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Contact structure and formation thereof
Grant 11,444,028 - Lee , et al. September 13, 2 | 2022-09-13 |
Method for forming semiconductor structure
Grant 11,398,381 - Su , et al. July 26, 2 | 2022-07-26 |
Method for conditioning polishing pad
Grant 11,389,928 - Lee , et al. July 19, 2 | 2022-07-19 |
Integrated circuit isolation feature and method of forming the same
Grant 11,387,138 - Peng , et al. July 12, 2 | 2022-07-12 |
Chemical Mechanical Polishing Slurry Composition And Method Of Polishing Metal Layer
App 20220195246 - Liao; Chun-Hung ; et al. | 2022-06-23 |
Spacer Structure For Semiconductor Device
App 20220190137 - Wang; Chen-Han ; et al. | 2022-06-16 |
CMP slurry solution for hardened fluid material
Grant 11,312,882 - Lin , et al. April 26, 2 | 2022-04-26 |
Chemical mechanical polishing slurry composition and method of polishing metal layer
Grant 11,267,987 - Liao , et al. March 8, 2 | 2022-03-08 |
Spacer structure for semiconductor device
Grant 11,264,485 - Wang , et al. March 1, 2 | 2022-03-01 |
Method of forming isolation layer
Grant 11,227,788 - Tsai , et al. January 18, 2 | 2022-01-18 |
Capping Layer For Gate Electrodes
App 20210384322 - LIN; Chin-Hsiang ; et al. | 2021-12-09 |
System for chemical mechanical polishing of Ge-based materials and devices
Grant 11,193,043 - Hsu , et al. December 7, 2 | 2021-12-07 |
Dummy Fin Structures and Methods of Forming Same
App 20210375667 - Lin; Chin-Hsiang ; et al. | 2021-12-02 |
Capping layer for gate electrodes
Grant 11,164,956 - Lin , et al. November 2, 2 | 2021-11-02 |
Methods of cutting metal gates and structures formed thereof
Grant 11,152,267 - Perng , et al. October 19, 2 | 2021-10-19 |
Semiconductor Structure And Manufacturing Method Thereof
App 20210287904 - SU; Chia-Wei ; et al. | 2021-09-16 |
Integrated Circuit with a Fin and Gate Structure and Method Making the Same
App 20210288161 - Chiang; Kuo-Cheng ; et al. | 2021-09-16 |
Method for forming multi-layer mask
Grant 11,120,995 - Hsu , et al. September 14, 2 | 2021-09-14 |
Methods of Cutting Metal Gates and Structures Formed Thereof
App 20210280473 - Perng; Tsu-Hsiu ; et al. | 2021-09-09 |
Fin Isolation Structure For Finfet And Method Of Forming The Same
App 20210265222 - LEE; Chu-An ; et al. | 2021-08-26 |
Partial Barrier Free Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof
App 20210257302 - Tsai; Tsung-Ling ; et al. | 2021-08-19 |
Selective High-K Formation in Gate-Last Process
App 20210225654 - Okuno; Yasutoshi ; et al. | 2021-07-22 |
Dummy fin structures and methods of forming same
Grant 11,069,558 - Lin , et al. July 20, 2 | 2021-07-20 |
Semiconductor device with multiple threshold voltage and method of fabricating the same
Grant 11,056,486 - Wang , et al. July 6, 2 | 2021-07-06 |
Materials and Methods for Chemical Mechanical Polishing of Ruthenium-Containing Materials
App 20210171800 - Lee; An-Hsuan ; et al. | 2021-06-10 |
Method for manufacturing a FinFET device
Grant 11,031,391 - Lee , et al. June 8, 2 | 2021-06-08 |
Semiconductor structure and manufacturing method thereof
Grant 11,024,504 - Su , et al. June 1, 2 | 2021-06-01 |
Integrated circuit with a fin and gate structure and method making the same
Grant 11,018,246 - Chiang , et al. May 25, 2 | 2021-05-25 |
CMP-friendly coatings for planar recessing or removing of variable-height layers
Grant 11,011,385 - Liu , et al. May 18, 2 | 2021-05-18 |
Mechanism for manufacturing semiconductor device
Grant 11,004,691 - Wu , et al. May 11, 2 | 2021-05-11 |
Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof
Grant 11,004,794 - Tsai , et al. May 11, 2 | 2021-05-11 |
Chemical Mechanical Polishing Slurry Composition And Method Of Polishing Metal Layer
App 20210130650 - Liao; Chun-Hung ; et al. | 2021-05-06 |
Fin isolation structure for FinFET and method of forming the same
Grant 10,998,239 - Lee , et al. May 4, 2 | 2021-05-04 |
Spacer Structure For Semiconductor Device
App 20210126106 - WANG; Chen-Han ; et al. | 2021-04-29 |
Methods of Cutting Metal Gates and Structures Formed Thereof
App 20210118748 - Perng; Tsu-Hsiu ; et al. | 2021-04-22 |
Contact Plugs For Semiconductor Device And Method Of Forming Same
App 20210104431 - Khaderbad; Mrunal A. ; et al. | 2021-04-08 |
Slurry Compositions For Chemical Mechanical Planarization
App 20210098266 - Lee; An-Hsuan ; et al. | 2021-04-01 |
Semiconductor Structure And Method Of Manufacturing The Same
App 20210098283 - LEE; Shen-Nan ; et al. | 2021-04-01 |
Wafer polishing with separated chemical reaction and mechanical polishing
Grant 10,964,549 - Lee , et al. March 30, 2 | 2021-03-30 |
Selective high-K formation in gate-last process
Grant 10,964,542 - Okuno , et al. March 30, 2 | 2021-03-30 |
Semiconductor Structure with Staggered Selective Growth
App 20210090944 - Lin; Zhi-Chang ; et al. | 2021-03-25 |
Capping Layer For Gate Electrodes
App 20210057543 - LIN; Chin-Hsiang ; et al. | 2021-02-25 |
Method Of Forming A Vertical Device
App 20210050430 - CHEN; DE-FANG ; et al. | 2021-02-18 |
Materials and methods for chemical mechanical polishing of ruthenium-containing materials
Grant 10,920,105 - Lee , et al. February 16, 2 | 2021-02-16 |
CMP Slurry Solution for Hardened Fluid Material
App 20200407594 - Lin; Kuo-Yin ; et al. | 2020-12-31 |
Replacement contacts
Grant 10,879,117 - Yeo , et al. December 29, 2 | 2020-12-29 |
Method and structure for FinFET devices
Grant 10,868,180 - Lin , et al. December 15, 2 | 2020-12-15 |
Methods of cutting metal gates and structures formed thereof
Grant 10,861,752 - Perng , et al. December 8, 2 | 2020-12-08 |
Vertical device having a protrusion structure
Grant 10,854,728 - Chen , et al. December 1, 2 | 2020-12-01 |
Method For Forming Semiconductor Structure
App 20200373160 - SU; Chia-Wei ; et al. | 2020-11-26 |
Ruthenium-containing semiconductor structure and method of manufacturing the same
Grant 10,847,410 - Lee , et al. November 24, 2 | 2020-11-24 |
Method of forming contact plugs for semiconductor device
Grant 10,847,413 - Khaderbad , et al. November 24, 2 | 2020-11-24 |
Fin Isolation Structure For Finfet And Method Of Forming The Same
App 20200365588 - LEE; Chu-An ; et al. | 2020-11-19 |
Semiconductor structure with staggered selective growth
Grant 10,840,133 - Lin , et al. November 17, 2 | 2020-11-17 |
Semiconductor Structure And Manufacturing Method Thereof
App 20200357646 - SU; Chia-Wei ; et al. | 2020-11-12 |
Slurry
App 20200357653 - LIAO; CHUN-HUNG ; et al. | 2020-11-12 |
Method and Structure for FinFET Devices
App 20200350434 - Lin; Kuo-Yin ; et al. | 2020-11-05 |
Method Of Forming Isolation Layer
App 20200335388 - TSAI; Teng-Chun ; et al. | 2020-10-22 |
Post Cmp Cleaning Apparatus And Post Cmp Cleaning Methods
App 20200294821 - WU; Chen-Hao ; et al. | 2020-09-17 |
CMP slurry solution for hardened fluid material
Grant 10,774,241 - Lin , et al. Sept | 2020-09-15 |
Method for forming semiconductor structure
Grant 10,741,392 - Su , et al. A | 2020-08-11 |
Slurry and manufacturing semiconductor using the slurry
Grant 10,727,076 - Liao , et al. | 2020-07-28 |
Semiconductor structure and manufacturing method thereof
Grant 10,727,065 - Su , et al. | 2020-07-28 |
Method and structure for FinFET devices
Grant 10,714,615 - Lin , et al. | 2020-07-14 |
Fin isolation structure for FinFET and method of forming the same
Grant 10,714,395 - Lee , et al. | 2020-07-14 |
Method of forming isolation layer
Grant 10,707,114 - Tsai , et al. | 2020-07-07 |
Wafer Polishing With Separated Chemical Reaction And Mechanical Polishing
App 20200176264 - LEE; Shen-Nan ; et al. | 2020-06-04 |
Integrated Circuit with a Fin and Gate Structure and Method Making the Same
App 20200135890 - Chiang; Kuo-Cheng ; et al. | 2020-04-30 |
Slurry And Manufacturing Semiconductor Using The Slurry
App 20200135486 - LIAO; CHUN-HUNG ; et al. | 2020-04-30 |
Dummy Fin Structures And Methods Of Forming Same
App 20200118867 - Lin; Chin-Hsiang ; et al. | 2020-04-16 |
Mechanism For Manufacturing Semiconductor Device
App 20200118833 - WU; Chen-Hao ; et al. | 2020-04-16 |
Contact Structure And Formation Thereof
App 20200118935 - LEE; Hong-Mao ; et al. | 2020-04-16 |
Method Of Forming A Vertical Device
App 20200111887 - CHEN; DE-FANG ; et al. | 2020-04-09 |
Method For Forming Multi-layer Mask
App 20200105538 - HSU; Chung-Wei ; et al. | 2020-04-02 |
Semiconductor Structure with Staggered Selective Growth
App 20200105591 - Lin; Zhi-Chang ; et al. | 2020-04-02 |
Integrated Circuit Dielectric Material
App 20200098616 - Peng; Chih-Tang ; et al. | 2020-03-26 |
Fin Isolation Structure For Finfet And Method Of Forming The Same
App 20200091007 - LEE; Chu-An ; et al. | 2020-03-19 |
Semiconductor Structure And Method Of Manufacturing The Same
App 20200090983 - LEE; Shen-Nan ; et al. | 2020-03-19 |
Materials and Methods for Chemical Mechanical Polishing of Ruthenium-Containing Materials
App 20200032105 - Lee; An-Hsuan ; et al. | 2020-01-30 |
Fabrication of a Polishing Pad for Chemical Mechanical Polishing
App 20200030934 - Lee; An-Hsuan ; et al. | 2020-01-30 |
Methods of Cutting Metal Gates and Structures Formed Thereof
App 20200035566 - Perng; Tsu-Hsiu ; et al. | 2020-01-30 |
Selective High-K Formation in Gate-Last Process
App 20200013622 - Okuno; Yasutoshi ; et al. | 2020-01-09 |
Integrated circuit with a fin and gate structure and method making the same
Grant 10,529,833 - Ching , et al. J | 2020-01-07 |
Partial Barrier Free Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof
App 20200006230 - Tsai; Tsung-Ling ; et al. | 2020-01-02 |
Selective high-K formation in gate-last process
Grant 10,515,809 - Okuno , et al. Dec | 2019-12-24 |
Mechanism for manufacturing semiconductor device
Grant 10,510,555 - Wu , et al. Dec | 2019-12-17 |
Contact structure and formation thereof
Grant 10,510,664 - Lee , et al. Dec | 2019-12-17 |
Dummy fin structures and methods of forming same
Grant 10,510,580 - Lin , et al. Dec | 2019-12-17 |
Vertical device having a protrusion source
Grant 10,505,014 - Chen , et al. Dec | 2019-12-10 |
Method for forming multi-layer mask
Grant 10,497,574 - Hsu , et al. De | 2019-12-03 |
Methods of cutting metal gates and structures formed thereof
Grant 10,490,458 - Perng , et al. Nov | 2019-11-26 |
Method for manufacturing a FinFET device
Grant 10,461,080 - Lee , et al. Oc | 2019-10-29 |
Method of forming isolation layer
Grant 10,418,271 - Tsai , et al. Sept | 2019-09-17 |
Replacement Contacts
App 20190237364 - YEO; Yee-Chia ; et al. | 2019-08-01 |
Semiconductor Device With Multiple Threshold Voltage And Method Of Fabricating The Same
App 20190229118 - WANG; Li-Ting ; et al. | 2019-07-25 |
Semiconductor device and method of forming vertical structure
Grant 10,325,994 - Peng , et al. | 2019-06-18 |
Contact Plugs for Semiconductor Device and Method of Forming Same
App 20190164817 - Khaderbad; Mrunal A ; et al. | 2019-05-30 |
Method For Forming Semiconductor Structure
App 20190164758 - SU; Chia-Wei ; et al. | 2019-05-30 |
Method For Manufacturing A Finfet Device
App 20190164963 - LEE; Shen-Nan ; et al. | 2019-05-30 |
Method For Conditioning Polishing Pad
App 20190160628 - LEE; Shen-Nan ; et al. | 2019-05-30 |
Semiconductor Structure And Manufacturing Method Thereof
App 20190164762 - SU; Chia-Wei ; et al. | 2019-05-30 |
Selective High-K Formation in Gate-Last Process
App 20190148151 - Okuno; Yasutoshi ; et al. | 2019-05-16 |
Method and Structure for FinFET Devices
App 20190140097 - Lin; Kuo-Yin ; et al. | 2019-05-09 |
System and method for operating chemical mechanical polishing process
Grant 10,279,311 - Peng , et al. | 2019-05-07 |
Systems and methods for gap filling improvement
Grant 10,283,359 - Chen , et al. | 2019-05-07 |
CMP Polishing Head Design for Improving Removal Rate Uniformity
App 20190126429 - Hou; Te-Chien ; et al. | 2019-05-02 |
Semiconductor device with multiple threshold voltage and method of fabricating the same
Grant 10,276,562 - Wang , et al. | 2019-04-30 |
Method of manufacturing semiconductor device
Grant 10,269,579 - Lee , et al. | 2019-04-23 |
Semiconductor device including Fin-PET and manufacturing method thereof
Grant 10,269,935 - Huang , et al. | 2019-04-23 |
Multi-layer mask and method of forming same
Grant 10,269,567 - Tsai , et al. | 2019-04-23 |
Replacement contacts
Grant 10,256,143 - Yeo , et al. | 2019-04-09 |
Mechanism For Manufacturing Semiconductor Device
App 20190103283 - WU; Chen-Hao ; et al. | 2019-04-04 |
Methods of Cutting Metal Gates and Structures formed Thereof
App 20190103323 - Perng; Tsu-Hsiu ; et al. | 2019-04-04 |
Methods of Cutting Metal Gates and Structures Formed Thereof
App 20190103324 - Perng; Tsu-Hsiu ; et al. | 2019-04-04 |
Dummy Fin Structures And Methods Of Forming Same
App 20190103304 - Lin; Chin-Hsiang ; et al. | 2019-04-04 |
Method For Forming Multi-layer Mask
App 20190096686 - HSU; Chung-Wei ; et al. | 2019-03-28 |
Integrated Circuit With a Fin and Gate Structure and Method Making the Same
App 20190067446 - Ching; Kuo-Cheng ; et al. | 2019-02-28 |
CMP polishing head design for improving removal rate uniformity
Grant 10,160,091 - Hou , et al. Dec | 2018-12-25 |
Method and structure for FinFET devices
Grant 10,164,102 - Lin , et al. Dec | 2018-12-25 |
Integrating junction formation of transistors with contact formation
Grant 10,157,995 - Wang , et al. Dec | 2018-12-18 |
Method Of Forming Isolation Layer
App 20180350655 - TSAI; Teng-Chun ; et al. | 2018-12-06 |
Polisher, polishing tool, and polishing method
Grant 10,144,109 - Tsai , et al. De | 2018-12-04 |
Fabricating method of a semiconductor device with a high-K dielectric layer having a U-shape profile
Grant 10,141,193 - Chien , et al. Nov | 2018-11-27 |
System For Chemical Mechanical Polishing Of Ge-based Materials And Devices
App 20180291234 - HSU; Chia-Jung ; et al. | 2018-10-11 |
Semiconductor device including fin FET and manufacturing method thereof
Grant 10,068,992 - Lo , et al. September 4, 2 | 2018-09-04 |
Method and Structure for FinFET Devices
App 20180240909 - Lin; Kuo-Yin ; et al. | 2018-08-23 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20180240882 - PENG; Chih-Tang ; et al. | 2018-08-23 |
Methods for fabricating vertical-gate-all-around transistor structures
Grant 10,026,658 - Tsai , et al. July 17, 2 | 2018-07-17 |
Semiconductor device having strained fin structure and method of making the same
Grant 10,014,227 - Tsai , et al. July 3, 2 | 2018-07-03 |
Replacement Contacts
App 20180166379 - YEO; Yee-Chia ; et al. | 2018-06-14 |
Slurry composition for chemical mechanical polishing of GE-based materials and devices
Grant 9,994,736 - Hsu , et al. June 12, 2 | 2018-06-12 |
Systems and methods for performing chemical mechanical planarization
Grant 9,962,801 - Lee , et al. May 8, 2 | 2018-05-08 |
Method of making a silicide beneath a vertical structure
Grant 9,966,448 - Lin , et al. May 8, 2 | 2018-05-08 |
Semiconductor device and method of forming vertical structure
Grant 9,954,069 - Peng , et al. April 24, 2 | 2018-04-24 |
Method and structure for FinFET devices
Grant 9,954,105 - Lin , et al. April 24, 2 | 2018-04-24 |
Air purge cleaning for semiconductor polishing apparatus
Grant 9,937,536 - Lin , et al. April 10, 2 | 2018-04-10 |
Tunnel field-effect transistor
Grant 9,941,394 - Tsai , et al. April 10, 2 | 2018-04-10 |
Semiconductor device including Fin-FET and manufacturing method thereof
Grant 9,882,029 - Huang , et al. January 30, 2 | 2018-01-30 |
Method and Structure for FinFET Devices
App 20180019338 - Lin; Kuo-Yin ; et al. | 2018-01-18 |
Multi-Layer Mask and Method of Forming Same
App 20170372900 - Tsai; Teng-Chun ; et al. | 2017-12-28 |
Tunnel field-effect transistor
Grant 9,853,102 - Tsai , et al. December 26, 2 | 2017-12-26 |
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
Grant 9,852,899 - Lee , et al. December 26, 2 | 2017-12-26 |
Semiconductor Device Including Fin-fet And Manufacturing Method Thereof
App 20170365707 - HUANG; Gin-Chen ; et al. | 2017-12-21 |
Cmp-friendly Coatings For Planar Recessing Or Removing Of Variable-height Layers
App 20170352548 - Liu; Wen-Kuei ; et al. | 2017-12-07 |
Contact Structure And Formation Thereof
App 20170345765 - Lee; Hong-Mao ; et al. | 2017-11-30 |
FinFET structures and methods of forming the same
Grant 9,812,358 - Huang , et al. November 7, 2 | 2017-11-07 |
Vertical structure having an etch stop over portion of the source
Grant 9,805,968 - Lin , et al. October 31, 2 | 2017-10-31 |
Semiconductor device including Fin- FET and manufacturing method thereof
Grant 9,780,214 - Huang , et al. October 3, 2 | 2017-10-03 |
Method and structure for FinFET device
Grant 9,768,303 - Lin , et al. September 19, 2 | 2017-09-19 |
Multi-layer mask and method of forming same
Grant 9,768,024 - Tsai , et al. September 19, 2 | 2017-09-19 |
CMP-friendly coatings for planar recessing or removing of variable-height layers
Grant 9,748,109 - Liu , et al. August 29, 2 | 2017-08-29 |
Semiconductor Device Including Fin Fet And Manufacturing Method Thereof
App 20170243957 - LO; Hung ; et al. | 2017-08-24 |
Contact structure and formation thereof
Grant 9,735,107 - Lee , et al. August 15, 2 | 2017-08-15 |
Systems and Methods for Gap Filling Improvement
App 20170221710 - Chen; Chi-Yuan ; et al. | 2017-08-03 |
Method and Structure for FinFET Device
App 20170213912 - Lin; Kuo-Yin ; et al. | 2017-07-27 |
Method Of Forming A Vertical Device
App 20170200804 - CHEN; DE-FANG ; et al. | 2017-07-13 |
Polisher, Polishing Tool, And Polishing Method
App 20170190017 - TSAI; Teng-Chun ; et al. | 2017-07-06 |
Semiconductor device including Fin FET and manufacturing method thereof
Grant 9,680,017 - Lo , et al. June 13, 2 | 2017-06-13 |
CMP Slurry Solution for Hardened Fluid Material
App 20170158914 - Lin; Kuo-Yin ; et al. | 2017-06-08 |
Vertical Structure and Method of Forming Semiconductor Device
App 20170154807 - Lin; Cheng-Tung ; et al. | 2017-06-01 |
CMP Polishing Head Design for Improving Removal Rate Uniformity
App 20170136602 - Hou; Te-Chien ; et al. | 2017-05-18 |
Wafer Back-side Polishing System And Method For Integrated Circuit Device Manufacturing Processes
App 20170125237 - Lee; Shen-Nan ; et al. | 2017-05-04 |
Systems and methods for gap filling improvement
Grant 9,624,576 - Chen , et al. April 18, 2 | 2017-04-18 |
Slurry Composition For Chemical Mechanical Polishing Of Ge-based Materials And Devices
App 20170098560 - HSU; Chia-Jung ; et al. | 2017-04-06 |
Method of forming a vertical device
Grant 9,614,054 - Chen , et al. April 4, 2 | 2017-04-04 |
Semiconductor Device Including Fin Fet And Manufacturing Method Thereof
App 20170077286 - LO; Hung ; et al. | 2017-03-16 |
System and method for CMP station cleanliness
Grant 9,592,585 - Lin , et al. March 14, 2 | 2017-03-14 |
Vertical structure and method of forming semiconductor device
Grant 9,577,093 - Lin , et al. February 21, 2 | 2017-02-21 |
CMP slurry solution for hardened fluid material
Grant 9,567,493 - Lin , et al. February 14, 2 | 2017-02-14 |
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
Grant 9,559,021 - Lee , et al. January 31, 2 | 2017-01-31 |
Slurry composition for chemical mechanical polishing of Ge-based materials and devices
Grant 9,530,655 - Hsu , et al. December 27, 2 | 2016-12-27 |
Semiconductor device having a low divot of alignment between a substrate and an isolation thereof and method of forming the same
Grant 9,520,296 - Chen , et al. December 13, 2 | 2016-12-13 |
Methods of manufacturing a semiconductor device
Grant 9,508,716 - Lin , et al. November 29, 2 | 2016-11-29 |
Vertical gate all around (VGAA) transistors and methods of forming the same
Grant 9,502,265 - Jiang , et al. November 22, 2 | 2016-11-22 |
Method for manufacturing CMOS transistor
Grant 9,502,305 - Chen , et al. November 22, 2 | 2016-11-22 |
Semiconductor Device Including Fin-fet And Manufacturing Method Thereof
App 20160322477 - HUANG; Gin-Chen ; et al. | 2016-11-03 |
Vertical-gate-all-around devices and method of fabrication thereof
Grant 9,478,631 - Lin , et al. October 25, 2 | 2016-10-25 |
BARC-assisted process for planar recessing or removing of variable-height layers
Grant 9,478,431 - Liu , et al. October 25, 2 | 2016-10-25 |
Method of forming shallow trench isolation and semiconductor device
Grant 9,460,956 - Chen , et al. October 4, 2 | 2016-10-04 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20160211370 - PENG; CHIH-TANG ; et al. | 2016-07-21 |
Contact Structure And Formation Thereof
App 20160190068 - Lee; Hong-Mao ; et al. | 2016-06-30 |
Wafer Back-side Polishing System And Method For Integrated Circuit Device Manufacturing Processes
App 20160190023 - Lee; Shen-Nan ; et al. | 2016-06-30 |
Semiconductor Device Including Fin- Fet And Manufacturing Method Thereof
App 20160181414 - HUANG; Gin-Chen ; et al. | 2016-06-23 |
Cmp-friendly Coatings For Planar Recessing Or Removing Of Variable-height Layers
App 20160172209 - Liu; Wen-Kuei ; et al. | 2016-06-16 |
Method Of Forming A Vertical Device
App 20160111523 - CHEN; DE-FANG ; et al. | 2016-04-21 |
Semiconductor device and method of forming vertical structure
Grant 9,318,447 - Peng , et al. April 19, 2 | 2016-04-19 |
Barc-assisted Process For Planar Recessing Or Removing Of Variable-height Layers
App 20160099157 - Liu; Wen-Kuei ; et al. | 2016-04-07 |
Semiconductor Device And Fabrication Method Thereof
App 20160079067 - Chien; Chin-Cheng ; et al. | 2016-03-17 |
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
Grant 9,287,127 - Lee , et al. March 15, 2 | 2016-03-15 |
Contact structure and formation thereof
Grant 9,287,170 - Lee , et al. March 15, 2 | 2016-03-15 |
Slurry Composition For Chemical Mechanical Polishing Of Ge-based Materials And Devices
App 20160071737 - Hsu; Chia-Jung ; et al. | 2016-03-10 |
CMP-friendly coatings for planar recessing or removing of variable-height layers
Grant 9,281,192 - Liu , et al. March 8, 2 | 2016-03-08 |
Vertical Structure And Method Of Forming Semiconductor Device
App 20160027917 - LIN; CHENG-TUNG ; et al. | 2016-01-28 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20160020180 - PENG; CHIH-TANG ; et al. | 2016-01-21 |
Barc-assisted process for planar recessing or removing of variable-height layers
Grant 9,236,446 - Liu , et al. January 12, 2 | 2016-01-12 |
Method of forming a vertical device
Grant 9,224,833 - Chen , et al. December 29, 2 | 2015-12-29 |
Semiconductor Device And Method Of Forming Vertical Structure
App 20150364333 - CHEN; DE-FANG ; et al. | 2015-12-17 |
Method Of Forming Isolation Layer
App 20150364358 - TSAI; TENG-CHUN ; et al. | 2015-12-17 |
Method Of Forming Shallow Trench Isolation And Semiconductor Device
App 20150364360 - CHEN; DE-FANG ; et al. | 2015-12-17 |
Systems And Methods For Fabricating Vertical-gate-all-around Devices
App 20150357432 - LIN; CHENG-TUNG ; et al. | 2015-12-10 |
Semiconductor Device Having Strained Fin Structure And Method Of Making The Same
App 20150348971 - Tsai; Teng-Chun ; et al. | 2015-12-03 |
Vertical Structure And Method Of Forming The Same
App 20150333152 - LIN; CHENG-TUNG ; et al. | 2015-11-19 |
Semiconductor device having strained fin structure and method of making the same
Grant 9,184,100 - Tsai , et al. November 10, 2 | 2015-11-10 |
Semiconductor structure with different fins of FinFETs
Grant 9,184,292 - Lin , et al. November 10, 2 | 2015-11-10 |
Tunnel Field-effect Transistor And Method For Fabrictaing The Same
App 20150318214 - TSAI; Teng-Chun ; et al. | 2015-11-05 |
Tunnel Field-effect Transistor And Method For Fabricating The Same
App 20150318213 - TSAI; Teng-Chun ; et al. | 2015-11-05 |
Cmp Slurry Solution For Hardened Fluid Material
App 20150307747 - Lin; Kuo-Yin ; et al. | 2015-10-29 |
Vertical structure and method of forming semiconductor device
Grant 9,166,001 - Lin , et al. October 20, 2 | 2015-10-20 |
Systems And Methods For Fabricating Vertical-gate-all-around Transistor Structures
App 20150295040 - TSAI; TENG-CHUN ; et al. | 2015-10-15 |
Semiconductor devices comprising a fin
Grant 9,153,657 - Chen , et al. October 6, 2 | 2015-10-06 |
Semiconductor Processing Methods
App 20150279686 - Kuo; Cheng-Yu ; et al. | 2015-10-01 |
Cmp-friendly Coatings For Planar Recessing Or Removing Of Variable-height Layers
App 20150262812 - Liu; Wen-Kuei ; et al. | 2015-09-17 |
Barc-assisted Process For Planar Recessing Or Removing Of Variable-height Layers
App 20150263132 - Liu; Wen-Kuei ; et al. | 2015-09-17 |
Contacts For Transistors
App 20150255575 - Wang; Li-Ting ; et al. | 2015-09-10 |
Wafer Back-side Polishing System And Method For Integrated Circuit Device Manufacturing Processes
App 20150235858 - Lee; Shen-Nan ; et al. | 2015-08-20 |
Vertical Device And Method Of Forming The Same
App 20150228759 - CHEN; DE-FANG ; et al. | 2015-08-13 |
Vertical Structure And Method Of Forming Semiconductor Device
App 20150228718 - LIN; CHENG-TUNG ; et al. | 2015-08-13 |
Semiconductor Device With Multiple Threshold Voltage And Method Of Fabricating The Same
App 20150194423 - WANG; LI-TING ; et al. | 2015-07-09 |
Systems And Methods For Performing Chemical Mechanical Planarization
App 20150194318 - LEE; SHEN-NAN ; et al. | 2015-07-09 |
Method and apparatus for forming a CMOS device
Grant 9,064,959 - Wang , et al. June 23, 2 | 2015-06-23 |
Systems And Methods For Gap Filling Improvement
App 20150170964 - CHEN; CHI-YUAN ; et al. | 2015-06-18 |
Methods for wet clean of oxide layers over epitaxial layers
Grant 9,048,087 - Wu , et al. June 2, 2 | 2015-06-02 |
Contact Structure And Formation Thereof
App 20150147880 - Lee; Hong-Mao ; et al. | 2015-05-28 |
Method for removing oxide
Grant 8,969,209 - Chen , et al. March 3, 2 | 2015-03-03 |
Integrating Junction Formation of Transistors with Contact Formation
App 20150044842 - Wang; Li-Ting ; et al. | 2015-02-12 |
Semiconductor Devices Comprising A Fin
App 20150028389 - Chen; Chi-Yuan ; et al. | 2015-01-29 |
Method for fabricating semiconductor device
Grant 8,940,600 - Hsu , et al. January 27, 2 | 2015-01-27 |
Systems and Methods for Reducing Contact Resistivity of Semiconductor Devices
App 20150021757 - LIN; CHENG-TUNG ; et al. | 2015-01-22 |
Systems and methods for reducing contact resistivity of semiconductor devices
Grant 8,927,418 - Lin , et al. January 6, 2 | 2015-01-06 |
Semiconductor devices and methods of manufacture thereof
Grant 8,889,497 - Chen , et al. November 18, 2 | 2014-11-18 |
Semiconductor Structure With Different Fins Of Finfets
App 20140332824 - Lin; Chin-Fu ; et al. | 2014-11-13 |
Method of removing oxides
Grant 8,883,650 - Lai , et al. November 11, 2 | 2014-11-11 |
Chemical mechanical polish in the growth of semiconductor regions
Grant 8,853,083 - Lin , et al. October 7, 2 | 2014-10-07 |
Fin field-effect transistor structure
Grant 8,847,325 - Tsai , et al. September 30, 2 | 2014-09-30 |
Method For Fabricating Semiconductor Device
App 20140273371 - Hsu; Chun-Wei ; et al. | 2014-09-18 |
Methods for Wet Clean of Oxide Layers over Epitaxial Layers
App 20140273412 - Wu; Li-Lan ; et al. | 2014-09-18 |
Semiconductor Devices and Methods of Manufacture Thereof
App 20140273366 - Lin; Cheng-Tung ; et al. | 2014-09-18 |
Method and Apparatus for Forming a CMOS Device
App 20140264362 - Wang; Li-Ting ; et al. | 2014-09-18 |
Method for manufacturing through-silicon via
Grant 8,828,745 - Tsao , et al. September 9, 2 | 2014-09-09 |
Through-silicon via forming method
Grant 8,822,336 - Tsai , et al. September 2, 2 | 2014-09-02 |
Method for fabricating FinFETs and semiconductor structure fabricated using the method
Grant 8,822,284 - Lin , et al. September 2, 2 | 2014-09-02 |
Method of manufacturing semiconductor device having metal gates
Grant 8,802,524 - Liao , et al. August 12, 2 | 2014-08-12 |
Chemical Mechanical Polish in the Growth of Semiconductor Regions
App 20140206164 - Lin; Kuo-Yin ; et al. | 2014-07-24 |
Non-planar semiconductor structure
Grant 8,779,513 - Tsai , et al. July 15, 2 | 2014-07-15 |
Semiconductor device
Grant 8,779,526 - Hsu , et al. July 15, 2 | 2014-07-15 |
System and Method for CMP Station Cleanliness
App 20140182633 - Lin; Kuo-Yin ; et al. | 2014-07-03 |
Semiconductor Devices and Methods of Manufacture Thereof
App 20140183633 - Chen; Chi-Yuan ; et al. | 2014-07-03 |
Planarization method applied in process of manufacturing semiconductor component
Grant 8,759,219 - Hsieh , et al. June 24, 2 | 2014-06-24 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof
App 20140106558 - Hsu; Chun-Wei ; et al. | 2014-04-17 |
Strained-silicon transistor and method of making the same
Grant 8,692,332 - Chen , et al. April 8, 2 | 2014-04-08 |
Fin field-effect transistor structure and manufacturing process thereof
Grant 8,664,055 - Tsai , et al. March 4, 2 | 2014-03-04 |
System And Method For Operating Chemical Mechanical Polishing Process
App 20140053980 - Peng; Chih-I ; et al. | 2014-02-27 |
Method of forming semiconductor device
Grant 8,647,941 - Chien , et al. February 11, 2 | 2014-02-11 |
Semiconductor process
Grant 8,647,986 - Huang , et al. February 11, 2 | 2014-02-11 |
Method For Manufacturing Cmos Transistor
App 20140038374 - Chen; Yi-Wei ; et al. | 2014-02-06 |
Semiconductor device having metal gate and manufacturing method thereof
Grant 8,643,069 - Hsu , et al. February 4, 2 | 2014-02-04 |
Cleaning method of semiconductor manufacturing process
Grant 8,641,828 - Chen , et al. February 4, 2 | 2014-02-04 |
Method for clearing native oxide
Grant 8,642,477 - Chen , et al. February 4, 2 | 2014-02-04 |
Air Purge Cleaning For Semiconductor Polishing Apparatus
App 20140014136 - Lin; Kuo-Yin ; et al. | 2014-01-16 |
Fabrication method and structure of through silicon via
Grant 8,609,529 - Lin , et al. December 17, 2 | 2013-12-17 |
Method For Removing Oxide
App 20130316540 - Chen; Yen-Chu ; et al. | 2013-11-28 |
Method of manufacturing semiconductor device having metal gate
Grant 8,574,990 - Liao , et al. November 5, 2 | 2013-11-05 |
Method for manufacturing multi-gate transistor device
Grant 8,551,829 - Chien , et al. October 8, 2 | 2013-10-08 |
Method for clearing native oxide
Grant 8,536,060 - Chen , et al. September 17, 2 | 2013-09-17 |
Non-planar Semiconductor Structure
App 20130228836 - Tsai; Shih-Hung ; et al. | 2013-09-05 |
Poly opening polish process
Grant 8,513,128 - Hsu , et al. August 20, 2 | 2013-08-20 |
Method For Fabricating Finfets And Semiconductor Structure Fabricated Using The Method
App 20130207122 - Lin; Chin-Fu ; et al. | 2013-08-15 |
Fabrication method and structure of through silicon via
App 20130193585 - Lin; Chin-Fu ; et al. | 2013-08-01 |
Semiconductor process
Grant 8,497,198 - Chien , et al. July 30, 2 | 2013-07-30 |
Non-planar semiconductor structure and fabrication method thereof
Grant 8,441,072 - Tsai , et al. May 14, 2 | 2013-05-14 |
Semiconductor Device
App 20130105912 - Hsu; Chun-Wei ; et al. | 2013-05-02 |
Fin Field-effect Transistor Structure And Manufacturing Process Thereof
App 20130089957 - TSAI; Teng-Chun ; et al. | 2013-04-11 |
Fin Field-effect Transistor Structure
App 20130087810 - TSAI; Teng-Chun ; et al. | 2013-04-11 |
Semiconductor Process
App 20130078778 - Chien; Chin-Cheng ; et al. | 2013-03-28 |
Semiconductor Process
App 20130078780 - Lin; Chin-Fu ; et al. | 2013-03-28 |
Non-planar Semiconductor Structure And Fabrication Method Thereof
App 20130056827 - Tsai; Shih-Hung ; et al. | 2013-03-07 |
Semiconductor Process
App 20130052825 - Huang; Po-Cheng ; et al. | 2013-02-28 |
Method Of Forming Semiconductor Device
App 20130045579 - Chien; Chin-Cheng ; et al. | 2013-02-21 |
Semiconductor Device And Method Of Making The Same
App 20130037886 - Tsai; Teng-Chun ; et al. | 2013-02-14 |
Fin field-effect transistor structure and manufacturing process thereof
Grant 8,361,854 - Tsai , et al. January 29, 2 | 2013-01-29 |
Cleaning Method Of Semiconductor Manufacturing Process
App 20130014779 - CHEN; Yi-Wei ; et al. | 2013-01-17 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof
App 20130015524 - Hsu; Chun-Wei ; et al. | 2013-01-17 |
Method For Manufacturing Through-silicon Via
App 20130011938 - TSAO; Wei-Che ; et al. | 2013-01-10 |
Fabricating Method Of Mos Transistor, Fin Field-effect Transistor And Fabrication Method Thereof
App 20130001707 - Lin; Chien-Liang ; et al. | 2013-01-03 |
Poly Opening Polish Process
App 20120322265 - HSU; Chun-Wei ; et al. | 2012-12-20 |
Through-silicon Via Forming Method
App 20120322260 - Tsai; Teng-Chun ; et al. | 2012-12-20 |
Semiconductor Device And Fabrication Method Thereof
App 20120319198 - Chien; Chin-Cheng ; et al. | 2012-12-20 |
Manufacturing method of metal gate structure
Grant 8,324,118 - Liu , et al. December 4, 2 | 2012-12-04 |
Chemical Mechanical Polishing Process
App 20120264302 - Hsu; Chun-Wei ; et al. | 2012-10-18 |
Metal Gate Structure And Manufacturing Method Thereof
App 20120248507 - Liu; Chih-Chien ; et al. | 2012-10-04 |
Method of Manufacturing Semiconductor Device Having Metal Gates
App 20120244669 - Liao; Po-Jui ; et al. | 2012-09-27 |
Fin Field-effect Transistor Structure And Manufacturing Process Thereof
App 20120241863 - TSAI; Teng-Chun ; et al. | 2012-09-27 |
Method For Clearing Native Oxide
App 20120220134 - Chen; Yen-Chu ; et al. | 2012-08-30 |
Method of Manufacturing Semiconductor Device Having Metal Gate
App 20120220113 - Liao; Po-Jui ; et al. | 2012-08-30 |
Method For Fabricating Fin Field Effect Transistor
App 20120196410 - TSAI; Teng-Chun ; et al. | 2012-08-02 |
Planarization Method Applied In Process Of Manufacturing Semiconductor Component
App 20120187563 - HSIEH; Ya-Hsueh ; et al. | 2012-07-26 |
Method For Manufacturing Multi-gate Transistor Device
App 20120115284 - Chien; Chin-Cheng ; et al. | 2012-05-10 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof
App 20120098043 - Hsieh; Ya-Hsueh ; et al. | 2012-04-26 |
Cleaning Method for Wafer
App 20120048296 - Lin; Wen-Chin ; et al. | 2012-03-01 |
METHOD FOR CLEANING SURFACE CONTAINING Cu
App 20110189855 - Lin; Jen-Chieh ; et al. | 2011-08-04 |
Strained-silicon Transistor And Method Of Making The Same
App 20110169095 - Chen; Jei-Ming ; et al. | 2011-07-14 |
Method For Fabricating Mos Transistor
App 20110065245 - Chen; Jei-Ming ; et al. | 2011-03-17 |
Method For Forming Superhigh Stress Layer
App 20100304042 - Liao; Hsiu-Lien ; et al. | 2010-12-02 |
Method for fabricating MOS transistors
Grant 7,803,702 - Lai , et al. September 28, 2 | 2010-09-28 |
Method for fabricating ultra-high tensile-stressed film and strained-silicon transistors thereof
Grant 7,662,730 - Chen , et al. February 16, 2 | 2010-02-16 |
Method For Fabricating Mos Transistors
App 20100035401 - Lai; Kuo-Chih ; et al. | 2010-02-11 |
Method for fabricating ultra-high tensile-stressed film and strained-silicon transistors thereof
Grant 7,655,987 - Chen , et al. February 2, 2 | 2010-02-02 |
Chemical vapor deposition method preventing particles forming in chamber
Grant 7,651,960 - Chen , et al. January 26, 2 | 2010-01-26 |
Method of forming contact
Grant 7,645,712 - Chen , et al. January 12, 2 | 2010-01-12 |
Cmos Transistor And The Method For Manufacturing The Same
App 20100001317 - Chen; Yi-Wei ; et al. | 2010-01-07 |
Method of forming metal-oxide-semiconductor transistors
Grant 7,642,166 - Lee , et al. January 5, 2 | 2010-01-05 |
Method For Clearing Native Oxide
App 20090298294 - Chen; Yen-Chu ; et al. | 2009-12-03 |
Method For Fabricating High Compressive Stress Film And Strained-silicon Transistors
App 20090274852 - Chen; Neng-Kuo ; et al. | 2009-11-05 |
Method for forming a gate and etching a conductive layer
Grant 7,588,883 - Chen , et al. September 15, 2 | 2009-09-15 |
Method of removing oxides
App 20090191714 - Lai; Kuo-Chih ; et al. | 2009-07-30 |
Method of forming contact
Grant 7,566,668 - Chen , et al. July 28, 2 | 2009-07-28 |
Chemical mechanical polishing process for forming shallow trench isolation structure
Grant 7,544,305 - Hsu , et al. June 9, 2 | 2009-06-09 |
Method of fabricating silicon nitride layer and method of fabricating semiconductor device
Grant 7,544,603 - Chen , et al. June 9, 2 | 2009-06-09 |
STI of a semiconductor device and fabrication method thereof
Grant 7,541,298 - Hsu , et al. June 2, 2 | 2009-06-02 |
Method Of Forming Contact
App 20090104773 - Chen; Neng-Kuo ; et al. | 2009-04-23 |
Method Of Forming Metal-oxide-semiconductor Transistors
App 20090068805 - Lee; Kun-Hsien ; et al. | 2009-03-12 |
Metal-oxide-semiconductor transistor and method of forming the same
Grant 7,494,878 - Lee , et al. February 24, 2 | 2009-02-24 |
Method of manufacturing metal oxide semiconductor
Grant 7,485,515 - Chen , et al. February 3, 2 | 2009-02-03 |
Method And Apparatus For Fabricating High Tensile Stress Film
App 20080305600 - Liao; Hsiu-Lien ; et al. | 2008-12-11 |
Method For Manufacturing Shallow Trench Isolation Structure
App 20080305610 - Chen; Yen-Chu ; et al. | 2008-12-11 |
Method Of Removing Insulating Layer On Substrate
App 20080261402 - Lu; Chan ; et al. | 2008-10-23 |
Semiconductor Device And Method Of Fabricating The Same
App 20080237658 - Liao; Hsiu-Lien ; et al. | 2008-10-02 |
Method For Fabricating High Compressive Stress Film And Strained-silicon Transistors
App 20080237748 - Chen; Neng-Kuo ; et al. | 2008-10-02 |
Semiconductor Device And Method Of Fabricating The Same
App 20080237662 - LIAO; HSIU-LIEN ; et al. | 2008-10-02 |
Method Of Manufacturing A Mos Transistor Device
App 20080242020 - Chen; Jei-Ming ; et al. | 2008-10-02 |
Method Of Forming Strained Cmos Transistor
App 20080206943 - Chen; Jei-Ming ; et al. | 2008-08-28 |
Semiconductor Device, Method For Fabricating Thereof And Method For Increasing Film Stress
App 20080188091 - HSU; SHAO-TA ; et al. | 2008-08-07 |
Smiconductor Device, Method For Fabricating Thereof And Method For Increasing Film Stress
App 20080185655 - Hsu; Shao-Ta ; et al. | 2008-08-07 |
Sti Of A Semiconductor Device And Fabrication Method Thereof
App 20080166888 - Hsu; Shao-Ta ; et al. | 2008-07-10 |
Method For Increasing Film Stress And Method For Forming High Stress Layer
App 20080160786 - Chen; Neng-Kuo ; et al. | 2008-07-03 |
Method Of Forming Contact
App 20080153290 - Chen; Neng-Kuo ; et al. | 2008-06-26 |
Method For Fabricating Ultra-high Tensile-stressed Film And Strained-silicon Transistors Thereof
App 20080142902 - Chen; Neng-Kuo ; et al. | 2008-06-19 |
Method of forming a contact
Grant 7,332,447 - Chen , et al. February 19, 2 | 2008-02-19 |
Chemical mechanical polishing process for forming shallow trench isolation structure
Grant 7,294,575 - Hsu , et al. November 13, 2 | 2007-11-13 |
Method of forming contact
Grant 7,294,572 - Yang , et al. November 13, 2 | 2007-11-13 |
Seamless trench fill method utilizing sub-atmospheric pressure chemical vapor deposition technique
Grant 7,238,586 - Hsu , et al. July 3, 2 | 2007-07-03 |
Method of removing contaminants from a silicon wafer after chemical-mechanical polishing operation
Grant 7,232,752 - Hu , et al. June 19, 2 | 2007-06-19 |
Polish method for semiconductor device planarization
Grant 7,172,970 - Lin , et al. February 6, 2 | 2007-02-06 |
Chemical mechanical polishing process
Grant 7,025,661 - Hsu , et al. April 11, 2 | 2006-04-11 |
Silicon oxide gap-filling process
Grant 6,989,337 - Chu , et al. January 24, 2 | 2006-01-24 |
Method for forming shallow trench isolation structure
Grant 6,913,978 - Chen , et al. July 5, 2 | 2005-07-05 |
Method of forming a dual damascene via by using a metal hard mask layer
Grant 6,831,013 - Tsai , et al. December 14, 2 | 2004-12-14 |
Control system for in-situ feeding back a polish profile
Grant 6,706,140 - Hsu , et al. March 16, 2 | 2004-03-16 |
Post-CMP removal of surface contaminants from silicon wafer
Grant 6,696,361 - Hu , et al. February 24, 2 | 2004-02-24 |
Method for fabricating a high-density capacitor
Grant 6,638,830 - Tsai , et al. October 28, 2 | 2003-10-28 |
Chemical mechanical polishing method for copper
Grant 6,616,510 - Hsu , et al. September 9, 2 | 2003-09-09 |
Method of forming embedded capacitor structure applied to logic integrated circuit
Grant 6,593,185 - Tsai , et al. July 15, 2 | 2003-07-15 |
Polishing pad for a chemical mechanical polishing process
Grant 6,544,373 - Chen , et al. April 8, 2 | 2003-04-08 |
Method for forming dual-damascene interconnect structure
Grant 6,524,962 - Chen , et al. February 25, 2 | 2003-02-25 |
Method for forming bridge free silicide by reverse spacer
Grant 6,316,323 - Fang , et al. November 13, 2 | 2001-11-13 |
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