loadpatents
Patent applications and USPTO patent grants for Umezawa; Yoshihiro.The latest application filed is for "plasma processing apparatus".
Patent | Date |
---|---|
Plasma processing apparatus Grant 11,348,768 - Hosaka , et al. May 31, 2 | 2022-05-31 |
Plasma Processing Apparatus App 20220005672 - SAITO; Takehisa ;   et al. | 2022-01-06 |
Plasma Processing Apparatus App 20210375597 - HOSAKA; Yuki ;   et al. | 2021-12-02 |
Plasma Processing Apparatus App 20210320009 - HOSAKA; Yuki ;   et al. | 2021-10-14 |
Plasma processing apparatus Grant 11,101,114 - Hosaka , et al. August 24, 2 | 2021-08-24 |
Gas supply mechanism and semiconductor manufacturing system Grant 10,950,467 - Hosaka , et al. March 16, 2 | 2021-03-16 |
Plasma Processing Apparatus, Plasma State Detection Method, And Plasma State Detection Program App 20210020418 - HAYASHI; Daisuke ;   et al. | 2021-01-21 |
Plasma Processing Apparatus App 20200266034 - HOSAKA; Yuki ;   et al. | 2020-08-20 |
Method of etching object to be processed Grant 10,685,816 - Umezawa , et al. | 2020-06-16 |
Gas supply mechanism and semiconductor manufacturing system Grant 10,636,683 - Hosaka , et al. | 2020-04-28 |
Gas supply mechanism and semiconductor manufacturing apparatus Grant 10,510,514 - Hosaka , et al. Dec | 2019-12-17 |
Plasma Processing Apparatus App 20190131136 - HOSAKA; Yuki ;   et al. | 2019-05-02 |
Ion beam irradiation apparatus and substrate processing apparatus Grant 10,204,766 - Umezawa , et al. Feb | 2019-02-12 |
Temperature control device for processing target object and method of selectively etching nitride film from multilayer film Grant 10,192,774 - Hosaka , et al. Ja | 2019-01-29 |
Method Of Etching Object To Be Processed App 20180337025 - UMEZAWA; Yoshihiro ;   et al. | 2018-11-22 |
Ion Beam Irradiation Apparatus And Substrate Processing Apparatus App 20180108516 - UMEZAWA; Yoshihiro ;   et al. | 2018-04-19 |
Gas Supply Mechanism And Semiconductor Manufacturing System App 20170301568 - HOSAKA; Yuki ;   et al. | 2017-10-19 |
Gas Supply Mechanism And Semiconductor Manufacturing Appratus App 20170301518 - HOSAKA; Yuki ;   et al. | 2017-10-19 |
Temperature Control Device For Processing Target Object And Method Of Selectively Etching Nitride Film From Multilayer Film App 20170301579 - Hosaka; Yuki ;   et al. | 2017-10-19 |
Plasma Processing Apparatus App 20170092513 - HOSAKA; Yuki ;   et al. | 2017-03-30 |
Plasma Processing Apparatus App 20160260582 - HOSAKA; Yuki ;   et al. | 2016-09-08 |
Moisture-permeable, waterproof fabric and its production process Grant 5,753,568 - Shimano , et al. May 19, 1 | 1998-05-19 |
Moisture permeable, waterproof fabric and its production process Grant 5,626,950 - Shimano , et al. May 6, 1 | 1997-05-06 |
Electrical connectors for leadless circuit boards Grant 4,857,001 - Nakano , et al. August 15, 1 | 1989-08-15 |
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