| Patent | Date |
|---|
Magnetic Memory Device
App 20220293676 - TOMIOKA; Kazuhiro | 2022-09-15 |
Magnetic Memory Device And Manufacturing Method Of Magnetic Memory Device
App 20210288243 - OCHIAI; Takao ; et al. | 2021-09-16 |
Magnetic memory device and manufacturing method thereof
Grant 10,847,576 - Tsubata , et al. November 24, 2 | 2020-11-24 |
Magnetic Memory Device And Manufacturing Method Thereof
App 20200083290 - TSUBATA; Shuichi ; et al. | 2020-03-12 |
Magnetic memory device with sidewall layer containing boron and manufacturing method thereof
Grant 10,490,732 - Sonoda , et al. Nov | 2019-11-26 |
Magnetic memory device and method of manufacturing the same
Grant 10,461,245 - Tsubata , et al. Oc | 2019-10-29 |
Plasma processing apparatus and plasma processing method
Grant 10,381,198 - Ui , et al. A | 2019-08-13 |
Magnetoresistive element and method of manufacturing the same
Grant 10,230,042 - Yoshikawa , et al. | 2019-03-12 |
Magnetic memory device
Grant 10,193,057 - Yoshikawa , et al. Ja | 2019-01-29 |
Magnetic Memory Device
App 20190006580 - YOSHIKAWA; Masatoshi ; et al. | 2019-01-03 |
Magnetic Memory Device And Manufacturing Method Of Magnetic Memory Device
App 20170263858 - SONODA; Yasuyuki ; et al. | 2017-09-14 |
Magnetoresistive Element And Method Of Manufacturing The Same
App 20170256705 - YOSHIKAWA; Masatoshi ; et al. | 2017-09-07 |
Magnetic memory device and method of manufacturing magnetic memory device
Grant 9,698,338 - Yoshikawa , et al. July 4, 2 | 2017-07-04 |
Plasma Processing Apparatus And Plasma Processing Methdo
App 20170169996 - UI; Akio ; et al. | 2017-06-15 |
Magnetic Memory Device
App 20170117454 - YOSHIKAWA; Masatoshi ; et al. | 2017-04-27 |
Magnetic memory having magnetoresistive element and method of manufacturing magnetoresistive element
Grant 9,595,663 - Yoshikawa , et al. March 14, 2 | 2017-03-14 |
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing The Same
App 20170069836 - TOMIOKA; Kazuhiro | 2017-03-09 |
Magnetic memory device
Grant 9,570,671 - Yoshikawa , et al. February 14, 2 | 2017-02-14 |
Magnetic memory device and method of manufacturing the same
Grant 9,508,922 - Yoshikawa , et al. November 29, 2 | 2016-11-29 |
Magnetic element and method of manufacturing the same
Grant 9,425,388 - Tomioka , et al. August 23, 2 | 2016-08-23 |
Magnetic Memory Device And Method Of Manufacturing Magnetic Memory Device
App 20160079519 - YOSHIKAWA; Masatoshi ; et al. | 2016-03-17 |
Method of manufacturing semiconductor device
Grant 9,287,495 - Tomioka March 15, 2 | 2016-03-15 |
Semiconductor Memory Device And Manufacturing Method Thereof
App 20160072047 - SETO; Satoshi ; et al. | 2016-03-10 |
Manufacturing Method Of Semiconductor Memory Device
App 20160072055 - SETO; Satoshi ; et al. | 2016-03-10 |
Magnetic Memory Device And Method Of Manufacturing The Same
App 20160072050 - YOSHIKAWA; Masatoshi ; et al. | 2016-03-10 |
Magnetic Memory Device And Method Of Manufacturing The Same
App 20160072056 - TSUBATA; Shuichi ; et al. | 2016-03-10 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same
App 20150295170 - TSUBATA; Shuichi ; et al. | 2015-10-15 |
Magnetic Memory Having Magnetoresistive Element And Method Of Manufacturing Magnetoresistive Element
App 20150263273 - YOSHIKAWA; Masatoshi ; et al. | 2015-09-17 |
Manufacturing Method Of Magnetic Memory Device And Manufacturing Apparatus Of Magnetic Memory Device
App 20150263272 - TOMIOKA; Kazuhiro | 2015-09-17 |
Manufacturing Method Of Magnetic Memory Device And Manufacturing Apparatus Of Magnetic Memory Device
App 20150263275 - TOMIOKA; Kazuhiro | 2015-09-17 |
Magnetic Memory Device
App 20150263265 - YOSHIKAWA; Masatoshi ; et al. | 2015-09-17 |
Nonvolatile semiconductor memory device and method of manufacturing the same
Grant 9,093,632 - Tsubata , et al. July 28, 2 | 2015-07-28 |
Method of manufacturing a semiconductor device having a magnetic film using plasma etching
Grant 8,987,007 - Tomioka March 24, 2 | 2015-03-24 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same
App 20150069559 - TSUBATA; Shuichi ; et al. | 2015-03-12 |
Magnetic Element And Method Of Manufacturing The Same
App 20150069549 - TOMIOKA; Kazuhiro ; et al. | 2015-03-12 |
Method Of Manufacturing Magnetoresistive Element
App 20150072439 - TOMIOKA; Kazuhiro ; et al. | 2015-03-12 |
Method Of Manufacturing Magnetoresistive Element
App 20150072440 - INADA; Satoshi ; et al. | 2015-03-12 |
Method of manufacturing magnetoresistive element
Grant 8,956,882 - Tomioka , et al. February 17, 2 | 2015-02-17 |
Semiconductor Device Manufacturing Method
App 20140087485 - TOMIOKA; Kazuhiro | 2014-03-27 |
Plasma Processing Apparatus And Plasma Processing Method
App 20140083977 - UI; Akio ; et al. | 2014-03-27 |
Method of Manufacturing Semiconductor Device
App 20140080227 - TOMIOKA; Kazuhiro | 2014-03-20 |
Method for manufacturing semiconductor device
Grant 8,586,390 - Tomioka November 19, 2 | 2013-11-19 |
Etching Method And Method Of Manufacturing Semiconductor Device
App 20130149795 - Tomioka; Kazuhiro | 2013-06-13 |
Etching Apparatus And Method Of Manufacturing Semiconductor Device
App 20130017626 - TOMIOKA; Kazuhiro | 2013-01-17 |
Method For Manufacturing Semiconductor Device
App 20120244641 - TOMIOKA; Kazuhiro | 2012-09-27 |
Substrate processing method, substrate processing system, and computer-readable storage medium
Grant 8,187,981 - Tomioka , et al. May 29, 2 | 2012-05-29 |
Magnetoresistive Element And Method Of Manufacturing The Same
App 20120032288 - TOMIOKA; Kazuhiro | 2012-02-09 |
Semiconductor device having multiple wiring layers and method of producing the same
Grant 7,855,141 - Shimooka , et al. December 21, 2 | 2010-12-21 |
Method of manufacturing semiconductor device
Grant 7,767,582 - Nishiyama , et al. August 3, 2 | 2010-08-03 |
Semiconductor device having multiple wiring layers and method of producing the same
Grant 7,745,326 - Shimooka , et al. June 29, 2 | 2010-06-29 |
Semiconductor Device Having Multiple Wiring Layers And Method Of Producing The Same
App 20090280642 - SHIMOOKA; Yoshiaki ; et al. | 2009-11-12 |
Semiconductor Device Having Multiple Wiring Layers And Method Of Producing The Same
App 20090275194 - Shimooka; Yoshiaki ; et al. | 2009-11-05 |
Semiconductor device having multiple wiring layers and method of producing the same
Grant 7,589,014 - Shimooka , et al. September 15, 2 | 2009-09-15 |
Semiconductor device and mask pattern
Grant 7,504,680 - Arisumi , et al. March 17, 2 | 2009-03-17 |
Substrate Processing Method, Substrate Processing System, And Computer-readable Storage Medium
App 20090014414 - Tomioka; Kazuhiro ; et al. | 2009-01-15 |
Semiconductor memory device having ferroelectric capacitors with hydrogen barriers
Grant 7,400,005 - Kumura , et al. July 15, 2 | 2008-07-15 |
Semiconductor Device Have Multiple Wiring Layers And Method Of Producing The Same
App 20070093052 - Shimooka; Yoshiaki ; et al. | 2007-04-26 |
Method of manufacturing semiconductor device
App 20070082493 - Nishiyama; Nobuyasu ; et al. | 2007-04-12 |
Semiconductor device and mask pattern
App 20060231876 - Arisumi; Osamu ; et al. | 2006-10-19 |
Method for manufacturing semiconductor device
Grant 7,115,522 - Tomioka , et al. October 3, 2 | 2006-10-03 |
Semiconductor memory device and its manufacturing method
App 20060180894 - Kumura; Yoshinori ; et al. | 2006-08-17 |
Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing
Grant 7,045,837 - Egger , et al. May 16, 2 | 2006-05-16 |
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing
Grant 7,042,705 - Zhuang , et al. May 9, 2 | 2006-05-09 |
Semiconductor device
App 20060071258 - Tomioka; Kazuhiro ; et al. | 2006-04-06 |
Fence-free etching of iridium barrier having a steep taper angle
Grant 7,015,049 - Egger , et al. March 21, 2 | 2006-03-21 |
Method for manufacturing semiconductor device
App 20060009040 - Tomioka; Kazuhiro ; et al. | 2006-01-12 |
Semiconductor device and method of manufacturing the same
App 20050128663 - Yamazaki, Soichi ; et al. | 2005-06-16 |
Semiconductor device and method for manufacturing the same
App 20050070043 - Yamakawa, Koji ; et al. | 2005-03-31 |
Fence-free Etching Of Iridium Barrier Having A Steep Taper Angle
App 20050045937 - Egger, Ulrich ; et al. | 2005-03-03 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
App 20040238126 - Hayashi, Hisataka ; et al. | 2004-12-02 |
Method for formation of hardmask elements during a semiconductor device fabrication process
App 20040171274 - Zhuang, Haoren ; et al. | 2004-09-02 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
Grant 6,780,278 - Hayashi , et al. August 24, 2 | 2004-08-24 |
Hardmask with high selectivity for Ir barriers for ferroelectic capacitor manufacturing
App 20040150923 - Egger, Ulrich ; et al. | 2004-08-05 |
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing
App 20040149477 - Zhuang, Haoren ; et al. | 2004-08-05 |
Process for fabrication of a ferrocapacitor
Grant 6,762,064 - Zhuang , et al. July 13, 2 | 2004-07-13 |
Semiconductor device have multiple wiring layers and method of producing the same
App 20020187625 - Shimooka, Yoshiaki ; et al. | 2002-12-12 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
App 20020042204 - Hayashi, Hisataka ; et al. | 2002-04-11 |
Plasma generating apparatus
Grant 5,897,713 - Tomioka , et al. April 27, 1 | 1999-04-27 |
Plasma processing apparatus and method
Grant 5,810,963 - Tomioka September 22, 1 | 1998-09-22 |
Method of manufacturing semiconductor device
Grant 5,445,710 - Hori , et al. * August 29, 1 | 1995-08-29 |
Method of manufacturing semiconductor device
Grant 5,302,240 - Hori , et al. April 12, 1 | 1994-04-12 |
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