Suguro; Kyoichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Suguro; Kyoichi.The latest application filed is for "semiconductor device and semiconductor device manufacturing method".

Company Profile

1.134.110

Suguro; Kyoichi - Kanagawa JP
Suguro; Kyoichi - Yokohama Kanagawa JP
SUGURO; Kyoichi - Yokohama JP
Suguro; Kyoichi - Ishikawa JP
SUGURO; Kyoichi - Nomi JP
SUGURO; Kyoichi - Kanagawa-ken JP
SUGURO; Kyoichi - Yokohama-shi JP
Suguro; Kyoichi - Yokohoma JP
Suguro; Kyoichi - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor manufacturing apparatus Grant 11,031,212 - Suguro June 8, 2	2021-06-08
Semiconductor device having electrode pad and electrode layer intervening semiconductor layer inbetween and manufacturing method thereof Grant 10,985,104 - Inumiya , et al. April 20, 2	2021-04-20
Semiconductor device and semiconductor device manufacturing method App 20190295957 - Inumiya; Seiji ; et al.	2019-09-26
Method And Apparatus For Manufacturing Semiconductor Device App 20190272989 - ISOBE; YASUHIRO ; et al.	2019-09-05
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device Grant 10,134,612 - Suguro November 20, 2	2018-11-20
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20180277388 - MATSUI; Yukiteru ; et al.	2018-09-27
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Grant 10,008,390 - Matsui , et al. June 26, 2	2018-06-26
Semiconductor Manufacturing Apparatus App 20170263420 - SUGURO; Kyoichi	2017-09-14
Method of manufacturing semiconductor device Grant 9,613,872 - Wakatsuki , et al. April 4, 2	2017-04-04
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device Grant 9,478,412 - Suguro October 25, 2	2016-10-25
Method Of Manufacturing Semiconductor Device App 20160093538 - WAKATSUKI; SATOSHI ; et al.	2016-03-31
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20160042944 - SUGURO; Kyoichi	2016-02-11
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20160027660 - MATSUI; YUKITERU ; et al.	2016-01-28
Film Formation Method And Nonvolatile Memory Device App 20160005960 - SUGURO; Kyoichi	2016-01-07
Semiconductor device, semiconductor device manufacturing method, and semiconductor device manufacturing apparatus Grant 9,159,769 - Suguro October 13, 2	2015-10-13
Semiconductor Manufacturing Equipment And Manufacturing Method Of Semiconductor Device App 20150255317 - SUGURO; KYOICHI ; et al.	2015-09-10
Semiconductor Manufacturing Apparatus and Method of Manufacturing Semiconductor Device App 20150235878 - SUGURO; Kyoichi	2015-08-20
Method of manufacturing multilayer film Grant 9,082,961 - Ohsawa , et al. July 14, 2	2015-07-14
Semiconductor Manufacturing Apparatus and Method of Manufacturing Semiconductor Device App 20150179533 - Aoyama; Tomonori ; et al.	2015-06-25
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Grant 9,029,247 - Suguro May 12, 2	2015-05-12
Method for manufacturing nonvolatile memory device Grant 8,981,507 - Takahashi , et al. March 17, 2	2015-03-17
Semiconductor Device, Semiconductor Device Manufacturing Method, And Semiconductor Device Manufacturing Apparatus App 20140284540 - SUGURO; Kyoichi	2014-09-25
Semiconductor device and fabrication method thereof Grant 8,836,075 - Suguro September 16, 2	2014-09-16
Semiconductor device and method of manufacturing the same Grant 8,754,433 - Matsui , et al. June 17, 2	2014-06-17
Non volatile semiconductor memory device and manufacturing method thereof Grant 8,743,601 - Suguro June 3, 2	2014-06-03
Method of manufacturing semiconductor device Grant 8,741,161 - Sonoda , et al. June 3, 2	2014-06-03
Method of manufacturing magnetic memory Grant 8,716,034 - Ohsawa , et al. May 6, 2	2014-05-06
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20140065805 - SUGURO; Kyoichi	2014-03-06
Film Formation Method And Nonvolatile Memory Device App 20140054660 - Suguro; Kyoichi	2014-02-27
Template manufacturing method, semiconductor device manufacturing method and template Grant 8,609,014 - Azuma , et al. December 17, 2	2013-12-17
Producing Method For Semiconductor Device App 20130267083 - Suguro; Kyoichi	2013-10-10
Semiconductor device manufacturing method, wiring and semiconductor device Grant 8,497,205 - Suguro , et al. July 30, 2	2013-07-30
Semiconductor device and manufacturing method for the same Grant 8,441,073 - Nakajima , et al. May 14, 2	2013-05-14
Memory device and method for manufacturing same Grant 8,436,331 - Iwakaji , et al. May 7, 2	2013-05-07
Semiconductor Device And Method Of Manufacturing The Same App 20130095656 - MATSUI; Yukiteru ; et al.	2013-04-18
Producing Method Of Semiconductor Device And Production Device Used Therefor App 20130078788 - SUGURO; Kyoichi	2013-03-28
Semiconductor Device And Fabrication Method Thereof App 20130069195 - Suguro; Kyoichi	2013-03-21
Method For Manufacturing Nonvolatile Memory Device App 20130029431 - TAKAHASHI; Shigeki ; et al.	2013-01-31
Method Of Manufacturing Semiconductor Device App 20130005148 - Sonoda; Yasuyuki ; et al.	2013-01-03
Non Volatile Semiconductor Memory Device And Manufacturing Method Thereof App 20120287709 - SUGURO; Kyoichi	2012-11-15
Method Of Manufacturing Magnetic Memory App 20120244639 - OHSAWA; Yuichi ; et al.	2012-09-27
Method Of Manufacturing Multilayer Film App 20120244640 - OHSAWA; Yuichi ; et al.	2012-09-27
Semiconductor device with extension structure and method for fabricating the same Grant 8,236,641 - Ito , et al. August 7, 2	2012-08-07
Method for manufacturing semiconductor device, including multiple heat treatment Grant RE43,521 - Ito , et al. July 17, 2	2012-07-17
Fabrication method for semiconductor device including flash lamp annealing processes Grant 8,211,785 - Itani , et al. July 3, 2	2012-07-03
Semiconductor Device Manufacturing Method, Wiring And Semiconductor Device App 20120164811 - Suguro; Kyoichi ; et al.	2012-06-28
Method for manufacturing semiconductor device, including multiple heat treatment Grant RE43,229 - Ito , et al. March 6, 2	2012-03-06
Template Manufacturing Method, Semiconductor Device Manufacturing Method And Template App 20120009799 - AZUMA; Tsukasa ; et al.	2012-01-12
Semiconductor device and manufacturing method for the same App 20110298055 - Nakajima; Kazuaki ; et al.	2011-12-08
Semiconductor Device And Method Of Manufacturing The Same App 20110294291 - Matsui; Yukiteru ; et al.	2011-12-01
Semiconductor Device With Extension Structure And Method For Fabricating The Same App 20110248361 - ITO; Takayuki ; et al.	2011-10-13
Semiconductor device and manufacturing method for the same Grant 8,017,466 - Nakajima , et al. September 13, 2	2011-09-13
Memory Device And Method For Manufacturing Same App 20110193049 - IWAKAJI; Yoko ; et al.	2011-08-11
Semiconductor device with extension structure and method for fabricating the same Grant 7,989,903 - Ito , et al. August 2, 2	2011-08-02
Method for manufacturing thin film Grant 7,972,960 - Suguro , et al. July 5, 2	2011-07-05
Semiconductor device manufacturing method, wiring and semiconductor device Grant 7,879,723 - Suguro , et al. February 1, 2	2011-02-01
Semiconductor device with extension structure and method for fabricating the same Grant 7,781,848 - Ito , et al. August 24, 2	2010-08-24
Method of manufacturing semiconductor device using dummy gate wiring layer Grant 7,772,076 - Yagishita , et al. August 10, 2	2010-08-10
Semiconductor device having an element isolating insulating film Grant 7,772,671 - Suguro , et al. August 10, 2	2010-08-10
Semiconductor Device With Extension Structure And Method For Fabricating The Same App 20100193874 - Ito; Takayuki ; et al.	2010-08-05
Manufacturing method of semiconductor device subjected to heat treatment by use of optical heating apparatus Grant 7,763,553 - Ito , et al. July 27, 2	2010-07-27
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same Grant 7,745,073 - Suguro , et al. June 29, 2	2010-06-29
Method for manufacturing a semiconductor device Grant 7,709,361 - Suguro May 4, 2	2010-05-04
Method for manufacturing semiconductor device Grant 7,709,363 - Suguro May 4, 2	2010-05-04
Semiconductor device and manufacturing method for the same App 20100062596 - Nakajima; Kazuaki ; et al.	2010-03-11
Semiconductor device and method of manufacturing the same App 20100055859 - Ito; Takayuki ; et al.	2010-03-04
Semiconductor device and method of manufacturing the same Grant 7,667,274 - Nakajima , et al. February 23, 2	2010-02-23
Semiconductor device and manufacturing method for the same Grant 7,635,631 - Nakajima , et al. December 22, 2	2009-12-22
Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product Grant 7,584,011 - Nishinohara , et al. September 1, 2	2009-09-01
Semiconductor device and method of manufacturing the same Grant 7,579,231 - Matsuo , et al. August 25, 2	2009-08-25
Semiconductor Device And Manufacturing Method Thereof App 20090206379 - Kitazaki; Soichirou ; et al.	2009-08-20
Semiconductor device manufacturing method, wiring and semiconductor device App 20090203181 - Suguro; Kyoichi ; et al.	2009-08-13
Method of manufacture of semiconductor device Grant 7,557,040 - Itokawa , et al. July 7, 2	2009-07-07
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same App 20090139449 - Suguro; Kyoichi ; et al.	2009-06-04
Method for fabricating semiconductor device and equipment for fabricating the same Grant 7,521,697 - Shibata , et al. April 21, 2	2009-04-21
Doping method and manufacturing method for a semiconductor device Grant 7,501,332 - Ito , et al. March 10, 2	2009-03-10
Semiconductor device and method for manufacturing the same Grant 7,495,293 - Iinuma , et al. February 24, 2	2009-02-24
Method For Manufacturing A Semiconductor Device App 20090023276 - Suguro; Kyoichi	2009-01-22
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same Grant 7,459,246 - Suguro , et al. December 2, 2	2008-12-02
Method For Manufacturing Semiconductor Device App 20080293225 - SUGURO; Kyoichi	2008-11-27
Fabrication method for semiconductor device and manufacturing apparatus for the same App 20080260501 - Itani; Takaharu ; et al.	2008-10-23
Semiconductor device having an element isolating insulating film App 20080224252 - Suguro; Kyoichi ; et al.	2008-09-18
Manufacturing Method Of Semiconductor Device Subjected To Heat Treatment By Use Of Optical Heating Apparatus App 20080214020 - ITO; Takayuki ; et al.	2008-09-04
Semiconductor device and method of manufacturing the same App 20080157214 - Nakajima; Kazuaki ; et al.	2008-07-03
Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product App 20080140229 - Nishinohara; Kazumi ; et al.	2008-06-12
Method of manufacturing CMOS with silicide contacts Grant 7,354,819 - Nakajima , et al. April 8, 2	2008-04-08
Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product Grant 7,349,750 - Nishinohara , et al. March 25, 2	2008-03-25
Semiconductor device manufacturing method and semiconductor manufacturing apparatus Grant 7,339,247 - Shibata , et al. March 4, 2	2008-03-04
Stencil mask with charge-up prevention and method of manufacturing the same Grant 7,327,013 - Shibata , et al. February 5, 2	2008-02-05
Method for fabricating semiconductor device and equipment for fabricating the same App 20070295918 - Shibata; Takeshi ; et al.	2007-12-27
Semiconductor manufacturing method using two-stage annealing Grant 7,300,832 - Ito , et al. November 27, 2	2007-11-27
Semiconductor device fabrication method using ultra-rapid thermal annealing App 20070243701 - Ito; Takayuki ; et al.	2007-10-18
Fabrication method for semiconductor device and manufacturing apparatus for the same Grant 7,279,405 - Itani , et al. October 9, 2	2007-10-09
Semiconductor device with extension structure and method for fabricating the same App 20070215918 - Ito; Takayuki ; et al.	2007-09-20
Method for fabricating semiconductor device and equipment for fabricating the same Grant 7,267,927 - Shibata , et al. September 11, 2	2007-09-11
Semiconductor device and method of manufacturing the same App 20070172997 - Yagishita; Atsushi ; et al.	2007-07-26
Ion implanter and method of manufacturing semiconductor device Grant 7,247,867 - Itokawa , et al. July 24, 2	2007-07-24
Method of manufacture of semiconductor device App 20070166977 - Itokawa; Hiroshi ; et al.	2007-07-19
Semiconductor device and manufacturing method therefor Grant 7,232,751 - Akasaka , et al. June 19, 2	2007-06-19
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same App 20070111114 - Suguro; Kyoichi ; et al.	2007-05-17
Semiconductor device Grant 7,208,797 - Yagishita , et al. April 24, 2	2007-04-24
Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product App 20070067056 - Nishinohara; Kazumi ; et al.	2007-03-22
Semiconductor device and method for manufacturing the same App 20070052039 - Iinuma; Toshihiko ; et al.	2007-03-08
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same Grant 7,179,569 - Suguro , et al. February 20, 2	2007-02-20
Method of fabrication of semiconductor device Grant 7,157,340 - Ito , et al. January 2, 2	2007-01-02
Semiconductor device and method of manufacturing the same App 20060273392 - Ito; Takayuki ; et al.	2006-12-07
Apparatus and method for evaluating semiconductor material Grant 7,145,658 - Akutsu , et al. December 5, 2	2006-12-05
Ion source, ion implanting device, and manufacturing method of semiconductor devices Grant 7,144,794 - Suguro December 5, 2	2006-12-05
Semiconductor device manufacturing method and semiconductor manufacturing apparatus App 20060263704 - Shibata; Takeshi ; et al.	2006-11-23
Semiconductor device and manufacturing method for the same App 20060237816 - Nakajima; Kazuaki ; et al.	2006-10-26
Annealing apparatus, annealing method, and manufacturing method of a semiconductor device Grant 7,122,448 - Ito , et al. October 17, 2	2006-10-17
Apparatus and method for depositing a dielectric film App 20060225657 - Mizushima; Ichiro ; et al.	2006-10-12
Method for annealing and method for manufacturing a semiconductor device App 20060216875 - Ito; Takayuki ; et al.	2006-09-28
Method of manufacturing semiconductor devices Grant 7,098,120 - Saito , et al. August 29, 2	2006-08-29
Method of controlling a potential difference between a stencil mask and a substrate of semiconductor device Grant 7,094,612 - Shibata , et al. August 22, 2	2006-08-22
Semiconductor device and method of manufacturing the same Grant 7,091,114 - Ito , et al. August 15, 2	2006-08-15
Annealing furnace, manufacturing apparatus, annealing method and manufacturing method of electronic device Grant 7,084,068 - Suguro , et al. August 1, 2	2006-08-01
Semiconductor device manufacturing method, wiring and semiconductor device App 20060160315 - Suguro; Kyoichi ; et al.	2006-07-20
Low threshold voltage semiconductor device Grant 7,078,776 - Nishinohara , et al. July 18, 2	2006-07-18
Semiconductor device and manufacturing method thereof App 20060131676 - Saito; Tomohiro ; et al.	2006-06-22
Method for manufacturing a semiconductor device Grant 7,060,581 - Ito , et al. June 13, 2	2006-06-13
Semiconductor and method of manufacturing the same Grant 7,045,458 - Ito , et al. May 16, 2	2006-05-16
Method of manufacturing semiconductor device and the semiconductor device Grant 7,041,584 - Tanaka , et al. May 9, 2	2006-05-09
Method for manufacturing semiconductor device, including multiple heat treatment Grant 7,026,205 - Ito , et al. April 11, 2	2006-04-11
Ion implanter and method of manufacturing semiconductor device App 20060017017 - Itokawa; Hiroshi ; et al.	2006-01-26
Semiconductor device and method for manufacturing Grant 6,989,316 - Suguro , et al. January 24, 2	2006-01-24
Annealing apparatus, annealing method, and manufacturing method of a semiconductor device App 20050272228 - Ito, Takayuki ; et al.	2005-12-08
Doping method and manufacturing method for a semiconductor device App 20050227463 - Ito, Takayuki ; et al.	2005-10-13
Method of fabrication of semiconductor device App 20050202656 - Ito, Takayuki ; et al.	2005-09-15
Method for fabricating semiconductor device having gate electrode with polymetal structure of polycrystalline silicon film and metal film Grant 6,939,787 - Ohtake , et al. September 6, 2	2005-09-06
Semiconductor device and method of manufacturing the same Grant 6,924,518 - Iinuma , et al. August 2, 2	2005-08-02
Semiconductor device and manufacturing method therefor App 20050130418 - Akasaka, Yasushi ; et al.	2005-06-16
Fabrication method for semiconductor device and manufacturing apparatus for the same App 20050124123 - Itani, Takaharu ; et al.	2005-06-09
Method for manufacturing a semiconductor device App 20050112854 - Ito, Takayuki ; et al.	2005-05-26
Semiconductor device and manufacturing method therefor Grant 6,893,980 - Akasaka , et al. May 17, 2	2005-05-17
Method of manufacturing semiconductor devices App 20050095825 - Saito, Tomohiro ; et al.	2005-05-05
Method of manufacturing semiconductor device Grant 6,881,631 - Saito , et al. April 19, 2	2005-04-19
Ion generation method and filament for ion generation apparatus Grant 6,875,986 - Murakoshi , et al. April 5, 2	2005-04-05
Semiconductor and method of manufacturing the same App 20050062107 - Ito, Takayuki ; et al.	2005-03-24
Semiconductor device having gate electrodes with polymetal structure of polycrystalline silicon films and metal films App 20050062115 - Ohtake, Fumio ; et al.	2005-03-24
Ion source, ion implanting device, and manufacturing method of semiconductor devices App 20050057137 - Suguro, Kyoichi	2005-03-17
Method Of Manufacturing Semiconductor Device App 20050048722 - Saito, Tomohiro ; et al.	2005-03-03
Manufacturing method for semiconductor device App 20050037580 - Nakajima, Kazuaki ; et al.	2005-02-17
Semiconductor device and method of manufacturing the same App 20050006637 - Iinuma, Toshihiko ; et al.	2005-01-13
Annealing furnace, manufacturing apparatus, annealing method and manufacturing method of electronic device App 20040266214 - Suguro, Kyoichi ; et al.	2004-12-30
Method for manufacturing semiconductor device, including multiple heat treatment App 20040259302 - Ito, Takayuki ; et al.	2004-12-23
Semiconductor manufacturing method using two-stage annealing App 20040248351 - Ito, Takayuki ; et al.	2004-12-09
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same App 20040248044 - Suguro, Kyoichi ; et al.	2004-12-09
Method of manufacturing semiconductor device and the semiconductor device App 20040248393 - Tanaka, Masayuki ; et al.	2004-12-09
Semiconductor device and method of manufacturing the same App 20040238883 - Nishinohara, Kazumi ; et al.	2004-12-02
Ion source, ion implanting device, and manufacturing method of semiconductor devices Grant 6,825,597 - Suguro November 30, 2	2004-11-30
Method for fabricating semiconductor device and equipment for fabricating the same App 20040219444 - Shibata, Takeshi ; et al.	2004-11-04
Apparatus and method for evaluating semiconductor material App 20040196464 - Akutsu, Haruko ; et al.	2004-10-07
Stencil mask with charge-up prevention and method of manufacturing the same App 20040197675 - Shibata, Takeshi ; et al.	2004-10-07
Semiconductor device and method of manufacturing the same App 20040183142 - Matsuo, Kouji ; et al.	2004-09-23
Process for fabricating a metal wiring and metal contact in a semicondutor device Grant 6,794,286 - Aoyama , et al. September 21, 2	2004-09-21
Semiconductor device having counter and channel impurity regions Grant 6,770,944 - Nishinohara , et al. August 3, 2	2004-08-03
Semiconductor manufacturing method using two-stage annealing Grant 6,770,519 - Ito , et al. August 3, 2	2004-08-03
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same Grant 6,770,402 - Suguro , et al. August 3, 2	2004-08-03
Method of manufacturing semiconductor device and the semiconductor device Grant 6,767,796 - Tanaka , et al. July 27, 2	2004-07-27
Semiconductor device and method of manufacturing the same App 20040142567 - Nakajima, Kazuaki ; et al.	2004-07-22
Semiconductor device manufacturing method and semiconductor manufacturing apparatus App 20040137759 - Shibata, Takeshi ; et al.	2004-07-15
MOSFET formed by using salicide process and method of manufacturing the same App 20040113209 - Izuha, Mitsuaki ; et al.	2004-06-17
Semiconductor device and method of manufacturing the same Grant 6,737,724 - Hieda , et al. May 18, 2	2004-05-18
Semiconductor device and method of manufacturing the same Grant 6,737,716 - Matsuo , et al. May 18, 2	2004-05-18
Semiconductor device and method of manufacture thereof Grant 6,730,581 - Suguro May 4, 2	2004-05-04
Semiconductor device and method for manufacturing the same App 20040070045 - Suguro, Kyoichi ; et al.	2004-04-15
Semiconductor device and method of manufacturing the same Grant 6,720,657 - Suguro April 13, 2	2004-04-13
Ion source, ion implanting device, and manufacturing method of semiconductor devices App 20040066128 - Suguro, Kyoichi	2004-04-08
Ion implantation method and ion implantation equipment Grant 6,693,023 - Murakoshi , et al. February 17, 2	2004-02-17
Semiconductor manufacturing method using two-stage annealing App 20040018702 - Ito, Takayuki ; et al.	2004-01-29
Semiconductor device and method for manufacturing App 20030211713 - Suguro, Kyoichi ; et al.	2003-11-13
Ion generation method and filament for ion generation apparatus Grant 6,646,268 - Murakoshi , et al. November 11, 2	2003-11-11
Semiconductor device and method of manufacturing the same App 20030193066 - Ito, Takayuki ; et al.	2003-10-16
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes Grant 6,614,033 - Suguro , et al. September 2, 2	2003-09-02
Semiconductor device and method of manufacturing the same Grant 6,607,958 - Suguro August 19, 2	2003-08-19
Semiconductor device and method of manufacturing the same App 20030122203 - Nishinohara, Kazumi ; et al.	2003-07-03
Sputtering target and method of manufacturing a semiconductor device Grant 6,586,837 - Suguro July 1, 2	2003-07-01
Method for fabricating semiconductor device Grant 6,541,393 - Sugizaki , et al. April 1, 2	2003-04-01
Semiconductor device and method of manufacturing the same Grant 6,541,829 - Nishinohara , et al. April 1, 2	2003-04-01
Semiconductor device and method of manufacturing the same App 20030047763 - Hieda, Katsuhiko ; et al.	2003-03-13
Semiconductor device and method of manufacturing the same App 20030027393 - Suguro, Kyoichi	2003-02-06
Semiconductor device and process of fabricating the same App 20020173116 - Apyama, Hisako ; et al.	2002-11-21
Semiconductor device and method of manufacturing the same Grant 6,482,714 - Hieda , et al. November 19, 2	2002-11-19
Semiconductor device and method of manufacturing the same Grant 6,476,454 - Suguro November 5, 2	2002-11-05
Method of manufacturing a semiconductor device using a polymer film pattern Grant 6,465,290 - Suguro , et al. October 15, 2	2002-10-15
Ion implantation method and ion implantation equipment App 20020130271 - Murakoshi, Atsushi ; et al.	2002-09-19
Ion generation method and filament for ion generation apparatus App 20020100876 - Murakoshi, Atsushi ; et al.	2002-08-01
Method of manufacturing semiconductor device and the semiconductor device App 20020086486 - Tanaka, Masayuki ; et al.	2002-07-04
Ion implantation method and ion implantation equipment Grant 6,403,452 - Murakoshi , et al. June 11, 2	2002-06-11
Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same App 20020058400 - Suguro, Kyoichi ; et al.	2002-05-16
Semiconductor device and method for fabricating the same App 20020056874 - Ohtake, Fumio ; et al.	2002-05-16
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device App 20020053645 - Suguro, Kyoichi ; et al.	2002-05-09
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes App 20020050573 - Suguro, Kyoichi ; et al.	2002-05-02
Semiconductor device and method of manufacturing the same Grant 6,376,888 - Tsunashima , et al. April 23, 2	2002-04-23
Semiconductor device App 20020045296 - Yagishita, Atsushi ; et al.	2002-04-18
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device Grant 6,365,492 - Suguro , et al. April 2, 2	2002-04-02
Method of manufacturing a semiconductor device Grant 6,346,438 - Yagishita , et al. February 12, 2	2002-02-12
Semiconductor device and manufacturing method thereof Grant 6,335,241 - Hieda , et al. January 1, 2	2002-01-01
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes Grant 6,335,534 - Suguro , et al. January 1, 2	2002-01-01
Semiconductor device and method of manufacture thereof App 20010039107 - Suguro, Kyoichi	2001-11-08
Semiconductor device and method of manufacturing the same App 20010033023 - Suguro, Kyoichi	2001-10-25
Semiconductor device and method of manufacturing the same App 20010025999 - Suguro, Kyoichi	2001-10-04
Method for fabricating semiconductor device App 20010018274 - Sugizaki, Taro ; et al.	2001-08-30
Semiconductor device with gate structure and method of manufacturing the same Grant 6,271,573 - Suguro August 7, 2	2001-08-07
Semiconductor device and method of manufacturing the same App 20010009292 - Nishinohara, Kazumi ; et al.	2001-07-26
Semiconductor device and manufacturing method therefor Grant 6,162,741 - Akasaka , et al. December 19, 2	2000-12-19
Semiconductor device and method for manufacturing the same Grant 6,133,150 - Nakajima , et al. October 17, 2	2000-10-17
Method of manufacturing a semiconductor device Grant 6,100,193 - Suehiro , et al. August 8, 2	2000-08-08
Sputtering target and method of manufacturing a semiconductor device Grant 6,033,537 - Suguro March 7, 2	2000-03-07
Semiconductor device and method of manufacturing the same Grant 5,989,988 - Iinuma , et al. November 23, 1	1999-11-23
MMIC semiconductor device with WN.sub.x capacitor electrode Grant 5,929,473 - Nishihori , et al. July 27, 1	1999-07-27
Semiconductor device with conductive oxidation preventing film and method for manufacturing the same Grant 5,907,188 - Nakajima , et al. May 25, 1	1999-05-25
Semiconductor device Grant 5,903,053 - Iijima , et al. May 11, 1	1999-05-11
Semiconductor device having a metal film formed in a groove in an insulating film Grant 5,731,634 - Matsuo , et al. March 24, 1	1998-03-24
Method of manufacturing a semiconductor device Grant 5,721,175 - Kunishima , et al. February 24, 1	1998-02-24
Metal oxide capacitor with a WN.sub.X electrode Grant 5,670,808 - Nishihori , et al. September 23, 1	1997-09-23
Semiconductor device having a single-crystal metal wiring Grant 5,661,345 - Wada , et al. August 26, 1	1997-08-26
Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device Grant 5,656,820 - Murakoshi , et al. August 12, 1	1997-08-12
Method of manufacturing semiconductor device Grant 5,654,237 - Suguro , et al. August 5, 1	1997-08-05
Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device Grant 5,640,020 - Murakoshi , et al. June 17, 1	1997-06-17
Semiconductor device having a wiring layer with a barrier layer Grant 5,592,024 - Aoyama , et al. January 7, 1	1997-01-07
Method for forming an electrode and/or wiring layer by reducing copper oxide or silver oxide Grant 5,561,082 - Matsuo , et al. October 1, 1	1996-10-01
Method of forming a thin film Grant 5,514,425 - Ito , et al. May 7, 1	1996-05-07
Method for making aluminum single crystal interconnections on insulators Grant 5,409,862 - Wada , et al. April 25, 1	1995-04-25
Method of manufacturing a semiconductor device comprising metal silicide Grant 5,316,977 - Kunishima , et al. May 31, 1	1994-05-31
High dielectric capacitor having low current leakage Grant 5,189,503 - Suguro , et al. February 23, 1	1993-02-23
Semiconductor device having salicide structure, method of manufacturing the same, and heating apparatus Grant 5,168,332 - Kunishima , et al. December 1, 1	1992-12-01
Semiconductor device having salicide structure, method of manufacturing the same, and heating apparatus Grant 5,162,263 - Kunishima , et al. November 10, 1	1992-11-10
Semiconductor device and method of manufacturing the same Grant 4,912,542 - Suguro March 27, 1	1990-03-27