| Patent | Date |
|---|
Semiconductor Device, Template, And Method Of Manufacturing Template
App 20220302024 - YOSHIMIZU; Yasuhito ; et al. | 2022-09-22 |
Template, Manufacturing Method Of Template
App 20220299870 - TAKAI; Kosuke ; et al. | 2022-09-22 |
Substrate processing method and substrate processing apparatus
Grant 11,443,963 - Tanabe , et al. September 13, 2 | 2022-09-13 |
Original Plate And Method Of Manufacturing The Same
App 20220082933 - UMEZAWA; Kaori ; et al. | 2022-03-17 |
Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomask
Grant 11,275,305 - Oppata , et al. March 15, 2 | 2022-03-15 |
Exposure mask and manufacturing method of same
Grant 11,249,391 - Kamo , et al. February 15, 2 | 2022-02-15 |
Substrate processing method, substrate processing apparatus, and composite processing apparatus
Grant 11,185,895 - Tanabe , et al. November 30, 2 | 2021-11-30 |
Method Of Manufacturing Template, Template, And Method Of Manufacturing Semiconductor Device
App 20210302830 - TAKAI; Kosuke ; et al. | 2021-09-30 |
Pattern Inspection Method And Photomask Fabrication Method
App 20210294225 - MORISHITA; Keiko ; et al. | 2021-09-23 |
Substrate processing method, substrate processing apparatus, and composite processing apparatus
Grant 11,123,774 - Takai , et al. September 21, 2 | 2021-09-21 |
Processing Apparatus
App 20210242042 - TAKAI; Kosuke ; et al. | 2021-08-05 |
Method For Producing Photomask, Method For Producing Semiconductor Device, Method For Forming Pattern, And Photomask
App 20210048739 - OPPATA; Yukio ; et al. | 2021-02-18 |
Substrate Processing Method And Substrate Processing Apparatus
App 20200294822 - TANABE; Mana ; et al. | 2020-09-17 |
Reflection-type exposure mask
Grant 10,698,311 - Yamane , et al. | 2020-06-30 |
Substrate Processing Apparatus
App 20200147655 - TAKAI; Kosuke | 2020-05-14 |
Substrate Processing Method, Substrate Processing Apparatus, And Composite Processing Apparatus
App 20200078833 - TAKAI; Kosuke ; et al. | 2020-03-12 |
Substrate Processing Method, Substrate Processing Apparatus, And Composite Processing Apparatus
App 20200078834 - TANABE; Mana ; et al. | 2020-03-12 |
Processing Apparatus
App 20190221452 - TAKAI; Kosuke ; et al. | 2019-07-18 |
Exposure Mask And Manufacturing Method Of Same
App 20190086792 - KAMO; Takashi ; et al. | 2019-03-21 |
Reflection-type Exposure Mask
App 20180275506 - YAMANE; Takeshi ; et al. | 2018-09-27 |
EUV mask and method for manufacturing same
Grant 10,018,904 - Takai July 10, 2 | 2018-07-10 |
Lithography mask production method and lithography mask production system
Grant 10,012,896 - Takai July 3, 2 | 2018-07-03 |
Light reflection type lithography mask, its manufacturing method, mask data generation method and mask blank
Grant 9,946,150 - Takai April 17, 2 | 2018-04-17 |
Photomask manufacturing method and photomask
Grant 9,846,357 - Takai December 19, 2 | 2017-12-19 |
Lithography Mask Production Method And Lithography Mask Production System
App 20170269469 - TAKAI; Kosuke | 2017-09-21 |
Defect Inspection Method And Defect Inspection Device
App 20170074802 - TAKAI; Kosuke | 2017-03-16 |
Euv Mask And Method For Manufacturing Same
App 20170038671 - TAKAI; Kosuke | 2017-02-09 |
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask
Grant 9,507,251 - Yoshimori , et al. November 29, 2 | 2016-11-29 |
Light Reflection Type Lithography Mask, Its Manufacturing Method, Mask Data Generation Method And Mask Blank
App 20160274453 - TAKAI; Kosuke | 2016-09-22 |
Reflective Photomask, Method for Inspecting Same and Mask Blank
App 20160266058 - NAKA; Masato ; et al. | 2016-09-15 |
Light-reflective photomask and mask blank for EUV exposure, and manufacturing method of semiconductor device
Grant 9,280,044 - Takai March 8, 2 | 2016-03-08 |
Photomask Manufacturing Method And Photomask
App 20150261081 - TAKAI; Kosuke | 2015-09-17 |
Light-reflective Photomask And Mask Blank For Euv Exposure, And Manufacturing Method Of Semiconductor Device
App 20140242499 - TAKAI; Kosuke | 2014-08-28 |
Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask
App 20140186754 - Yoshimori; Tomoaki ; et al. | 2014-07-03 |
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask
Grant 8,702,901 - Yoshimori , et al. April 22, 2 | 2014-04-22 |
Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask
App 20120129083 - Yoshimori; Tomoaki ; et al. | 2012-05-24 |
Light Reflecting Mask, Exposure Apparatus, And Measuring Method
App 20110286002 - TAKAI; Kosuke | 2011-11-24 |
Light reflecting mask, exposure apparatus, and measuring method
Grant 8,007,960 - Takai August 30, 2 | 2011-08-30 |
Reflection-type mask and method of making the reflection-type mask
Grant 7,932,002 - Takai April 26, 2 | 2011-04-26 |
Light Reflecting Mask, Exposure Apparatus, And Measuring Method
App 20090273772 - TAKAI; Kosuke | 2009-11-05 |
Reflection-type Mask And Method Of Making The Reflection-type Mask
App 20090220869 - TAKAI; Kosuke | 2009-09-03 |
Light Reflection Mask, Method Of Manufacturing The Same And Semiconductor Device
App 20080268352 - TAKAI; Kosuke | 2008-10-30 |
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