| Patent | Date |
|---|
Chamber Components With Polished Internal Apertures
App 20220297256 - Sun; Jennifer Y. ; et al. | 2022-09-22 |
Multiple sequential linear powder dispensers for additive manufacturing
Grant 11,446,740 - Rowland , et al. September 20, 2 | 2022-09-20 |
Rare-earth oxide based coatings based on ion assisted deposition
Grant 11,424,136 - Sun , et al. August 23, 2 | 2022-08-23 |
Metal Oxyfluoride Film Formation Methods
App 20220259735 - Deepak; Nitin ; et al. | 2022-08-18 |
Erosion resistant metal silicate coatings
Grant 11,401,599 - He , et al. August 2, 2 | 2022-08-02 |
Methods Of Making Nanopowders, Nanoceramic Materials And Nanoceramic Components
App 20220234959 - Zhan; Guodong ; et al. | 2022-07-28 |
Atomic Layer Deposition Of Protective Coatings For Semiconductor Process Chamber Components
App 20220235458 - Fenwick; David ; et al. | 2022-07-28 |
Method of forming a fluorinated metal film
Grant 11,390,947 - Deepak , et al. July 19, 2 | 2022-07-19 |
Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
Grant 11,373,882 - Sun , et al. June 28, 2 | 2022-06-28 |
Chamber components with polished internal apertures
Grant 11,370,078 - Sun , et al. June 28, 2 | 2022-06-28 |
Multi-layer Plasma Resistant Coating By Atomic Layer Deposition
App 20220157568 - Wu; Xiaowei ; et al. | 2022-05-19 |
Atomic layer deposition of protective coatings for semiconductor process chamber components
Grant 11,326,253 - Fenwick , et al. May 10, 2 | 2022-05-10 |
Magnetic-material Shield Around Plasma Chambers Near Pedestal
App 20220139679 - KONNOTH JOSEPH; Job George ; et al. | 2022-05-05 |
Heat treated ceramic substrate having ceramic coating
Grant 11,279,661 - Sun , et al. March 22, 2 | 2022-03-22 |
Nanopowders, nanoceramic materials and methods of making and use thereof
Grant 11,279,656 - Zhan , et al. March 22, 2 | 2022-03-22 |
Atomic Layer Deposition Coatings For High Temperature Ceramic Components
App 20220081762 - Wu; Xiaowei ; et al. | 2022-03-17 |
High temperature electrostatic chuck bonding adhesive
Grant 11,264,261 - Sun , et al. March 1, 2 | 2022-03-01 |
Multi-layer plasma resistant coating by atomic layer deposition
Grant 11,251,023 - Wu , et al. February 15, 2 | 2022-02-15 |
Ceramic Material With High Thermal Shock Resistance And High Erosion Resistance
App 20220041508 - Duan; Ren-Guan ; et al. | 2022-02-10 |
Fluoride Coating To Improve Chamber Performance
App 20220037126 - Sun; Jennifer Y. ; et al. | 2022-02-03 |
Atomic layer deposition of protective coatings for semiconductor process chamber components
Grant 11,198,936 - Fenwick , et al. December 14, 2 | 2021-12-14 |
Atomic layer deposition of protective coatings for semiconductor process chamber components
Grant 11,198,937 - Fenwick , et al. December 14, 2 | 2021-12-14 |
Atomic layer deposition coatings for high temperature ceramic components
Grant 11,180,847 - Wu , et al. November 23, 2 | 2021-11-23 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
App 20210317563 - Sun; Jennifer Y. ; et al. | 2021-10-14 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20210317049 - Sun; Jennifer Y. ; et al. | 2021-10-14 |
Apparatuses And Methods Of Protecting Nickel And Nickel Containing Components With Thin Films
App 20210319983 - LEI; Pingyan ; et al. | 2021-10-14 |
Plasma Resistant Process Chamber Lid
App 20210301395 - Wu; Xiaowei ; et al. | 2021-09-30 |
Showerhead having a detachable gas distribution plate
Grant 11,130,142 - Lubomirsky , et al. September 28, 2 | 2021-09-28 |
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
App 20210230070 - Sun; Jennifer Y. ; et al. | 2021-07-29 |
Plasma erosion resistant rare-earth oxide based thin film coatings
Grant 11,053,581 - Sun , et al. July 6, 2 | 2021-07-06 |
Y.sub.2O.sub.3--ZrO.sub.2 erosion resistant material for chamber components in plasma environments
Grant 11,014,853 - Sun , et al. May 25, 2 | 2021-05-25 |
Multi-layer coating with diffusion barrier layer and erosion resistant layer
Grant 11,008,653 - Fenwick , et al. May 18, 2 | 2021-05-18 |
Hafnium Aluminum Oxide Coatings Deposited By Atomic Layer Deposition
App 20210123143 - Fenwick; David ; et al. | 2021-04-29 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition
App 20210118703 - Sun; Jennifer Y. ; et al. | 2021-04-22 |
Rare-earth oxide based chamber material
Grant 10,934,216 - Sun , et al. March 2, 2 | 2021-03-02 |
Rare-earth oxide based coatings based on ion assisted deposition
Grant 10,930,526 - Sun , et al. February 23, 2 | 2021-02-23 |
Copolymerized high temperature bonding component
Grant 10,899,892 - Sun , et al. January 26, 2 | 2021-01-26 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application
App 20210010126 - Firouzdor; Vahid ; et al. | 2021-01-14 |
Coated Article And Semiconductor Chamber Apparatus Formed From Yttrium Oxide And Zirconium Oxide
App 20200395226 - Sun; Jennifer Y. ; et al. | 2020-12-17 |
Plasma resistant multi-layer architecture for high aspect ratio parts
Grant 10,858,741 - He , et al. December 8, 2 | 2020-12-08 |
Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide
Grant 10,847,386 - Sun , et al. November 24, 2 | 2020-11-24 |
Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide
Grant 10,840,113 - Sun , et al. November 17, 2 | 2020-11-17 |
Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
Grant 10,840,112 - Sun , et al. November 17, 2 | 2020-11-17 |
Plasma erosion resistant thin film coating for high temperature application
Grant 10,815,562 - Firouzdor , et al. October 27, 2 | 2020-10-27 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
Grant 10,796,888 - Sun , et al. October 6, 2 | 2020-10-06 |
Plasma Resistant Multi-layer Architecture For High Aspect Ratio Parts
App 20200291528 - He; Xiao-Ming ; et al. | 2020-09-17 |
High purity aluminum top coat on substrate
Grant 10,774,436 - Sun , et al. Sept | 2020-09-15 |
Low temperature fluoride glasses and glazes
Grant 10,773,995 - Lee , et al. Sept | 2020-09-15 |
Microwave and induction heat treatment of ceramic coatings
Grant 10,774,006 - Gangakhedkar , et al. September 15, 2 | 2020-09-15 |
Oxy-fluoride Compounds For Chamber Parts Protection
App 20200283897 - DEEPAK; Nitin ; et al. | 2020-09-10 |
Methods of minimizing particles on wafer from plasma spray coatings
Grant 10,766,824 - Gangakhedkar , et al. Sep | 2020-09-08 |
Multi-layer plasma erosion protection for chamber components
Grant 10,755,900 - Tran , et al. A | 2020-08-25 |
Showerhead Having A Detachable Gas Distribution Plate
App 20200238303 - LUBOMIRSKY; Dmitry ; et al. | 2020-07-30 |
Plasma Spray Coating Design Using Phase And Stress Control
App 20200190653 - Sun; Jennifer Y. ; et al. | 2020-06-18 |
Atomic Layer Deposition Coatings For High Temperature Ceramic Components
App 20200181771 - Wu; Xiaowei ; et al. | 2020-06-11 |
Multi-layer Plasma Resistant Coating By Atomic Layer Deposition
App 20200185200 - Wu; Xiaowei ; et al. | 2020-06-11 |
Corrosion Resistant Ground Shield Of Processing Chamber
App 20200185203 - Lubomirsky; Dmitry ; et al. | 2020-06-11 |
Non-line of sight deposition of erbium based plasma resistant ceramic coating
Grant 10,676,819 - Sun | 2020-06-09 |
Metal Oxy-flouride Films Based On Oxidation Of Metal Flourides
App 20200140996 - Wu; Xiaowei ; et al. | 2020-05-07 |
Copolymerized High Temperature Bonding Component
App 20200140620 - Sun; Jennifer Y. ; et al. | 2020-05-07 |
Showerhead having a detachable gas distribution plate
Grant 10,625,277 - Lubomirsky , et al. | 2020-04-21 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
Grant 10,622,194 - Sun , et al. | 2020-04-14 |
Plasma resistant coating with tailorable coefficient of thermal expansion
Grant 10,612,121 - Lee , et al. | 2020-04-07 |
Plasma spray coating design using phase and stress control
Grant 10,604,831 - Sun , et al. | 2020-03-31 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
App 20200087776 - Sun; Jennifer Y. ; et al. | 2020-03-19 |
Rare-earth oxide based chamber material
Grant 10,584,068 - Sun , et al. | 2020-03-10 |
Rare-earth oxide based chamber material
Grant 10,577,286 - Sun , et al. | 2020-03-03 |
Multi-layer plasma resistant coating by atomic layer deposition
Grant 10,573,497 - Wu , et al. Feb | 2020-02-25 |
Copolymerized high temperature bonding component
Grant 10,570,257 - Sun , et al. Feb | 2020-02-25 |
Ion assisted deposition top coat of rare-earth oxide
Grant 10,563,297 - Sun , et al. Feb | 2020-02-18 |
Metal oxy-flouride films based on oxidation of metal flourides
Grant 10,563,303 - Wu , et al. Feb | 2020-02-18 |
Plasma Spray Coating Enhancement Using Plasma Flame Heat Treatment
App 20200035463 - Sun; Jennifer Y. ; et al. | 2020-01-30 |
Ion assisted deposition top coat of rare-earth oxide
Grant 10,544,500 - Sun , et al. Ja | 2020-01-28 |
Erosion Resistant Metal Oxide Coatings
App 20200024194 - Wu; Xiaowei ; et al. | 2020-01-23 |
Erosion Resistant Metal Fluoride Coatings Deposited By Atomic Layer Deposition
App 20200024735 - Wu; Xiaowei ; et al. | 2020-01-23 |
Methods And Apparatus For Enhanced Flow Detection Repeatability Of Thermal-based Mass Flow Controllers (mfcs)
App 20190391602 - Xu; Ming ; et al. | 2019-12-26 |
Erosion Resistant Metal Silicate Coatings
App 20190382880 - He; Xiao-Ming ; et al. | 2019-12-19 |
Zone-controlled Rare-earth Oxide Ald And Cvd Coatings
App 20190382888 - Wu; Xiaowei ; et al. | 2019-12-19 |
Enhanced Anodization For Processing Equipment
App 20190376202 - HE; Xiao-Ming ; et al. | 2019-12-12 |
Plasma erosion resistant rare-earth oxide based thin film coatings
Grant 10,501,843 - Sun , et al. Dec | 2019-12-10 |
Halogen Resistant Coatings And Methods Of Making And Using Thereof
App 20190338418 - Goradia; Prerna ; et al. | 2019-11-07 |
Plasma spray coating enhancement using plasma flame heat treatment
Grant 10,468,235 - Sun , et al. No | 2019-11-05 |
Cold Spray Coating With Sacrificial Filler Powder
App 20190330742 - Wu; Xiaowei ; et al. | 2019-10-31 |
Zone-controlled rare-earth oxide ALD and CVD coatings
Grant 10,443,126 - Wu , et al. Oc | 2019-10-15 |
Flourination process to create sacrificial oxy-flouride layer
Grant 10,443,125 - Wu , et al. Oc | 2019-10-15 |
Zone-controlled Rare-earth Oxide Ald And Cvd Coatings
App 20190309413 - Wu; Xiaowei ; et al. | 2019-10-10 |
Aerosol deposition coating for semiconductor chamber components
Grant 10,418,229 - Sun , et al. Sept | 2019-09-17 |
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
App 20190276366 - Sun; Jennifer Y. ; et al. | 2019-09-12 |
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
Grant 10,409,295 - Xu , et al. Sept | 2019-09-10 |
Atomic Layer Deposition Of Protective Coatings For Semiconductor Process Chamber Components
App 20190271076 - Fenwick; David ; et al. | 2019-09-05 |
Rare-earth Oxide Based Chamber Material
App 20190263722 - Sun; Jennifer Y. ; et al. | 2019-08-29 |
Advanced layered bulk ceramics via field assisted sintering technology
Grant 10,385,459 - Sun , et al. A | 2019-08-20 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20190233343 - Sun; Jennifer Y. ; et al. | 2019-08-01 |
Heat treated ceramic substrate having ceramic coating
Grant 10,364,197 - Sun , et al. July 30, 2 | 2019-07-30 |
Ceramic article with reduced surface defect density
Grant 10,336,656 - Duan , et al. | 2019-07-02 |
High Purity Metallic Top Coat For Semiconductor Manufacturing Components
App 20190194817 - Sun; Jennifer Y. ; et al. | 2019-06-27 |
Method Of Forming A Bulk Article And Semiconductor Chamber Apparatus From Yttrium Oxide And Zirconium Oxide
App 20190157114 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Method Of Forming A Coated Article And Semiconductor Chamber Apparatus From Yttrium Oxide And Zirconium Oxide
App 20190157115 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Coated Article And Semiconductor Chamber Apparatus Formed From Yttrium Oxide And Zirconium Oxide
App 20190157113 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Atomic Layer Deposition Coatings For High Temperature Heaters
App 20190136372 - Zhan; Guodong ; et al. | 2019-05-09 |
Plasma Spray Coating Design Using Phase And Stress Control
App 20190136360 - Sun; Jennifer Y. ; et al. | 2019-05-09 |
Methods Of Minimizing Particles On Wafer From Plasma Spray Coatings
App 20190135704 - GANGAKHEDKAR; Kaushal ; et al. | 2019-05-09 |
Nanopowders, Nanoceramic Materials And Methods Of Making And Use Thereof
App 20190127280 - Zhan; Guodong ; et al. | 2019-05-02 |
Y2O3-SiO2 PROTECTIVE COATINGS FOR SEMICONDUCTOR PROCESS CHAMBER COMPONENTS
App 20190131113 - Fenwick; David ; et al. | 2019-05-02 |
High purity metallic top coat for semiconductor manufacturing components
Grant 10,260,160 - Sun , et al. | 2019-04-16 |
Chamber Components With Polished Internal Apertures
App 20190105751 - Sun; Jennifer Y. ; et al. | 2019-04-11 |
Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance
Grant 10,242,888 - Sun , et al. | 2019-03-26 |
Fluorinated Rare Earth Oxide Ald Coating For Chamber Productivity Enhancement
App 20190078200 - Wu; Xiaowei ; et al. | 2019-03-14 |
Fluorinated Rare Earth Oxide Ald Coating For Chamber Productivity Enhancement
App 20190078206 - Wu; Xiaowei ; et al. | 2019-03-14 |
Rare-earth-based Oxyfluoride Ald Coating For Chamber Productivity Enhancement
App 20190078199 - Wu; Xiaowei ; et al. | 2019-03-14 |
Plasma spray coating design using phase and stress control
Grant 10,196,728 - Sun , et al. Fe | 2019-02-05 |
Chamber components with polished internal apertures
Grant 10,189,141 - Sun , et al. Ja | 2019-01-29 |
Multi-layer plasma resistant coating by atomic layer deposition
Grant 10,186,400 - Wu , et al. Ja | 2019-01-22 |
Plasma Resistant Semiconductor Processing Chamber Components
App 20190019655 - Sun; Jennifer Y. ; et al. | 2019-01-17 |
Coating Architecture For Plasma Sprayed Chamber Components
App 20180366302 - Sun; Jennifer Y. ; et al. | 2018-12-20 |
Semiconductor processing apparatus with protective coating including amorphous phase
Grant 10,157,731 - Sun , et al. Dec | 2018-12-18 |
Microwave And Induction Heat Treatment Of Ceramic Coatings
App 20180327325 - Gangakhedkar; Kaushal ; et al. | 2018-11-15 |
Multi-layer Plasma Erosion Protection For Chamber Components
App 20180330923 - Tran; Toan ; et al. | 2018-11-15 |
Metal Oxy-flouride Films For Chamber Components
App 20180327892 - Wu; Xiaowei ; et al. | 2018-11-15 |
Metal Oxy-flouride Films Based On Oxidation Of Metal Flourides
App 20180327899 - Wu; Xiaowei ; et al. | 2018-11-15 |
Flourination Process To Create Sacrificial Oxy-flouride Layer
App 20180327898 - Wu; Xiaowei ; et al. | 2018-11-15 |
Plasma erosion resistant rare-earth oxide based thin film coatings
Grant 10,119,188 - Sun , et al. November 6, 2 | 2018-11-06 |
Chemistry Compatible Coating Material For Advanced Device On-wafer Particle Performance
App 20180269039 - Sun; Jennifer Y. ; et al. | 2018-09-20 |
Sintered Ceramic Protective Layer Formed By Hot Pressing
App 20180251406 - Sun; Jennifer Y. ; et al. | 2018-09-06 |
Multi-layer Plasma Resistant Coating By Atomic Layer Deposition
App 20180240648 - Wu; Xiaowei ; et al. | 2018-08-23 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application
App 20180230587 - Firouzdor; Vahid ; et al. | 2018-08-16 |
Multiple Sequential Linear Powder Dispensers For Additive Manufacturing
App 20180221948 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Semiconductor processing apparatus with protective coating including amorphous phase
App 20180226232 - Sun; Jennifer Y. ; et al. | 2018-08-09 |
Linear Powder Dispenser That Raster Scans For Additive Manufacturing
App 20180221949 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Low Temperature Fluoride Glasses And Glazes
App 20180208501 - Lee; Chengtsin ; et al. | 2018-07-26 |
Multi-layer Plasma Resistant Coating By Atomic Layer Deposition
App 20180209042 - Wu; Xiaowei ; et al. | 2018-07-26 |
Electrostatic chuck having reduced power loss
Grant 10,026,636 - Makhratchev , et al. July 17, 2 | 2018-07-17 |
Chemistry compatible coating material for advanced device on-wafer particle performance
Grant 10,020,170 - Sun , et al. July 10, 2 | 2018-07-10 |
Methods And Apparatus For Enhanced Flow Detection Repeatability Of Thermal-based Mass Flow Controllers (mfcs)
App 20180188748 - Xu; Ming ; et al. | 2018-07-05 |
Semiconductor Processing Apparatus With A Ceramic-comprising Surface Which Exhibits Fracture Toughness And Halogen Plasma Resistance
App 20180174866 - Sun; Jennifer Y. ; et al. | 2018-06-21 |
Cleaning process that precipitates yttrium oxy-flouride
Grant 9,999,907 - Lee , et al. June 19, 2 | 2018-06-19 |
Substrate Support Assembly Having A Plasma Resistant Protective Layer
App 20180151401 - Sun; Jennifer Y. ; et al. | 2018-05-31 |
Plasma erosion resistant thin film coating for high temperature application
Grant 9,976,211 - Firouzdor , et al. May 22, 2 | 2018-05-22 |
Ceramic Component Formed From Ceramic Portions Bonded Together With A Halogen Plasma Resistant Bonding Agent
App 20180134612 - Sun; Jennifer Y. ; et al. | 2018-05-17 |
Ion assisted deposition top coat of rare-earth oxide
Grant 9,970,095 - Sun , et al. May 15, 2 | 2018-05-15 |
Multi-Tiered Safety Control System and Methods for Online Communities
App 20180121557 - Dinan; Mark A. ; et al. | 2018-05-03 |
Low temperature fluoride glasses and glazes
Grant 9,957,192 - Lee , et al. May 1, 2 | 2018-05-01 |
Multi-layer Coating With Diffusion Barrier Layer And Erosion Resistant Layer
App 20180112311 - Fenwick; David ; et al. | 2018-04-26 |
High Purity Metallic Top Coat For Semiconductor Manufacturing Components
App 20180105938 - Sun; Jennifer Y. ; et al. | 2018-04-19 |
Coating Architecture For Plasma Sprayed Chamber Components
App 20180108517 - Sun; Jennifer Y. ; et al. | 2018-04-19 |
Atomic Layer Deposition Of Protective Coatings For Semiconductor Process Chamber Components
App 20180105932 - Fenwick; David ; et al. | 2018-04-19 |
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components
App 20180105922 - Sun; Jennifer Y. ; et al. | 2018-04-19 |
High temperature electrostatic chuck with real-time heat zone regulating capability
Grant 9,948,214 - Lubomirsky , et al. April 17, 2 | 2018-04-17 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition
App 20180100228 - Sun; Jennifer Y. ; et al. | 2018-04-12 |
Rare-earth Oxide Based Erosion Resistant Coatings For Semiconductor Application
App 20180102237 - Sun; Jennifer Y. ; et al. | 2018-04-12 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings
App 20180096825 - Sun; Jennifer Y. ; et al. | 2018-04-05 |
Flouride Glazes From Flourine Ion Treatment
App 20180093919 - Lee; Chengtsin ; et al. | 2018-04-05 |
Non-Line of Sight Deposition of Erbium Based Plasma Resistant Ceramic Coating
App 20180094348 - Sun; Jennifer Y. | 2018-04-05 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
App 20180087144 - Sun; Jennifer Y. ; et al. | 2018-03-29 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide
App 20180080116 - Sun; Jennifer Y. ; et al. | 2018-03-22 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
App 20180073125 - Sun; Jennifer Y. ; et al. | 2018-03-15 |
Substrate support assembly having a plasma resistant protective layer
Grant 9,916,998 - Sun , et al. March 13, 2 | 2018-03-13 |
High Purity Aluminum Top Coat On Substrate
App 20180066373 - Sun; Jennifer Y. ; et al. | 2018-03-08 |
Independently Controllable Powder Delivery For Additive Manufacturing
App 20180065178 - Rowland; Christopher A. ; et al. | 2018-03-08 |
Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent
Grant 9,896,376 - Sun , et al. February 20, 2 | 2018-02-20 |
Rare-earth Oxide Based Chamber Material
App 20180044246 - Sun; Jennifer Y. ; et al. | 2018-02-15 |
Rare-earth Oxide Based Chamber Material
App 20180044247 - Sun; Jennifer Y. ; et al. | 2018-02-15 |
Rare-earth oxide based monolithic chamber material
Grant 9,890,086 - Sun , et al. February 13, 2 | 2018-02-13 |
Rare-earth oxide based monolithic chamber material
Grant 9,884,787 - Sun , et al. February 6, 2 | 2018-02-06 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide
App 20180030589 - Sun; Jennifer Y. ; et al. | 2018-02-01 |
High purity metallic top coat for semiconductor manufacturing components
Grant 9,879,348 - Sun , et al. January 30, 2 | 2018-01-30 |
Multi-layer Coating With Diffusion Barrier Layer And Erosion Resistant Layer
App 20180016678 - Fenwick; David ; et al. | 2018-01-18 |
Ion assisted deposition for rare-earth oxide based coatings
Grant 9,869,012 - Sun , et al. January 16, 2 | 2018-01-16 |
Ion assisted deposition top coat of rare-earth oxide
Grant 9,869,013 - Sun , et al. January 16, 2 | 2018-01-16 |
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components
App 20180010235 - Sun; Jennifer Y. ; et al. | 2018-01-11 |
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components
App 20180010234 - Sun; Jennifer Y. ; et al. | 2018-01-11 |
Rare-earth oxide based erosion resistant coatings for semiconductor application
Grant 9,865,434 - Sun , et al. January 9, 2 | 2018-01-09 |
Non-Line of Sight Deposition of Erbium Based Plasma Resistant Ceramic Coating
App 20170369993 - Sun; Jennifer Y. | 2017-12-28 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
App 20170372874 - Sun; Jennifer Y. ; et al. | 2017-12-28 |
Fluoride glazes from fluorine ion treatment
Grant 9,850,161 - Lee , et al. December 26, 2 | 2017-12-26 |
Plasma erosion resistant rare-earth oxide based thin film coatings
Grant 9,850,568 - Sun , et al. December 26, 2 | 2017-12-26 |
Non-line of sight deposition of erbium based plasma resistant ceramic coating
Grant 9,850,573 - Sun December 26, 2 | 2017-12-26 |
High purity aluminum top coat on substrate
Grant 9,850,591 - Sun , et al. December 26, 2 | 2017-12-26 |
Protective Metal Oxy-fluoride Coatings
App 20170323772 - Fenwick; David ; et al. | 2017-11-09 |
Rare-earth oxide based coatings based on ion assisted deposition
Grant 9,812,341 - Sun , et al. November 7, 2 | 2017-11-07 |
Atomic Layer Deposition Of Protective Coatings For Semiconductor Process Chamber Components
App 20170314125 - Fenwick; David ; et al. | 2017-11-02 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components
Grant 9,797,037 - Sun , et al. October 24, 2 | 2017-10-24 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings
App 20170301522 - Sun; Jennifer Y. ; et al. | 2017-10-19 |
Coating Architecture For Plasma Sprayed Chamber Components
App 20170301520 - Sun; Jennifer Y. ; et al. | 2017-10-19 |
Solution Precursor Plasma Spray Of Ceramic Coating For Semiconductor Chamber Applications
App 20170291856 - Sun; Jennifer Y. ; et al. | 2017-10-12 |
Low Temperature Fluoride Glasses And Glazes
App 20170283312 - Lee; Chengtsin ; et al. | 2017-10-05 |
Cleaning Process That Precipitates Yttrium Oxy-flouride
App 20170282221 - Lee; Chengtsin ; et al. | 2017-10-05 |
Fluoride Glazes From Fluorine Ion Treatment
App 20170283313 - Lee; Chengtsin ; et al. | 2017-10-05 |
Aerosol Deposition Coating For Semiconductor Chamber Components
App 20170287683 - Sun; Jennifer Y. ; et al. | 2017-10-05 |
Chamber Components With Polished Internal Apertures
App 20170274493 - Sun; Jennifer Y. ; et al. | 2017-09-28 |
Plasma Resistant Coating With Tailorable Coefficient Of Thermal Expansion
App 20170260616 - Lee; Chengtsin ; et al. | 2017-09-14 |
High Purity Metallic Top Coat For Semiconductor Manufacturing Components
App 20170247795 - Sun; Jennifer Y. ; et al. | 2017-08-31 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components
Grant 9,725,799 - Sun , et al. August 8, 2 | 2017-08-08 |
Ceramic Slit Valve Doors And Assemblies
App 20170211706 - Amir; Ofer ; et al. | 2017-07-27 |
Slit Valve Gate Coating And Methods For Cleaning Slit Valve Gates
App 20170213705 - AMIR; OFER ; et al. | 2017-07-27 |
Additive Manufacturing With Laser And Plasma
App 20170203364 - Ramaswamy; Kartik ; et al. | 2017-07-20 |
Layerwise Heating, Linewise Heating, Plasma Heating And Multiple Feed Materials In Additive Manufacturing
App 20170203363 - Rowland; Christopher A. ; et al. | 2017-07-20 |
Aerosol deposition coating for semiconductor chamber components
Grant 9,708,713 - Sun , et al. July 18, 2 | 2017-07-18 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings
Grant 9,711,334 - Sun , et al. July 18, 2 | 2017-07-18 |
Additive Manufacturing With Laser And Gas Flow
App 20170182556 - Ramaswamy; Kartik ; et al. | 2017-06-29 |
Chamber components with polished internal apertures
Grant 9,687,953 - Sun , et al. June 27, 2 | 2017-06-27 |
Anodization Architecture For Electro-plate Adhesion
App 20170175284 - Sun; Jennifer Y. ; et al. | 2017-06-22 |
Showerhead Having A Detachable Gas Distribution Plate
App 20170178863 - LUBOMIRSKY; DMITRY ; et al. | 2017-06-22 |
High purity metallic top coat for semiconductor manufacturing components
Grant 9,663,870 - Sun , et al. May 30, 2 | 2017-05-30 |
Copolymerized High Temperature Bonding Component
App 20170137575 - Sun; Jennifer Y. ; et al. | 2017-05-18 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition
App 20170133207 - Sun; Jennifer Y. ; et al. | 2017-05-11 |
Ion Assisted Deposition For Rare-earth Oxide Based Coatings
App 20170130319 - Sun; Jennifer Y. ; et al. | 2017-05-11 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
App 20170110293 - Sun; Jennifer Y. ; et al. | 2017-04-20 |
Anodization architecture for electro-plate adhesion
Grant 9,624,593 - Sun , et al. April 18, 2 | 2017-04-18 |
Rare-earth oxide based coating
Grant 9,617,188 - Sun , et al. April 11, 2 | 2017-04-11 |
Showerhead having a detachable gas distribution plate
Grant 9,610,591 - Lubomirsky , et al. April 4, 2 | 2017-04-04 |
High Temperature Electrostatic Chuck Bonding Adhesive
App 20170092525 - SUN; JENNIFER Y. ; et al. | 2017-03-30 |
Innovative top-coat approach for advanced device on-wafer particle performance
Grant 9,604,249 - Sun , et al. March 28, 2 | 2017-03-28 |
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles
Grant 9,583,369 - Sun , et al. February 28, 2 | 2017-02-28 |
High temperature electrostatic chuck bonding adhesive
Grant 9,520,314 - Sun , et al. December 13, 2 | 2016-12-13 |
Rare-earth Oxide Based Monolithic Chamber Material
App 20160326061 - Sun; Jennifer Y. ; et al. | 2016-11-10 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide
App 20160326626 - Sun; Jennifer Y. ; et al. | 2016-11-10 |
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components
App 20160326625 - Sun; Jennifer Y. ; et al. | 2016-11-10 |
Rare-earth Oxide Based Monolithic Chamber Material
App 20160326060 - Sun; Jennifer Y. ; et al. | 2016-11-10 |
Rare-earth Oxide Based Monolithic Chamber Material
App 20160318807 - Sun; Jennifer Y. ; et al. | 2016-11-03 |
Semiconductor processing apparatus with protective coating including amorphous phase
App 20160276141 - Sun; Jennifer Y. ; et al. | 2016-09-22 |
Enhanced cleaning process of chamber used plasma spray coating without damaging coating
Grant 9,447,365 - Banda , et al. September 20, 2 | 2016-09-20 |
Rare-earth oxide based monolithic chamber material
Grant 9,440,886 - Sun , et al. September 13, 2 | 2016-09-13 |
Chemistry Compatible Coating Material For Advanced Device On-wafer Particle Performance
App 20160211121 - Sun; Jennifer Y. ; et al. | 2016-07-21 |
Plasma resistant ceramic coated conductive article
Grant 9,394,615 - Sun , et al. July 19, 2 | 2016-07-19 |
Electrostatic Chuck Having Reduced Power Loss
App 20160163577 - MAKHRATCHEV; Konstantin ; et al. | 2016-06-09 |
Temperature management of aluminium nitride electrostatic chuck
Grant 9,358,702 - Banda , et al. June 7, 2 | 2016-06-07 |
Chemistry compatible coating material for advanced device on-wafer particle performance
Grant 9,343,289 - Sun , et al. May 17, 2 | 2016-05-17 |
Electrostatic chuck having reduced power loss
Grant 9,281,226 - Makhratchev , et al. March 8, 2 | 2016-03-08 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20160060181 - Sun; Jennifer Y. ; et al. | 2016-03-03 |
High Purity Aluminum Top Coat On Substrate
App 20160002811 - SUN; Jennifer Y. ; et al. | 2016-01-07 |
Chamber Components With Polished Internal Apertures
App 20150375358 - Sun; Jennifer Y. ; et al. | 2015-12-31 |
Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
Grant 9,212,099 - Sun , et al. December 15, 2 | 2015-12-15 |
Plasma Spray Coating Design Using Phase And Stress Control
App 20150329955 - Sun; Jennifer Y. ; et al. | 2015-11-19 |
Advanced Layered Bulk Ceramics Via Field Assisted Sintering Technology
App 20150329430 - Sun; Jennifer Y. ; et al. | 2015-11-19 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application
App 20150307982 - Firouzdor; Vahid ; et al. | 2015-10-29 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide
App 20150311044 - Sun; Jennifer Y. ; et al. | 2015-10-29 |
Chamber Component With Fluorinated Thin Film Coating
App 20150311043 - Sun; Jennifer Y. ; et al. | 2015-10-29 |
Ceramic Coated Article And Process For Applying Ceramic Coating
App 20150299050 - Sun; Jennifer Y. ; et al. | 2015-10-22 |
Ceramic Article With Reduced Surface Defect Density
App 20150218057 - Duan; Ren-Guan ; et al. | 2015-08-06 |
Ceramic coated article and process for applying ceramic coating
Grant 9,090,046 - Sun , et al. July 28, 2 | 2015-07-28 |
Methods And Apparatus Toward Preventing Esc Bonding Adhesive Erosion
App 20150183187 - LIN; Xing ; et al. | 2015-07-02 |
Ion Beam Sputtering With Ion Assisted Deposition For Coatings On Chamber Components
App 20150158775 - Sun; Jennifer Y. ; et al. | 2015-06-11 |
Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide
Grant 9,051,219 - Sun , et al. June 9, 2 | 2015-06-09 |
Semiconductor Processing Apparatus With A Ceramic-comprising Surface Which Exhibits Fracture Toughness And Halogen Plasma Resistance
App 20150143677 - Sun; Jennifer Y. ; et al. | 2015-05-28 |
Ceramic article with reduced surface defect density and process for producing a ceramic article
Grant 9,034,199 - Duan , et al. May 19, 2 | 2015-05-19 |
Rare-earth Oxide Based Monolithic Chamber Material
App 20150133285 - Sun; Jennifer Y. ; et al. | 2015-05-14 |
High Purity Metallic Top Coat For Semiconductor Manufacturing Components
App 20150132602 - Sun; Jennifer Y. ; et al. | 2015-05-14 |
Protective coatings resistant to reactive plasma processing
Grant 9,017,765 - Sun , et al. April 28, 2 | 2015-04-28 |
Oxygen Containing Plasma Cleaning To Remove Contamination From Electronic Device Components
App 20150107618 - Sun; Jennifer Y. ; et al. | 2015-04-23 |
Plasma Spray Coating Enhancement Using Plasma Flame Heat Treatment
App 20150075714 - Sun; Jennifer Y. ; et al. | 2015-03-19 |
Coating Architecture For Plasma Sprayed Chamber Components
App 20150079370 - Sun; Jennifer Y. ; et al. | 2015-03-19 |
Methods and apparatus toward preventing ESC bonding adhesive erosion
Grant 8,982,530 - Lin , et al. March 17, 2 | 2015-03-17 |
Anodization Architecture For Electro-plate Adhesion
App 20150064450 - Sun; Jennifer Y. ; et al. | 2015-03-05 |
Single-body electrostatic chuck
Grant 8,941,969 - Thach , et al. January 27, 2 | 2015-01-27 |
Ion Assisted Deposition For Rare-earth Oxide Based Coatings On Lids And Nozzles
App 20150021324 - Sun; Jennifer Y. ; et al. | 2015-01-22 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings
App 20150024155 - Sun; Jennifer Y. ; et al. | 2015-01-22 |
Electrostatic chuck with advanced RF and temperature uniformity
Grant 8,937,800 - Lubomirsky , et al. January 20, 2 | 2015-01-20 |
Ceramic Component formed ceramic portions bonded together with a halogen plasma resistant bonding agent
App 20150004418 - Sun; Jennifer Y. ; et al. | 2015-01-01 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
App 20140377504 - Sun; Jennifer Y. ; et al. | 2014-12-25 |
Rare-earth Oxide Based Erosion Resistant Coatings For Semiconductor Application
App 20140363596 - Sun; Jennifer Y. ; et al. | 2014-12-11 |
Aerosol Deposition Coating For Semiconductor Chamber Components
App 20140349073 - Sun; Jennifer Y. ; et al. | 2014-11-27 |
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
Grant 8,871,312 - Sun , et al. October 28, 2 | 2014-10-28 |
Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
Grant 8,858,745 - Sun , et al. October 14, 2 | 2014-10-14 |
Enhanced Cleaning Process Of Chamber Used Plasma Spray Coating Without Damaging Coating
App 20140221188 - Banda; Sumanth ; et al. | 2014-08-07 |
Substrate Processing Chamber Components Incorporating Anisotropic Materials
App 20140209242 - SUN; JENNIFER Y. ; et al. | 2014-07-31 |
Showerhead Having A Detachable Gas Distribution Plate
App 20140209027 - LUBOMIRSKY; DMITRY ; et al. | 2014-07-31 |
Temperature Management Of Aluminium Nitride Electrostatic Chuck
App 20140203526 - Banda; Sumanth ; et al. | 2014-07-24 |
Single-body Electrostatic Chuck
App 20140177123 - Thach; Senh ; et al. | 2014-06-26 |
Method of producing a plasma-resistant thermal oxide coating
Grant 8,758,858 - Sun , et al. June 24, 2 | 2014-06-24 |
Substrate Support Assembly Having A Plasma Resistant Protective Layer
App 20140154465 - Sun; Jennifer Y. ; et al. | 2014-06-05 |
Chemistry Compatible Coating Material For Advanced Device On-wafer Particle Performance
App 20140030486 - Sun; Jennifer Y. ; et al. | 2014-01-30 |
Innovative Top-coat Approach For Advanced Device On-wafer Particle Performance
App 20140030533 - Sun; Jennifer Y. ; et al. | 2014-01-30 |
Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide
Grant 8,623,527 - Sun , et al. January 7, 2 | 2014-01-07 |
Adhesive Material Used For Joining Chamber Components
App 20130344285 - Sun; Jennifer Y. ; et al. | 2013-12-26 |
Electrostatic Chuck Having Reduced Power Loss
App 20130284709 - MAKHRATCHEV; Konstantin ; et al. | 2013-10-31 |
Plasma Resistant Ceramic Coated Conductive Article
App 20130284373 - Sun; Jennifer Y. ; et al. | 2013-10-31 |
Methods And Apparatus Toward Preventing Esc Bonding Adhesive Erosion
App 20130286530 - Lin; Xing ; et al. | 2013-10-31 |
High Temperature Electrostatic Chuck With Real-time Heat Zone Regulating Capability
App 20130284374 - LUBOMIRSKY; Dmitry ; et al. | 2013-10-31 |
Plasma Spray Coating Process Enhancement For Critical Chamber Components
App 20130288037 - Sun; Jennifer Y. ; et al. | 2013-10-31 |
Electrostatic Chuck With Advanced Rf And Temperature Uniformity
App 20130279066 - Lubomirsky; Dmitry ; et al. | 2013-10-24 |
Ceramic Coated Ring And Process For Applying Ceramic Coating
App 20130273313 - Sun; Jennifer Y. ; et al. | 2013-10-17 |
Ceramic Coated Article And Process For Applying Ceramic Coating
App 20130273327 - Sun; Jennifer Y. ; et al. | 2013-10-17 |
Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide
App 20130224498 - Sun; Jennifer Y. ; et al. | 2013-08-29 |
Heat Treated Ceramic Substrate Having Ceramic Coating And Heat Treatment For Coated Ceramics
App 20130216821 - Sun; Jennifer Y. ; et al. | 2013-08-22 |
Ceramic Article With Reduced Surface Defect Density And Process For Producing A Ceramic Article
App 20130216783 - Duan; Ren-Guan ; et al. | 2013-08-22 |
Plasma-resistant ceramics with controlled electrical resistivity
Grant 8,367,227 - Sun , et al. February 5, 2 | 2013-02-05 |
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
App 20130022838 - Sun; Jennifer Y. ; et al. | 2013-01-24 |
Method And Apparatus For Refurbishing Gas Distribution Plate Surfaces
App 20120255635 - BANDA; Sumanth ; et al. | 2012-10-11 |
Wet clean process for recovery of anodized chamber parts
Grant 8,231,736 - Sun , et al. July 31, 2 | 2012-07-31 |
Plasma resistant coatings for plasma chamber components
Grant 8,206,829 - Sun , et al. June 26, 2 | 2012-06-26 |
Method Of Forming A Process Chamber Component Having Electroplated Yttrium Containing Coating
App 20120138472 - HAN; Nianci ; et al. | 2012-06-07 |
Method of producing a plasma-resistant thermal oxide coating
App 20120125488 - Sun; Jennifer Y. ; et al. | 2012-05-24 |
Method For Debonding Components In A Chamber
App 20120118510 - Banda; Sumanth ; et al. | 2012-05-17 |
Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating
Grant 8,129,029 - Sun , et al. March 6, 2 | 2012-03-06 |
Process chamber component having electroplated yttrium containing coating
Grant 8,114,525 - Han , et al. February 14, 2 | 2012-02-14 |
Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide
App 20120034469 - Sun; Jennifer Y. ; et al. | 2012-02-09 |
Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator
Grant 8,080,479 - Collins , et al. December 20, 2 | 2011-12-20 |
Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes
Grant 8,076,247 - Collins , et al. December 13, 2 | 2011-12-13 |
Clean, dense yttrium oxide coating protecting semiconductor processing apparatus
Grant 8,067,067 - Sun , et al. November 29, 2 | 2011-11-29 |
Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus
Grant 8,034,734 - Sun , et al. October 11, 2 | 2011-10-11 |
Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal
Grant 8,016,948 - Wang , et al. September 13, 2 | 2011-09-13 |
Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity
Grant 7,968,469 - Collins , et al. June 28, 2 | 2011-06-28 |
Solid yttrium oxide-containing substrate which has been cleaned to remove impurities
App 20110036874 - Wang; Xikun ; et al. | 2011-02-17 |
Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources
Grant 7,884,025 - Collins , et al. February 8, 2 | 2011-02-08 |
Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources
Grant 7,879,731 - Collins , et al. February 1, 2 | 2011-02-01 |
Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate
Grant 7,846,264 - Wang , et al. December 7, 2 | 2010-12-07 |
Electroplating an yttrium-containing coating on a chamber component
Grant 7,833,401 - Han , et al. November 16, 2 | 2010-11-16 |
Particle Reduction Treatment For Gas Delivery System
App 20100180426 - HUO; DAVID DATONG ; et al. | 2010-07-22 |
Semiconductor processing apparatus comprising a solid solution ceramic of yttrium oxide and zirconium oxide
App 20100160143 - Sun; Jennifer Y. ; et al. | 2010-06-24 |
High Temperature Electrostatic Chuck Bonding Adhesive
App 20100156054 - Sun; Jennifer Y. ; et al. | 2010-06-24 |
Filled Polymer Composition For Etch Chamber Component
App 20100140222 - Sun; Jennifer Y. ; et al. | 2010-06-10 |
Protective coatings resistant to reactive plasma processing
App 20100129670 - Sun; Jennifer Y. ; et al. | 2010-05-27 |
Self-passivating plasma resistant material for joining chamber components
Grant 7,718,029 - Sun , et al. May 18, 2 | 2010-05-18 |
Erosion resistance enhanced quartz used in plasma etch chamber
Grant 7,718,559 - Yuan , et al. May 18, 2 | 2010-05-18 |
Plasma Resistant Coatings For Plasma Chamber Components
App 20100119843 - SUN; JENNIFER Y. ; et al. | 2010-05-13 |
Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
App 20100119844 - Sun; Jennifer Y. ; et al. | 2010-05-13 |
Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas
Grant 7,696,117 - Sun , et al. April 13, 2 | 2010-04-13 |
Electrostatic chuck having textured contact surface
Grant 7,672,110 - Sun , et al. March 2, 2 | 2010-03-02 |
Workpiece Support For A Plasma Reactor With Controlled Apportionment Of Rf Power To A Process Kit Ring
App 20100018648 - COLLINS; KENNETH S. ; et al. | 2010-01-28 |
Process for wafer backside polymer removal with a ring of plasma under the wafer
Grant 7,552,736 - Collins , et al. June 30, 2 | 2009-06-30 |
Low temperature aerosol deposition of a plasma resistive layer
Grant 7,479,464 - Sun , et al. January 20, 2 | 2009-01-20 |
Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
Grant 7,479,304 - Sun , et al. January 20, 2 | 2009-01-20 |
Sealing of flat-panel device
Grant 7,473,152 - Ludwig , et al. January 6, 2 | 2009-01-06 |
Process chamber component having electroplated yttrium containing coating
Grant 7,371,467 - Han , et al. May 13, 2 | 2008-05-13 |
Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination
Grant 7,220,937 - Hofman , et al. May 22, 2 | 2007-05-22 |
Semiconductor processing apparatus including plasma-resistant, welded aluminum structures
Grant 7,055,732 - Thach , et al. June 6, 2 | 2006-06-06 |
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
Grant 7,048,814 - Lin , et al. May 23, 2 | 2006-05-23 |
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
Grant 7,033,447 - Lin , et al. April 25, 2 | 2006-04-25 |
Gas distribution showerhead for semiconductor processing
Grant 6,983,892 - Noorbakhsh , et al. January 10, 2 | 2006-01-10 |
Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers
Grant 6,776,873 - Sun , et al. August 17, 2 | 2004-08-17 |
Sealing of flat-panel device
Grant 6,722,937 - Ludwig , et al. April 20, 2 | 2004-04-20 |
Process chamber having a corrosion-resistant wall and method
Grant 6,682,627 - Shamouilian , et al. January 27, 2 | 2004-01-27 |
Plasma-resistant, welded aluminum structures for use in semiconductor apparatus
Grant 6,659,331 - Thach , et al. December 9, 2 | 2003-12-09 |
Diamond coated parts in a plasma reactor
Grant 6,508,911 - Han , et al. January 21, 2 | 2003-01-21 |
Low temperature glass frit sealing for thin computer displays
Grant 6,129,603 - Sun , et al. October 10, 2 | 2000-10-10 |
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