U.S. patent number RE43,837 [Application Number 13/049,056] was granted by the patent office on 2012-12-04 for substrate supporting apparatus.
This patent grant is currently assigned to NHK Spring Co., Ltd.. Invention is credited to Jun Futakuchiya, Naoya Kida, Toshihiro Tachikawa.
United States Patent |
RE43,837 |
Kida , et al. |
December 4, 2012 |
Substrate supporting apparatus
Abstract
A substrate supporting apparatus includes a plate member of an
aluminum alloy having a flat upper surface, bottomed pits formed in
the plate member, and spacer members held in the pits,
individually. The spacer members are sapphire spheres. The diameter
of each spacer member is a little smaller than that of each pit.
The upper end of each spacer member projects from the upper surface
of the plate member. A spot facing is formed in a region that
includes the open edge portion of the pit. A bending portion which
is obtained by plastically deforming the open edge portion of the
pit toward the spacer member is formed on a bottom surface of the
spot facing. A V-shaped groove is formed behind the bending
portion.
Inventors: |
Kida; Naoya (Yokohama,
JP), Tachikawa; Toshihiro (Yokohama, JP),
Futakuchiya; Jun (Yokohama, JP) |
Assignee: |
NHK Spring Co., Ltd.
(Yokohama-shi, JP)
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Family
ID: |
38231358 |
Appl.
No.: |
13/049,056 |
Filed: |
March 16, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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Reissue of: |
11642155 |
Dec 20, 2006 |
7503980 |
Mar 17, 2009 |
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Foreign Application Priority Data
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Dec 27, 2005 [JP] |
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2005-376558 |
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Current U.S.
Class: |
118/728;
156/345.54; 156/345.52; 118/724; 118/500; 156/345.53; 118/725;
156/345.51 |
Current CPC
Class: |
F16C
29/046 (20130101); H01L 21/68757 (20130101); H01L
21/6875 (20130101); C23C 16/4581 (20130101); Y10T
29/49165 (20150115) |
Current International
Class: |
H01L
21/00 (20060101); C23C 16/00 (20060101); C23C
14/00 (20060101) |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2000183146 |
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Jun 2000 |
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JP |
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2001-508599 |
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Jun 2001 |
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JP |
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3784253 |
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Mar 2006 |
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JP |
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WO 98/32893 |
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Jul 1998 |
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WO |
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Primary Examiner: Kackar; Ram N.
Attorney, Agent or Firm: Holtz, Holtz. Goodman & Chick,
PC
Claims
What is claimed is:
1. A substrate supporting apparatus comprising: a metallic plate
member having a flat upper surface; and a plurality of spacer
arrangement portions provided at the upper surface of the plate
member to support a substrate; wherein each of the spacer
arrangement .[.portion.]. .Iadd.portions .Iaddend.comprises: a pit
formed in the upper surface of the plate member and having a
circular open edge portion and a bottom, wherein the open edge
portion and the bottom of the pit are integrally formed with the
plate member as one piece; a spacer member which has a diameter
smaller than an inside diameter of the pit, and which is held in
the pit and has an upper end projecting from the upper surface of
the plate member; a bending portion which is formed by plastically
deforming the open edge portion of the pit toward the spacer member
so that an opening width of the open edge portion of the pit is
smaller than the diameter of the spacer member, wherein the bending
portion and the plate member are integrally formed as one piece;
and a groove formed in the plate member and located behind the
bending portion so as to extend along a circumferential direction
of the open edge portion of the pit; wherein the groove has a
V-shaped cross section, and the groove and the bending portion are
arranged individually in continuous rings covering an entire
circumference of the open edge portion; wherein a spot facing is
formed on a part of the upper surface of the plate member which
surrounds the open edge portion of the pit, and wherein the bending
portion and the groove are formed on a bottom surface of the spot
facing; and wherein an inner bump and an outer bump are formed
around the groove of the bottom surface of the spot facing, wherein
the inner bump is raised higher than the outer bump, and wherein
the bumps are confined to positions lower than the upper surface of
the plate member.
2. A substrate supporting apparatus according to claim 1, wherein
the spacer member is a sphere of aluminum oxide, and the plate
member is formed of an aluminum alloy.
3. A substrate supporting apparatus according to claim 1, wherein
the spacer member is a sphere of a ceramic material, and the plate
member is formed of an aluminum alloy.
.Iadd.4. A substrate supporting apparatus comprising: a metallic
plate member having a flat upper surface; and a plurality of spacer
arrangement portions provided at the upper surface of the plate
member to support a substrate; wherein each of the spacer
arrangement portions comprises: a pit formed in the upper surface
of the plate member and having a circular open edge portion and a
bottom, wherein the open edge portion and the bottom of the pit are
integrally formed with the plate member as one piece; a spacer
member which has a diameter smaller than an inside diameter of the
pit, and which is held in the pit and has an upper end projecting
from the upper surface of the plate member; a bending portion which
is formed by plastically deforming the open edge portion of the pit
toward the spacer member so that an opening width of the open edge
portion of the pit is smaller than the diameter of the spacer
member, wherein the bending portion and the plate member are
integrally formed as one piece; and a groove formed in the plate
member and located behind the bending portion so as to extend along
a circumferential direction of the open edge portion of the pit;
wherein the groove has a V-shaped cross section, and the groove and
the bending portion are arranged individually in part on rings
covering an entire circumference of the open edge portion; wherein
a spot facing is formed on a part of the upper surface of the plate
member which surrounds the open edge portion of the pit, and
wherein the bending portion and the groove are formed on a bottom
surface of the spot facing; and wherein an inner bump and an outer
bump are formed around the groove of the bottom surface of the spot
facing, wherein the inner bump is raised higher than the outer
bump, and wherein the bumps are confined to positions lower than
the upper surface of the plate member..Iaddend.
.Iadd.5. A substrate supporting apparatus comprising: a metallic
plate member having a flat upper surface; and a plurality of spacer
arrangement portions provided at the upper surface of the plate
member to support a substrate; wherein each of the spacer
arrangement portions comprises: a pit formed in the upper surface
of the plate member and having a circular open edge portion and a
bottom, wherein the open edge portion and the bottom of the pit are
integrally formed with the plate member as one piece; a spacer
member which is a sphere and has a diameter smaller than an inside
diameter of the pit, and which is held in the pit and has an upper
end projecting from the upper surface of the plate member; a
bending portion which is formed by plastically deforming the open
edge portion of the pit toward the spacer member so that an opening
width of the open edge portion of the pit is smaller than the
diameter of the spacer member, wherein the bending portion and the
plate member are integrally formed as one piece, and the bending
portion is configured to prevent the spacer member from slipping
out of the pit; a gap which is defined between a circumference of
the sphere spacer member and the bending portion; and a groove
formed in the plate member and located behind the bending portion
so as to extend along a circumferential direction of the open edge
portion of the pit; wherein the groove has a V-shaped cross
section, and the groove and the bending portion are arranged
individually in part on rings covering an entire circumference of
the open edge portion; wherein a spot facing is formed on a part of
the upper surface of the plate member which surrounds the open edge
portion of the pit, and wherein the bending portion and the groove
are formed on a bottom surface of the spot facing; and wherein an
inner bump and an outer bump are formed around the groove of the
bottom surface of the spot facing, wherein the inner bump is raised
higher than the outer bump, and wherein the bumps are confined to
positions lower than the upper surface of the plate
member..Iaddend.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is based upon and claims the benefit of priority
from prior Japanese Patent Application No. 2005-376558, filed Dec.
27, 2005, the entire contents of which are incorporated herein by
reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a substrate supporting apparatus
used in an apparatus for processing, for example, a semiconductor
wafer or the like and a manufacturing method therefor.
2. Description of the Related Art
In semiconductor manufacturing processes, a substrate supporting
apparatus that has a heating function and the like is used to
process a substrate, such as a wafer. The substrate supporting
apparatus has a plate member for supporting the substrate. The
substrate is placed on the upper surface of the plate member.
If any particulate dust, a contributor to contamination, exists on
the plate member and adheres to the reverse side of the wafer, it
lowers the quality of semiconductors. To prevent adhesion of the
particulate dust, therefore, an attempt is made to arrange a
plurality of small spacer members on the upper surface of the plate
member and place the wafer on the spacer members. Described in
FIGS. 2a and 2b of Japanese Patent Publication No. 2001-508599, for
example, are a plate member and a plurality of small spacer members
that are arranged on the upper surface of the plate member.
Each of the spacer members is in the form of a sphere or column,
which is fitted into a pit in the plate member by press fit or some
other technique. The spacer members are formed of a ceramic or
another material that has brittleness and a thermal expansion
coefficient lower than that of metal. Possibly, on the other hand,
the plate member may be formed of an aluminum alloy or other
material that has a high thermal expansion coefficient.
In some cases, the plate member and the spacer members may be
considerably different in thermal expansion coefficient. If the
substrate supporting apparatus is exposed to high temperature in,
for example, a wafer treatment process, in such cases, the spacer
members, which are lower in thermal expansion coefficient than the
plate member, may possibly slip out of their corresponding pits of
the plate member. The spacer members can be made less easy to slip
out of the pits by only being brought tightly into contact with the
respective inner surfaces of the pits. If this is done, however,
the plate member thermally contracts to a higher degree than the
spacer members do when the substrate supporting apparatus is
cooled, for example. Accordingly, an excessive stress is generated
in the spacer members and may possibly break the spacer members
that are brittle. Thus, the conventional substrate supporting
apparatus has a problem in structural solidity to resist a heat
cycle or the like.
In the conventional substrate supporting apparatus, moreover, the
upper end of each spacer member simply projects from the upper
surface of the plate member. If any particulate dust that causes
contamination exists on the upper surface of the plate member, in
this arrangement, it moves from the upper surface of the plate
member toward the spacer member and may possibly adhere to the
reverse side of the wafer.
BRIEF SUMMARY OF THE INVENTION
An object of the present invention is to provide a substrate
supporting apparatus, capable of preventing slipping-off or
breakage of spacer members and also supporting a substrate in a
cleaner state.
A substrate supporting apparatus according to the invention
comprises a metallic plate member having a flat upper surface, a
pit formed in each of a plurality of portions of the upper surface
of the plate member and having a circular open edge portion and a
bottom, a spacer member which has a diameter smaller than an inside
diameter of the pit, is held in the pit, and has an upper end
projecting from the upper surface, a bending portion which is
formed by plastically deforming the open edge portion toward the
spacer member so that an opening width of the open edge portion is
smaller than the diameter of the spacer member, and a groove formed
behind the bending portion so as to extend along a circumferential
direction of the open edge portion.
According to this arrangement, there is no possibility of the
spacer member slipping out of the pit, and the spacer member can be
prevented from being cracked owing to a difference in thermal
expansion coefficient or the like. If any particulate dust or the
like that causes contamination exists on the plate member, the
groove and a bump near the bending portion can restrain it from
being transferred from the upper surface of the plate member onto
the spacer member. Thus, a substrate can be kept cleaner when it is
supported.
In a preferred aspect of the invention, the groove has a V-shaped
cross section, and the groove and the bending portion are arranged
individually in continuous rings covering an entire circumference
of the open edge portion.
Preferably, a spot facing should be formed on that part of the
upper surface of the plate member which surrounds the open edge
portion, the bending portion and the groove being formed on a
bottom surface of the spot facing. Further, a bump should be formed
around the groove of the bottom surface of the spot facing, the
bump being confined to a position lower than the upper surface of
the plate member.
An example of the spacer member is a sphere of aluminum oxide
(e.g., corundum such as sapphire or ruby) or a ceramic material,
such as silicon carbide, alumina, aluminum nitride, or magnesia.
The plate member is formed of a metallic material selected from a
group of metals including aluminum, aluminum alloy, stainless
steel, nickel, nickel alloy, titanium, titanium alloy, copper,
copper alloy, etc.
Additional objects and advantages of the invention will be set
forth in the description which follows, and in part will be obvious
from the description, or may be learned by practice of the
invention. The objects and advantages of the invention may be
realized and obtained by means of the instrumentalities and
combinations particularly pointed out hereinafter.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
The accompanying drawings, which are incorporated in and constitute
a part of the specification, illustrate embodiments of the
invention, and together with the general description given above
and the detailed description of the embodiments given below, serve
to explain the principles of the invention.
FIG. 1 is a sectional view of a wafer processor provided with a
substrate supporting apparatus according to a first embodiment of
the invention;
FIG. 2 is a perspective view of a plate member of the substrate
supporting apparatus shown in FIG. 1;
FIG. 3 is an enlarged plan view of a spacer arrangement portion of
the plate member shown in FIG. 1;
FIG. 4 is a sectional view of the spacer arrangement portion taken
along line F4-F4 of FIG. 3;
FIG. 5 is a sectional view of a part of the plate member before the
formation of a bending portion of the spacer arrangement portion
shown in FIG. 4;
FIG. 6 is a sectional view showing the plate member, a spacer
member, and a wedgy tool;
FIG. 7 is a sectional view showing a state in which the bending
portion is formed on the plate member;
FIG. 8 is a sectional view of a spacer arrangement portion
according to a second embodiment of the invention; and
FIG. 9 is a sectional view of a spacer arrangement portion
according to a third embodiment of the invention.
DETAILED DESCRIPTION OF THE INVENTION
Substrate supporting apparatuses according to embodiments of the
present invention will now be described with reference to FIGS. 1
to 9.
FIG. 1 shows a wafer processor 10 that is used in, for example,
semiconductor manufacturing processes. The wafer processor 10 is
used in processes such as chemical vapor deposition (CVD), plasma
vapor deposition (PVD), etching, etc. The processor 10 comprises a
sealed case 11 and a substrate supporting apparatus 12 that is
arranged in the case 11.
The substrate supporting apparatus 12 includes a disc-shaped plate
member 20 of a metal, such as an aluminum alloy, a post member 21
that supports the plate member 20 from the underside, and the like.
The plate member 20 contains a heater unit (not shown). The heater
unit heats the plate member 20 to a predetermined temperature. A
substrate W, such as a wafer as an example of a supported object
(workpiece), is placed on an upper surface 22 of the plate member
20.
FIG. 2 is a perspective view showing the plate member 20 from the
side of the upper surface 22. The plate member 20 is circular, as
viewed from above. The upper surface 22 of the plate member 20 is
finished flat by machining or the like.
Spacer arrangement portions 30 of a common structure are provided
in a plurality of spots of the upper surface 22 of the plate member
20, that is, in three or more spots on the plate member 20 at
regular intervals in the circumferential direction thereof.
Further, through-holes 31 (shown in FIG. 2) penetrate, e.g., three
circumferential parts of the plate member 20 in its thickness
direction. Pins (not shown) for pushing up the substrate W on the
plate member 20 can be inserted individually into the through-holes
31. These pins are inserted into the through-holes 31 from under
the plate member 20.
FIGS. 3 and 4 show details of one of the spacer arrangement
portions 30. The spacer arrangement portion 30 has a pit 40 formed
in the upper surface 22 of the plate member 20 and a spacer member
42 held in the pit 40. As shown in FIG. 4, the pit 40 has a bottom
41. The top end of the pit 40 is open. The bottom 41 of the pit 40
is in the form of a hemispherical recess. An open edge portion 45
of the pit 40 is circular, as viewed from above.
An example of the spacer member 42 is a sphere of sapphire.
Alternatively, the spacer member 42 may be formed of a sphere of
aluminum oxide, such as ruby, or any other ceramic material. The
spacer member 42 has a diameter D1 of, for example, 2 mm. A
diameter D2 of the pit 40 is a little larger than the diameter D1
of the spacer member 42. For example, D2 is about 0.01 mm larger
than D1.
The diameter D2 of the pit 40 is a dimension that is not smaller
than the diameter D1 of the spacer member 42 even when the plate
member 20 is cooled so that its amount of thermal contraction is
larger than that of the spacer member 42. An upper end 42a of the
spacer member 42 projects by H (shown in FIG. 4) from the upper
surface 22 of the plate member 20. The projection amount H of the
spacer member 42 can be accurately regulated as the bottom surface
of the spacer member 42 engages the bottom 41 of the pit 40. The
top of the upper end 42a of the spacer member 42 is in contact with
the under surface of the substrate W.
A spot facing 50 is formed in the upper surface 22 of the plate
member 20 so as to surround the open edge portion 45 of the pit 40.
The spot facing 50 is a plain spot facing that has a flat bottom
surface 50a and is formed by machining using, for example, an NC
machine or the like. A diameter D4 of the spot facing 50 is about
twice or thrice as large as the diameter D1 of the spacer member
42. For example, D4 is 2 to 3 mm larger than D1. A depth D5 of the
spot facing 50 is 0.1 mm, for example.
In the bottom surface 50a of the spot facing 50, a bending portion
55 is formed on the open edge portion 45 of the pit 40. The bending
portion 55 is formed by plastically deforming the open edge portion
45 toward the spacer member 42 by means of a wedgy tool 70, which
will be mentioned later. An opening width D3 of the open edge
portion 45 is smaller than the diameter D1 of the spacer member 42.
The opening width D3 is a dimension that does not exceeds the
diameter D1 of the spacer member 42 even when the plate member 20
is heated and thermally expanded to become larger than the spacer
member 42.
As shown in FIG. 4, a groove 60 with a V-shaped cross section is
formed in the bottom surface 50a of the spot facing 50. The groove
60 is formed along the circumferential direction of the open edge
portion 45 at the back of the bending portion 55 (or on the side
opposite from the spacer member 42). Bumps 61 and 62 are formed
around the groove 60 of the bottom surface 50a of the spot facing
50.
The inner bump 61 is raised higher than the outer bump 62. However,
the respective upper ends of the bumps 61 and 62 are lower than the
upper surface 22 of the plate member 20. Therefore, the bumps 61
and 62 are confined inside the recess of the spot facing 50. As
shown in FIG. 3, the bending portion 55, groove 60, and bumps 61
and 62 are arranged in continuous rings covering the entire
circumference of the open edge portion 45.
The substrate supporting apparatus 12 that comprises the spacer
arrangement portions 30 is manufactured by the following
processes.
First, the flat upper surface 22 is formed on the plate member 20
by machining. Thereafter, the pit 40 that has the bottom 41 and the
spot facing 50 that has the bottom surface 50a are formed in the
upper surface 22 of the plate member 20 by drilling and boring
processes, as shown in FIG. 5. Then, the spacer member 42 is
inserted into the pit 40.
The wedgy tool 70 shown as an example in FIG. 6 is used in a
bending process. It has a cylindrical edge portion 72 that has a
sharp V-shaped tip 71. The tip 71 is in the shape of a ring that
extends along the open edge portion 45 of the pit 40, as viewed
from the distal end side of the edge portion 72. A diameter D7 of
the tip 71 is larger than an inside diameter D2 (shown in FIG. 4)
of the pit 40. A taper angle .theta.1 of an inside slope 73 of the
edge portion 72 is larger than a taper angle .theta.2 of an outside
slope 74. The taper angle .theta.2 of the outside slope 74 may be
zero.
As shown in FIG. 7, the tip 71 of the wedgy tool 70 is pushed in
around the open edge portion 45. Thus, the open edge portion 45 is
plastically deformed toward the spacer member 42 so that its
opening width D3 (shown in FIG. 4) is smaller than the diameter D1
of the spacer member 42.
When the tip 71 of the wedgy tool 70 is pushed in around the open
edge portion 45 of the pit 40, the open edge portion 45 is pushed
toward the spacer member 42 by the inside slope 73 of the edge
portion 72. Thereupon, the V-shaped groove 60 is formed, and the
bending portion 55 is plastically deformed so that it inclines
toward the spacer member 42. Further, the inside bump 61 is formed
as a part of the bottom surface 50a of the spot facing 50 swells.
Furthermore, the outer bump 62 is formed as a part of the bottom
surface 50a of the spot facing 50 is raised by the outside slope 74
of the edge portion 72.
Since the taper angle .theta.1 of the inside slope 73 of the edge
portion 72 is larger than the taper angle .theta.2 of the outside
slope 74, the inside bump 61 is raised higher than the outer bump
62. These bumps 61 and 62 cannot be raised beyond the depth D5 of
the spot facing 50 and is confined inside the recess of the spot
facing 50.
In the semiconductor manufacturing processes, there is a
possibility of particulate dust remaining in a corner 50c (shown in
FIG. 4) of the spot facing 50. The particulate dust in the corner
50c cannot be easily removed even by washing. From some cause,
therefore, the particulate dust may possibly move from the bottom
surface 50a of the spot facing 50 toward the spacer member 42. If
the moving particulate dust reaches the upper end 42a of the spacer
member 42, it may contaminate the under surface of the substrate W
to be supported.
Each spacer arrangement portion 30 of the present embodiment is
formed with the V-shaped groove 60 and the bumps 61 and 62 on the
opposite sides of the groove 60, covering the entire circumference
of the spacer member 42. Therefore, the particulate dust or the
like that is urged to move from the bottom surface 50a of the spot
facing 50 toward the spacer member 42 is blocked by the bumps 61
and 62. Further, the particulate dust is captured by the groove 60.
Accordingly, the particulate dust or the like that causes
contamination can be restrained from being transferred onto the
upper end 42a of the spacer member 42, so that the substrate W can
be kept cleaner when it is supported. Since the groove 60 and the
bumps 61 and 62 can be simultaneously formed by the wedgy tool 70,
the working process is not laborious.
FIG. 8 shows a spacer arrangement portion 30 according to a second
embodiment of the invention. A groove 60 of the spacer arrangement
portion 30 of this embodiment is formed deeper than the groove 60
according to the first embodiment. A bending portion 55 of FIG. 8
is inclined more sharply toward the spacer member 42. Therefore,
the bending portion 55 is located close to or in contact with the
spacer member 42.
A plate member 20 that is formed of a metal, such as an aluminum
alloy, has a thermal expansion coefficient higher than that of the
spacer member 42. If the plate member 20 is contracted relatively
greatly at low temperature, therefore, a compressive load P1 (shown
in FIG. 8) acts on the spacer member 42. If the plate member 20 is
warped in the direction of arrow P2 by thermal expansion at high
temperature, moreover, the compressive load P1 may also acts on the
spacer member 42.
In the spacer arrangement portion 30 of the present embodiment, the
V-shaped groove 60 is formed behind the bending portion 55, and the
bending portion 55 is liable to bend in the direction of arrow P3
(shown in FIG. 8). Thus, the load P1 is absorbed as the bending
portion 55 bends, so that an excessive stress that can break the
spacer member 42 can be avoided. This effect can be also obtained
with use of the spacer arrangement portion 30 according to the
first embodiment.
FIG. 9 shows a spacer arrangement portion 30 according to a third
embodiment of the invention. A spacer member 42 of this embodiment
has a columnar trunk portion 80, a hemispherical head portion 81,
and a flat lower surface 82. A pit 40 that holds the spacer member
42 has a flat bottom 83. Since other configurations and effects of
the third embodiment are the same as those of the first embodiment
(FIGS. 1 to 7), common numbers are used to designate like portions
of these two embodiments, and a description those portions is
omitted.
The spacer member 42 is not limited to the foregoing embodiments,
but may be in the shape of a rotationally symmetric body, such as a
column, cone, frustum, etc. In short, the pit 40 used should only
have a shape corresponding to the spacer member 42 of which the
shape is properly selected as required. Further, a bending portion
55, a groove 60, and bumps 61 and 62 may be formed in a part around
the pit 40.
The present invention may be also applied to a substrate supporting
apparatus for supporting any other substrate than a semiconductor
wafer. It is to be understood, in carrying out the present
invention, that the components of the invention, including the
plate member, spacer member, bending portion, and groove, may be
modified suitably.
Additional advantages and modifications will readily occur to those
skilled in the art. Therefore, the invention in its broader aspects
is not limited to the specific details and representative
embodiments shown and described herein. Accordingly, various
modifications may be made without departing from the spirit or
scope of the general inventive concept as defined by the appended
claims and their equivalents.
* * * * *