Toyoda; Kazuyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Toyoda; Kazuyuki.The latest application filed is for "substrate processing apparatus".

Company Profile

7.41.71

Toyoda; Kazuyuki - Toyama JP
TOYODA; Kazuyuki - Toyama-shi JP
Toyoda; Kazuyuki - Nakano-ku JP
Toyoda; Kazuyuki - Tokyo JP
TOYODA; Kazuyuki - Toyama-city JP
TOYODA; Kazuyuki - Tayama-shi JP
TOYODA; Kazuyuki - Toyaina-shi JP
Toyoda; Kazuyuki - Nakano-ku Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus Grant 11,104,995 - Yahata , et al. August 31, 2	2021-08-31
Substrate processing apparatus, method of manufacturing semiconductor device, and non- transitory computer-readable recording medium Grant 10,943,806 - Toyoda , et al. March 9, 2	2021-03-09
Substrate processing apparatus Grant 10,818,476 - Toyoda , et al. October 27, 2	2020-10-27
Substrate Processing Apparatus App 20190393057 - SHIMAMOTO; Satoshi ; et al.	2019-12-26
Substrate Processing Apparatus App 20190221468 - OHASHI; Naofumi ; et al.	2019-07-18
Substrate Processing Apparatus App 20190218664 - YAMAMOTO; Tetsuo ; et al.	2019-07-18
Method of processing substrate Grant 10,224,227 - Ohashi , et al.	2019-03-05
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20190006218 - TOYODA; Kazuyuki ; et al.	2019-01-03
Method of manufacturing semiconductor device Grant 10,115,583 - Shimamoto , et al. October 30, 2	2018-10-30
Method Of Processing Substrate App 20180286727 - OHASHI; Naofumi ; et al.	2018-10-04
Substrate Processing Apparatus App 20180277405 - SHIMAMOTO; Satoshi ; et al.	2018-09-27
Method Of Manufacturing Semiconductor Device App 20180233348 - SHIMAMOTO; Satoshi ; et al.	2018-08-16
Substrate Processing Apparatus App 20180226228 - TOYODA; Kazuyuki ; et al.	2018-08-09
Method of manufacturing semiconductor device Grant 10,032,630 - Yamamoto , et al. July 24, 2	2018-07-24
Method of manufacturing semiconductor device Grant 9,991,179 - Ohashi , et al. June 5, 2	2018-06-05
Method Of Manufacturing Semiconductor Device App 20170358506 - OHASHI; Naofumi ; et al.	2017-12-14
Substrate processing apparatus Grant 9,818,630 - Takahashi , et al. November 14, 2	2017-11-14
Substrate Processing Apparatus App 20170283945 - YAHATA; Takashi ; et al.	2017-10-05
Substrate Processing Apparatus App 20170283949 - YAHATA; Takashi ; et al.	2017-10-05
Method of manufacturing semiconductor device Grant 9,735,068 - Ohashi , et al. August 15, 2	2017-08-15
Substrate Processing Apparatus App 20170221738 - TAKAHASHI; Akira ; et al.	2017-08-03
Substrate Processing Apparatus App 20170159181 - TOYODA; Kazuyuki ; et al.	2017-06-08
Method of manufacturing semiconductor device Grant 9,666,494 - Suda , et al. May 30, 2	2017-05-30
Method Of Manufacturing Semiconductor Device App 20170040232 - NAKAYAMA; Masanori ; et al.	2017-02-09
Method of manufacturing semiconductor device Grant 9,508,546 - Toyoda , et al. November 29, 2	2016-11-29
Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device Grant 9,502,236 - Hirochi , et al. November 22, 2	2016-11-22
Substrate processing apparatus Grant 9,487,863 - Matsui , et al. November 8, 2	2016-11-08
Method Of Manufacturing Semiconductor Device App 20160293500 - OHASHI; Naofumi ; et al.	2016-10-06
Method Of Manufacturing Semiconductor Device App 20160293498 - SUDA; Atsuhiko ; et al.	2016-10-06
Substrate Processing Apparatus, Program And Method Of Manufacturing Semiconductor Device App 20160284543 - TOYODA; Kazuyuki ; et al.	2016-09-29
Substrate Processing Apparatus App 20160276183 - OHASHI; Naofumi ; et al.	2016-09-22
Substrate Processing Apparatus App 20160276135 - YAMAMOTO; Tetsuo ; et al.	2016-09-22
Substrate processing apparatus and substrate processing system Grant 9,431,220 - Ohashi , et al. August 30, 2	2016-08-30
Substrate Processing Apparatus App 20160230280 - MATSUI; Shun ; et al.	2016-08-11
Batch-type remote plasma processing apparatus Grant 9,373,499 - Toyoda , et al. June 21, 2	2016-06-21
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160093476 - TOYODA; Kazuyuki ; et al.	2016-03-31
Substrate Processing Apparatus, Gas Introduction Shaft and Gas Supply Plate App 20160083844 - NISHITANI; Eisuke ; et al.	2016-03-24
Method of Manufacturing Semiconductor Device App 20160056035 - TOYODA; Kazuyuki ; et al.	2016-02-25
Substrate Processing Apparatus App 20160024650 - TOYODA; Kazuyuki ; et al.	2016-01-28
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,171,734 - Toyoda , et al. October 27, 2	2015-10-27
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,163,309 - Yamamoto , et al. October 20, 2	2015-10-20
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20150252474 - ITATANI; Hideharu ; et al.	2015-09-10
Batch-type Remote Plasma Processing Apparatus App 20150228476 - Toyoda; Kazuyuki ; et al.	2015-08-13
Method Of Manufacturing Semiconductor Device App 20150221503 - TOYODA; Kazuyuki ; et al.	2015-08-06
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium and Method of Manufacturing Semiconductor Device App 20150194306 - HIROCHI; Yukitomo ; et al.	2015-07-09
Substrate Processing Apparatus, Non-transitory Computer-readable Recording Medium And Method Of Manufacturing Semiconductor Device App 20150194304 - Hirochi; Yukitomo ; et al.	2015-07-09
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,070,554 - Toyoda , et al. June 30, 2	2015-06-30
Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device Grant 9,064,695 - Hirochi , et al. June 23, 2	2015-06-23
Batch-type remote plasma processing apparatus Grant 9,039,912 - Toyoda , et al. May 26, 2	2015-05-26
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,023,429 - Takeshima , et al. May 5, 2	2015-05-05
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150093916 - YAMAMOTO; Tetsuo ; et al.	2015-04-02
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150093913 - TOYODA; Kazuyuki ; et al.	2015-04-02
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20150087160 - TOYODA; Kazuyuki ; et al.	2015-03-26
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,925,562 - Toyoda , et al. January 6, 2	2015-01-06
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20140087567 - TOYODA; Kazuyuki ; et al.	2014-03-27
Injection Member For Manufacturing Semiconductor Device And Plasma Processing Apparatus Having The Same App 20130276983 - Park; Yong Sung ; et al.	2013-10-24
Batch-type remote plasma processing apparatus Grant 8,544,411 - Toyoda , et al. October 1, 2	2013-10-01
Substrate processing apparatus Grant 8,518,182 - Ogawa , et al. August 27, 2	2013-08-27
Batch-Type Remote Plasma Processing Apparatus App 20130104804 - Toyoda; Kazuyuki ; et al.	2013-05-02
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20130078823 - Takeshima; Yuichiro ; et al.	2013-03-28
Batch-Type Remote Plasma Processing Apparatus App 20130072002 - TOYODA; Kazuyuki ; et al.	2013-03-21
Substrate Processing Apparatus, And Transport Device App 20120258018 - NISHITANI; Eisuke ; et al.	2012-10-11
Substrate Processing Apparatus And Method For Forming Coating Film On Surface Of Reaction Tube Used For The Substrate Processing Apparatus App 20120258565 - NISHITANI; Eisuke ; et al.	2012-10-11
Substrate Processing Apparatus, Method For Manufacturing Solar Battery, And Method For Manufacturing Substrate App 20120258566 - NISHITANI; Eisuke ; et al.	2012-10-11
Substrate processing apparatus and reaction container Grant 8,261,692 - Kontani , et al. September 11, 2	2012-09-11
Method of producing semiconductor device Grant 8,227,346 - Miya , et al. July 24, 2	2012-07-24
Substrate processing apparatus and semiconductor device manufacturing method for forming film Grant 8,193,101 - Sato , et al. June 5, 2	2012-06-05
Method Of Producing Semiconductor Device App 20120077350 - MIYA; Hironobu ; et al.	2012-03-29
Method Of Producing Semiconductor Device App 20120034790 - Miya; Hironobu ; et al.	2012-02-09
Method of producing semiconductor device Grant 8,105,957 - Miya , et al. January 31, 2	2012-01-31
Substrate processing apparatus and reaction container Grant 8,047,158 - Kontani , et al. November 1, 2	2011-11-01
Production method for semiconductor device Grant 8,039,404 - Miya , et al. October 18, 2	2011-10-18
Batch-type remote plasma processing apparatus Grant 8,028,652 - Toyoda , et al. October 4, 2	2011-10-04
Batch-type remote plasma processing apparatus Grant 8,020,514 - Toyoda , et al. September 20, 2	2011-09-20
Substrate Processing Apparatus App 20110209664 - Ogawa; Shizue ; et al.	2011-09-01
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20110212625 - TOYODA; Kazuyuki ; et al.	2011-09-01
Substrate processing apparatus Grant 7,958,842 - Ogawa , et al. June 14, 2	2011-06-14
Substrate processing apparatus and reaction container Grant 7,900,580 - Kontani , et al. March 8, 2	2011-03-08
Batch-type remote plasma processing apparatus Grant 7,861,668 - Toyoda , et al. January 4, 2	2011-01-04
Substrate Processing Apparatus And Producing Method Of Device App 20100323507 - TOYODA; Kazuyuki ; et al.	2010-12-23
Substrate Processing Apparatus And Reaction Container App 20100263593 - Kontani; Tadashi ; et al.	2010-10-21
Substrate Processing Apparatus And Producing Method Of Device App 20100258530 - TOYODA; Kazuyuki ; et al.	2010-10-14
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20100233887 - Miya; Hironobu ; et al.	2010-09-16
Production method for semiconductor device and substrate processing apparatus Grant 7,779,785 - Miya , et al. August 24, 2	2010-08-24
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20100087069 - MIYA; Hironobu ; et al.	2010-04-08
Substrate Processing Apparatus And Semiconductor Device Manufacturing Method For Forming Film App 20100015811 - Sato; Taketoshi ; et al.	2010-01-21
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20090280652 - Miya; Hironobu ; et al.	2009-11-12
Substrate Treatment Device and Substrate Treatment Method App 20090258507 - Itoh; Takeshi ; et al.	2009-10-15
Substrate processing apparatus and electrode member App 20090255630 - Toyoda; Kazuyuki ; et al.	2009-10-15
Batch-Type Remote Plasma Processing Apparatus App 20090159440 - TOYODA; Kazuyuki ; et al.	2009-06-25
Batch-Type Remote Plasma Processing Apparatus App 20090133630 - TOYODA; Kazuyuki ; et al.	2009-05-28
Substrate Processing Apparatus and Reaction Container App 20080251014 - KONTANI; Tadashi ; et al.	2008-10-16
Substrate Processing Apparatus and Reaction Container App 20080251015 - KONTANI; Tadashi ; et al.	2008-10-16
Substrate Processing Apparatus App 20080153308 - Ogawa; Shizue ; et al.	2008-06-26
Production Method for Semiconductor Device and Substrate Processing Apparatus App 20080124945 - Miya; Hironobu ; et al.	2008-05-29
Substrate Processing Apparatus and Reaction Container App 20080121180 - KONTANI; Tadashi ; et al.	2008-05-29
Batch-Type Remote Plasma Processing Apparatus App 20080093215 - TOYODA; Kazuyuki ; et al.	2008-04-24
Batch-Type Remote Plasma Processing Apparatus App 20080066681 - Toyoda; Kazuyuki ; et al.	2008-03-20
Batch-Type Remote Plasma Processing Apparatus App 20080060580 - TOYODA; Kazuyuki ; et al.	2008-03-13
Batch-Type Remote Plasma Processing Apparatus App 20070246355 - TOYODA; Kazuyuki ; et al.	2007-10-25
Substrate processing and method of manufacturing device App 20060260544 - Toyoda; Kazuyuki ; et al.	2006-11-23
Substrate processing apparatus App 20060090849 - Toyoda; Kazuyuki ; et al.	2006-05-04
Apparatus and method for use in manufacturing a semiconductor device Grant 7,033,937 - Toyoda , et al. April 25, 2	2006-04-25
Substrate processing apparatus and reaction container App 20040025786 - Kontani, Tadashi ; et al.	2004-02-12
Batch-type remote plasma processing apparatus App 20030164143 - Toyoda, Kazuyuki ; et al.	2003-09-04
Apparatus and method for use in manufacturing a semiconductor device App 20030124876 - Toyoda, Kazuyuki ; et al.	2003-07-03
Apparatus and method for use in manufacturing a semiconductor device App 20010029112 - Toyoda, Kazuyuki ; et al.	2001-10-11
Substrate processing apparatus Grant 6,053,980 - Suda , et al. April 25, 2	2000-04-25