Sugarman; Michael
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sugarman; Michael.The latest application filed is for "single wafer dryer and drying methods".
- Sugarman; Michael - San Francisco CA
Trademarks
| Patent | Date |
|---|---|
| Single wafer dryer and drying methods Grant 7,980,255 - Achkire , et al. July 19, 2 | 2011-07-19 |
| Single Wafer Dryer And Drying Methods App 20100006124 - Achkire; Younes ; et al. | 2010-01-14 |
| Electro-chemical deposition system Grant 7,497,932 - Dordi , et al. March 3, 2 | 2009-03-03 |
| Single Wafer Dryer And Drying Methods App 20070295371 - Achkire; Younes ; et al. | 2007-12-27 |
| Spin-rinse-dryer Grant 7,226,514 - Husain , et al. June 5, 2 | 2007-06-05 |
| Electro-chemical deposition system App 20060246690 - Dordi; Yezdi ; et al. | 2006-11-02 |
| Roller that avoids substrate slippage App 20060189465 - Brown; Brian J. ; et al. | 2006-08-24 |
| Single wafer dryer and drying methods App 20060174921 - Achkire; Younes ; et al. | 2006-08-10 |
| Scrubber with sonic nozzle Grant 7,063,749 - Sugarman June 20, 2 | 2006-06-20 |
| Scrubber with sonic nozzle App 20050268937 - Sugarman, Michael | 2005-12-08 |
| Single wafer dryer and drying methods App 20050241684 - Achkire, Younes ; et al. | 2005-11-03 |
| Single wafer dryer and drying methods Grant 6,955,516 - Achkire , et al. October 18, 2 | 2005-10-18 |
| Backside etching in a scrubber Grant 6,921,494 - Brown , et al. July 26, 2 | 2005-07-26 |
| Roller that avoids substrate slippage Grant 6,918,864 - Brown , et al. July 19, 2 | 2005-07-19 |
| Scrubber with sonic nozzle Grant 6,904,637 - Sugarman June 14, 2 | 2005-06-14 |
| Roller that avoids substrate slippage App 20050109373 - Brown, Brian J. ; et al. | 2005-05-26 |
| Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint Grant 6,820,298 - White , et al. November 23, 2 | 2004-11-23 |
| Wafer edge cleaning method and apparatus Grant 6,797,074 - Redeker , et al. September 28, 2 | 2004-09-28 |
| Electro-chemical deposition system App 20040084301 - Dordi, Yezdi ; et al. | 2004-05-06 |
| Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber Grant 6,728,989 - Lerner , et al. May 4, 2 | 2004-05-04 |
| Electro-chemical deposition cell for face-up processing of single semiconductor substrates App 20040020781 - Dordi, Yezdi ; et al. | 2004-02-05 |
| Backside etching in a scrubber App 20030209255 - Brown, Brian J. ; et al. | 2003-11-13 |
| Electro-chemical deposition system Grant 6,635,157 - Dordi , et al. October 21, 2 | 2003-10-21 |
| Electro-chemical deposition cell for face-up processing of single semiconductor substrates Grant 6,599,402 - Dordi , et al. July 29, 2 | 2003-07-29 |
| Single wafer dryer and drying methods App 20030121170 - Achkire, Younes ; et al. | 2003-07-03 |
| Spin-rinse-dryer App 20030079762 - Husain, Anwar ; et al. | 2003-05-01 |
| Scrubber with sonic nozzle App 20030061675 - Sugarman, Michael | 2003-04-03 |
| Wafer edge cleaning method and apparatus App 20030041879 - Redeker, Fred C. ; et al. | 2003-03-06 |
| Wafer edge cleaning method and apparatus Grant 6,523,553 - Redeker , et al. February 25, 2 | 2003-02-25 |
| Gripper assembly Grant 6,520,315 - Sugarman , et al. February 18, 2 | 2003-02-18 |
| Gripper for supporting substrate in a vertical orientation App 20030026683 - Govzman, Boris I. ; et al. | 2003-02-06 |
| Gripper for supporting substrate in a vertical orientation Grant 6,474,712 - Govzman , et al. November 5, 2 | 2002-11-05 |
| Electro-chemical deposition cell for face-up processing of single semiconductor substrates App 20020157960 - Dordi, Yezdi ; et al. | 2002-10-31 |
| Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint App 20020152567 - White, John M. ; et al. | 2002-10-24 |
| Wafer presence sensor for detecting quartz wafers App 20020117188 - Galburt, Vladimir ; et al. | 2002-08-29 |
| Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber App 20020100131 - Lerner, Alexander ; et al. | 2002-08-01 |
| Electro-chemical deposition cell for face-up processing of single semiconductor substrates Grant 6,416,647 - Dordi , et al. July 9, 2 | 2002-07-09 |
| Electro-chemical deposition system App 20020029961 - Dordi, Yezdi ; et al. | 2002-03-14 |
| Spin-rinse-drying process for electroplated semiconductor wafers Grant 6,290,865 - Lloyd , et al. September 18, 2 | 2001-09-18 |
| Electro-chemical deposition system Grant 6,258,220 - Dordi , et al. July 10, 2 | 2001-07-10 |
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