Tachikawa; Toshihiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tachikawa; Toshihiro.The latest application filed is for "substrate-placing stage and manufacturing method thereof".
- Tachikawa; Toshihiro - Kanagawa JP
- Tachikawa; Toshihiro - Isehara JP
- TACHIKAWA; Toshihiro - Isehara-city JP
- Tachikawa; Toshihiro - Yokohama JP
- Tachikawa; Toshihiro - Isehara-shi JP
- Tachikawa; Toshihiro - Yokohama-shi JP
| Patent | Date |
|---|---|
| Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater Grant 10,462,850 - Hirano , et al. Oc | 2019-10-29 |
| Substrate-placing Stage And Manufacturing Method Thereof App 20190228953 - TACHIKAWA; Toshihiro ; et al. | 2019-07-25 |
| Substrate support device Grant 10,276,410 - Tachikawa , et al. | 2019-04-30 |
| Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit Grant 9,414,441 - Takahara , et al. August 9, 2 | 2016-08-09 |
| Shaft-equipped Heater Unit And Method For Manufacturing Shaft-equipped Heater Unit App 20140083995 - Takahara; Gou ; et al. | 2014-03-27 |
| Method Of Manufacturing Ceramic Sintered Body, Ceramic Sintered Body, And Ceramic Heater App 20130200067 - Hirano; Satoshi ; et al. | 2013-08-08 |
| Substrate Support Device App 20130134148 - TACHIKAWA; Toshihiro ; et al. | 2013-05-30 |
| Substrate supporting apparatus Grant RE43,837 - Kida , et al. December 4, 2 | 2012-12-04 |
| Electrostatic chucking stage and substrate processing apparatus Grant RE42,175 - Sago , et al. March 1, 2 | 2011-03-01 |
| Heater unit Grant 7,851,728 - Futakuchiya , et al. December 14, 2 | 2010-12-14 |
| Substrate supporting apparatus Grant 7,503,980 - Kida , et al. March 17, 2 | 2009-03-17 |
| Ceramics heater Grant 7,372,001 - Tachikawa , et al. May 13, 2 | 2008-05-13 |
| Heater unit App 20080006618 - Futakuchiya; Jun ; et al. | 2008-01-10 |
| Substrate supporting apparatus and manufacturing method therefor App 20070157466 - Kida; Naoya ; et al. | 2007-07-12 |
| Apparatus for vapor deposition Grant 7,241,346 - Hanamachi , et al. July 10, 2 | 2007-07-10 |
| Electrostatic chucking stage and substrate processing apparatus Grant 7,220,319 - Sago , et al. May 22, 2 | 2007-05-22 |
| Heater unit Grant 7,045,747 - Futakuchiya , et al. May 16, 2 | 2006-05-16 |
| Device for heating or cooling workpieces and manufacturing method therefor App 20060081601 - Futakuchiya; Jun ; et al. | 2006-04-20 |
| Heater unit App 20050167421 - Futakuchiya, Jun ; et al. | 2005-08-04 |
| Apparatus for vapor deposition App 20040194710 - Hanamachi, Toshihiko ; et al. | 2004-10-07 |
| Ceramics heater App 20040112888 - Tachikawa, Toshihiro ; et al. | 2004-06-17 |
| Electrostatic chucking stage and substrate processing apparatus App 20030222416 - Sago, Yasumi ; et al. | 2003-12-04 |
| Heating apparatus Grant 6,376,808 - Tachikawa , et al. April 23, 2 | 2002-04-23 |
| Heating apparatus App 20010042744 - Tachikawa, Toshihiro ; et al. | 2001-11-22 |
| Ceramic heater device and film forming device using the same App 20010029895 - Hanamachi, Toshihiko ; et al. | 2001-10-18 |
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