Patent | Date |
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Methods of forming high aspect ratio openings and methods of forming high aspect ratio features Grant 11,417,565 - Tokashiki , et al. August 16, 2 | 2022-08-16 |
Methods Of Forming High Aspect Ratio Openings And Methods Of Forming High Aspect Ratio Features App 20210143055 - Tokashiki; Ken ;   et al. | 2021-05-13 |
Methods of forming high aspect ratio openings and methods of forming high aspect ratio features Grant 10,903,109 - Tokashiki , et al. January 26, 2 | 2021-01-26 |
Methods of processing semiconductor device structures and related systems Grant 10,811,267 - Tokashiki October 20, 2 | 2020-10-20 |
Components and systems for cleaning a tool for forming a semiconductor device, and related methods Grant 10,766,057 - Tokashiki , et al. Sep | 2020-09-08 |
Memory cells, magnetic memory cells, and semiconductor devices Grant 10,636,839 - Tokashiki | 2020-04-28 |
Memory cells, magnetic memory cells, and semiconductor devices Grant 10,600,842 - Tokashiki | 2020-03-24 |
Methods Of Forming High Aspect Ratio Openings, Methods Of Forming High Aspect Ratio Features, And Related Semiconductor Devices App 20190206723 - Tokashiki; Ken ;   et al. | 2019-07-04 |
Components And Systems For Cleaning A Tool For Forming A Semiconductor Device, And Related Methods App 20190201945 - Tokashiki; Ken ;   et al. | 2019-07-04 |
Methods Of Processing Semiconductor Device Structures And Related Systems App 20190198333 - Tokashiki; Ken | 2019-06-27 |
Memory Cells, Magnetic Memory Cells, And Semiconductor Devices App 20190189687 - Tokashiki; Ken | 2019-06-20 |
Memory Cells Magnetic Memory Cells, And Semiconductor Devices App 20180358407 - Tokashiki; Ken | 2018-12-13 |
Methods of forming magnetic memory cells, and methods of forming arrays of magnetic memory cells Grant 10,103,196 - Tokashiki October 16, 2 | 2018-10-16 |
Semiconductor devices and methods of fabricating the same Grant 9,978,932 - Kwon , et al. May 22, 2 | 2018-05-22 |
Methods Of Forming Magnetic Memory Cells, And Methods Of Forming Arrays Of Magnetic Memory Cells App 20180061886 - Tokashiki; Ken | 2018-03-01 |
Methods of manufacturing a magnetoresistive random access memory device Grant 9,577,183 - Kim , et al. February 21, 2 | 2017-02-21 |
Magnetic Memory Device And Method Of Manufacturing The Same App 20160351795 - CHO; Yoonchul ;   et al. | 2016-12-01 |
Semiconductor devices and methods of fabricating the same Grant 9,496,488 - Kwon , et al. November 15, 2 | 2016-11-15 |
Magnetic memory device and method of manufacturing the same Grant 9,444,033 - Cho , et al. September 13, 2 | 2016-09-13 |
Semiconductor Devices And Methods Of Fabricating The Same App 20160181511 - KWON; HYUNGJOON ;   et al. | 2016-06-23 |
Semiconductor Fabricating Apparatus And Method Of Fabricating Semiconductor Device Using The Same App 20160064194 - TOKASHIKI; KEN ;   et al. | 2016-03-03 |
Method of forming magnetic memory devices Grant 9,246,082 - Tokashiki January 26, 2 | 2016-01-26 |
Methods Of Manufacturing A Magnetoresistive Random Access Memory Device App 20150287911 - KIM; Kyoung-Sun ;   et al. | 2015-10-08 |
Magnetic Memory Device And Method Of Manufacturing The Same App 20150069560 - CHO; Yoonchul ;   et al. | 2015-03-12 |
Method Of Forming Magnetic Memory Devices App 20150044781 - TOKASHIKI; Ken | 2015-02-12 |
Semiconductor Devices And Methods Of Fabricating The Same App 20140124881 - KWON; HYUNGJOON ;   et al. | 2014-05-08 |
Method For Etching Metal Layer And Method For Manufacturing A Semiconductor Device Using The Same App 20140024138 - Kwon; Hyungjoon ;   et al. | 2014-01-23 |
Device for analyzing charge and ultraviolet (UV) light Grant 8,592,812 - Tokashiki November 26, 2 | 2013-11-26 |
Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device Grant 8,460,508 - Tokashiki , et al. June 11, 2 | 2013-06-11 |
Methods For Manufacturing Magnetic Tunnel Junction Structure App 20130008867 - Tokashiki; Ken ;   et al. | 2013-01-10 |
Method of processing a substrate Grant 8,277,906 - Kim , et al. October 2, 2 | 2012-10-02 |
Plasma Etching Method And Apparatus Thereof App 20120052689 - Tokashiki; Ken | 2012-03-01 |
Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same Grant 7,988,874 - Lee , et al. August 2, 2 | 2011-08-02 |
Method Of Fabricating Semiconductor Device And Synchronous Pulse Plasma Etching Equipment For The Same App 20110143537 - LEE; Jeong-Yun ;   et al. | 2011-06-16 |
Device For Analyzing Charge And Ultraviolet (uv) Light App 20110101348 - Tokashiki; Ken | 2011-05-05 |
Method of forming semiconductor device App 20100203699 - Tokashiki; Ken | 2010-08-12 |
Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device App 20100130018 - Tokashiki; Ken ;   et al. | 2010-05-27 |
Method Of Processing A Substrate App 20100062613 - Kim; Yoon-jae ;   et al. | 2010-03-11 |
Method for manufacturing semiconductor device App 20030190807 - Soda, Eiichi ;   et al. | 2003-10-09 |
Apparatus for fabricating a semiconductor device and method of doing the same App 20030114015 - Tokashiki, Ken | 2003-06-19 |
Method of fabricating semiconductor device App 20020119669 - Ono, Yasuhiro ;   et al. | 2002-08-29 |
Semiconductor device manufacturing method App 20020119677 - Soda, Eiichi ;   et al. | 2002-08-29 |
Apparatus for fabricating a semiconductor device and method of doing the same Grant 6,372,654 - Tokashiki April 16, 2 | 2002-04-16 |
Method for fabricating semiconductor device App 20010055884 - Tokashiki, Ken | 2001-12-27 |