Teramoto; Akinobu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Teramoto; Akinobu.The latest application filed is for "method for producing silicon nitride film".

Company Profile

5.84.116

Teramoto; Akinobu - Miyagi JP
Teramoto; Akinobu - Sendai JP
TERAMOTO; Akinobu - Sendai-shi JP
Teramoto; Akinobu - Tokyo JP
Teramoto; Akinobu - Miyagi-Ken JP
Teramoto; Akinobu - Hyogo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of forming nitride film Grant 10,927,454 - Nishimura , et al. February 23, 2	2021-02-23
Method For Producing Silicon Nitride Film App 20200335322 - TERAMOTO; Akinobu ; et al.	2020-10-22
Film forming apparatus and film forming method Grant 10,559,460 - Shimizu , et al. Feb	2020-02-11
Method Of Forming Nitride Film App 20190390332 - NISHIMURA; Shinichi ; et al.	2019-12-26
Film Forming Apparatus And Film Forming Method App 20190074177 - SHIMIZU; Akira ; et al.	2019-03-07
Method for rinsing compound semiconductor, solution for rinsing compound semiconductor containing gallium as constituent element, method for fabricating compound semiconductor device, method for fabricating gallium nitride substrate, and gallium nitride substrate Grant 10,043,654 - Nagao , et al. August 7, 2	2018-08-07
Semiconductor transistor Grant 9,875,899 - Kambayashi , et al. January 23, 2	2018-01-23
Method For Rinsing Compound Semiconductor, Solution For Rinsing Compound Semiconductor Containing Gallium As Constituent Element, Method For Fabricating Compound Semiconductor Device, Method For Fabricating Gallium Nitride Substrate, And Gallium Nitride Substrate App 20170178893 - Nagao; Kenji ; et al.	2017-06-22
Wiring structure having interlayer insulating film and wiring line without a barrier layer between Grant 9,543,191 - Nemoto , et al. January 10, 2	2017-01-10
Surface Treatment Method for Atomically Flattening a Silicon Wafer and Heat Treatment Apparatus App 20160276171 - OHMI; Tadahiro ; et al.	2016-09-22
Accumulation-mode MOSFET and driving method thereof Grant 9,299,844 - Teramoto March 29, 2	2016-03-29
Method for fabricating semiconductor device and the semiconductor device Grant 9,230,799 - Teramoto , et al. January 5, 2	2016-01-05
Surface treatment method for atomically flattening a silicon wafer and heat treatment apparatus Grant 9,157,681 - Ohmi , et al. October 13, 2	2015-10-13
Semiconductor device and method of manufacturing the same Grant 9,153,658 - Kuroda , et al. October 6, 2	2015-10-06
Accumulation-mode Mosfet And Driving Method Thereof App 20150179788 - Teramoto; Akinobu	2015-06-25
Manufacturing method of GaN-based semiconductor device and semiconductor device Grant 8,999,788 - Kambayashi , et al. April 7, 2	2015-04-07
Semiconductor-device Manufacturing Method And Semiconductor Device App 20150041983 - Nemoto; Takenao ; et al.	2015-02-12
Method For Fabricating Semiconductor Device And The Semiconductor Device App 20140367699 - TERAMOTO; Akinobu ; et al.	2014-12-18
Method of producing semiconductor transistor Grant 8,906,796 - Kambayashi , et al. December 9, 2	2014-12-09
Method of manufacturing semiconductor device and semiconductor manufacturing apparatus Grant 8,895,410 - Ohmi , et al. November 25, 2	2014-11-25
Semiconductor Device And Method Of Manufacturing The Same App 20140312399 - Kuroda; Rihito ; et al.	2014-10-23
Wiring Structure, Semiconductor Device Including Wiring Structure, And Method Of Manufacturing Semiconductor Device App 20140306344 - Sugawa; Shigetoshi ; et al.	2014-10-16
Solar cell wherein solar photovolatic thin film is directly formed on base Grant 8,841,545 - Wakayama , et al. September 23, 2	2014-09-23
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20140225263 - Nemoto; Takenao ; et al.	2014-08-14
Semiconductor device manufacturing method and semiconductor device Grant 8,716,114 - Ohmi , et al. May 6, 2	2014-05-06
Inverter unit, integrated circuit chip, and vehicle drive apparatus Grant 8,664,909 - Sumida , et al. March 4, 2	2014-03-04
Transistor and semiconductor device Grant 8,648,393 - Ohmi , et al. February 11, 2	2014-02-11
Semiconductor device Grant 8,643,106 - Ohmi , et al. February 4, 2	2014-02-04
Multilayer wiring board Grant 8,633,395 - Ohmi , et al. January 21, 2	2014-01-21
MANUFACTURING METHOD OF GaN-BASED SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE App 20130307063 - KAMBAYASHI; Hiroshi ; et al.	2013-11-21
Manufacturing Method Of Semiconductor Device App 20130309828 - KAMBAYASHI; Hiroshi ; et al.	2013-11-21
Method For Manufacturing Photoelectric Conversion Elements App 20130295709 - OHMI; Tadahiro ; et al.	2013-11-07
Method For Fabricating Semiconductor Device And The Semiconductor Device App 20130292700 - Teramoto; Akinobu ; et al.	2013-11-07
Contact formation method, semiconductor device manufacturing method, and semiconductor device Grant 8,575,023 - Ohmi , et al. November 5, 2	2013-11-05
Semiconductor device manufacturing method Grant 8,497,214 - Ueda , et al. July 30, 2	2013-07-30
Semiconductor substrate and semiconductor device Grant 8,492,879 - Ohmi , et al. July 23, 2	2013-07-23
Semiconductor Device Manufacturing Method And Semiconductor Device App 20130154059 - Ohmi; Tadahiro ; et al.	2013-06-20
Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method Grant 8,465,719 - Ohmi , et al. June 18, 2	2013-06-18
Inverter Unit, Integrated Circuit Chip, And Vehicle Drive Apparatus App 20130113412 - Sumida; Hitoshi ; et al.	2013-05-09
Inverter unit, integrated circuit chip, and vehicle drive apparatus Grant 8,405,343 - Sumida , et al. March 26, 2	2013-03-26
Ion implanting apparatus and ion implanting method Grant 8,399,862 - Ohmi , et al. March 19, 2	2013-03-19
Method Of Producing Semiconductor Transistor App 20130052816 - Kambayashi; Hiroshi ; et al.	2013-02-28
Semiconductor Transistor App 20130032819 - Kambayashi; Hiroshi ; et al.	2013-02-07
Semiconductor device Grant 8,362,567 - Ohmi , et al. January 29, 2	2013-01-29
Metal Nanoink And Process For Producing The Metal Nanoink, And Die Bonding Method And Die Bonding Apparatus Using The Metal Nanoink App 20130001280 - MAEDA; Toru ; et al.	2013-01-03
Metal nanoink and process for producing the metal nanoink, and die bonding method and die bonding apparatus using the metal nanoink Grant 8,328,928 - Maeda , et al. December 11, 2	2012-12-11
Reduced Pressure Deposition Apparatus And Reduced Pressure Deposition Method App 20120308714 - OHMI; Tadahiro ; et al.	2012-12-06
Surface Treatment Method For Atomically Flattening A Silicon Wafer And Heat Treatment Apparatus App 20120292743 - OHMI; Tadahiro ; et al.	2012-11-22
MIS transistor and CMOS transistor Grant 8,314,449 - Nishimuta , et al. November 20, 2	2012-11-20
Plasma Processing Method And Plasma Processing Apparatus App 20120234491 - OHMI; Tadahiro ; et al.	2012-09-20
Semiconductor Device And Method Of Manufacturing The Same App 20120208375 - Ohmi; Tadahiro ; et al.	2012-08-16
Multilayer circuit board and electronic device Grant 8,217,270 - Ohmi , et al. July 10, 2	2012-07-10
Transistor And Semiconductor Device App 20120146102 - Ohmi; Tadahiro ; et al.	2012-06-14
Plasma processing method and plasma processing apparatus Grant 8,198,195 - Ohmi , et al. June 12, 2	2012-06-12
Semiconductor device and method of manufacturing the same Grant 8,183,670 - Ohmi , et al. May 22, 2	2012-05-22
Transistor and semiconductor device Grant 8,138,527 - Ohmi , et al. March 20, 2	2012-03-20
Method of measuring electronic device and measuring apparatus Grant 8,134,376 - Ohmi , et al. March 13, 2	2012-03-13
Electronic device identifying method and electronic device comprising identification means Grant 8,093,918 - Okayasu , et al. January 10, 2	2012-01-10
Semiconductor storage device including a gate insulating film with a favorable nitrogen concentration profile and method for manufacturing the same Grant 8,067,809 - Kitagawa , et al. November 29, 2	2011-11-29
Semiconductor device manufacturing method and semiconductor manufacturing apparatus Grant 8,030,182 - Ohmi , et al. October 4, 2	2011-10-04
Inverter Unit, Integrated Circuit Chip, And Vehicle Drive Apparatus App 20110222257 - SUMIDA; Hitoshi ; et al.	2011-09-15
Display Apparatus App 20110209567 - SUGAWA; SHIGETOSHI ; et al.	2011-09-01
Device Manufacturing Method App 20110212552 - SUGAWA; SHIGETOSHI ; et al.	2011-09-01
Contact Formation Method, Semiconductor Device Manufacturing Method, and Semiconductor Device App 20110198702 - Ohmi; Tadahiro ; et al.	2011-08-18
Method for manufacturing semiconductor device and method for cleaning semiconductor substrate Grant 7,994,063 - Ohmi , et al. August 9, 2	2011-08-09
Bonding apparatus and wire bonding method Grant 7,975,901 - Maeda , et al. July 12, 2	2011-07-12
Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus Grant 7,968,470 - Ohmi , et al. June 28, 2	2011-06-28
Test circuit, wafer, measuring apparatus, measuring method, device manufacturing method and display apparatus Grant 7,965,097 - Sugawa , et al. June 21, 2	2011-06-21
Inverter unit, integrated circuit chip, and vehicle drive apparatus Grant 7,960,937 - Sumida , et al. June 14, 2	2011-06-14
Metal Nanoink And Process For Producing The Metal Nanoink, And Die Bonding Method And Die Bonding Apparatus Using The Metal Nanoink App 20110114708 - Maeda; Toru ; et al.	2011-05-19
Multilayer Wiring Board App 20110110052 - Ohmi; Tadahiro ; et al.	2011-05-12
P-channel power MIS field effect transistor and switching circuit Grant 7,928,518 - Ohmi , et al. April 19, 2	2011-04-19
Plasma processing method and method for manufacturing an electronic device Grant 7,928,018 - Ohmi , et al. April 19, 2	2011-04-19
Contact Forming Method, Semiconductor Device Manufacturing Method, And Semiconductor Device App 20110073922 - Ohmi; Tadahiro ; et al.	2011-03-31
Organic El Light Emitting Element, Manufacturing Method Thereof, And Display Device App 20110062460 - Ohmi; Tadahiro ; et al.	2011-03-17
Power IC device and method of manufacturing same Grant 7,902,595 - Adan , et al. March 8, 2	2011-03-08
Semiconductor device Grant 7,898,033 - Ohmi , et al. March 1, 2	2011-03-01
Semiconductor Device App 20110042725 - Ohmi; Tadahiro ; et al.	2011-02-24
Semiconductor device Grant 7,893,537 - Ohmi , et al. February 22, 2	2011-02-22
Organic EL light emitting element, manufacturing method thereof, and display device Grant 7,887,385 - Ohmi , et al. February 15, 2	2011-02-15
Method For Manufacturing Semiconductor Device And Method For Cleaning Semiconductor Substrate App 20110034037 - Ohmi; Tadahiro ; et al.	2011-02-10
Test Circuit, Wafer, Measuring Apparatus, Measuring Method, Device Manufacturing Method And Display Apparatus App 20110018577 - SUGAWA; SHIGETOSHI ; et al.	2011-01-27
Composite Material And Manufacturing Method Thereof App 20110017501 - Ohmi; Tadahiro ; et al.	2011-01-27
Test circuit, wafer, measuring apparatus, and measuring method Grant 7,863,925 - Sugawa , et al. January 4, 2	2011-01-04
Semiconductor device Grant 7,863,713 - Ohmi , et al. January 4, 2	2011-01-04
Solar Cell Wherein Solar Photovolatic Thin Film Is Directly Formed On Base App 20100326511 - Wakayama; Yoshihide ; et al.	2010-12-30
Electronic Device Identifying Method App 20100308839 - Okayasu; Toshiyuki ; et al.	2010-12-09
Method and apparatus for managing manufacturing equipment, method for manufacturing device thereby Grant 7,848,828 - Okayasu , et al. December 7, 2	2010-12-07
Bonding Apparatus And Wire Bonding Method App 20100294435 - MAEDA; Toru ; et al.	2010-11-25
Apparatus And Method For Manufacturing Photoelectric Conversion Elements, And Photoelectric Conversion Element App 20100275981 - Ohmi; Tadahiro ; et al.	2010-11-04
Semiconductor device and method of producing the semiconductor device Grant 7,820,558 - Ohmi , et al. October 26, 2	2010-10-26
Electronic device identifying method Grant 7,812,595 - Okayasu , et al. October 12, 2	2010-10-12
Method of Chemical Mechanical Polishing App 20100240283 - Nemoto; Takenao ; et al.	2010-09-23
Semiconductor device Grant 7,800,202 - Ohmi , et al. September 21, 2	2010-09-21
Semiconductor Device Manufacturing Method App 20100216300 - Ueda; Hirokazu ; et al.	2010-08-26
Semiconductor Substrate And Semiconductor Device App 20100213516 - Ohmi; Tadahiro ; et al.	2010-08-26
Manufacturing system, manufacturing method, managing apparatus, managing method and computer readable medium Grant 7,774,081 - Okayasu , et al. August 10, 2	2010-08-10
Soi Substrate And Semiconductor Device Using An Soi Substrate App 20100193900 - Ohmi; Tadahiro ; et al.	2010-08-05
Method of Manufacturing Semiconductor Device and Semiconductor Manufacturing Apparatus App 20100173477 - Ohmi; Tadahiro ; et al.	2010-07-08
Method Of Observing Pattern Evolution Using Variance And Fourier Transform Spectra Of Friction Forces In Cmp App 20100159804 - Sampurno; Yasa ; et al.	2010-06-24
Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD Grant 7,704,893 - Kobayashi , et al. April 27, 2	2010-04-27
Method for manufacturing semiconductor device Grant 7,691,725 - Ohmi , et al. April 6, 2	2010-04-06
P-channel Power Mis Field Effect Transistor And Switching Circuit App 20100072519 - Ohmi; Tadahiro ; et al.	2010-03-25
Semiconductor device App 20100059830 - Ohmi; Tadahiro ; et al.	2010-03-11
Mis Transistor And Cmos Transistor App 20100038722 - NISHIMUTA; Takefumi ; et al.	2010-02-18
P-channel power MIS field effect transistor and switching circuit Grant 7,663,195 - Ohmi , et al. February 16, 2	2010-02-16
Ion Implanting Apparatus And Ion Implanting Method App 20100025821 - Ohmi; Tadahiro ; et al.	2010-02-04
Composite Magnetic Body, Method Of Manufacturing The Same, Circuit Board Using The Same, And Electronic Apparatus Using The Same App 20100000769 - Ohmi; Tadahiro ; et al.	2010-01-07
Semiconductor Device App 20090321832 - Ohmi; Tadahiro ; et al.	2009-12-31
Transistor and semiconductor device App 20090309138 - Ohmi; Tadahiro ; et al.	2009-12-17
Power Ic Device and Method of Manufacturing Same App 20090302382 - Adan; Alberto O. ; et al.	2009-12-10
Silicon Carbide Substrate, Semiconductor Device, Wiring Substrate, And Silicon Carbide Manufacturing Method App 20090263306 - Ohmi; Tadahiro ; et al.	2009-10-22
Reduced Pressure Deposition Apparatus and Reduced Pressure Deposition Method App 20090263566 - Ohmi; Tadahiro ; et al.	2009-10-22
Semiconductor Device App 20090250755 - Ohmi; Tadahiro ; et al.	2009-10-08
Resin pipe App 20090169789 - Ohmi; Tadahiro ; et al.	2009-07-02
Semiconductor Device App 20090166739 - Ohmi; Tadahiro ; et al.	2009-07-02
Semiconductor Device Manufacturing Method and Semiconductor Manufacturing Apparatus App 20090162995 - Ohmi; Tadahiro ; et al.	2009-06-25
Plasma Processing Method and Plasma Processing Apparatus App 20090134120 - Ohmi; Tadahiro ; et al.	2009-05-28
Multilayer structural body and method for cleaning the same App 20090133713 - Ohmi; Tadahiro ; et al.	2009-05-28
Multilayer circuit board and electronic device App 20090120673 - Ohmi; Tadahiro ; et al.	2009-05-14
Semiconductor device and method for manufacturing the same App 20090108452 - Nemoto; Takenao ; et al.	2009-04-30
Chemical Solution Or Pure Water Feeder, Substrate Processing System, Substrate Processing Apparatus, Or Substrate Processing Method App 20090107521 - Ohmi; Tadahiro ; et al.	2009-04-30
Plasma Nitriding Method, Method For Manufacturing Semiconductor Device And Plasma Processing Apparatus App 20090104787 - Ohmi; Tadahiro ; et al.	2009-04-23
Semiconductor device and method for manufacturing the same Grant 7,521,324 - Ohmi , et al. April 21, 2	2009-04-21
Method And Apparatus For Managing Manufacturing Equipment, Method For Manufacturing Device Thereby App 20090081819 - OKAYASU; TOSHIYUKI ; et al.	2009-03-26
Semiconductor Storage Device and Method for Manufacturing the Same App 20090072327 - Kitagawa; Junichi ; et al.	2009-03-19
Manufacturing System, Manufacturing Method, Managing Apparatus, Managing Method And Computer Readable Medium App 20090058456 - OKAYASU; TOSHIYUKI ; et al.	2009-03-05
Semiconductor Manufacturing Method, Semiconductor Manufacturing Apparatus, And Display Unit App 20090050895 - Hiroe; Akihiko ; et al.	2009-02-26
Semiconductor Device App 20090001471 - Ohmi; Tadahiro ; et al.	2009-01-01
Semiconductor device and method of manufacturing the same Grant 7,449,719 - Ohmi , et al. November 11, 2	2008-11-11
Plasma Processing Method and Method for Manufacturing an Electronic Device App 20080268657 - Ohmi; Tadahiro ; et al.	2008-10-30
Test Circuit, Wafer, Measuring Apparatus, Measuring Method, Device Manufacturing Method And Display Apparatus App 20080224725 - Sugawa; Shigetoshi ; et al.	2008-09-18
Method of Measuring Electronic Device and Measuring Apparatus App 20080204050 - Ohmi; Tadahiro ; et al.	2008-08-28
Silicon semiconductor substrate and its manufacturing method Grant 7,411,274 - Yamanaka , et al. August 12, 2	2008-08-12
Dielectric Film and Method of Forming the Same App 20080187747 - Ohmi; Tadahiro ; et al.	2008-08-07
Device Identifying Method, Device Manufacturing Method And Electronic Device App 20080180126 - OKAYASU; TOSHIYUKI ; et al.	2008-07-31
Semiconductor device and method of producing the semiconductor device App 20080135954 - Ohmi; Tadahiro ; et al.	2008-06-12
Organic El Light Emitting Element, Manufacturing Method Thereof, and Display Device App 20080054795 - Ohmi; Tadahiro ; et al.	2008-03-06
Processing Liquid and Processing Method for Semiconductor Device, and Semiconductor Manufacturing Apparatus App 20070227567 - Ohmi; Tadahiro ; et al.	2007-10-04
Resin pipe and pipe material App 20070231523 - Ohmi; Tadahiro ; et al.	2007-10-04
Semiconductor device and method of manufacturing the same App 20070145535 - Ohmi; Tadahiro ; et al.	2007-06-28
Mixer circuit App 20070142017 - Nishimuta; Takefumi ; et al.	2007-06-21
Low noise amplifier App 20070105523 - Nishimuta; Takefumi ; et al.	2007-05-10
Semiconductor device and method for manufacturing the same App 20070052042 - Ohmi; Tadahiro ; et al.	2007-03-08
Method of surface treatment for manufacturing semiconductor device Grant 7,179,746 - Ohmi , et al. February 20, 2	2007-02-20
Semiconductor device and method of manufacturing the same App 20070023780 - Ohmi; Tadahiro ; et al.	2007-02-01
Mis transistor and cmos transistor App 20060278909 - Nishimuta; Takefumi ; et al.	2006-12-14
Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd App 20060264059 - Kobayashi; Yasuo ; et al.	2006-11-23
Silicon carbide product, method for producing same, and method for cleaning silicon carbide product App 20060234058 - Ohmi; Tadahiro ; et al.	2006-10-19
Semiconductor device and process for producing the same App 20060214224 - Ohmi; Tadahiro ; et al.	2006-09-28
Substrate processing system and method for manufacturing semiconductor device App 20060216948 - Ohmi; Tadahiro ; et al.	2006-09-28
Internal Pressure Controller Of Chamber And Internal Pressure Subject -to- Control Type Chamber App 20060207595 - OHMI; Tadahiro ; et al.	2006-09-21
Switched capacitor circuit and semiconductor integrated circuit thereof App 20060180840 - Nishimuta; Takefumi ; et al.	2006-08-17
P-channel power MIS field effect transistor and switching circuit App 20060138538 - Ohmi; Tadahiro ; et al.	2006-06-29
Limiter circuit and semiconductor integrated circuit thereof App 20060139821 - Nishimuta; Takefumi ; et al.	2006-06-29
Dc amplifier and semiconductor integrated circuit therefor App 20060138476 - Nishimuta; Takefumi ; et al.	2006-06-29
Silicon semiconductor substrate and its manufacturing method App 20060131553 - Yamanaka; Hideki ; et al.	2006-06-22
Method for manufacturing semiconductor device App 20060051934 - Ohmi; Tadahiro ; et al.	2006-03-09
Inverter unit, integrated circuit chip, and vehicle drive apparatus App 20060050455 - Sumida; Hitoshi ; et al.	2006-03-09
Semiconductor device including nitride layer Grant 6,756,647 - Inoue , et al. June 29, 2	2004-06-29
Method of manufacturing semiconductor device, and semiconductor device having memory cell Grant 6,753,233 - Terauchi , et al. June 22, 2	2004-06-22
Semiconductor device and method of manufacturing the same App 20040108575 - Ohmi, Tadahiro ; et al.	2004-06-10
Semiconductor device comprising a gate conductive layer with a stress mitigating film thereon Grant 6,720,601 - Terauchi , et al. April 13, 2	2004-04-13
Semiconductor device and manufacturing method thereof App 20040056315 - Ueno, Shuuichi ; et al.	2004-03-25
Semiconductor device including nitride layer App 20040031985 - Inoue, Masao ; et al.	2004-02-19
Method of manufacturing a semiconductor device, and semiconductor device manufactured thereby Grant 6,683,004 - Inoue , et al. January 27, 2	2004-01-27
Nonvolatile semiconductor device Grant 6,649,969 - Tsuji , et al. November 18, 2	2003-11-18
Semiconductor device and method for manufacturing the same Grant 6,638,803 - Mori , et al. October 28, 2	2003-10-28
Semiconductor device App 20030107071 - Terauchi, Takashi ; et al.	2003-06-12
Method of manufacturing semiconductor device, and semiconductor device having memory cell App 20020149068 - Terauchi, Takashi ; et al.	2002-10-17
Semiconductor device and manufacturing method thereof App 20020130373 - Ueno, Shuuichi ; et al.	2002-09-19
Semiconductor device and method for manufacturing the same App 20020110969 - Mori, Kiyoshi ; et al.	2002-08-15
Nonvolatile semiconductor device and fabrication process for the same App 20020100928 - Tsuji, Naoki ; et al.	2002-08-01
Semiconductor device and method of manufacturing the same App 20020081818 - Teramoto, Akinobu ; et al.	2002-06-27
Semiconductor device, and manufacture thereof App 20020047141 - Teramoto, Akinobu	2002-04-25
Semiconductor Device With Isolation Insulator, Interlayer Insulation Film, And A Sidewall Coating Film App 20020027260 - WAKAO, KAZUTOSHI ; et al.	2002-03-07
Method of forming tungsten silicide film, method of fabricating semiconductor devices and semiconductor manufactured thereby Grant 6,221,771 - Ban , et al. April 24, 2	2001-04-24