Summerfelt; Scott R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Summerfelt; Scott R..The latest application filed is for "oscillator self-calibration".

Company Profile

0.150.88

Summerfelt; Scott R. - Garland TX
Summerfelt; Scott R. - Dallas TX
Summerfelt; Scott R. - Cupertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Oscillator self-calibration Grant 11,303,288 - Bahr , et al. April 12, 2	2022-04-12
Oscillator Self-calibration App 20210203332 - Bahr; Bichoy ; et al.	2021-07-01
Oscillator self-calibration Grant 10,911,055 - Bahr , et al. February 2, 2	2021-02-02
Dilution doped integrated circuit resistors Grant 9,991,120 - Montgomery , et al. June 5, 2	2018-06-05
Transistor performance modification with stressor structures Grant 9,773,793 - Summerfelt , et al. September 26, 2	2017-09-26
Adjustable dummy fill Grant 9,619,606 - Summerfelt , et al. April 11, 2	2017-04-11
Drawn dummy FeCAP, via and metal structures Grant 9,536,822 - Summerfelt , et al. January 3, 2	2017-01-03
Hydrogen passivation of integrated circuits Grant 9,218,981 - Basim , et al. December 22, 2	2015-12-22
Dilution Doped Integrated Circuit Resistors App 20150187583 - Montgomery; Scott K. ; et al.	2015-07-02
Contact and via interconnects using metal around dielectric pillars Grant 9,048,297 - Summerfelt June 2, 2	2015-06-02
Ferroelectric Capacitor Encapsulated With A Hydrogen Barrier App 20140370621 - Aggarwal; Rajni J. ; et al.	2014-12-18
Integrated circuit structure with capacitor and resistor and method for forming Grant 8,907,446 - Summerfelt , et al. December 9, 2	2014-12-09
Adjustable dummy fill Grant 8,883,629 - Summerfelt , et al. November 11, 2	2014-11-11
Adjustable Dummy Fill App 20140308762 - Summerfelt; Scott R. ; et al.	2014-10-16
Adjustable Dummy Fill App 20140215425 - Summerfelt; Scott R. ; et al.	2014-07-31
Hydrogen barrier for ferroelectric capacitors Grant 8,779,485 - Udayakumar , et al. July 15, 2	2014-07-15
Hydrogen barrier for ferroelectric capacitors Grant 8,778,700 - Udayakumar , et al. July 15, 2	2014-07-15
Contact and Via Interconnects Using Metal Around Dielectric Pillars App 20140094028 - Summerfelt; Scott R.	2014-04-03
Hydrogen passivation of integrated circuits Grant 8,669,644 - Basim , et al. March 11, 2	2014-03-11
Contact and via interconnects using metal around dielectric pillars Grant 8,658,474 - Summerfelt February 25, 2	2014-02-25
Contact and VIA interconnects using metal around dielectric pillars Grant 8,659,165 - Summerfelt February 25, 2	2014-02-25
Hydrogen Passivation Of Integrated Circuits App 20140051234 - Basim; Gul B. ; et al.	2014-02-20
Increasing exposure tool alignment signal strength for a ferroelectric capacitor layer Grant 8,586,130 - Meisner , et al. November 19, 2	2013-11-19
Method For Forming Integrated Circuit Structure With Capacitor And Resistor And Method For Forming App 20130302965 - SUMMERFELT; Scott R. ; et al.	2013-11-14
Hydrogen Barrier For Ferroelectric Capacitors App 20130164933 - Udayakumar; Kezhakkedath R. ; et al.	2013-06-27
Differential plate line screen test for ferroelectric latch circuits Grant 8,472,236 - Summerfelt , et al. June 25, 2	2013-06-25
Increasing exposure tool alignment signal strength for a ferroelectric capacitor layer Grant 8,466,569 - Meisner , et al. June 18, 2	2013-06-18
Differential plate line screen test for ferroelectric latch circuits Grant 8,441,833 - Summerfelt , et al. May 14, 2	2013-05-14
Hydrogen barrier for ferroelectric capacitors Grant 8,440,508 - Udayakumar , et al. May 14, 2	2013-05-14
Differential plate line screen test for ferroelectric latch circuits Grant 8,416,598 - Summerfelt , et al. April 9, 2	2013-04-09
Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers Grant 8,384,190 - Summerfelt , et al. February 26, 2	2013-02-26
Modeling of ferroelectric capacitors to include local statistical variations of ferroelectric properties Grant 8,380,476 - Obradovic , et al. February 19, 2	2013-02-19
Drawn dummy FeCAP, via and metal structures Grant 8,377,719 - Summerfelt , et al. February 19, 2	2013-02-19
Differential Plate Line Screen Test For Ferroelectric Latch Circuits App 20130021833 - Summerfelt; Scott R. ; et al.	2013-01-24
Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers Grant 8,329,588 - Summerfelt , et al. December 11, 2	2012-12-11
Interleaved Bit Line Architecture for 2T2C Ferroelectric Memories App 20120307545 - McAdams; Hugh P. ; et al.	2012-12-06
Alignment mark for opaque layer Grant 8,324,742 - Summerfelt , et al. December 4, 2	2012-12-04
Ferroelectric Capacitor Encapsulated With A Hydrogen Barrier App 20120241907 - AGGARWAL; RAJNI J. ; et al.	2012-09-27
Alignment mark for opaque layer Grant 8,268,696 - Summerfelt , et al. September 18, 2	2012-09-18
Hydrogen Barrier For Ferroelectric Capacitors App 20120228739 - Udayakumar; Kezhakkedath R. ; et al.	2012-09-13
Enhanced local interconnects employing ferroelectric electrodes Grant 8,247,855 - Summerfelt August 21, 2	2012-08-21
Differential Plate Line Screen Test For Ferroelectric Latch Circuits App 20120195096 - Summerfelt; Scott R. ; et al.	2012-08-02
Hydrogen Passivation Of Integrated Circuits App 20120175689 - Basim; Gul B. ; et al.	2012-07-12
Hydrogen Passivation Of Integrated Circuits App 20120149189 - Basim; Gul B. ; et al.	2012-06-14
DRAWN DUMMY FeCAP, VIA AND METAL STRUCTURES App 20120077287 - Summerfelt; Scott R. ; et al.	2012-03-29
Passivation Of Integrated Circuits Containing Ferroelectric Capacitors And Hydrogen Barriers App 20120070993 - Summerfelt; Scott R. ; et al.	2012-03-22
Method for leakage reduction in fabrication of high-density FRAM arrays Grant 8,093,070 - Celii , et al. January 10, 2	2012-01-10
Alignment Mark For Opaque Layer App 20110306176 - Summerfelt; Scott R. ; et al.	2011-12-15
Stress buffer layer for ferroelectric random access memory Grant 8,071,430 - Summerfelt , et al. December 6, 2	2011-12-06
Stress buffer layer for ferroelectric random access memory Grant 8,058,677 - Summerfelt , et al. November 15, 2	2011-11-15
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 8,053,252 - Udayakumar , et al. November 8, 2	2011-11-08
Stress Buffer Layer for Ferroelectric Random Access Memory App 20110183471 - Summerfelt; Scott R. ; et al.	2011-07-28
Contact and Via Interconnects Using Metal Around Dielectric Pillars App 20110165774 - Summerfelt; Scott R.	2011-07-07
Scribe seal connection Grant 7,968,974 - Summerfelt , et al. June 28, 2	2011-06-28
Method of forming PZT ferroelectric capacitors for integrated circuits Grant 7,935,543 - Moise, IV , et al. May 3, 2	2011-05-03
F-RAM device with current mirror sense amp Grant 7,933,138 - McAdams , et al. April 26, 2	2011-04-26
Transistor Performance Modification with Stressor Structures App 20110084323 - Summerfelt; Scott R. ; et al.	2011-04-14
Hydrogen Passivation of Integrated Circuits App 20110079884 - Basim; Gul B. ; et al.	2011-04-07
Ferroelectric Capacitor Encapsulated With A Hydrogen Barrier App 20110079878 - Aggarwal; Rajni J. ; et al.	2011-04-07
Hydrogen Barrier For Ferroelectric Capacitors App 20110062550 - Udayakumar; Kezhakkedath R. ; et al.	2011-03-17
F-SRAM power-off operation Grant 7,898,837 - McAdams , et al. March 1, 2	2011-03-01
F-SRAM before package solid data write Grant 7,894,234 - Rodriguez , et al. February 22, 2	2011-02-22
F-RAM device with current mirror sense amp Grant 7,894,235 - McAdams , et al. February 22, 2	2011-02-22
F-SRAM margin screen Grant 7,889,535 - Rodriguez , et al. February 15, 2	2011-02-15
F-SRAM Power-Off Operation App 20110019461 - McAdams; Hugh P. ; et al.	2011-01-27
Increasing Exposure Tool Alignment Signal Strength for a Ferroelectric Capacitor Layer App 20110014360 - Meisner; Stephen Arion ; et al.	2011-01-20
Adjustable Dummy Fill App 20110004859 - Summerfelt; Scott R. ; et al.	2011-01-06
F-RAM Device with Current Mirror Sense Amp App 20100309711 - McAdams; Hugh P. ; et al.	2010-12-09
F-RAM device with current mirror sense amp App 20100302834 - McAdams; Hugh P. ; et al.	2010-12-02
Differential Plate Line Screen Test for Ferroelectric Latch Circuits App 20100296329 - Summerfelt; Scott R. ; et al.	2010-11-25
Modeling of Ferroelectric Capacitors to Include Local Statistical Variations of Ferroelectric Properties App 20100299115 - Obradovic; Borna ; et al.	2010-11-25
Integrated circuit structure with capacitor and resistor and method for forming App 20100295149 - SUMMERFELT; Scott R. ; et al.	2010-11-25
F-RAM device with current mirror sense amp Grant 7,839,670 - McAdams , et al. November 23, 2	2010-11-23
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 7,799,582 - Udayakumar , et al. September 21, 2	2010-09-21
Passivation Of Integrated Circuits Containing Ferroelectric Capacitors And Hydrogen Barriers App 20100224961 - Summerfelt; Scott R. ; et al.	2010-09-09
F-RAM Device with Current Mirror Sense Amp App 20100195368 - McAdams; Hugh P. ; et al.	2010-08-05
Drawn Dummy FeCAP, Via and Metal Structures App 20100090340 - Summerfelt; Scott R. ; et al.	2010-04-15
Contact and VIA Interconnects Using Metal Around Dielectric Pillars App 20100038749 - Summerfelt; Scott R.	2010-02-18
Adjustable dummy fill App 20100041232 - Summerfelt; Scott R. ; et al.	2010-02-18
F-SRAM Before Package Solid Data Write App 20100027313 - Rodriguez; John A. ; et al.	2010-02-04
F-SRAM Margin Screen App 20100002488 - Rodriguez; John A. ; et al.	2010-01-07
Stress Buffer Layer for Ferroelectric Random Access Memory App 20090321964 - Summerfelt; Scott R. ; et al.	2009-12-31
Scribe Seal Connection App 20090321889 - Summerfelt; Scott R. ; et al.	2009-12-31
Mitigation Of Edge Degradation In Ferroelectric Memory Devices Through Plasma Etch Clean App 20090275147 - UDAYAKUMAR; Kezhakkedath R. ; et al.	2009-11-05
Alignment Mark For Opaque Layer App 20090243122 - Summerfelt; Scott R. ; et al.	2009-10-01
Increasing Exposure Tool Alignment Signal Strength for a Ferroelectric Capacitor Layer App 20090243123 - Meisner; Stephen Arlon ; et al.	2009-10-01
High Polarization Ferroelectric Capacitors for Integrated Circuits App 20090233382 - Moise, IV; Theodore S. ; et al.	2009-09-17
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 7,572,698 - Udayakumar , et al. August 11, 2	2009-08-11
Methods For Cleaning Etch Residue Deposited By Wet Etch Processes For High-k Dielectrics App 20090061632 - Summerfelt; Scott R.	2009-03-05
Circuit Logic Embedded Within Ic Protective Layer App 20090020313 - LEDUC; Yves ; et al.	2009-01-22
Method For Etching A Substrate And A Device Formed Using The Method App 20080303141 - Udayakumar; K.R. ; et al.	2008-12-11
Method for etching a substrate and a device formed using the method Grant 7,425,512 - Udayakumar , et al. September 16, 2	2008-09-16
Enhanced local interconnects employing ferroelectric electrodes App 20080121953 - Summerfelt; Scott R.	2008-05-29
Integrated circuit and method Grant 7,361,599 - Moise , et al. April 22, 2	2008-04-22
Method for leakage reduction in fabrication of high-density FRAM arrays App 20080081380 - Celii; Francis Gabriel ; et al.	2008-04-03
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean App 20070281422 - Udayakumar; Kezhakkedath R. ; et al.	2007-12-06
Method for Forming Ferroelectric Memory Capacitor App 20070221974 - Celii; Francis G. ; et al.	2007-09-27
Method for forming ferroelectric memory capacitor Grant 7,250,349 - Celii , et al. July 31, 2	2007-07-31
FRAM capacitor stack clean Grant 7,228,865 - Hall , et al. June 12, 2	2007-06-12
Ferroelectric capacitor stack etch cleaning methods Grant 7,220,600 - Summerfelt , et al. May 22, 2	2007-05-22
Ferroelectric capacitor hydrogen barriers and methods for fabricating the same Grant 7,183,602 - Udayakumar , et al. February 27, 2	2007-02-27
High permittivity silicate gate dielectric Grant 7,115,461 - Anthony , et al. October 3, 2	2006-10-03
Ferroelectric capacitor stack etch cleaning methods App 20060134808 - Summerfelt; Scott R. ; et al.	2006-06-22
FeRAM capacitor stack etch Grant 7,029,925 - Celii , et al. April 18, 2	2006-04-18
Low silicon-hydrogen sin layer to inhibit hydrogen related degradation in semiconductor devices having ferroelectric components Grant 7,019,352 - Udayakumar , et al. March 28, 2	2006-03-28
Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same Grant 6,984,857 - Udayakumar , et al. January 10, 2	2006-01-10
Ferroelectric capacitor hydrogen barriers and methods for fabricating the same Grant 6,982,448 - Udayakumar , et al. January 3, 2	2006-01-03
Ferroelectric capacitor having an oxide electrode template and a method of manufacture therefor App 20050230725 - Aggarwal, Sanjeev ; et al.	2005-10-20
Integrated circuit and method App 20050227378 - Moise, Theodore S. ; et al.	2005-10-13
Ferroelectric Capacitor Hydrogen Barriers And Methods For Fabricating The Same App 20050205906 - Udayakumar, K. R. ; et al.	2005-09-22
Ferroelectric capacitor hydrogen barriers and methods for fabricating the same App 20050205911 - Udayakumar, K. R. ; et al.	2005-09-22
High polarization ferroelectric capacitors for integrated circuits App 20050145908 - Moise, Theodore S. IV ; et al.	2005-07-07
Integrated circuit and method Grant 6,902,939 - Moise , et al. June 7, 2	2005-06-07
High permittivity silicate gate dielectric App 20050112827 - Anthony, John Mark ; et al.	2005-05-26
Method for etching a substrate and a device formed using the method App 20050112898 - Udayakumar, K.R. ; et al.	2005-05-26
Use of amorphous aluminum oxide on a capacitor sidewall for use as a hydrogen barrier Grant 6,876,021 - Martin , et al. April 5, 2	2005-04-05
PZT (111) texture through Ir texture improvement Grant 6,872,669 - Summerfelt , et al. March 29, 2	2005-03-29
FeRAM capacitor stack etch App 20050054122 - Celii, Francis G. ; et al.	2005-03-10
FRAM capacitor stack clean App 20050045590 - Hall, Lindsey H. ; et al.	2005-03-03
Low silicon-hydrogen sin layer to inhibit hydrogen related degradation in semiconductor devices having ferroelectric components App 20050032301 - Udayakumar, K. R. ; et al.	2005-02-10
Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same App 20050012126 - Udayakumar, K. R. ; et al.	2005-01-20
VIA0 etch process for FRAM integration Grant 6,841,396 - Celii , et al. January 11, 2	2005-01-11
High permittivity silicate gate dielectric Grant 6,841,439 - Anthony , et al. January 11, 2	2005-01-11
Method of forming an FeRAM having a multi-layer hard mask and patterning thereof Grant 6,828,161 - Summerfelt , et al. December 7, 2	2004-12-07
FRAM capacitor stack clean App 20040237998 - Hall, Lindsey H. ; et al.	2004-12-02
Via0 Etch Process For Fram Integration App 20040235259 - Celii, Francis Gabriel ; et al.	2004-11-25
Boron trichloride-based plasma etch App 20040217087 - Celii, Francis G. ; et al.	2004-11-04
Method for forming ferroelectric memory capacitor App 20040175954 - Celii, Francis G. ; et al.	2004-09-09
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier Grant 6,773,930 - Summerfelt , et al. August 10, 2	2004-08-10
Detection of AIOx ears for process control in FeRAM processing Grant 6,767,750 - Summerfelt , et al. July 27, 2	2004-07-27
Use Of Amorphous Aluminum Oxide On A Capacitor Sidewall For Use As A Hydrogen Barrier App 20040099893 - Martin, J. Scott ; et al.	2004-05-27
Versatile plasma processing system for producing oxidation resistant barriers Grant 6,730,616 - Summerfelt May 4, 2	2004-05-04
FeRAM sidewall diffusion barrier etch Grant 6,713,342 - Celii , et al. March 30, 2	2004-03-30
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing Grant 6,686,236 - Aggarwal , et al. February 3, 2	2004-02-03
Methods for controlling the crystallographic texture of thin films with anisotropic ferroelectric polarization or permittivity Grant 6,686,210 - Gilbert , et al. February 3, 2	2004-02-03
Grouped plate line drive architecture and method Grant 6,667,896 - Rickes , et al. December 23, 2	2003-12-23
Design to prevent tungsten oxidation at contact alignment in FeRAM Grant 6,660,612 - Chang , et al. December 9, 2	2003-12-09
FeRAM capacitor post stack etch clean/repair Grant 6,656,748 - Hall , et al. December 2, 2	2003-12-02
Grouped Plate Line Drive Architecture And Method App 20030218898 - Rickes, Juergen T. ; et al.	2003-11-27
Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch Grant 6,635,498 - Summerfelt , et al. October 21, 2	2003-10-21
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing Grant 6,635,497 - Aggarwal , et al. October 21, 2	2003-10-21
Feram Capacitor Post Stack Etch Clean/repair App 20030143800 - Hall, Lindsey H. ; et al.	2003-07-31
FeRAM capacitor stack etch App 20030143853 - Celii, Francis G. ; et al.	2003-07-31
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing Grant 6,596,547 - Aggarwal , et al. July 22, 2	2003-07-22
Lightly donor doped electrodes for high-dielectric-constant materials Grant 6,593,638 - Summerfelt , et al. July 15, 2	2003-07-15
FeRAM sidewall diffusion barrier etch App 20030129847 - Celii, Francis G. ; et al.	2003-07-10
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier App 20030129771 - Summerfelt, Scott R. ; et al.	2003-07-10
Detection of AIOx ears for process control in FeRAM processing App 20030124791 - Summerfelt, Scott R. ; et al.	2003-07-03
Method of forming an FeRAM having a multi-layer hard mask and patterning thereof App 20030124748 - Summerfelt, Scott R. ; et al.	2003-07-03
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing App 20030119251 - Aggarwal, Sanjeev ; et al.	2003-06-26
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing App 20030119271 - Aggarwal, Sanjeev ; et al.	2003-06-26
Method Of Patterning A Feram Capacitor With A Sidewall During Bottom Electrode Etch App 20030119211 - Summerfelt, Scott R. ; et al.	2003-06-26
Methods Of Preventing Reduction Of Irox During Pzt Formation By Metalorganic Chemical Vapor Deposition Or Other Processing App 20030119273 - Aggarwal, Sanjeev ; et al.	2003-06-26
One step deposition process for the top electrode and hardmask in a ferroelectric memory cell Grant 6,576,482 - Aggarwal , et al. June 10, 2	2003-06-10
Method for forming integrated circuit capacitor and memory Grant 6,555,431 - Xing , et al. April 29, 2	2003-04-29
Method of fabricating a ferroelectric memory cell Grant 6,548,343 - Summerfelt , et al. April 15, 2	2003-04-15
Integrated circuit and method App 20030068846 - Moise, Theodore S. ; et al.	2003-04-10
Versatile plasma processing system for producing oxidation resistant barriers App 20030060059 - Summerfelt, Scott R.	2003-03-27
Hardmask designs for dry etching FeRAM capacitor stacks Grant 6,534,809 - Moise , et al. March 18, 2	2003-03-18
Protection of tungsten alignment mark for FeRAM processing Grant 6,528,386 - Summerfelt , et al. March 4, 2	2003-03-04
Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing Grant 6,528,328 - Aggarwal , et al. March 4, 2	2003-03-04
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing Grant 6,500,678 - Aggarwal , et al. December 31, 2	2002-12-31
Structure and method for a large-permittivity gate using a germanium layer Grant 6,486,520 - Okuno , et al. November 26, 2	2002-11-26
Hydrogen-free contact etch for ferroelectric capacitor formation Grant 6,485,988 - Ma , et al. November 26, 2	2002-11-26
Integrated circuit and method Grant 6,444,542 - Moise , et al. September 3, 2	2002-09-03
Ferroelectric and paraelectric thin film devices using dopants which eliminate ferroelectricity Grant 6,441,415 - Moise , et al. August 27, 2	2002-08-27
Electrode interface for high-dielectric-constant materials Grant 6,362,068 - Summerfelt , et al. March 26, 2	2002-03-26
Ferroelectric transistors using thin film semiconductor gate electrodes Grant 6,362,499 - Moise , et al. March 26, 2	2002-03-26
Hydrogen-free contact etch for ferroelectric capacitor formation App 20020006674 - Ma, Shawming ; et al.	2002-01-17
Integrated circuit and method App 20010055852 - Moise, Theodore S. ; et al.	2001-12-27
Diffusion barriers between noble metal electrodes and metallization layers, and integrated circuit and semiconductor devices comprising same Grant 6,320,213 - Kirlin , et al. November 20, 2	2001-11-20
Hardmask designs for dry etching FeRAM capacitor stacks App 20010034106 - Moise, Theodore ; et al.	2001-10-25
Method of forming dual metal gate structures or CMOS devices Grant 6,291,282 - Wilk , et al. September 18, 2	2001-09-18
Structure and method for a large-permittivity gate using a germanium layer App 20010020725 - Okuno, Yasutoshi ; et al.	2001-09-13
Electrical connections to dielectric materials Grant 6,275,370 - Gnade , et al. August 14, 2	2001-08-14
Electrical connections to dielectric materials App 20010004790 - Gnade, Bruce E. ; et al.	2001-06-28
Electrical connections to dielectric materials Grant 6,215,650 - Gnade , et al. April 10, 2	2001-04-10
Integrated circuit and method Grant 6,211,035 - Moise , et al. April 3, 2	2001-04-03
Lightly donor doped electrodes for high-dielectric-constant materials Grant 6,204,069 - Summerfelt , et al. March 20, 2	2001-03-20
Method and structure for etching a thin film perovskite layer Grant 6,177,351 - Beratan , et al. January 23, 2	2001-01-23
Method for forming integrated circuit capacitor and memory Grant 6,153,490 - Xing , et al. November 28, 2	2000-11-28
Stable high-dielectric-constant material electrode and method Grant 6,117,689 - Summerfelt September 12, 2	2000-09-12
Sputtering process for the conformal deposition of a metallization or insulating layer Grant 6,100,200 - Van Buskirk , et al. August 8, 2	2000-08-08
Heteroepitaxy by large surface steps Grant 6,083,812 - Summerfelt July 4, 2	2000-07-04
Adhesion promoting sacrificial etch stop layer in advanced capacitor structures Grant 5,972,722 - Visokay , et al. October 26, 1	1999-10-26
Pb/Bi-containing high-dielectric constant oxides using a non-Pb/Bi-containing perovskite as a buffer layer Grant 5,912,486 - Summerfelt June 15, 1	1999-06-15
Sacrificial oxygen sources to prevent reduction of oxygen containing materials Grant 5,909,043 - Summerfelt June 1, 1	1999-06-01
Conductive exotic-nitride barrier layer for high-dielectric-constant material electrodes Grant 5,851,896 - Summerfelt December 22, 1	1998-12-22
Pre-oxidizing high-dielectric-constant material electrodes Grant 5,811,851 - Nishioka , et al. September 22, 1	1998-09-22
Conductive amorphous-nitride barrier layer for high dielectric-constant material electrodes Grant 5,793,057 - Summerfelt August 11, 1	1998-08-11
Method and structure for forming an array of thermal sensors Grant 5,746,930 - Belcher , et al. May 5, 1	1998-05-05
Conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes Grant 5,729,054 - Summerfelt , et al. March 17, 1	1998-03-17
Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes Grant 5,696,018 - Summerfelt , et al. December 9, 1	1997-12-09
Conductive exotic-nitride barrier layer for high-dielectric-constant material electrodes Grant 5,679,980 - Summerfelt October 21, 1	1997-10-21
Method of forming conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes Grant 5,665,628 - Summerfelt September 9, 1	1997-09-09
High-dielectric-constant material electrodes comprising sidewall spacers Grant 5,656,852 - Nishioka , et al. August 12, 1	1997-08-12
Semiconductor structure for fabrication of a thermal sensor Grant 5,654,580 - Beratan , et al. August 5, 1	1997-08-05
Pb/Bi-containing high-dielectric constant oxides using a non-Pb/Bi-containing perovskite as a buffer layer Grant 5,650,646 - Summerfelt July 22, 1	1997-07-22
Structure and method including dry etching techniques for forming an array of thermal sensitive elements Grant 5,647,946 - Belcher , et al. July 15, 1	1997-07-15
Electrodes comprising conductive perovskite-seed layers for perovskite dielectrics Grant 5,626,906 - Summerfelt , et al. May 6, 1	1997-05-06
Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes Grant 5,622,893 - Summerfelt , et al. April 22, 1	1997-04-22
High-dielectric-constant material electrodes comprising thin ruthenium dioxide layers Grant 5,619,393 - Summerfelt , et al. April 8, 1	1997-04-08
Semiconductor structures using high-dielectric-constant materials and an adhesion layer Grant 5,612,574 - Summerfelt , et al. March 18, 1	1997-03-18
Processing methods for high-dielectric-constant materials Grant 5,609,927 - Summerfelt , et al. March 11, 1	1997-03-11
Method of forming high-dielectric-constant material electrodes comprising conductive sidewall spacers of same material as electrodes Grant 5,605,858 - Nishioka , et al. February 25, 1	1997-02-25
Electrodes comprising conductive perovskite-seed layers for perovskite dielectrics Grant 5,589,284 - Summerfelt , et al. December 31, 1	1996-12-31
High-dielectric-constant material electrodes comprising thin platinum layers Grant 5,576,928 - Summerfelt , et al. November 19, 1	1996-11-19
High-dielectric-constant material electrodes comprising thin platinum layers Grant 5,566,045 - Summerfelt , et al. October 15, 1	1996-10-15
Pre-oxidizing high-dielectric-constant material electrodes Grant 5,554,564 - Nishioka , et al. September 10, 1	1996-09-10
Pre-oxidizing high-dielectric-constant material electrodes Grant 5,554,866 - Nishioka , et al. September 10, 1	1996-09-10
Porous thermal isolation mesas for hybrid uncooled infrared detectors Grant 5,536,965 - Beratan , et al. July 16, 1	1996-07-16
Electrodes for high dielectric constant materials Grant 5,520,992 - Douglas , et al. May 28, 1	1996-05-28
Conductive exotic-nitride barrier layer for high-dielectric-constant materials Grant 5,504,041 - Summerfelt April 2, 1	1996-04-02
Method of forming high-dielectric-constant material electrodes comprising sidewall spacers Grant 5,489,548 - Nishioka , et al. February 6, 1	1996-02-06
High-dielectric constant oxides on semiconductors using a Ge buffer layer Grant 5,473,171 - Summerfelt December 5, 1	1995-12-05
Electrode interface for high-dielectric-constant materials Grant 5,471,364 - Summerfelt , et al. November 28, 1	1995-11-28
Pb/Bi-containing high-dielectric constant oxides using a non-P/Bi-containing perovskite as a buffer layer Grant 5,393,352 - Summerfelt February 28, 1	1995-02-28
Method of forming electrical connections to high dielectric constant materials Grant 5,348,894 - Gnade , et al. September 20, 1	1994-09-20
Method of fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer Grant 5,326,721 - Summerfelt July 5, 1	1994-07-05
Anisotropic tantalum pentoxide etch Grant 5,312,516 - Douglas , et al. May 17, 1	1994-05-17
Anisotropic titanate etch Grant 5,238,530 - Douglas , et al. August 24, 1	1993-08-24
Anisotropic niobium pentoxide etch Grant 5,201,989 - Douglas , et al. April 13, 1	1993-04-13

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