Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,725,386 - Middlebrooks , et al. | 2020-07-28 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic apparatus and device manufacturing method Grant 10,656,538 - Streefkerk , et al. | 2020-05-19 |
Lithographic apparatus and device manufacturing method Grant 10,620,545 - Lof , et al. | 2020-04-14 |
Method for estimating overlay Grant 10,613,446 - Straaijer | 2020-04-07 |
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190278190 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2019-09-12 |
Lithographic Apparatus And Device Manufacturing Method App 20190265596 - LOF; Joeri ;   et al. | 2019-08-29 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,331,041 - Middlebrooks , et al. | 2019-06-25 |
Metrology method and apparatus, computer program and lithographic system Grant 10,261,427 - Zeng , et al. | 2019-04-16 |
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic Apparatus And Device Manufacturing Method App 20190086821 - STREEFKERK; Bob ;   et al. | 2019-03-21 |
Method For Estimating Overlay App 20190079414 - STRAAIJER; Alexander | 2019-03-14 |
Lithographic apparatus and device manufacturing method Grant 10,222,706 - Lof , et al. | 2019-03-05 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190049860 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2019-02-14 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic apparatus and device manufacturing method Grant 10,151,989 - Streefkerk , et al. Dec | 2018-12-11 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,126,662 - Middlebrooks , et al. November 13, 2 | 2018-11-13 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20180196357 - Middlebrooks; Scott Anderson ;   et al. | 2018-07-12 |
Metrology Method And Apparatus, Computer Program And Lithographic System App 20180136570 - ZENG; Si-Han ;   et al. | 2018-05-17 |
Lithographic Apparatus And Device Manufacturing Method App 20180129143 - HOOGENDAM; Christiaan Alexander ;   et al. | 2018-05-10 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,910,366 - Middlebrooks , et al. March 6, 2 | 2018-03-06 |
Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ;   et al. | 2018-02-15 |
Lithographic apparatus and device manufacturing method Grant 9,885,965 - Hoogendam , et al. February 6, 2 | 2018-02-06 |
Metrology method and apparatus, computer program and lithographic system Grant 9,869,940 - Zeng , et al. January 16, 2 | 2018-01-16 |
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic Apparatus And Device Manufacturing Method App 20170329240 - STREEFKERK; Bob ;   et al. | 2017-11-16 |
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
Lithographic Apparatus And Device Manufacturing Method App 20170242347 - HOOGENDAM; Christiaan Alexander ;   et al. | 2017-08-24 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Lithographic apparatus and device manufacturing method Grant 9,733,575 - Streefkerk , et al. August 15, 2 | 2017-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method Grant 9,588,442 - Hoogendam , et al. March 7, 2 | 2017-03-07 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
Metrology Method and Apparatus, Computer Program and Lithographic System App 20160313654 - ZENG; Si-Han ;   et al. | 2016-10-27 |
Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ;   et al. | 2016-10-13 |
Lithographic Apparatus And Device Manufacturing Method App 20160282726 - STREEFKERK; Bob ;   et al. | 2016-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ;   et al. | 2016-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160274473 - HOOGENDAM; Christiaan Alexander ;   et al. | 2016-09-22 |
Lithographic apparatus and device manufacturing method Grant 9,383,655 - Streefkerk , et al. July 5, 2 | 2016-07-05 |
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20160161864 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2016-06-09 |
Lithographic apparatus and device manufacturing method Grant 9,360,765 - Hoogendam , et al. June 7, 2 | 2016-06-07 |
Lithographic Apparatus And Device Manufacturing Method App 20150362844 - LOF; Joeri ;   et al. | 2015-12-17 |
Lithographic Apparatus And Device Manufacturing Method App 20150338748 - HOOGENDAM; Christiaan Alexander ;   et al. | 2015-11-26 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method Grant 9,097,987 - Hoogendam , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet Grant 9,091,940 - Derksen , et al. July 28, 2 | 2015-07-28 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ;   et al. | 2015-06-18 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20150070668 - STREEFKERK; Bob ;   et al. | 2015-03-12 |
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
Lithographic apparatus and device manufacturing method Grant 8,913,223 - Streefkerk , et al. December 16, 2 | 2014-12-16 |
Lithographic apparatus and device manufacturing method Grant 8,823,920 - Streefkerk , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure Grant 8,797,503 - Lof , et al. August 5, 2 | 2014-08-05 |
Determining a structural parameter and correcting an asymmetry property Grant 8,797,554 - Straaijer August 5, 2 | 2014-08-05 |
Inspection apparatus for lithography Grant 8,792,096 - Straaijer July 29, 2 | 2014-07-29 |
Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and device manufacturing method Grant 8,711,323 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
Inspection method and apparatus, and associated computer readable product Grant 8,692,994 - Straaijer April 8, 2 | 2014-04-08 |
Inspection apparatus for lithography Grant 8,681,312 - Straaijer March 25, 2 | 2014-03-25 |
Determining A Structural Parameter And Correcting An Asymmetry Property App 20130308142 - Straaijer; Alexander | 2013-11-21 |
Lithographic Apparatus And Device Manufacturing Method App 20130301017 - Derksen; Antonius Theodorus Anna Maria ;   et al. | 2013-11-14 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ;   et al. | 2013-09-26 |
Lithographic Apparatus And Device Manufacturing Method App 20130235358 - HOOGENDAM; Christiaan Alexander ;   et al. | 2013-09-12 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Inspection Method and Apparatus, and Lithographic Apparatus App 20130162996 - STRAAIJER; Alexander ;   et al. | 2013-06-27 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Lithographic apparatus and device manufacturing method Grant 8,446,568 - Derksen , et al. May 21, 2 | 2013-05-21 |
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ;   et al. | 2012-11-01 |
Lithographic apparatus and device manufacturing method Grant 8,208,120 - Lof , et al. June 26, 2 | 2012-06-26 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20120044468 - STREEFKERK; Bob ;   et al. | 2012-02-23 |
Inspection Method and Apparatus, and Associated Computer Readable Product App 20120044495 - Straaijer; Alexander | 2012-02-23 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell, and device manufacturing method to measure a property of a substrate Grant 8,115,926 - Straaijer February 14, 2 | 2012-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110228241 - LOF; Joeri ;   et al. | 2011-09-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ;   et al. | 2011-07-28 |
Immersion lithographic apparatus and device manufacturing method with gas supply Grant 7,982,850 - Lof , et al. July 19, 2 | 2011-07-19 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20110122376 - Derksen; Antonius Theodorus Anna Maria ;   et al. | 2011-05-26 |
Inspection Apparatus for Lithography App 20110102793 - Straaijer; Alexander | 2011-05-05 |
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
Lithographic apparatus and device manufacturing method Grant 7,932,999 - Hoogendam , et al. April 26, 2 | 2011-04-26 |
Inspection Apparatus For Lithography App 20110032500 - Straaijer; Alexander | 2011-02-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method App 20100302519 - STREEFKERK; Bob ;   et al. | 2010-12-02 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,839,506 - Straaijer , et al. November 23, 2 | 2010-11-23 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20100157299 - Straaijer; Alexander ;   et al. | 2010-06-24 |
Lithographic apparatus and device manufacturing method Grant 7,738,074 - Streefkerk , et al. June 15, 2 | 2010-06-15 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,701,577 - Straaijer , et al. April 20, 2 | 2010-04-20 |
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ;   et al. | 2009-11-26 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell, and Device Manufacturing Method to Measure a Property of a Substrate App 20090168062 - STRAAIJER; Alexander | 2009-07-02 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems Grant 7,511,884 - Flagello , et al. March 31, 2 | 2009-03-31 |
Lithographic apparatus and device manufacturing method Grant 7,491,478 - Buurman , et al. February 17, 2 | 2009-02-17 |
Lithographic apparatus and device manufacturing method App 20090002652 - Lof; Joeri ;   et al. | 2009-01-01 |
Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ;   et al. | 2008-09-11 |
Lithographic apparatus and device manufacturing method App 20080218726 - Lof; Joeri ;   et al. | 2008-09-11 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080198380 - Straaijer; Alexander ;   et al. | 2008-08-21 |
Lithographic projection apparatus Grant 7,388,648 - Lof , et al. June 17, 2 | 2008-06-17 |
Lithographic apparatus and device manufacturing method Grant 7,372,541 - Lof , et al. May 13, 2 | 2008-05-13 |
Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus and device manufacturing method Grant 7,317,507 - Straaijer January 8, 2 | 2008-01-08 |
Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ;   et al. | 2007-11-22 |
Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132972 - Streefkerk; Bob ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,224,436 - Derksen , et al. May 29, 2 | 2007-05-29 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems Grant 7,221,501 - Flagello , et al. May 22, 2 | 2007-05-22 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems Grant 7,206,059 - Flagello , et al. April 17, 2 | 2007-04-17 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus and device manufacturing method Grant 7,158,211 - Straaijer January 2, 2 | 2007-01-02 |
Lithographic apparatus and device manufacturing method App 20060268250 - Maria Derksen; Antonius Theodorus Anna ;   et al. | 2006-11-30 |
Lithographic apparatus and device manufacturing method App 20060232756 - Lof; Joeri ;   et al. | 2006-10-19 |
Lithographic apparatus and device manufacturing method Grant 7,110,081 - Hoogendam , et al. September 19, 2 | 2006-09-19 |
Lithographic apparatus and device manufacturing method App 20060176458 - Maria Derksen; Antonius Theodorus Anna ;   et al. | 2006-08-10 |
Lithographic apparatus and device manufacturing method Grant 7,075,616 - Derksen , et al. July 11, 2 | 2006-07-11 |
Lithographic apparatus and device manufacturing method Grant 7,038,760 - Mulkens , et al. May 2, 2 | 2006-05-02 |
Lithographic apparatus and device manufacturing method App 20060023189 - Lof; Joeri ;   et al. | 2006-02-02 |
Lithographic apparatus and device manufacturing method App 20060017906 - Buurman; Erik Petrus ;   et al. | 2006-01-26 |
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ;   et al. | 2005-12-01 |
Lithographic apparatus and device manufacturing method App 20050259236 - Straaijer, Alexander | 2005-11-24 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20050259324 - Flagello, Donis ;   et al. | 2005-11-24 |
Lithographic apparatus and device manufacturing method Grant 6,952,253 - Lof , et al. October 4, 2 | 2005-10-04 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20050180008 - Flagello, Donis ;   et al. | 2005-08-18 |
Lithographic apparatus and device manufacturing method App 20050046813 - Streefkerk, Bob ;   et al. | 2005-03-03 |
Lithographic apparatus and device manufacturing method App 20050036121 - Hoogendam, Christiaan Alexander ;   et al. | 2005-02-17 |
Lithographic apparatus and device manufacturing method App 20050018156 - Mulkens, Johannes Catharinus Hubertus ;   et al. | 2005-01-27 |
Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ;   et al. | 2005-01-13 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20040227923 - Flagello, Donis George ;   et al. | 2004-11-18 |
Lithographic apparatus and device manufacturing method App 20040211920 - Maria Derksen, Antonius Theodorus Anna ;   et al. | 2004-10-28 |
Lithographic apparatus and device manufacturing method App 20040207824 - Lof, Joeri ;   et al. | 2004-10-21 |
Abbe arm calibration system for use in lithographic apparatus App 20040184018 - Groeneveld, Rogier H.M. ;   et al. | 2004-09-23 |
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20040169924 - Flagello, Donis ;   et al. | 2004-09-02 |
Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ;   et al. | 2004-08-19 |
Abbe arm calibration system for use in lithographic apparatus Grant 6,730,920 - Groeneveld , et al. May 4, 2 | 2004-05-04 |
Abbe arm calibration system for use in lithographic apparatus App 20010008273 - Groeneveld, Rogier H.M. ;   et al. | 2001-07-19 |
Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders Grant 6,084,673 - Van Den Brink , et al. July 4, 2 | 2000-07-04 |
Lens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a system Grant 5,602,683 - Straaijer , et al. February 11, 1 | 1997-02-11 |