| Patent | Date |
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Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus
Grant 11,276,555 - Sugiyama , et al. March 15, 2 | 2022-03-15 |
Focused ion beam apparatus, and control method for focused ion beam apparatus
Grant 11,257,655 - Sugiyama , et al. February 22, 2 | 2022-02-22 |
Focused Ion Beam Processing Apparatus
App 20210296080 - OBA; Hiroshi ; et al. | 2021-09-23 |
Charged particle beam apparatus
Grant 11,017,988 - Oba , et al. May 25, 2 | 2021-05-25 |
Composite charged particle beam apparatus and control method thereof
Grant 11,017,982 - Sugiyama , et al. May 25, 2 | 2021-05-25 |
Focused Ion Beam Apparatus, And Control Method For Focused Ion Beam Apparatus
App 20210118642 - SUGIYAMA; Yasuhiko ; et al. | 2021-04-22 |
Charged Particle Beam Apparatus, Composite Charged Particle Beam Apparatus, And Control Method For Charged Particle Beam Apparatus
App 20210118645 - SUGIYAMA; Yasuhiko ; et al. | 2021-04-22 |
Composite Charged Particle Beam Apparatus And Control Method Thereof
App 20200266029 - SUGIYAMA; Yasuhiko ; et al. | 2020-08-20 |
Charged Particle Beam Apparatus
App 20200135437 - OBA; Hiroshi ; et al. | 2020-04-30 |
Focused ion beam apparatus
Grant 10,176,964 - Sugiyama , et al. J | 2019-01-08 |
Charged particle beam apparatus and plasma ignition method
Grant 10,056,232 - Oba , et al. August 21, 2 | 2018-08-21 |
Focused ion beam apparatus
Grant 9,793,085 - Yasaka , et al. October 17, 2 | 2017-10-17 |
Charged Particle Beam Apparatus And Plasma Ignition Method
App 20170278678 - Oba; Hiroshi ; et al. | 2017-09-28 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus
Grant 9,773,634 - Kozakai , et al. September 26, 2 | 2017-09-26 |
Plasma ion source and charged particle beam apparatus
Grant 9,773,637 - Oba , et al. September 26, 2 | 2017-09-26 |
Plasma ion source and charged particle beam apparatus
Grant 9,773,646 - Oba , et al. September 26, 2 | 2017-09-26 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus
App 20170148603 - Kozakai; Tomokazu ; et al. | 2017-05-25 |
Emitter structure, gas ion source and focused ion beam system
Grant 9,640,361 - Yasaka , et al. May 2, 2 | 2017-05-02 |
Focused Ion Beam Apparatus
App 20170069456 - SUGIYAMA; Yasuhiko ; et al. | 2017-03-09 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus
Grant 9,583,299 - Kozakai , et al. February 28, 2 | 2017-02-28 |
Repair Apparatus
App 20160322123 - Aramaki; Fumio ; et al. | 2016-11-03 |
Plasma Ion Source And Charged Particle Beam Apparatus
App 20160240354 - OBA; Hiroshi ; et al. | 2016-08-18 |
Plasma Ion Source And Charged Particle Beam Apparatus
App 20160240346 - OBA; Hiroshi ; et al. | 2016-08-18 |
Focused ion beam apparatus and control method thereof
Grant 9,418,817 - Aramaki , et al. August 16, 2 | 2016-08-16 |
Focused Ion Beam Apparatus
App 20160225574 - YASAKA; Anto ; et al. | 2016-08-04 |
Repair apparatus
Grant 9,378,858 - Aramaki , et al. June 28, 2 | 2016-06-28 |
Focused ion beam apparatus with precious metal emitter surface
Grant 9,336,979 - Yasaka , et al. May 10, 2 | 2016-05-10 |
Focused ion beam system
Grant 9,245,712 - Sugiyama , et al. January 26, 2 | 2016-01-26 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System
App 20150357147 - YASAKA; Anto ; et al. | 2015-12-10 |
Emitter structure, gas ion source and focused ion beam system
Grant 9,129,771 - Yasaka , et al. September 8, 2 | 2015-09-08 |
Ion beam apparatus
Grant 9,111,717 - Asahata , et al. August 18, 2 | 2015-08-18 |
Focused Ion Beam Apparatus
App 20150162160 - YASAKA; Anto ; et al. | 2015-06-11 |
Method for fabricating emitter
Grant 8,999,178 - Sugiyama , et al. April 7, 2 | 2015-04-07 |
Repair Apparatus
App 20150053866 - Aramaki; Fumio ; et al. | 2015-02-26 |
Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa
Grant 8,963,100 - Yasaka , et al. February 24, 2 | 2015-02-24 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus
App 20150047079 - Kozakai; Tomokazu ; et al. | 2015-02-12 |
Focused Ion Beam Apparatus And Control Method Thereof
App 20140292189 - ARAMAKI; Fumio ; et al. | 2014-10-02 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System
App 20140291542 - YASAKA; Anto ; et al. | 2014-10-02 |
Focused Ion Beam System
App 20140284474 - SUGIYAMA; Yasuhiko ; et al. | 2014-09-25 |
Method For Fabricating Emitter
App 20140246397 - SUGIYAMA; Yasuhiko ; et al. | 2014-09-04 |
Focused ion beam apparatus and method of adjusting ion beam optics
Grant 8,822,911 - Sugiyama , et al. September 2, 2 | 2014-09-02 |
Method for fabricating emitter
Grant 8,764,994 - Sugiyama , et al. July 1, 2 | 2014-07-01 |
Method For Fabricating Emitter
App 20130248483 - SUGIYAMA; Yasuhiko ; et al. | 2013-09-26 |
Ion Beam Apparatus
App 20130248732 - ASAHATA; Tatsuya ; et al. | 2013-09-26 |
Focused Ion Beam Apparatus And Method Of Adjusting Ion Beam Optics
App 20130240720 - SUGIYAMA; Yasuhiko ; et al. | 2013-09-19 |
Focused Ion Beam Apparatus
App 20130099133 - YASAKA; Anto ; et al. | 2013-04-25 |
Composite focused ion beam device, process observation method using the same, and processing method
Grant 8,274,063 - Kaito , et al. September 25, 2 | 2012-09-25 |
Composite focused ion beam device, and processing observation method and processing method using the same
Grant 8,269,194 - Kaito , et al. September 18, 2 | 2012-09-18 |
Focused ion beam apparatus
App 20110215256 - Ogawa; Takashi ; et al. | 2011-09-08 |
Composite Focused Ion Beam Device, Process Observation Method Using The Same,and Processing Method
App 20100288924 - Kaito; Takashi ; et al. | 2010-11-18 |
Composite Focused Ion Beam Device, And Processing Observation Method And Processing Method Using The Same
App 20100176296 - Kaito; Takashi ; et al. | 2010-07-15 |
Focused ion beam processing method
Grant 7,576,340 - Hagiwara , et al. August 18, 2 | 2009-08-18 |
Focused Ion Beam Apparatus
App 20080156998 - Sugiyama; Yasuhiko | 2008-07-03 |
Photomask correction method using composite charged particle beam, and device used in the correction method
App 20070267579 - Sugiyama; Yasuhiko ; et al. | 2007-11-22 |
Ion beam device and ion beam processing method, and holder member
Grant 7,297,944 - Kodama , et al. November 20, 2 | 2007-11-20 |
Ion beam device and ion beam processing method
Grant 7,276,691 - Kodama , et al. October 2, 2 | 2007-10-02 |
Focused ion beam processing method
App 20070158590 - Hagiwara; Ryoji ; et al. | 2007-07-12 |
Photomask correction method using composite charged particle beam, and device used in the correction method
Grant 7,172,839 - Sugiyama , et al. February 6, 2 | 2007-02-06 |
Ion beam device and ion beam processing method
App 20060163497 - Kodama; Toshio ; et al. | 2006-07-27 |
Ion beam device and ion beam processing method, and holder member
App 20050236587 - Kodama, Toshio ; et al. | 2005-10-27 |
Apparatus for processing and observing a sample
Grant 6,870,161 - Adachi , et al. March 22, 2 | 2005-03-22 |
Ion beam apparatus, ion beam processing method and sample holder member
Grant 6,838,685 - Kodama , et al. January 4, 2 | 2005-01-04 |
Photomask correction method using composite charged particle beam, and device used in the correction method
App 20040131953 - Sugiyama, Yasuhiko ; et al. | 2004-07-08 |
Sample manufacturing apparatus
App 20040129897 - Adachi, Tatsuya ; et al. | 2004-07-08 |
Focused ion beam system and machining method using it
App 20030173527 - Adachi, Tatsuya ; et al. | 2003-09-18 |
Point managing method
App 20020120508 - Matsumoto, Kiyotaka ; et al. | 2002-08-29 |
Sample transfer apparatus and sample stage
Grant 6,384,418 - Fujii , et al. May 7, 2 | 2002-05-07 |
Focused ion beam machining method and device thereof
Grant 6,300,628 - Fujii , et al. October 9, 2 | 2001-10-09 |
Ion beam working apparatus
Grant 6,118,122 - Koyama , et al. September 12, 2 | 2000-09-12 |
Focused ion beam optical axis adjustment method and focused ion beam apparatus
Grant 5,969,355 - Fujii , et al. October 19, 1 | 1999-10-19 |
Focused ion beam apparatus
Grant 5,438,197 - Fujii , et al. August 1, 1 | 1995-08-01 |
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