| Patent | Date |
|---|
Substrate Processing Apparatus With Flow Control Ring, And Substrate Processing Method
App 20220259731 - Tsuji; Naoto | 2022-08-18 |
Substrate processing device having connection plates, substrate processing method
Grant 11,339,476 - Tsuji , et al. May 24, 2 | 2022-05-24 |
Winding transmission body tension device
Grant 11,199,247 - Tsuji , et al. December 14, 2 | 2021-12-14 |
Substrate processing apparatus having a gas-mixing manifold
Grant 11,118,262 - Tsuji , et al. September 14, 2 | 2021-09-14 |
Gas Distribution Assembly And Method Of Using Same
App 20210254216 - Mori; Yukihiro ; et al. | 2021-08-19 |
Substrate Processing Device Having Connection Plates, Substrate Processing Method
App 20210102289 - Tsuji; Naoto ; et al. | 2021-04-08 |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
Grant 10,844,484 - Jdira , et al. November 24, 2 | 2020-11-24 |
Substrate Processing Apparatus Having Manifold
App 20200115797 - TSUJI; Naoto ; et al. | 2020-04-16 |
Substrate treatment apparatus
Grant 10,435,789 - Tsuji , et al. O | 2019-10-08 |
Winding Transmission Body Tension Device
App 20190277371 - TSUJI; Naoto ; et al. | 2019-09-12 |
Apparatus For Dispensing A Vapor Phase Reactant To A Reaction Chamber And Related Methods
App 20190093221 - Jdira; Lucian ; et al. | 2019-03-28 |
Substrate Treatment Apparatus
App 20180158709 - TSUJI; Naoto ; et al. | 2018-06-07 |
Semiconductor manufacturing apparatus
Grant 9,963,782 - Tsuji May 8, 2 | 2018-05-08 |
Film forming apparatus
Grant 9,885,112 - Tsuji , et al. February 6, 2 | 2018-02-06 |
Semiconductor Manufacturing Apparatus
App 20160237559 - TSUJI; Naoto | 2016-08-18 |
Anti-slip end-effector for transporting workpiece
Grant 9,370,863 - Tsuji , et al. June 21, 2 | 2016-06-21 |
Film Forming Apparatus
App 20160153088 - TSUJI; Naoto ; et al. | 2016-06-02 |
Top plate
Grant D753,269 - Yamagishi , et al. April 5, 2 | 2016-04-05 |
Seal ring
Grant D743,513 - Yamagishi , et al. November 17, 2 | 2015-11-17 |
Anti-slip End-effector For Transporting Workpiece
App 20150217456 - Tsuji; Naoto ; et al. | 2015-08-06 |
Shower plate
Grant D735,836 - Yamagishi , et al. August 4, 2 | 2015-08-04 |
Shower plate
Grant D733,843 - Yamagishi , et al. July 7, 2 | 2015-07-07 |
Top plate
Grant D733,261 - Yamagishi , et al. June 30, 2 | 2015-06-30 |
Top plate
Grant D732,644 - Yamagishi , et al. June 23, 2 | 2015-06-23 |
Shower plate
Grant D732,145 - Yamagishi , et al. June 16, 2 | 2015-06-16 |
Method for forming layer constituted by repeated stacked layers
Grant 9,018,093 - Tsuji , et al. April 28, 2 | 2015-04-28 |
Heater block
Grant D726,884 - Yamagishi , et al. April 14, 2 | 2015-04-14 |
Heater block
Grant D725,168 - Yamagishi , et al. March 24, 2 | 2015-03-24 |
Shower plate
Grant D724,701 - Yamagishi , et al. March 17, 2 | 2015-03-17 |
Shower plate
Grant D720,838 - Yamagishi , et al. January 6, 2 | 2015-01-06 |
Method for forming Si-containing film using two precursors by ALD
Grant 8,912,101 - Tsuji , et al. December 16, 2 | 2014-12-16 |
Method for Forming Layer Constituted by Repeated Stacked Layers
App 20140213065 - Tsuji; Naoto ; et al. | 2014-07-31 |
UV Irradiation Apparatus with Cleaning Mechanism and Method for Cleaning UV Irradiation Apparatus
App 20140116335 - Tsuji; Naoto ; et al. | 2014-05-01 |
UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and Method of Processing Semiconductor Substrate Using Same
App 20140099798 - Tsuji; Naoto | 2014-04-10 |
Method for Forming Si-Containing Film Using Two Precursors by ALD
App 20130244446 - Tsuji; Naoto ; et al. | 2013-09-19 |
Method for forming dielectric film using porogen gas
Grant 7,955,650 - Tsuji June 7, 2 | 2011-06-07 |
Method for forming dielectric SiOCH film having chemical stability
Grant 7,807,566 - Tsuji , et al. October 5, 2 | 2010-10-05 |
Shower plate having projections and plasma CVD apparatus using same
Grant 7,799,134 - Tsuji , et al. September 21, 2 | 2010-09-21 |
Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient
Grant 7,718,544 - Tsuji , et al. May 18, 2 | 2010-05-18 |
Method Of Forming Fluorine-containing Dielectric Film
App 20100003833 - Tsuji; Naoto ; et al. | 2010-01-07 |
Apparatus and method for forming thin film using surface-treated shower plate
Grant 7,641,761 - Tsuji , et al. January 5, 2 | 2010-01-05 |
METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY
App 20090148964 - Tsuji; Naoto ; et al. | 2009-06-11 |
Method For Forming Dielectric Film Using Porogen Gas
App 20080305258 - TSUJI; Naoto | 2008-12-11 |
Method For Increasing Mechanical Strength Of Dielectric Film By Using Sequential Combination Of Two Types Of Uv Irradiation
App 20080220619 - MATSUSHITA; Kiyohiro ; et al. | 2008-09-11 |
Plasma CVD apparatus for forming uniform film
Grant 7,418,921 - Tsuji , et al. September 2, 2 | 2008-09-02 |
Plasma CVD apparatus for forming uniform film
App 20070037390 - Tsuji; Naoto ; et al. | 2007-02-15 |
Method for depositing thin film by controlling effective distance between showerhead and susceptor
App 20070032048 - Tsuji; Naoto ; et al. | 2007-02-08 |
Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation
Grant 7,147,900 - Tsuji , et al. December 12, 2 | 2006-12-12 |
Interlayer insulation film used for multilayer interconnect of semiconductor integrated circuit and method of manufacturing the same
Grant 7,098,129 - Tsuji , et al. August 29, 2 | 2006-08-29 |
Method Of Forming Silicon-containing Insulation Film Having Low Dielectric Constant And Low Diffusion Coefficient
App 20060183341 - Tsuji; Naoto ; et al. | 2006-08-17 |
Method of forming fluorine-doped low-dielectric-constant insulating film
Grant 7,037,855 - Tsuji , et al. May 2, 2 | 2006-05-02 |
Gas-shield electron-beam gun for thin-film curing application
Grant 7,012,268 - Matsuki , et al. March 14, 2 | 2006-03-14 |
Method Of Forming Fluorine-doped Low-dielectric-constant Insulating Film
App 20060046519 - Tsuji; Naoto ; et al. | 2006-03-02 |
Method of cleaning CVD device and cleaning device therefor
Grant 6,935,351 - Shibata , et al. August 30, 2 | 2005-08-30 |
Shower plate having projections and plasma CVD apparatus using same
App 20050183666 - Tsuji, Naoto ; et al. | 2005-08-25 |
Apparatus and method for forming thin film using surface-treated shower plate
App 20050156063 - Tsuji, Naoto ; et al. | 2005-07-21 |
Method of forming interlayer insulation film
Grant 6,905,978 - Tsuji , et al. June 14, 2 | 2005-06-14 |
Method and apparatus for forming silicon-containing insulation film having low dielectric constant
App 20050034667 - Tsuji, Naoto ; et al. | 2005-02-17 |
Gas-shield electron-beam gun for thin-film curing application
App 20040232355 - Matsuki, Nobuo ; et al. | 2004-11-25 |
Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength
Grant 6,818,570 - Tsuji , et al. November 16, 2 | 2004-11-16 |
Method of forming low-dielectric constant film on semiconductor substrate by plasma reaction using high-RF power
Grant 6,740,602 - Hendriks , et al. May 25, 2 | 2004-05-25 |
Interlayer insulation film used for multilayer interconnect of semiconductor integrated circuit and method of manufacturing the same
App 20040048490 - Tsuji, Naoto ; et al. | 2004-03-11 |
Plasma film-forming apparatus and cleaning method for the same
App 20040007247 - Asari, Shin ; et al. | 2004-01-15 |
Plasma CVD apparatus comprising susceptor with ring
App 20030192478 - Tsuji, Naoto ; et al. | 2003-10-16 |
Method of forming interlayer insulation film
App 20030181069 - Tsuji, Naoto ; et al. | 2003-09-25 |
Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength
App 20030176030 - Tsuji, Naoto ; et al. | 2003-09-18 |
Method of cleaning cvd device and cleaning device therefor
App 20030079757 - Shibata, Koji ; et al. | 2003-05-01 |
Plasma film-forming apparatus and cleaning method for the same
App 20020124866 - Asari, Shin ; et al. | 2002-09-12 |
Method and apparatus for preparing a silicon oxide film
Grant 5,626,679 - Shimizu , et al. May 6, 1 | 1997-05-06 |
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