ULVAC, INC.
Patent Applications and Registrations
Patent applications and USPTO patent grants for ULVAC, INC..The latest application filed is for "sputtering target and method of producing sputtering target".
Company Profile
146.200.200
Trademarks
- ULVAC, INC. - Chigasaki-shi, Kanagawa JP
- ULVAC, Inc. - Kanagawa JP
- ULVAC, INC. - Chigasaki JP
- ULVAC, INC. - Chigasaki-shi JP
- ULVAC, INC. - Shiuoka JP
- ULVAC, Inc. - Susono JP
- ULVAC, INC. - Chigasaki, Kanagawa N/A JP
Trademarks
Patent Activity
| Patent | Date |
|---|---|
| Sputtering Target And Method Of Producing Sputtering Target App 20220307124 - TAKESUE; Kentarou ; et al. | 2022-09-29 |
| Ion Gun App 20220293388 - YUZE; Takumi | 2022-09-15 |
| Vacuum Processing Apparatus And Vacuum Processing Method Using The Same App 20220285179 - CHUNG; Kyung Hoon ; et al. | 2022-09-08 |
| Can-roller for vacuum processing apparatus Grant 11,434,562 - Saitou September 6, 2 | 2022-09-06 |
| Housing case for crystal oscillator Grant 11,437,256 - Kaida , et al. September 6, 2 | 2022-09-06 |
| Sputtering target and method of producing sputtering target Grant 11,421,315 - Lu , et al. August 23, 2 | 2022-08-23 |
| Freeze-drying Device And Freeze-drying Method App 20220260313 - Yoshimoto; Tsuyoshi ; et al. | 2022-08-18 |
| Method for manufacturing semiconductor device using plasma CVD process Grant 11,411,120 - Kobayashi , et al. August 9, 2 | 2022-08-09 |
| Sputtering apparatus and sputtering method Grant 11,384,423 - Nakano July 12, 2 | 2022-07-12 |
| Etching Apparatus And Etching Method App 20220208554 - TONARI; Kazuhiko | 2022-06-30 |
| Thin Film Manufacturing Apparatus App 20220195582 - GIBO; Manabu ; et al. | 2022-06-23 |
| Laterally switching cell having sub-stoichiometric metal oxide active layer Grant 11,362,274 - Rozen , et al. June 14, 2 | 2022-06-14 |
| Vacuum deposition apparatus Grant 11,345,992 - Saitou , et al. May 31, 2 | 2022-05-31 |
| Evaporator And Deposition Apparatus App 20220162741 - GIBO; Manabu ; et al. | 2022-05-26 |
| Vacuum Processing Apparatus App 20220154324 - Tashiro; Yukihito ; et al. | 2022-05-19 |
| Method of manufacturing OTS device, and OTS device Grant 11,335,853 - Ahn , et al. May 17, 2 | 2022-05-17 |
| Oxide semiconductor thin film, thin film transistor, method producing the same, and sputtering target Grant 11,335,782 - Hanna , et al. May 17, 2 | 2022-05-17 |
| Can-roller For Vacuum Processing Apparatus App 20220145449 - Saitou; Shuuji | 2022-05-12 |
| Film Formation Apparatus App 20220145441 - GIBO; Manabu ; et al. | 2022-05-12 |
| Sputtering Apparatus App 20220145445 - Suzuki; Koji ; et al. | 2022-05-12 |
| Vapor Deposition Unit And Vacuum Vapor Deposition Apparatus Provided With Vapor Deposition Unit App 20220145443 - Saitou; Shuuji ; et al. | 2022-05-12 |
| Vacuum processing apparatus Grant 11,319,627 - Fujii May 3, 2 | 2022-05-03 |
| Deposition apparatus and deposition method Grant 11,319,630 - Tonari May 3, 2 | 2022-05-03 |
| Freeze-drying device and freeze-drying method Grant 11,320,200 - Yoshimoto , et al. May 3, 2 | 2022-05-03 |
| Deep ultraviolet LED and method for producing the same Grant 11,309,454 - Kashima , et al. April 19, 2 | 2022-04-19 |
| Sputtering apparatus Grant 11,286,554 - Nakano , et al. March 29, 2 | 2022-03-29 |
| Vacuum Processing Apparatus And Method Of Cleaning Vacuum Processing Apparatus App 20220081774 - MIYAYA; Takehisa ; et al. | 2022-03-17 |
| Vacuum Processing Apparatus App 20220064799 - MIYAYA; Takehisa ; et al. | 2022-03-03 |
| Film Forming Method App 20220056571 - Tsutsumi; Kengo ; et al. | 2022-02-24 |
| Silicon Dry Etching Method App 20220044938 - DOI; Kenta ; et al. | 2022-02-10 |
| Vacuum processing apparatus Grant 11,239,063 - Fujii February 1, 2 | 2022-02-01 |
| Magnet unit for magnetron sputtering apparatus Grant 11,239,064 - Fujii , et al. February 1, 2 | 2022-02-01 |
| Sputtering apparatus and method of forming film Grant 11,230,760 - Fujii , et al. January 25, 2 | 2022-01-25 |
| Vacuum Processing Apparatus App 20220018014 - TAKAGI; Dai ; et al. | 2022-01-20 |
| Deposition Apparatus App 20210395880 - KATO; Yuko ; et al. | 2021-12-23 |
| Conformal replacement gate electrode for short channel devices Grant 11,195,929 - Ando , et al. December 7, 2 | 2021-12-07 |
| Method for forming magnetic film and method for manufacturing magnetic storage element Grant 11,189,784 - Oh , et al. November 30, 2 | 2021-11-30 |
| Thin film formation method Grant 11,189,482 - Hatanaka , et al. November 30, 2 | 2021-11-30 |
| Vacuum Processing Apparatus And Support Shaft App 20210363640 - YAMAMOTO; Yoshiaki ; et al. | 2021-11-25 |
| Deposition Apparatus And Deposition Method App 20210348263 - KODAIRA; Shuji ; et al. | 2021-11-11 |
| Lift Pin And Vacuum Processing Apparatus App 20210343577 - YAMAMOTO; Yoshiaki ; et al. | 2021-11-04 |
| Method Of Manufacturing Ots Device, And Ots Device App 20210336137 - AHN; Hyung-Woo ; et al. | 2021-10-28 |
| Vacuum Processing Apparatus App 20210319985 - Suzuki; Koji ; et al. | 2021-10-14 |
| Object Processing Apparatus App 20210305070 - KAGAMI; Tsuyoshi ; et al. | 2021-09-30 |
| Electrostatic Chuck, Vacuum Processing Apparatus, And Substrate Processing Method App 20210296154 - SAKATA; Genji ; et al. | 2021-09-23 |
| Sputtering Apparatus and Sputtering Method App 20210292886 - Nakano; Katsuaki | 2021-09-23 |
| Film Formation Apparatus App 20210296097 - KANEKO; Toshinori ; et al. | 2021-09-23 |
| Sputtering Apparatus App 20210285094 - KANEKO; Toshinori ; et al. | 2021-09-16 |
| Substrate Guide And Carrier App 20210277514 - KANEKO; Toshinori ; et al. | 2021-09-09 |
| Freeze vacuum drying apparatus and freeze vacuum drying method Grant 11,112,176 - Nishihashi , et al. September 7, 2 | 2021-09-07 |
| Film-forming apparatus and film-forming method Grant 11,111,577 - Kobayashi , et al. September 7, 2 | 2021-09-07 |
| Sub-stoichiometric Metal-oxide Thin Films App 20210272796 - Rozen; John ; et al. | 2021-09-02 |
| Oxide Semiconductor Thin Film, Thin Film Transistor, Method Producing The Same, And Sputtering Target App 20210257465 - HANNA; Taku ; et al. | 2021-08-19 |
| Housing Case for Crystal Oscillator App 20210257238 - Kaida; Yuki ; et al. | 2021-08-19 |
| Gate valve Grant 11,092,246 - Wada , et al. August 17, 2 | 2021-08-17 |
| Vacuum Processing Apparatus App 20210249237 - Fujii; Yoshinori | 2021-08-12 |
| Magnet Unit for Magnetron Sputtering Apparatus App 20210249241 - Fujii; Yoshinori ; et al. | 2021-08-12 |
| Contact-type Power Supply Apparatus And Contact Unit App 20210242647 - SAITOU; Shuuji | 2021-08-05 |
| Sub-stoichiometric metal-oxide thin films Grant 11,081,343 - Rozen , et al. August 3, 2 | 2021-08-03 |
| Cu ALLOY TARGET App 20210230718 - TAKASAWA; Satoru | 2021-07-29 |
| Film Forming Method App 20210230741 - Kodaira; Shuji ; et al. | 2021-07-29 |
| Vacuum Processing Apparatus App 20210225681 - Fujii; Yoshinori | 2021-07-22 |
| Aluminum Alloy Film, Method Of Producing The Same, And Thin Film Transistor App 20210226028 - UJIHARA; Yuusuke ; et al. | 2021-07-22 |
| Sputtering Apparatus App 20210222289 - KOKAZE; Yutaka ; et al. | 2021-07-22 |
| Plasma Cvd Device And Plasma Cvd Method App 20210222298 - KOBAYASHI; Tadamasa ; et al. | 2021-07-22 |
| Cu Alloy Target, Wiring Film, Semiconductor Device, And Liquid Crystal Display Device App 20210215986 - TAKASAWA; Satoru ; et al. | 2021-07-15 |
| Laterally Switching Cell Having Sub-stoichiometric Metal Oxide Active Layer App 20210217953 - Rozen; John ; et al. | 2021-07-15 |
| Sputtering Apparatus and Method of Forming Film App 20210214841 - Fujii; Yoshinori ; et al. | 2021-07-15 |
| Sputtering apparatus and method of forming film Grant 11,056,323 - Nakamura , et al. July 6, 2 | 2021-07-06 |
| Vacuum Processing Apparatus App 20210198784 - Fujii; Yoshinori | 2021-07-01 |
| Thin-film transistor, oxide semiconductor film, and sputtering target Grant 11,049,976 - Ueno , et al. June 29, 2 | 2021-06-29 |
| Sputtering Target And Method Of Producing Sputtering Target App 20210172056 - LU; Xiaoli ; et al. | 2021-06-10 |
| Vacuum Deposition Apparatus App 20210140034 - Saitou; Shuuji ; et al. | 2021-05-13 |
| Sputtering Apparatus App 20210140033 - Nakano; Katsuaki ; et al. | 2021-05-13 |
| Aluminum Alloy Target And Method Of Producing The Same App 20210140032 - NAKAMURA; Ryouta ; et al. | 2021-05-13 |
| Gate valve device Grant 11,002,366 - Saitou May 11, 2 | 2021-05-11 |
| Vacuum processing device Grant 10,994,938 - Nakao May 4, 2 | 2021-05-04 |
| Reactive ion etching apparatus Grant 10,991,591 - Kamimura , et al. April 27, 2 | 2021-04-27 |
| Vacuum pump Grant 10,982,663 - Suzuki , et al. April 20, 2 | 2021-04-20 |
| Conductive thin film manufacturing method Grant 10,982,323 - Maehira , et al. April 20, 2 | 2021-04-20 |
| Substrate Transport Device And Substrate Transporting Method App 20210107149 - MUSHA; Kazuhiro ; et al. | 2021-04-15 |
| Method of forming internal stress control film Grant 10,975,465 - Nakano , et al. April 13, 2 | 2021-04-13 |
| Substrate Transport Device And Substrate Transporting Method App 20210101281 - MUSHA; Kazuhiro ; et al. | 2021-04-08 |
| Sputtering Target And Method Of Producing The Same App 20210087672 - NAKAMURA; Akira ; et al. | 2021-03-25 |
| Freeze Vacuum Drying Apparatus And Freeze Vacuum Drying Method App 20210080179 - NISHIHASHI; Tsutomu ; et al. | 2021-03-18 |
| Sputtering Method and Sputtering Apparatus App 20210079514 - Fujii; Yoshinori ; et al. | 2021-03-18 |
| Deep ultraviolet LED and method for manufacturing the same Grant 10,950,751 - Kashima , et al. March 16, 2 | 2021-03-16 |
| Gate Valve Device App 20210062921 - Saitou; Shuuji | 2021-03-04 |
| Cathode device and sputtering apparatus Grant 10,934,616 - Tashiro , et al. March 2, 2 | 2021-03-02 |
| Gate Valve App 20210041039 - WADA; Shinichi ; et al. | 2021-02-11 |
| Deep Ultraviolet Led And Method For Producing The Same App 20210036186 - KASHIMA; Yukio ; et al. | 2021-02-04 |
| Ion source, ion implantation apparatus, and ion source operating method Grant 10,910,192 - Higashi , et al. February 2, 2 | 2021-02-02 |
| Ligand Selection For Ternary Oxide Thin Films App 20210020426 - Frank; Martin Michael ; et al. | 2021-01-21 |
| Sub-stoichiometric Metal-oxide Thin Films App 20210020427 - Rozen; John ; et al. | 2021-01-21 |
| Vacuum pump Grant 10,895,258 - Hashimoto , et al. January 19, 2 | 2021-01-19 |
| Roll-to-roll Deposition Apparatus And Roll-to-roll Deposition Method App 20210002758 - SAKAMOTO; Junichi ; et al. | 2021-01-07 |
| Selective phase change material growth in high aspect ratio dielectric pores for semiconductor device fabrication Grant 10,886,464 - BrightSky , et al. January 5, 2 | 2021-01-05 |
| Thin Film Formation Method, Thin Film Formation Apparatus, And Lithium Battery App 20200407841 - GIBO; Manabu ; et al. | 2020-12-31 |
| Ion Source, Ion Implantation Apparatus, And Ion Source Operating Method App 20200402759 - HIGASHI; Akio ; et al. | 2020-12-24 |
| Method For Forming Magnetic Film And Method For Manufacturing Magnetic Storage Element App 20200381616 - OH; Seungjun ; et al. | 2020-12-03 |
| Cathode Device And Sputtering Apparatus App 20200377992 - TASHIRO; Yukihito ; et al. | 2020-12-03 |
| Cathode unit for sputtering apparatus Grant 10,844,474 - Nakamura , et al. November 24, 2 | 2020-11-24 |
| Vacuum pump having a first housing with a supply port and a second housing with a recess portion Grant 10,837,447 - Kimura , et al. November 17, 2 | 2020-11-17 |
| Oxide Semiconductor Thin Film App 20200357924 - OOTAKE; Fumito ; et al. | 2020-11-12 |
| Sterilized-liquefied Gas Apparatus And Connectin Pipe Thereof App 20200345881 - YOSHIMOTO; Tsuyoshi | 2020-11-05 |
| Heater Base And Processing Apparatus App 20200343120 - MIYAYA; Takehisa ; et al. | 2020-10-29 |
| Composition control of chemical vapor deposition nitrogen doped germanium antimony tellurium Grant 10,808,316 - Carta , et al. October 20, 2 | 2020-10-20 |
| Deep Ultraviolet Led And Method For Manufacturing The Same App 20200313041 - KASHIMA; Yukio ; et al. | 2020-10-01 |
| Method Of Processing Wiring Substrate App 20200315021 - SATO; Muneyuki ; et al. | 2020-10-01 |
| Film forming unit for sputtering apparatus Grant 10,770,275 - Saitou Sep | 2020-09-08 |
| Sensor head for crystal oscillator type of film thickness monitor Grant 10,767,987 - Oguma , et al. Sep | 2020-09-08 |
| Holding apparatus Grant 10,763,153 - Tashiro , et al. Sep | 2020-09-01 |
| Vacuum Pump And Control Method Therefor App 20200271120 - KIMURA; Yasuhiro ; et al. | 2020-08-27 |
| Conductive Thin Film Manufacturing Method App 20200248301 - Kind Code | 2020-08-06 |
| Vacuum Pump App 20200240412 - KIMURA; Yasuhiro ; et al. | 2020-07-30 |
| Plasma Processing Apparatus App 20200243310 - KAGAMI; Tsuyoshi ; et al. | 2020-07-30 |
| Attraction device, method for producing attraction device, and vacuum processing device Grant 10,720,858 - Maehira , et al. | 2020-07-21 |
| Reactive Ion Etching Apparatus App 20200219729 - Kamimura; Ryuichiro ; et al. | 2020-07-09 |
| Pressure Measurement System App 20200191677 - Sato; Takanobu ; et al. | 2020-06-18 |
| Deep ultraviolet LED and method for manufacturing the same Grant 10,680,134 - Kashima , et al. | 2020-06-09 |
| Vacuum Pump App 20200173435 - HASHIMOTO; Kenji ; et al. | 2020-06-04 |
| Pressure measurement system for judging power supply from terminal device to control section Grant 10,670,486 - Sato , et al. | 2020-06-02 |
| Method Of Manufacturing Substrate With A Transparent Conductive Film, Manufacturing Apparatus Of Substrate With Transparent Cond App 20200168759 - MATSUZAKI; Junsuke ; et al. | 2020-05-28 |
| Method For Manufacturing Semiconductor Device, And Semiconductor Device App 20200127136 - Kobayashi; Tadamasa ; et al. | 2020-04-23 |
| Vacuum drying apparatus and vacuum drying method Grant 10,627,160 - Miura , et al. | 2020-04-21 |
| Manufacturing method for electronic component Grant 10,619,261 - Hironiwa , et al. | 2020-04-14 |
| Vacuum Pump App 20200109705 - SUZUKI; Toshio ; et al. | 2020-04-09 |
| Vacuum processing apparatus Grant 10,612,130 - Minami , et al. | 2020-04-07 |
| Gate valve Grant 10,612,673 - Wada , et al. | 2020-04-07 |
| Sensor Head for Crystal Oscillator Type of Film Thickness Monitor App 20200103225 - Oguma; Yousuke ; et al. | 2020-04-02 |
| Deposition Method And Roll-to-roll Deposition Apparatus App 20200095672 - HONMA; Hiroaki ; et al. | 2020-03-26 |
| Acrylic Vaporizer App 20200080189 - KATO; Yuko ; et al. | 2020-03-12 |
| Sputtering Apparatus and Method of Forming Film App 20200080192 - Nakamura; Shinya ; et al. | 2020-03-12 |
| Method of manufacturing an electronic component and processing system Grant 10,586,712 - Kageyama , et al. | 2020-03-10 |
| Conformal Replacement Gate Electrode For Short Channel Devices App 20200066859 - Ando; Takashi ; et al. | 2020-02-27 |
| Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probe Grant 10,568,607 - Suzuki , et al. Feb | 2020-02-25 |
| Liquid Crystal Display Device, Organic El Display Device, Semiconductor Element, Wiring Film, Wiring Substrate, And Target App 20200058683 - TAKASAWA; Satoru ; et al. | 2020-02-20 |
| Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same Grant 10,553,777 - Kobayashi , et al. Fe | 2020-02-04 |
| Ion source and ion implantation apparatus Grant 10,529,532 - Yuze , et al. J | 2020-01-07 |
| Conformal replacement gate electrode for short channel devices Grant 10,529,815 - Ando , et al. J | 2020-01-07 |
| Vacuum Processing Apparatus App 20200002807 - MATSUZAKI; Junsuke ; et al. | 2020-01-02 |
| Film formation apparatus, film formation method, and manufacturing method of solar battery Grant 10,508,332 - Matsuzaki , et al. Dec | 2019-12-17 |
| Deposition Guard Plate And Sputtering Device App 20190378701 - Fujii; Yoshinori ; et al. | 2019-12-12 |
| Manufacturing Method Of Substrate With Transparent Conductive Film, Manufacturing Apparatus Of Substrate With Transparent Conduc App 20190368027 - OONO; Yukiaki ; et al. | 2019-12-05 |
| Vacuum Drying Apparatus And Vacuum Drying Method App 20190360748 - MIURA; Makoto ; et al. | 2019-11-28 |
| Substrate processing device Grant 10,490,390 - Fujinaga , et al. Nov | 2019-11-26 |
| Thin Film Formation Method App 20190355576 - HATANAKA; Masanobu ; et al. | 2019-11-21 |
| Composition Control Of Chemical Vapor Deposition Nitrogen Doped Germanium Antimony Tellurium App 20190345607 - Carta; Fabio ; et al. | 2019-11-14 |
| Power supply device Grant 10,461,731 - Nakashima , et al. Oc | 2019-10-29 |
| Target assembly Grant 10,435,783 - Nakamura , et al. O | 2019-10-08 |
| Touch panel, method of manufacturing touch panel, and optical thin film Grant 10,429,964 - Harada , et al. O | 2019-10-01 |
| Device, Method Of Manufacturing The Device, And Method Of Manufacturing Array Type Of Ultrasound Probe App 20190290244 - SUZUKI; Taichi ; et al. | 2019-09-26 |
| Deposition Apparatus And Deposition Method App 20190284697 - TONARI; KAZUHIKO | 2019-09-19 |
| Rotary cathode unit for magnetron sputtering apparatus Grant 10,378,102 - Saitou A | 2019-08-13 |
| Thin substrate processing device Grant 10,370,757 - Fujinaga , et al. | 2019-08-06 |
| Film Formation Apparatus App 20190233938 - MATSUZAKI; Junsuke ; et al. | 2019-08-01 |
| Ion Source And Ion Implantation Apparatus App 20190237290 - YUZE; Takumi ; et al. | 2019-08-01 |
| Vacuum Processing Apparatus App 20190233224 - MINAMI; Hirofumi ; et al. | 2019-08-01 |
| Gate Valve App 20190211935 - WADA; Shinichi ; et al. | 2019-07-11 |
| Film Forming Unit For Sputtering Apparatus App 20190206662 - SAITOU; Shuuji | 2019-07-04 |
| Cathode Unit for Sputtering Apparatus App 20190194798 - Nakamura; Shinya ; et al. | 2019-06-27 |
| Manufacturing Method For Electronic Component App 20190177865 - HIRONIWA; DAISUKE ; et al. | 2019-06-13 |
| Binary metal oxide based interlayer for high mobility channels Grant 10,283,610 - Narayanan , et al. | 2019-05-07 |
| Conformal Replacement Gate Electrode For Short Channel Devices App 20190131418 - Ando; Takashi ; et al. | 2019-05-02 |
| Device structure and method of producing the same Grant 10,276,827 - Oka , et al. | 2019-04-30 |
| Power Supply Device App 20190123733 - NAKASHIMA; Kenya ; et al. | 2019-04-25 |
| Mixing device Grant 10,258,947 - Ozeki | 2019-04-16 |
| Roll-to-Roll Deposition Apparatus and Roll-to-Roll Deposition Method App 20190099775 - SAKAMOTO; JUNICHI ; et al. | 2019-04-04 |
| Holding Apparatus App 20190103301 - Tashiro; Yukihito ; et al. | 2019-04-04 |
| Sputtering apparatus and method of discriminating state thereof Grant 10,233,536 - Nakamura , et al. | 2019-03-19 |
| Film-forming Method And Sputtering Apparatus App 20190078196 - Nakamura; Shinya ; et al. | 2019-03-14 |
| Method Of Forming Internal Stress Control Film App 20190071767 - NAKANO; Katsuaki ; et al. | 2019-03-07 |
| Binary metal oxide based interlayer for high mobility channels Grant 10,217,835 - Narayanan , et al. Feb | 2019-02-26 |
| Binary metal oxide based interlayer for high mobility channels Grant 10,217,834 - Narayanan , et al. Feb | 2019-02-26 |
| Shower Head And Vacuum Processing Apparatus App 20190055651 - JINBO; YOSUKE ; et al. | 2019-02-21 |
| Sterilized-liquefied Gas Producing Apparatus App 20190015534 - YOSHIMOTO; Tsuyoshi ; et al. | 2019-01-17 |
| Vacuum Processing Device App 20180370733 - NAKAO; Hirotoshi | 2018-12-27 |
| Film-forming Apparatus And Film-forming Method App 20180355474 - Kobayashi; Yousuke ; et al. | 2018-12-13 |
| Oxide-sintered-body Sputtering Target And Method Of Producing The Same App 20180355472 - TAKAHASHI; KAZUTOSHI ; et al. | 2018-12-13 |
| Film Formation Apparatus, Film Formation Method, And Manufacturing Method Of Solar Battery App 20180347032 - MATSUZAKI; Junsuke ; et al. | 2018-12-06 |
| Thin-film Transistor, Oxide Semiconductor Film, And Sputtering Target App 20180337285 - UENO; MITSURU ; et al. | 2018-11-22 |
| Method Of Forming Carbon Film App 20180305807 - Kohari; Shinji ; et al. | 2018-10-25 |
| Cathode assembly Grant 10,100,399 - Nakamura , et al. October 16, 2 | 2018-10-16 |
| Workpiece Holding Body And Film-forming Apparatus App 20180274085 - NAKAMUTA; YUU ; et al. | 2018-09-27 |
| Plasma processing device Grant 10,079,133 - Murayama , et al. September 18, 2 | 2018-09-18 |
| Method Of Manufacturing An Electronic Component And Processing System App 20180254192 - KAGEYAMA; TAKASHI ; et al. | 2018-09-06 |
| Deep Ultraviolet Led And Method For Manufacturing The Same App 20180248075 - KASHIMA; Yukio ; et al. | 2018-08-30 |
| Deep ultraviolet LED and method for manufacturing the same Grant 10,056,526 - Kashima , et al. August 21, 2 | 2018-08-21 |
| Positive electrode having sulfur contained in pores between nanocarbon structures, alkali metal-sulfur battery including the same, and method of preparing the positive electrode Grant 10,050,265 - Omoda , et al. August 14, 2 | 2018-08-14 |
| Substrate Processing Method And Substrate Processing Device App 20180204729 - SONODA; Kazuhiro ; et al. | 2018-07-19 |
| Deep Ultraviolet Led And Method For Manufacturing The Same App 20180198026 - KASHIMA; Yukio ; et al. | 2018-07-12 |
| Binary Metal Oxide Based Interlayer For High Mobility Channels App 20180175156 - Narayanan; Vijay ; et al. | 2018-06-21 |
| Attraction Device, Method For Producing Attraction Device, And Vacuum Processing Device App 20180175749 - MAEHIRA; Ken ; et al. | 2018-06-21 |
| Deposition method and method of manufacturing a catalyst wire for a catalytic chemical vapor deposition apparatus Grant 10,000,850 - Osono , et al. June 19, 2 | 2018-06-19 |
| Lithium-sulfur secondary battery Grant 9,997,770 - Tsukahara , et al. June 12, 2 | 2018-06-12 |
| Mixing Device App 20180154321 - Ozeki; Tomomitsu | 2018-06-07 |
| Magnetron Sputtering Apparatus App 20180155821 - Nakamura; Shinya ; et al. | 2018-06-07 |
| Selective and conformal passivation layer for 3D high-mobility channel devices Grant 9,984,940 - Chu , et al. May 29, 2 | 2018-05-29 |
| Multi-layered film and method of manufacturing the same Grant 9,985,196 - Kobayashi , et al. May 29, 2 | 2018-05-29 |
| Combined reactive gas species for high-mobility channel passivation Grant 9,984,870 - Ando , et al. May 29, 2 | 2018-05-29 |
| Target assembly Grant 9,972,479 - Nakamura , et al. May 15, 2 | 2018-05-15 |
| Binary metal oxide based interlayer for high mobility channels Grant 9,972,695 - Narayanan , et al. May 15, 2 | 2018-05-15 |
| RF sputtering apparatus and sputtering method Grant 9,960,018 - Fujii , et al. May 1, 2 | 2018-05-01 |
| Mixing device Grant D814,046 - Ozeki , et al. March 27, 2 | 2018-03-27 |
| Contact type power feeding apparatus Grant 9,929,526 - Saitou March 27, 2 | 2018-03-27 |
| Semiconductor light emitting element and method for producing the same Grant 9,929,311 - Kashima , et al. March 27, 2 | 2018-03-27 |
| Deep ultraviolet LED and method for manufacturing the same Grant 9,929,317 - Kashima , et al. March 27, 2 | 2018-03-27 |
| Method of Depositing Aluminum Oxide Film, Method of Forming the Same, and Sputtering Apparatus App 20180057929 - Miyaguchi; Yuusuke ; et al. | 2018-03-01 |
| Sputtering Apparatus App 20180057928 - Yamamoto; Hiroki ; et al. | 2018-03-01 |
| Film formation method and film formation apparatus Grant 9,903,012 - Yoshida , et al. February 27, 2 | 2018-02-27 |
| Contact Type Power Feeding Apparatus App 20180048104 - Saitou; Shuuji | 2018-02-15 |
| Touch panel, method of producing the same, optical thin film substrate and method of producing the same Grant 9,891,731 - Harada , et al. February 13, 2 | 2018-02-13 |
| Binary Metal Oxide Based Interlayer For High Mobility Channels App 20180040708 - Narayanan; Vijay ; et al. | 2018-02-08 |
| Binary Metal Oxide Based Interlayer For High Mobility Channels App 20180040710 - Narayanan; Vijay ; et al. | 2018-02-08 |
| Binary Metal Oxide Based Interlayer For High Mobility Channels App 20180040709 - Narayanan; Vijay ; et al. | 2018-02-08 |
| Rotary Cathode Unit for Magnetron Sputtering Apparatus App 20180030591 - Saitou; Shuuji | 2018-02-01 |
| Positive electrode for lithium-sulfur secondary battery and method of forming the same Grant 9,882,202 - Nozue , et al. January 30, 2 | 2018-01-30 |
| Mixing Device App 20180008944 - OZEKI; Tomomitsu | 2018-01-11 |
| Substrate Processing Device App 20180012734 - FUJINAGA; Tetsushi ; et al. | 2018-01-11 |
| Method of manufacturing radiological image conversion panel and radiological image conversion panel Grant 9,851,453 - Honda , et al. December 26, 2 | 2017-12-26 |
| Deep Ultraviolet Led And Method For Manufacturing The Same App 20170358712 - KASHIMA; Yukio ; et al. | 2017-12-14 |
| Plasma etching method, plasma etching device, plasma processing method, and plasma processing device Grant 9,837,251 - Moriguchi December 5, 2 | 2017-12-05 |
| Chucking Device And Vacuum Processing Apparatus App 20170346418 - MAEHIRA; Ken ; et al. | 2017-11-30 |
| Plasma Processing Device App 20170316917 - MURAYAMA; Takahide ; et al. | 2017-11-02 |
| Deep ultraviolet LED and method for manufacturing the same Grant 9,806,229 - Kashima , et al. October 31, 2 | 2017-10-31 |
| Cathode Assembly App 20170283941 - Nakamura; Shinya ; et al. | 2017-10-05 |
| Sputtering Apparatus and Method of Discriminating State Thereof App 20170283940 - Nakamura; Shinya ; et al. | 2017-10-05 |
| Method of, and apparatus for, forming hard mask Grant 9,779,958 - Nakano October 3, 2 | 2017-10-03 |
| Film-forming apparatus Grant 9,777,376 - Yang , et al. October 3, 2 | 2017-10-03 |
| Target Assembly App 20170268097 - Nakamura; Shinya ; et al. | 2017-09-21 |
| Vacuum freeze-drying apparatus and frozen particle manufacturing method Grant 9,759,485 - Ito , et al. September 12, 2 | 2017-09-12 |
| Target Assembly App 20170229296 - Nakamura; Shinya ; et al. | 2017-08-10 |
| Rf Sputtering Apparatus And Sputtering Method App 20170213706 - Fujii; Yoshinori ; et al. | 2017-07-27 |
| Ion beam irradiation device Grant 9,595,418 - Yamamoto , et al. March 14, 2 | 2017-03-14 |
| Dielectric film forming apparatus and method for forming dielectric film Grant 9,593,409 - Kimura , et al. March 14, 2 | 2017-03-14 |
| Articulated robot, and conveying device Grant 9,561,586 - Tashiro February 7, 2 | 2017-02-07 |
| Thin Substrate Processing Device App 20160376697A1 - | 2016-12-29 |
| Ashing device Grant 9,466,475 - Ueda , et al. October 11, 2 | 2016-10-11 |
| Evaporating material and method of manufacturing the same Grant 9,434,002 - Nagata , et al. September 6, 2 | 2016-09-06 |
| Tungsten target and method for producing same Grant 9,388,489 - Nakahata July 12, 2 | 2016-07-12 |
| Mounting device and method of manufacturing the same Grant 9,363,900 - Takasawa , et al. June 7, 2 | 2016-06-07 |
| Method for measuring viscoelastic modulus of substance, and apparatus for measuring viscoelastic modulus of substance Grant 9,360,409 - Itoh , et al. June 7, 2 | 2016-06-07 |
| Light emitting element and method for manufacturing same Grant 9,349,918 - Kashima , et al. May 24, 2 | 2016-05-24 |
| Method for forming dielectric thin film Grant 9,347,128 - Kimura , et al. May 24, 2 | 2016-05-24 |
| Resistance change device, and method for producing same Grant 9,343,207 - Fukuda , et al. May 17, 2 | 2016-05-17 |
| Method of manufacturing semiconductor device Grant 9,337,092 - Hamaguchi , et al. May 10, 2 | 2016-05-10 |
| Method For Manufacturing Semiconductor Device App 20110315191A1 - | 2011-12-29 |
| Oxygen Detection Method, Air Leakage Determination Method, Gas Component Detection Device, And Vacuum Processing Apparatus App 20110315872A1 - | 2011-12-29 |
| Sensor-fitted Substrate And Method For Producing Sensor-fitted Substrate App 20110315985A1 - | 2011-12-29 |
| Resin Substrate App 20100330363A1 - | 2010-12-30 |
Company Registrations
| NCAGE Code | SJY53 | ULVAC, INC. |
| CAGE Code | SJY53 | ULVAC, INC. |
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