loadpatents
Patent applications and USPTO patent grants for Thomas; Terence M..The latest application filed is for "chemical mechanical polishing composition and methods relating thereto".
Patent | Date |
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Low-stain polishing composition Grant 9,633,865 - Thomas , et al. April 25, 2 | 2017-04-25 |
Chemical mechanical polishing composition and methods relating thereto Grant 8,563,436 - Ghosh , et al. October 22, 2 | 2013-10-22 |
Chemical mechanical polishing composition and methods relating thereto Grant 8,540,893 - Ghosh , et al. September 24, 2 | 2013-09-24 |
Chemical Mechanical Polishing Composition And Methods Relating Thereto App 20130217230 - Ghosh; Tirthankar ;   et al. | 2013-08-22 |
Polymeric barrier removal polishing slurry Grant 7,785,487 - Thomas , et al. August 31, 2 | 2010-08-31 |
Chemical mechanical polishing composition and methods relating thereto App 20100029079 - Ghosh; Tirthankar ;   et al. | 2010-02-04 |
Low-stain polishing composition App 20090215265 - Thomas; Terence M. ;   et al. | 2009-08-27 |
Polishing Copper-Containing patterned wafers App 20090215266 - Thomas; Terence M. ;   et al. | 2009-08-27 |
Alkaline barrier polishing slurry App 20080276543 - Thomas; Terence M. ;   et al. | 2008-11-13 |
Copper polishing cleaning solution Grant 7,387,964 - So , et al. June 17, 2 | 2008-06-17 |
Compositions and methods for improved planarization of copper utilizing inorganic oxide abrasive App 20080029126 - Thomas; Terence M. | 2008-02-07 |
Polishing compositions for noble metals Grant 7,270,762 - Wang , et al. September 18, 2 | 2007-09-18 |
Barrier polishing solution Grant 7,253,111 - Liu , et al. August 7, 2 | 2007-08-07 |
Polymeric barrier removal polishing slurry App 20070051917 - Thomas; Terence M. ;   et al. | 2007-03-08 |
Tungsten polishing solution Grant 7,132,058 - Thomas , et al. November 7, 2 | 2006-11-07 |
CMP system for metal deposition Grant 7,084,059 - Thomas , et al. August 1, 2 | 2006-08-01 |
Polishing composition Grant 7,070,485 - Lack , et al. July 4, 2 | 2006-07-04 |
Multi-step polishing solution for chemical mechanical planarization Grant 6,971,945 - Liu , et al. December 6, 2 | 2005-12-06 |
Barrier polishing solution App 20050236601 - Liu, Zhendong ;   et al. | 2005-10-27 |
Multi-step Polishing Solution For Chemical Mechanical Planarization App 20050194357 - Liu, Zhendong ;   et al. | 2005-09-08 |
Method for planarizing metal interconnects Grant 6,936,541 - Bian , et al. August 30, 2 | 2005-08-30 |
Compositions and methods for low downforce pressure polishing of copper App 20050136671 - Goldberg, Wendy B. ;   et al. | 2005-06-23 |
Compositions and methods for controlled polishing of copper App 20050136670 - Ameen, Joseph G. ;   et al. | 2005-06-23 |
Compositions and methods for polishing copper App 20050104048 - Thomas, Terence M. ;   et al. | 2005-05-19 |
Composition and method for polishing in metal CMP Grant 6,699,299 - Sachan , et al. March 2, 2 | 2004-03-02 |
Method for planarizing metal interconnects App 20040023492 - Bian, Jinru ;   et al. | 2004-02-05 |
Semiconductor wafer with a resistant film Grant 6,664,188 - Thomas December 16, 2 | 2003-12-16 |
Copper polishing cleaning solution App 20030207778 - So, Joseph K. ;   et al. | 2003-11-06 |
Polishing of semiconductor substrates Grant 6,641,631 - Thomas , et al. November 4, 2 | 2003-11-04 |
Composition and method for polishing in metal CMP App 20030181046 - Sachan, Vikas ;   et al. | 2003-09-25 |
Polishing compositions for noble metals App 20030176072 - Wang, Hongyu ;   et al. | 2003-09-18 |
Composition and method for polishing in metal CMP Grant 6,616,717 - Sachan , et al. September 9, 2 | 2003-09-09 |
CMP system for metal deposition App 20030166339 - Thomas, Terence M. ;   et al. | 2003-09-04 |
Compositions for insulator and metal CMP and methods relating thereto Grant 6,607,424 - Costas , et al. August 19, 2 | 2003-08-19 |
Polishing of metal substrates Grant 6,605,537 - Bian , et al. August 12, 2 | 2003-08-12 |
Dissolution of metal particles produced by polishing Grant 6,602,112 - Tran , et al. August 5, 2 | 2003-08-05 |
Metal polishing slurry having a static etch inhibitor and method of formulation App 20030139047 - Thomas, Terence M. ;   et al. | 2003-07-24 |
Tungsten polishing solution App 20030139050 - Thomas, Terence M. ;   et al. | 2003-07-24 |
Copper polishing cleaning solution App 20030119692 - So, Joseph K. ;   et al. | 2003-06-26 |
Adapting a semiconductor wafer for planarization App 20030020141 - Thomas, Terence M. | 2003-01-30 |
Polishing composition for CMP having abrasive particles App 20030006396 - Wang, Hongyu ;   et al. | 2003-01-09 |
Method and composition for polishing by CMP App 20020146965 - Thomas, Terence M. ;   et al. | 2002-10-10 |
Chemical mechanical polishing slurries for metal Grant 6,447,373 - Lack , et al. September 10, 2 | 2002-09-10 |
Polishing compositions for noble metals App 20020111027 - Sachan, Vikas ;   et al. | 2002-08-15 |
Polishing of metal substrates App 20020106897 - Bian, Jinru ;   et al. | 2002-08-08 |
Polishing of semiconductor substrates App 20020083650 - Thomas, Terence M. ;   et al. | 2002-07-04 |
Polishing composition App 20020062600 - Mandigo, Glenn C. ;   et al. | 2002-05-30 |
Polishing by CMP for optimized planarization App 20020042199 - Bian, Jinru ;   et al. | 2002-04-11 |
Polishing compositions for noble metals App 20020039839 - Thomas, Terence M. ;   et al. | 2002-04-04 |
Control of removal rates in CMP App 20020019202 - Thomas, Terence M. ;   et al. | 2002-02-14 |
Polishing composition App 20010044264 - Lack, Craig D. ;   et al. | 2001-11-22 |
Dissolution of metal particles produced by polishing App 20010039166 - Tran, Tony Quan ;   et al. | 2001-11-08 |
Composition and method for polishing in metal CMP App 20010024933 - Sachan, Vikas ;   et al. | 2001-09-27 |
Method of bonding silver to glass and mirrors produced according to this method Grant 4,547,432 - Pitts , et al. October 15, 1 | 1985-10-15 |
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