| Patent | Date |
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Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 10,720,325 - Nitta , et al. | 2020-07-21 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,604,842 - Harada , et al. | 2020-03-31 |
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
Grant 10,586,698 - Hashimoto , et al. | 2020-03-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190218666 - HARADA; Katsuyoshi ; et al. | 2019-07-18 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,290,492 - Harada , et al. | 2019-05-14 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180240665 - SANO; Atsushi ; et al. | 2018-08-23 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
App 20180218897 - NITTA; Takafumi ; et al. | 2018-08-02 |
Substrate processing apparatus for forming film including at least two different elements
Grant 10,026,607 - Takasawa , et al. July 17, 2 | 2018-07-17 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170345645 - HARADA; Katsuyoshi ; et al. | 2017-11-30 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
App 20170263439 - HASHIMOTO; Yoshitomo ; et al. | 2017-09-14 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus For Forming Film Including At Least Two Different Elements
App 20170200599 - TAKASAWA; Yushin ; et al. | 2017-07-13 |
Substrate Processing Apparatus For Forming Film Including At Least Two Different Elements
App 20160329208 - TAKASAWA; Yushin ; et al. | 2016-11-10 |
Substrate processing apparatus capable of forming films including at least two different elements
Grant 9,487,861 - Takasawa , et al. November 8, 2 | 2016-11-08 |
Method of manufacturing semiconductor device for forming film including at least two different elements
Grant 9,478,417 - Takasawa , et al. October 25, 2 | 2016-10-25 |
Subtrate Processing Apparatus Capable Forming Film Including At Least Two Different Elements
App 20160298236 - TAKASAWA; Yushin ; et al. | 2016-10-13 |
Method of manufacturing semiconductor device
Grant 9,455,137 - Hirose , et al. September 27, 2 | 2016-09-27 |
Method of manufacturing semiconductor device for forming film including at least two different elements
Grant 9,443,719 - Takasawa , et al. September 13, 2 | 2016-09-13 |
Method of manufacturing semiconductor device for forming film including at least two different elements
Grant 9,443,720 - Takasawa , et al. September 13, 2 | 2016-09-13 |
Method Of Manufacturing Semiconductor Device
App 20160211133 - TAKASAWA; Yushin ; et al. | 2016-07-21 |
Method Of Manufacturing Semiconductor Device
App 20160211132 - TAKASAWA; Yushin ; et al. | 2016-07-21 |
Method Of Manufacturing Semiconductor Device
App 20160211134 - TAKASAWA; Yushin ; et al. | 2016-07-21 |
Method of manufacturing semiconductor device by forming a film on a substrate
Grant 9,384,969 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate
Grant 9,384,970 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate
Grant 9,384,966 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate
Grant 9,384,971 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate
Grant 9,385,013 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate
Grant 9,384,968 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate
Grant 9,384,972 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate
Grant 9,384,967 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,378,943 - Hirose , et al. June 28, 2 | 2016-06-28 |
Method and Apparatus of Manufacturing a Semiconductor Device by Forming a Film on a Substrate
App 20160148824 - TAKASAWA; Yushin ; et al. | 2016-05-26 |
Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus
Grant 9,334,567 - Hirose , et al. May 10, 2 | 2016-05-10 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 9,330,904 - Takasawa , et al. May 3, 2 | 2016-05-03 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements
Grant 9,318,316 - Takasawa , et al. April 19, 2 | 2016-04-19 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 9,312,123 - Takasawa , et al. April 12, 2 | 2016-04-12 |
Substrate processing apparatus
Grant 9,269,566 - Akae , et al. February 23, 2 | 2016-02-23 |
Method Of Manufacturing Semiconductor Device
App 20160013044 - Hirose; Yoshiro ; et al. | 2016-01-14 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150371843 - TAKASAWA; Yushin ; et al. | 2015-12-24 |
Substrate processing apparatus
Grant 9,217,199 - Hirose , et al. December 22, 2 | 2015-12-22 |
Method of manufacturing an oxynitride film for a semiconductor device
Grant 9,196,473 - Ota , et al. November 24, 2 | 2015-11-24 |
Substrate Processing Apparatus
App 20150259795 - HIROSE; Yoshiro ; et al. | 2015-09-17 |
Method of manufacturing semiconductor device, substrate processing method, computer-readable medium with program for executing a substrate processing method, and substrate processing apparatus
Grant 9,136,114 - Sasajima , et al. September 15, 2 | 2015-09-15 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150221495 - TAKASAWA; Yushin ; et al. | 2015-08-06 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150214033 - TAKASAWA; Yushin ; et al. | 2015-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150214024 - TAKASAWA; Yushin ; et al. | 2015-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150214031 - TAKASAWA; Yushin ; et al. | 2015-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150214034 - TAKASAWA; Yushin ; et al. | 2015-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150214032 - TAKASAWA; Yushin ; et al. | 2015-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150206742 - TAKASAWA; Yushin ; et al. | 2015-07-23 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150206737 - TAKASAWA; Yushin ; et al. | 2015-07-23 |
Method For Manufacturing Semiconductor Device, Method For Processing Substrate And Substrate Processing Apparatus
App 20150200092 - HIROSE; Yoshiro ; et al. | 2015-07-16 |
Substrate Processing Apparatus
App 20150194302 - AKAE; Naonori ; et al. | 2015-07-09 |
Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus
Grant 9,018,104 - Hirose , et al. April 28, 2 | 2015-04-28 |
Substrate processing apparatus
Grant 9,011,601 - Akae , et al. April 21, 2 | 2015-04-21 |
Substrate Processing Apparatus
App 20150101755 - HIROSE; Yoshiro ; et al. | 2015-04-16 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
Grant 8,946,092 - Hirose , et al. February 3, 2 | 2015-02-03 |
Substrate Processing Apparatus
App 20140318451 - AKAE; Naonori ; et al. | 2014-10-30 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 8,809,204 - Akae , et al. August 19, 2 | 2014-08-19 |
Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion
Grant 8,679,989 - Nakashima , et al. March 25, 2 | 2014-03-25 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus
App 20140024225 - HIROSE; Yoshiro ; et al. | 2014-01-23 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus
App 20130337660 - Ota; Yosuke ; et al. | 2013-12-19 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method And Substrate Processing Apparatus
App 20130273748 - Sasajima; Ryota ; et al. | 2013-10-17 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
Grant 8,546,272 - Hirose , et al. October 1, 2 | 2013-10-01 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
Grant 8,415,258 - Akae , et al. April 9, 2 | 2013-04-09 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 8,409,988 - Takasawa , et al. April 2, 2 | 2013-04-02 |
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus
Grant 8,410,003 - Ota , et al. April 2, 2 | 2013-04-02 |
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus
Grant 8,410,001 - Takasawa , et al. April 2, 2 | 2013-04-02 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparataus
App 20130059451 - AKAE; Naonori ; et al. | 2013-03-07 |
Method For Manufacturing Semiconductor Device, Method For Processing Substrate And Substrate Processing Apparatus
App 20130052836 - Hirose; Yoshiro ; et al. | 2013-02-28 |
Method of forming an insulation film having low impurity concentrations
Grant 8,367,557 - Akae , et al. February 5, 2 | 2013-02-05 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus
App 20120184110 - Hirose; Yoshiro ; et al. | 2012-07-19 |
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus
Grant 8,202,809 - Ota , et al. June 19, 2 | 2012-06-19 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus
App 20120045905 - AKAE; Naonori ; et al. | 2012-02-23 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus
App 20110318940 - OTA; Yosuke ; et al. | 2011-12-29 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
Grant 8,076,251 - Akae , et al. December 13, 2 | 2011-12-13 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20110294280 - TAKASAWA; Yushin ; et al. | 2011-12-01 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus
App 20110256733 - HIROSE; Yoshiro ; et al. | 2011-10-20 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus
App 20110230057 - TAKASAWA; Yushin ; et al. | 2011-09-22 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus
App 20110124204 - Ota; Yosuke ; et al. | 2011-05-26 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20110076857 - AKAE; Naonori ; et al. | 2011-03-31 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 7,884,034 - Hirose , et al. February 8, 2 | 2011-02-08 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20100130024 - TAKASAWA; Yushin ; et al. | 2010-05-27 |
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
App 20100105192 - Akae; Naonori ; et al. | 2010-04-29 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20100055927 - HIROSE; Yoshiro ; et al. | 2010-03-04 |
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
App 20090305517 - Nakashima; Sadao ; et al. | 2009-12-10 |
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus
App 20090114146 - Takasawa; Yushin ; et al. | 2009-05-07 |
Method of producing semiconductor device, and substrate processing apparatus
App 20090117714 - Akae; Naonori ; et al. | 2009-05-07 |
Manufacturing Method Of Semiconductor Device And Substrate Processing Apparatus
App 20080268644 - Kameda; Kenji ; et al. | 2008-10-30 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
Grant 6,943,089 - Takasawa , et al. September 13, 2 | 2005-09-13 |
Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus
Grant 6,821,871 - Nomura , et al. November 23, 2 | 2004-11-23 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
App 20020025651 - Takasawa, Yushin ; et al. | 2002-02-28 |
Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus
App 20020016051 - Nomura, Hisashi ; et al. | 2002-02-07 |
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