Patent | Date |
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Workpiece loader for a wet processing system Grant 10,074,554 - Keigler , et al. September 11, 2 | 2018-09-11 |
Electrochemical deposition apparatus and methods for controlling the chemistry therein Grant 9,988,735 - Papapanayiotou , et al. June 5, 2 | 2018-06-05 |
Workpiece Loader For A Wet Processing System App 20170372938 - Keigler; Arthur ;   et al. | 2017-12-28 |
Workpiece Holder For A Wet Processing System App 20170372937 - Keigler; Arthur ;   et al. | 2017-12-28 |
Wet Processing System And Method Of Operating App 20170370017 - Keigler; Arthur ;   et al. | 2017-12-28 |
Seed layer deposition in microscale features Grant 9,714,474 - Keigler , et al. July 25, 2 | 2017-07-25 |
Electrochemical deposition apparatus and methods for controlling the chemistry therein Grant 9,637,836 - Papapanayiotou , et al. May 2, 2 | 2017-05-02 |
Method And Apparatus For Forming Emi Shielding Layers On Semiconductor Packages App 20160365317 - Keigler; Arthur ;   et al. | 2016-12-15 |
Parallel single substrate marangoni module Grant 9,508,582 - Keigler , et al. November 29, 2 | 2016-11-29 |
Apparatus for fluid processing a workpiece Grant 9,453,290 - Keigler , et al. September 27, 2 | 2016-09-27 |
Parallel single substrate processing system Grant 9,449,862 - Keigler , et al. September 20, 2 | 2016-09-20 |
Method for Increasing Adhesion of Copper to Polymeric Surfaces App 20160260673 - Seryogin; Georgiy ;   et al. | 2016-09-08 |
Substrate holder Grant 9,421,617 - Goodman , et al. August 23, 2 | 2016-08-23 |
Method for increasing adhesion of copper to polymeric surfaces Grant 9,355,864 - Seryogin , et al. May 31, 2 | 2016-05-31 |
Electrochemical deposition apparatus with remote catholyte fluid management Grant 9,303,329 - Keigler , et al. April 5, 2 | 2016-04-05 |
Method for Increasing Adhesion of Copper to Polymeric Surfaces App 20160071703 - Seryogin; Georgiy ;   et al. | 2016-03-10 |
Parallel single substrate processing system with alignment features on a process section frame Grant 9,257,319 - Keigler February 9, 2 | 2016-02-09 |
Substrate processing pallet with cooling Grant 9,147,588 - Goodman , et al. September 29, 2 | 2015-09-29 |
Substrate loader and unloader having an air bearing support Grant 9,117,856 - Goodman , et al. August 25, 2 | 2015-08-25 |
Electrochemical Deposition Apparatus With Remote Catholyte Fluid Management App 20150129418 - Keigler; Arthur ;   et al. | 2015-05-14 |
Electro chemical deposition and replenishment apparatus Grant 9,017,528 - Papapanayiotou , et al. April 28, 2 | 2015-04-28 |
Electro chemical deposition and replenishment apparatus Grant 9,005,409 - Guarnaccia , et al. April 14, 2 | 2015-04-14 |
Insoluble Anode With a Plurality of Switchable Conductive Elements Used to Control Current Density in a Plating Bath App 20150090599 - Hander; Jonathan ;   et al. | 2015-04-02 |
Substrate loader and unloader Grant 8,967,935 - Goodman , et al. March 3, 2 | 2015-03-03 |
Method And Apparatus For Removal Of Photoresist Using Improved Chemistry App 20150047674 - Goodman; Daniel L. ;   et al. | 2015-02-19 |
Method For Increasing Adhesion Of Copper To Polymeric Surfaces App 20150044871 - Seryogin; Georgiy ;   et al. | 2015-02-12 |
Electrochemical Deposition Apparatus And Methods For Controlling The Chemistry Therein App 20150008134 - Papapanayiotou; Demetrius ;   et al. | 2015-01-08 |
Electrochemical Deposition Apparatus And Methods For Controlling The Chemistry Therein App 20150008133 - Papapanayiotou; Demetrius ;   et al. | 2015-01-08 |
Electrochemical Deposition Apparatus And Methods For Controlling The Chemistry Therein App 20150008119 - Papapanayiotou; Demetrius ;   et al. | 2015-01-08 |
Edge bevel removal apparatus and method Grant 8,858,755 - Goodman , et al. October 14, 2 | 2014-10-14 |
Substrate loader and unloader having a Bernoulli support Grant 8,613,474 - Goodman , et al. December 24, 2 | 2013-12-24 |
Apparatus For Fluid Processing A Workpiece App 20130334036 - KEIGLER; Arthur ;   et al. | 2013-12-19 |
Incorporating High-Purity Copper Deposit As Smoothing Step After Direct On-Barrier Plating To Improve Quality Of Deposited Nucleation Metal In Microscale Features App 20130213816 - Chiu; Johannes S. ;   et al. | 2013-08-22 |
Method for fluid processing a workpiece Grant 8,512,543 - Keigler , et al. August 20, 2 | 2013-08-20 |
Wetting a workpiece surface in a fluid-processing system Grant 8,425,687 - Keigler April 23, 2 | 2013-04-23 |
Apparatus for thermal processing with micro-environment Grant 8,420,981 - Goodman , et al. April 16, 2 | 2013-04-16 |
Edge Bevel Removal Apparatus And Method App 20130048610 - GOODMAN; Daniel ;   et al. | 2013-02-28 |
Electroplated Lead-free Bump Deposition App 20120325671 - Keigler; Arthur ;   et al. | 2012-12-27 |
Method and apparatus for fluid processing a workpiece Grant 8,277,624 - Keigler , et al. October 2, 2 | 2012-10-02 |