami, Tatsuya	2003-05-08
Semiconductor device and manufacturing method thereof for realizing high packaging density Grant 6,531,755 - Usami March 11, 2	2003-03-11
Semiconductor device and method of manufacturing the same Grant 6,514,852 - Usami February 4, 2	2003-02-04
Semiconductor device and process for production thereof App 20030020172 - Usami, Tatsuya	2003-01-30
Dual damascene circuit with upper wiring and interconnect line positioned in regions formed as two layers including organic polymer layer and low-permittivity layer App 20020195711 - Usami, Tatsuya	2002-12-26
Semiconductor device and process for producing the same Grant 6,479,407 - Yokoyama , et al. November 12, 2	2002-11-12
Manufacturing method of semiconductor device App 20020155702 - Aoki, Hidemitsu ; et al.	2002-10-24
Method of manufacturing semiconductor device Grant 6,468,898 - Usami October 22, 2	2002-10-22
Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer App 20020127807 - Usami, Tatsuya	2002-09-12
Process For Fabricating Semiconductor Device, Apparatus Using More Than One Kind Of Inert Gas For Evacuating Air And Method For Entering Wafer Into The Apparatus App 20020019130 - Usami, Tatsuya	2002-02-14
Semiconductor device and method of manufacturing the same App 20020009873 - Usami, Tatsuya	2002-01-24
Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer App 20010051447 - Usami, Tatsuya	2001-12-13
Plasma CVD apparatus App 20010047759 - Matsui, Takayuki ; et al.	2001-12-06
Semiconductor device and fabrication process thereof App 20010048165 - Usami, Tatsuya	2001-12-06
Process for manufacturing a semiconductor device Grant 6,319,797 - Usami November 20, 2	2001-11-20
Semiconductor device and process for producing the same App 20010019857 - Yokoyama, Takashi ; et al.	2001-09-06
Semiconductor device and method of manufacturing the same App 20010017402 - Usami, Tatsuya	2001-08-30
Semiconductor device and fabrication process thereof Grant 6,222,269 - Usami April 24, 2	2001-04-24
Semiconductor device with low permittivity interlayer insulating film and method of manufacturing the same Grant 6,187,662 - Usami , et al. February 13, 2	2001-02-13
Semiconductor device and method of manufacturing the same Grant 6,133,137 - Usami October 17, 2	2000-10-17
Process of fabricating semiconductor device having ashing step for photo-resist mask in plasma produced from N.sub.x H.sub.y gas Grant 6,124,213 - Usami , et al. September 26, 2	2000-09-26
Chamber etching of plasma processing apparatus Grant 6,099,747 - Usami August 8, 2	2000-08-08
Plasma CVD process for forming a fluorine-doped SiO.sub.2 dielectric film Grant 6,077,574 - Usami June 20, 2	2000-06-20
Semiconductor device and process for production thereof Grant 6,005,291 - Koyanagi , et al. December 21, 1	1999-12-21
Semiconductor device having an organic resin layer and silicon oxide layer containing fluorine for preventing crosstalk between metal lines and a method of manufacturing the same Grant 5,939,771 - Usami , et al. August 17, 1	1999-08-17
Chamber etching of plasma processing apparatus Grant 5,863,339 - Usami January 26, 1	1999-01-26
Semiconductor device having a polysilicon resistor element with increased stability and method of fabricating same Grant 5,751,050 - Ishikawa , et al. May 12, 1	1998-05-12
Vertical low pressure CVD apparatus with an adjustable nozzle Grant 5,503,678 - Usami April 2, 1	1996-04-02