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Liner Assemblies For Substrate Processing Systems App 20210147980 - Abedijaberi; Arash ;   et al. | 2021-05-20 |
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High Resistivity Soi Wafers And A Method Of Manufacturing Thereof App 20210005507 - Peidous; Igor ;   et al. | 2021-01-07 |
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Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress Grant 10,658,227 - Wang , et al. | 2020-05-19 |
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High Resistivity Silicon-on-insulator Substrate Having Enhanced Charge Trapping Efficiency App 20200126847 - Wang; Gang ;   et al. | 2020-04-23 |
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High Resistivity Semiconductor-on-insulator Wafer And A Method Of Manufacturing App 20190139818 - Peidous; Igor ;   et al. | 2019-05-09 |
Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress Grant 10,283,402 - Wang , et al. | 2019-05-07 |
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Semiconductor Wafer Support Ring For Heat Treatment App 20180274862 - Liu; Qingmin ;   et al. | 2018-09-27 |
High resistivity SOI wafers and a method of manufacturing thereof Grant 10,079,170 - Peidous , et al. September 18, 2 | 2018-09-18 |
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Preparation Of Silicon-germanium-on-insulator Structures App 20180005872 - Thomas; Shawn George ;   et al. | 2018-01-04 |
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Method Of Manufacturing High Resistivity Silicon-on-insulator Substrate App 20160071959 - Thomas; Shawn George ;   et al. | 2016-03-10 |
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