| Patent | Date |
|---|
Semiconductor Wafer, Manufacturing Method For Semiconductor Wafer, And Manufacturing Method For Semiconductor Device
App 20220216051 - KOIKE; Takashi ; et al. | 2022-07-07 |
Position Measuring Apparatus And Measuring Method
App 20220084864 - TAKAKUWA; Manabu | 2022-03-17 |
Substrate bonding apparatus
Grant 11,267,237 - Terai , et al. March 8, 2 | 2022-03-08 |
Template, imprint apparatus, imprint method and imprint apparatus management method
Grant 11,152,218 - Takakuwa October 19, 2 | 2021-10-19 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device
App 20210296152 - NAGAI; Satoshi ; et al. | 2021-09-23 |
Exposure Method, Exposure Apparatus, And Semiconductor Device Manufacturing Method
App 20210294205 - TERAI; Hayato ; et al. | 2021-09-23 |
Substrate Bonding Apparatus
App 20210078317 - TERAI; Hayato ; et al. | 2021-03-18 |
Semiconductor Wafer, Manufacturing Method For Semiconductor Wafer, And Manufacturing Method For Semiconductor Device
App 20210066068 - KOIKE; Takashi ; et al. | 2021-03-04 |
Exposure apparatus, exposure method, and semiconductor device manufacturing method
Grant 10,921,722 - Takakuwa February 16, 2 | 2021-02-16 |
Patterning support system, patterning method, and nonvolatile recording medium
Grant 10,627,726 - Takakuwa | 2020-04-21 |
Patterning Support System, Patterning Method, And Nonvolatile Recording Medium
App 20200019073 - TAKAKUWA; Manabu | 2020-01-16 |
Exposure Apparatus, Exposure Method, And Semiconductor Device Manufacturing Method
App 20190271922 - TAKAKUWA; Manabu | 2019-09-05 |
Substrate measurement system, method of measuring substrate, and computer program product
Grant 10,295,409 - Toshima , et al. | 2019-05-21 |
Alignment method, pattern formation system, and exposure device
Grant 10,283,392 - Takakuwa | 2019-05-07 |
Measurement method, measurement program, and measurement system
Grant 10,276,459 - Konomi , et al. | 2019-04-30 |
Imprint apparatus and imprint method
Grant 10,241,397 - Takakuwa , et al. | 2019-03-26 |
Imprinting apparatus and imprinting method
Grant 10,093,044 - Mizuta , et al. October 9, 2 | 2018-10-09 |
Measurement Method, Measurement Program, And Measurement System
App 20180269116 - KONOMI; Kenji ; et al. | 2018-09-20 |
Alignment Method, Pattern Formation System, And Exposure Device
App 20180233389 - TAKAKUWA; Manabu | 2018-08-16 |
Alignment method, pattern formation system, and exposure device
Grant 9,966,284 - Takakuwa May 8, 2 | 2018-05-08 |
Deposition supporting system, depositing apparatus and manufacturing method of a semiconductor device
Grant 9,966,316 - Takakuwa May 8, 2 | 2018-05-08 |
Imprint device and pattern forming method
Grant 9,952,505 - Okamoto , et al. April 24, 2 | 2018-04-24 |
Pattern accuracy detecting apparatus and processing system
Grant 9,941,177 - Kasa , et al. April 10, 2 | 2018-04-10 |
Deposition Supporting System, Depositing Apparatus And Manufacturing Method Of A Semiconductor Device
App 20170345727 - TAKAKUWA; Manabu | 2017-11-30 |
Positional deviation measuring device, non-transitory computer-readable recording medium containing a positional deviation measuring program, and method of manufacturing semiconductor device
Grant 9,784,573 - Sato , et al. October 10, 2 | 2017-10-10 |
Pattern Accuracy Detecting Apparatus And Processing System
App 20170271214 - KASA; Kentaro ; et al. | 2017-09-21 |
Substrate Measurement System, Method Of Measuring Substrate, And Computer Program Product
App 20170235232 - TOSHIMA; Miki ; et al. | 2017-08-17 |
Alignment Method, Pattern Formation System, And Exposure Device
App 20170148656 - TAKAKUWA; Manabu | 2017-05-25 |
Mask processing apparatus and mask processing method
Grant 9,632,407 - Sato , et al. April 25, 2 | 2017-04-25 |
Imprinting Apparatus And Imprinting Method
App 20170050351 - MIZUTA; Yoshio ; et al. | 2017-02-23 |
Template, Imprint Apparatus, Imprint Method And Imprint Apparatus Management Method
App 20170040196 - TAKAKUWA; Manabu | 2017-02-09 |
Imprint method and imprint system
Grant 9,541,847 - Suzuki , et al. January 10, 2 | 2017-01-10 |
Positional Deviation Measuring Device, Non-transitory Computer-readable Recording Medium Containing A Positional Deviation Measuring Program, And Method Of Manufacturing Semiconductor Device
App 20160245645 - SATO; Hidenori ; et al. | 2016-08-25 |
Reticle mark arrangement method and nontransitory computer readable medium storing a reticle mark arrangement program
Grant 9,396,299 - Nakagawa , et al. July 19, 2 | 2016-07-19 |
Mask Processing Apparatus, Mask Processing Method And Recording Medium
App 20160018730 - Sato; Hidenori ; et al. | 2016-01-21 |
Imprint method and imprint apparatus
Grant 9,240,336 - Takakuwa January 19, 2 | 2016-01-19 |
Imprint Apparatus And Imprint Method
App 20160009020 - Takakuwa; Manabu ; et al. | 2016-01-14 |
Reticle Mark Arrangement Method And Nontransitory Computer Readable Medium Storing A Reticle Mark Arrangement Program
App 20150339423 - Nakagawa; Shinichi ; et al. | 2015-11-26 |
Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method
Grant 9,188,879 - Kasa , et al. November 17, 2 | 2015-11-17 |
Imprint Device And Pattern Forming Method
App 20150251350 - OKAMOTO; Yosuke ; et al. | 2015-09-10 |
Pattern formation method for manufacturing semiconductor device using phase-separating self-assembling material
Grant 9,087,875 - Takakuwa , et al. July 21, 2 | 2015-07-21 |
Imprint Method And Imprint Apparatus
App 20150170922 - TAKAKUWA; MANABU | 2015-06-18 |
Exposure apparatus, exposure method, and method of manufacturing semiconductor device
Grant 8,953,163 - Kasa , et al. February 10, 2 | 2015-02-10 |
Pattern Formation Method And Pattern Formation Apparatus
App 20140340660 - SUZUKI; Masato ; et al. | 2014-11-20 |
Pattern Formation Method And Method For Manufacturing Semiconductor Device
App 20140242799 - TAKAKUWA; Manabu ; et al. | 2014-08-28 |
Pattern formation method, pattern formation apparatus, and recording medium recorded with alignment program
Grant 8,765,034 - Takakuwa July 1, 2 | 2014-07-01 |
Alignment Measurement System, Overlay Measurement System, And Method For Manufacturing Semiconductor Device
App 20140094015 - KASA; Kentaro ; et al. | 2014-04-03 |
Pattern Formation Method, Pattern Formation Apparatus, And Recording Medium Recorded With Alignment Program
App 20140071413 - TAKAKUWA; Manabu | 2014-03-13 |
Exposure Apparatus, Exposure Method, And Method Of Manufacturing Semiconductor Device
App 20140065528 - KASA; Kentaro ; et al. | 2014-03-06 |
Substrate Holding Apparatus, Pattern Transfer Apparatus, And Pattern Transfer Method
App 20130222782 - KASA; Kentaro ; et al. | 2013-08-29 |
Imprint Method And Imprint System
App 20130020741 - SUZUKI; Masato ; et al. | 2013-01-24 |
Nanoimprint Template And Pattern Transcription Apparatus
App 20120068372 - Mimotogi; Akiko ; et al. | 2012-03-22 |
Exposing method
Grant 6,842,230 - Takakuwa , et al. January 11, 2 | 2005-01-11 |
Method of correcting projection optical system and method of manufacturing semiconductor device
Grant 6,741,327 - Nomura , et al. May 25, 2 | 2004-05-25 |
Exposing method
App 20030117599 - Takakuwa, Manabu ; et al. | 2003-06-26 |
Method of correcting projection optical system and method of manufacturing semiconductor device
App 20020001071 - Nomura, Hiroshi ; et al. | 2002-01-03 |
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