Patent | Date |
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Method of predicting thermal donor formation behavior in silicon wafer, method of evaluating silicon wafer, and method of producing silicon wafer Grant 11,121,003 - Torigoe , et al. September 14, 2 | 2021-09-14 |
Silicon wafer Grant 11,094,557 - Ono , et al. August 17, 2 | 2021-08-17 |
Method Of Predicting Thermal Donor Formation Behavior In Silicon Wafer, Method Of Evaluating Silicon Wafer, And Method Of Produc App 20200105542 - Torigoe; Kazuhisa ;   et al. | 2020-04-02 |
Silicon Wafer App 20200083060 - ONO; Toshiaki ;   et al. | 2020-03-12 |
Silicon wafer and method for manufacturing the same Grant 10,177,008 - Nakayama , et al. J | 2019-01-08 |
Silicon Wafer And Method For Manufacturing The Same App 20160322233 - NAKAYAMA; Takashi ;   et al. | 2016-11-03 |
Epitaxial silicon wafer and method for manufacturing same Grant 9,412,622 - Ono , et al. August 9, 2 | 2016-08-09 |
Epitaxial Silicon Wafer And Method For Manufacturing Same App 20160042974 - ONO; Toshiaki ;   et al. | 2016-02-11 |
Method of manufacturing silicon single crystal, silicon single crystal ingot, and silicon wafer Grant 8,771,415 - Umeno , et al. July 8, 2 | 2014-07-08 |
Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT Grant 08617311 - | 2013-12-31 |
Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT Grant 8,617,311 - Ono , et al. December 31, 2 | 2013-12-31 |
Silicon wafer and method for producing the same Grant 8,460,463 - Umeno , et al. June 11, 2 | 2013-06-11 |
Silicon wafer and method for producing the same Grant 8,231,852 - Itou , et al. July 31, 2 | 2012-07-31 |
Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same Grant 8,105,436 - Umeno January 31, 2 | 2012-01-31 |
Method Of Producing Epitaxial Wafer As Well As Epitaxial Wafer App 20110052923 - Umeno; Shigeru ;   et al. | 2011-03-03 |
Silicon wafer for IGBT and method for producing same Grant 7,846,252 - Umeno , et al. December 7, 2 | 2010-12-07 |
Silicon Single Crystal Wafer For Igbt And Method For Manufacturing Silicon Single Crystal Wafer For Igbt App 20100288184 - ONO; Toshiaki ;   et al. | 2010-11-18 |
Silicon Wafer And Method For Producing The Same App 20100290971 - Itou; Wataru ;   et al. | 2010-11-18 |
Method Of Manufacturing Silicon Single Crystal, Silicon Single Crystal Ingot, And Silicon Wafer App 20100111802 - UMENO; Shigeru ;   et al. | 2010-05-06 |
Silicon Wafer And Method For Producing The Same App 20100052103 - UMENO; Shigeru ;   et al. | 2010-03-04 |
Silicon Wafer And Method For Producing The Same App 20100051945 - Umeno; Shigeru ;   et al. | 2010-03-04 |
Single crystal silicon wafer for insulated gate bipolar transistors Grant 7,629,054 - Umeno December 8, 2 | 2009-12-08 |
Manufacturing method of silicon wafer Grant 7,563,319 - Umeno , et al. July 21, 2 | 2009-07-21 |
Single Crystal Silicon Wafer For Insulated Gate Bipolar Transistors And Process For Producing The Same App 20090081856 - Umeno; Shigeru | 2009-03-26 |
Silicon Wafer For Igbt And Method For Producing Same App 20080102287 - Umeno; Shigeru ;   et al. | 2008-05-01 |
Silicon wafer for IGBT and method for producing same Grant 7,344,689 - Umeno , et al. March 18, 2 | 2008-03-18 |
Epitaxial wafer and method for manufacturing method Grant 7,288,791 - Umeno , et al. October 30, 2 | 2007-10-30 |
Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT App 20070193501 - Ono; Toshiaki ;   et al. | 2007-08-23 |
Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same App 20070186845 - Umeno; Shigeru | 2007-08-16 |
Silicon wafer for IGBT and method for producing same App 20070000427 - Umeno; Shigeru ;   et al. | 2007-01-04 |
Method for growing silicon single crystal Grant 7,014,704 - Ono , et al. March 21, 2 | 2006-03-21 |
Manufacturing method of silicon wafer App 20050229842 - Umeno, Shigeru ;   et al. | 2005-10-20 |
Epitaxial wafer and method for manufacturing method App 20050035349 - Umeno, Shigeru ;   et al. | 2005-02-17 |
Method for growing silicon single crystal App 20040244674 - Ono, Toshiaki ;   et al. | 2004-12-09 |
Silicon single crystal, silicon wafer, and epitaxial wafer. Grant 6,641,888 - Asayama , et al. November 4, 2 | 2003-11-04 |
Silicon single crystal, silicon wafer, and epitaxial wafer App 20020142171 - Asayama, Eiichi ;   et al. | 2002-10-03 |
Silicon single crystal, silicon wafer, and epitaxial wafer App 20020142170 - Asayama, Eiichi ;   et al. | 2002-10-03 |