| Patent | Date |
|---|
Physics package for compact atomic device
Grant 10,416,246 - DeNatale , et al. Sept | 2019-09-17 |
Integrated field coil for compact atomic devices
Grant 10,325,707 - DeNatale , et al. | 2019-06-18 |
Physics Package for Compact Atomic Device
App 20180313913 - DeNatale; Jeffrey F. ; et al. | 2018-11-01 |
Integrated Field Coil for Compact Atomic Devices
App 20180315529 - DeNatale; Jeffrey F. ; et al. | 2018-11-01 |
Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof
Grant 9,607,748 - Mihailovich , et al. March 28, 2 | 2017-03-28 |
MEMS device with integrated temperature stabilization
Grant 9,409,768 - DeNatale , et al. August 9, 2 | 2016-08-09 |
Micro-fabricated Integrated Coil And Magnetic Circuit And Method Of Manufacturing Thereof
App 20160064470 - Mihailovich; Robert E. ; et al. | 2016-03-03 |
Silicon Waveguides With Embedded Active Circuitry
App 20150185416 - Stupar; Philip A. ; et al. | 2015-07-02 |
Self-aligning hybridization method
Grant 9,029,259 - Stupar , et al. May 12, 2 | 2015-05-12 |
Mems Device With Integrated Temperature Stabilization
App 20150115377 - DeNatale; Jeffrey F. ; et al. | 2015-04-30 |
Method of fabricating silicon waveguides with embedded active circuitry
Grant 8,995,800 - Stupar , et al. March 31, 2 | 2015-03-31 |
Micro-scale system to provide thermal isolation and electrical communication between substrates
Grant 8,937,513 - DeNatale , et al. January 20, 2 | 2015-01-20 |
Compliant micro-socket hybridization method
Grant 8,847,409 - DeNatale , et al. September 30, 2 | 2014-09-30 |
Microfabricated inductors with through-wafer vias
Grant 8,826,514 - Papavasiliou , et al. September 9, 2 | 2014-09-09 |
Method Of Fabricating Silicon Waveguides With Embedded Active Circuitry
App 20140205231 - STUPAR; PHILIP A. ; et al. | 2014-07-24 |
Self-aligning Hybridization Method
App 20140061838 - STUPAR; PHILIP A. ; et al. | 2014-03-06 |
Micro-scale System to Provide Thermal Isolation and Electrical Communication Between Substrates
App 20130293314 - DeNatale; Jeffrey F. ; et al. | 2013-11-07 |
Method for adjusting resonance frequencies of a vibrating microelectromechanical device
Grant 8,505,357 - DeNatale , et al. August 13, 2 | 2013-08-13 |
Method for adjusting resonance frequencies of a vibrating microelectromechanical device
Grant 8,505,358 - DeNatale , et al. August 13, 2 | 2013-08-13 |
Micro-scale system to provide thermal isolation and electrical communication between substrates
Grant 8,456,249 - DeNatale , et al. June 4, 2 | 2013-06-04 |
Method for adjusting resonance frequencies of a vibrating microelectromechanical device
Grant 8,327,684 - DeNatale , et al. December 11, 2 | 2012-12-11 |
System for heating a vapor cell
Grant 8,319,156 - Borwick, III , et al. November 27, 2 | 2012-11-27 |
Micro-scale System to Provide Thermal Isolation and Electrical Communication Between Substrates
App 20120286884 - DeNatale; Jeffrey F. ; et al. | 2012-11-15 |
System for charging a vapor cell
Grant 8,258,884 - Borwick, III , et al. September 4, 2 | 2012-09-04 |
Through-substrate vias with polymer fill and method of fabricating same
Grant 8,187,972 - Stupar , et al. May 29, 2 | 2012-05-29 |
Method For Adjusting Resonance Frequencies Of A Vibrating Microelectromechanical Device
App 20120006789 - DeNatale; Jeffrey F. ; et al. | 2012-01-12 |
Method For Adjusting Resonance Frequencies Of A Vibrating Microelectromechanical Device
App 20120006787 - DeNatale; Jeffrey F. ; et al. | 2012-01-12 |
Method of fabricating vertical capacitors in through-substrate vias
Grant 8,088,667 - DeNatale , et al. January 3, 2 | 2012-01-03 |
Non-planar microcircuit structure and method of fabricating same
Grant 8,080,736 - DeNatale , et al. December 20, 2 | 2011-12-20 |
System For Charging A Vapor Cell
App 20110232782 - Borwick, III; Robert L. ; et al. | 2011-09-29 |
Disc resonator gyroscope with improved frequency coincidence and method of manufacture
Grant 7,987,714 - DeNatale , et al. August 2, 2 | 2011-08-02 |
System For Heating A Vapor Cell
App 20110147367 - Borwick, III; Robert L. ; et al. | 2011-06-23 |
Microfabricated Inductors With Through-wafer Vias
App 20110131798 - Papavasiliou; Alexandros ; et al. | 2011-06-09 |
Through-substrate Vias With Polymer Fill And Method Of Fabricating Same
App 20110121427 - Stupar; Philip A. ; et al. | 2011-05-26 |
High temperature microelectromechanical (MEM) devices
Grant 7,810,379 - DeNatale , et al. October 12, 2 | 2010-10-12 |
Microfabricated Inductors With Through-wafer Vias
App 20100225436 - Papavasiliou; Alexandros ; et al. | 2010-09-09 |
Non-planar Microcircuit Structure And Method Of Fabricating Same
App 20100207229 - DeNatale; Jeffrey F. ; et al. | 2010-08-19 |
Thermomechanical sensor for fluid diagnostics
Grant 7,735,362 - DeNatale , et al. June 15, 2 | 2010-06-15 |
Vertical capacitors and method of fabricating same
App 20100110607 - DeNatale; Jeffrey F. ; et al. | 2010-05-06 |
Method For Adjusting Resonance Frequencies Of A Vibrating Microelectromechanical Device
App 20100095739 - DeNatale; Jeffrey F. ; et al. | 2010-04-22 |
Through-substrate vias and method of fabricating same
App 20100001378 - DeNatale; Jeffrey F. ; et al. | 2010-01-07 |
Compact optical assembly for chip-scale atomic clock
Grant 7,619,485 - DeNatale , et al. November 17, 2 | 2009-11-17 |
Compact Optical Assembly For Chip-scale Atomic Clock
App 20090251224 - DeNatale; Jeffrey Frank ; et al. | 2009-10-08 |
Low temperature method for fabricating high-aspect ratio vias and devices fabricated by said method
Grant 7,538,032 - Borwick , et al. May 26, 2 | 2009-05-26 |
Disc Resonator Gyroscope With Improved Frequency Coincidence And Method Of Manufacture
App 20090095077 - DeNatale; Jeffrey F. ; et al. | 2009-04-16 |
High temperature microelectromechanical (MEM) devices
App 20080238446 - DeNatale; Jeffrey F. ; et al. | 2008-10-02 |
Method for fabricating microelectromechanical system (MEMS) devices
Grant 7,346,981 - Borwick, III , et al. March 25, 2 | 2008-03-25 |
Microelectromechanical (MEM) viscosity sensor and method
Grant 7,329,932 - DeNatale , et al. February 12, 2 | 2008-02-12 |
Microelectromechanical (MEM) fluid health sensing device and fabrication method
Grant 7,328,604 - DeNatale , et al. February 12, 2 | 2008-02-12 |
High temperature microelectromechanical (MEM) devices and fabrication method
Grant 7,303,935 - DeNatale , et al. December 4, 2 | 2007-12-04 |
Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring
Grant 7,287,415 - Borwick, III , et al. October 30, 2 | 2007-10-30 |
Thermomechanical sensor for fluid diagnostics
App 20070231911 - DeNatale; Jeffrey F. ; et al. | 2007-10-04 |
Thermal and intrinsic stress compensated micromirror apparatus and method
Grant 7,261,430 - DeNatale , et al. August 28, 2 | 2007-08-28 |
Thermal And Intrinsic Stress Compensated Micromirror Apparatus And Method
App 20070195439 - DeNatale; Jeffrey F. ; et al. | 2007-08-23 |
Microelectromechanical (MEM) fluid health sensing device and fabrication method
App 20070062261 - DeNatale; Jeffrey F. ; et al. | 2007-03-22 |
Microelectromechanical (MEM) viscosity sensor and method
App 20070057336 - DeNatale; Jeffrey F. ; et al. | 2007-03-15 |
High temperature microelectromechanical (MEM) devices and fabrication method
App 20070054433 - DeNatale; Jeffrey F. ; et al. | 2007-03-08 |
Low temperature method for fabricating high-aspect ratio vias and devices fabricated by said method
App 20060292866 - Borwick; Robert L. ; et al. | 2006-12-28 |
Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring
App 20060065045 - Borwick; Robert L. III ; et al. | 2006-03-30 |
Liquid-medium immersed MEMs devices
Grant 6,771,081 - Borwick, III , et al. August 3, 2 | 2004-08-03 |
Microelectromechanical system (MEMS) devices and fabricating methods
App 20040113513 - Borwick, Robert L. III ; et al. | 2004-06-17 |
Liquid-medium immersed MEMs devices
App 20040036483 - Borwick, Robert L. III ; et al. | 2004-02-26 |
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