| Patent | Date |
|---|
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
Grant 11,422,151 - Kautzsch , et al. August 23, 2 | 2022-08-23 |
Producing a buried cavity in a semiconductor substrate
Grant 11,393,714 - Roeth , et al. July 19, 2 | 2022-07-19 |
Method Of Generating A Germanium Structure And Optical Device Comprising A Germanium Structure
App 20220069156 - Roeth; Andre ; et al. | 2022-03-03 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Grant 11,078,072 - Kautzsch , et al. August 3, 2 | 2021-08-03 |
Methods for Manufacturing a MOSFET
App 20210151584 - Riegler; Andreas ; et al. | 2021-05-20 |
Methods for manufacturing a MOSFET
Grant 10,903,341 - Riegler , et al. January 26, 2 | 2021-01-26 |
Producing A Buried Cavity In A Semiconductor Substrate
App 20210013087 - ROETH; Andre ; et al. | 2021-01-14 |
Stressed decoupled micro-electro-mechanical system sensor
Grant 10,870,575 - Theuss , et al. December 22, 2 | 2020-12-22 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device
App 20200300886 - KAUTZSCH; Thoralf ; et al. | 2020-09-24 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process
App 20200290867 - KAUTZSCH; Thoralf ; et al. | 2020-09-17 |
Light Emitter Devices, Optical Filter Structures and Methods for Forming Light Emitter Devices and Optical Filter Structures
App 20200253000 - Kind Code | 2020-08-06 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Grant 10,683,203 - Kautzsch , et al. | 2020-06-16 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
Grant 10,684,306 - Bieselt , et al. | 2020-06-16 |
Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
Grant 10,681,777 - Kautzsch , et al. | 2020-06-09 |
Integrated semiconductor device and manufacturing method
Grant 10,544,037 - Kautzsch , et al. Ja | 2020-01-28 |
Stressed Decoupled Micro-electro-mechanical System Sensor
App 20200002159 - THEUSS; Horst ; et al. | 2020-01-02 |
Pressure sensor device and manufacturing method
Grant 10,386,255 - Kautzsch , et al. A | 2019-08-20 |
Graded-index structure for optical systems
Grant 10,347,778 - Kautzsch , et al. July 9, 2 | 2019-07-09 |
Contact Hole
App 20190189509 - Bertrams; Thomas ; et al. | 2019-06-20 |
Emitter and method for manufacturing the same
Grant 10,290,805 - Bieselt , et al. | 2019-05-14 |
Methods for Manufacturing a MOSFET
App 20190081158 - Riegler; Andreas ; et al. | 2019-03-14 |
Graded-index Structure For Optical Systems
App 20180358483 - KAUTZSCH; Thoralf ; et al. | 2018-12-13 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process
App 20180297838 - KAUTZSCH; Thoralf ; et al. | 2018-10-18 |
Graded-index structure for optical systems
Grant 10,084,101 - Kautzsch , et al. September 25, 2 | 2018-09-25 |
Sensor structures, systems and methods with improved integration and optimized footprint
Grant 10,060,816 - Kautzsch , et al. August 28, 2 | 2018-08-28 |
Integrated Semiconductor Device And Manufacturing Method
App 20180155188 - Kautzsch; Thoralf ; et al. | 2018-06-07 |
Emitter And Method For Manufacturing The Same
App 20180159034 - BIESELT; Steffen ; et al. | 2018-06-07 |
Graded-index Structure For Optical Systems
App 20180130914 - KAUTZSCH; Thoralf ; et al. | 2018-05-10 |
Integrated semiconductor device and manufacturing method
Grant 9,896,329 - Kautzsch , et al. February 20, 2 | 2018-02-20 |
Emitter and method for manufacturing the same
Grant 9,887,355 - Bieselt , et al. February 6, 2 | 2018-02-06 |
Pressure Sensor Device And Manufacturing Method
App 20180017456 - Kautzsch; Thoralf ; et al. | 2018-01-18 |
Light Emitter Devices, Optical Filter Structures and Methods for Forming Light Emitter Devices and Optical Filter Structures
App 20170290098 - Kautzsch; Thoralf ; et al. | 2017-10-05 |
Sensor structures, systems and methods with improved integration and optimized footprint
Grant 9,752,943 - Kautzsch , et al. September 5, 2 | 2017-09-05 |
Method and structure for creating cavities with extreme aspect ratios
Grant 9,663,355 - Kautzsch , et al. May 30, 2 | 2017-05-30 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint
App 20170089790 - Kautzsch; Thoralf ; et al. | 2017-03-30 |
Integrated Semiconductor Device And Manufacturing Method
App 20170015546 - Kautzsch; Thoralf ; et al. | 2017-01-19 |
Sensor structures, systems and methods with improved integration and optimized footprint
Grant 9,546,923 - Kautzsch , et al. January 17, 2 | 2017-01-17 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device
App 20170010301 - BIESELT; Steffen ; et al. | 2017-01-12 |
Emitter And Method For Manufacturing The Same
App 20160308084 - BIESELT; Steffen ; et al. | 2016-10-20 |
Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region
Grant 9,452,923 - Kautzsch , et al. September 27, 2 | 2016-09-27 |
Micromechanical system and method for manufacturing a micromechanical system
Grant 9,382,111 - Kautzsch , et al. July 5, 2 | 2016-07-05 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures
App 20160185594 - Kautzsch; Thoralf ; et al. | 2016-06-30 |
Method for manufacturing a micromechanical system
Grant 9,376,314 - Kautzsch , et al. June 28, 2 | 2016-06-28 |
Microelectromechanical Resonators
App 20160126926 - Kautzsch; Thoralf ; et al. | 2016-05-05 |
Systems and methods for horizontal integration of acceleration sensor structures
Grant 9,330,929 - Kautzsch , et al. May 3, 2 | 2016-05-03 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures
App 20160104625 - Kautzsch; Thoralf ; et al. | 2016-04-14 |
Method And Structure For Creating Cavities With Extreme Aspect Ratios
App 20160060106 - Kautzsch; Thoralf ; et al. | 2016-03-03 |
Micromechanical System And Method For Manufacturing A Micromechanical System
App 20150375999 - Kautzsch; Thoralf ; et al. | 2015-12-31 |
Micromechanical System And Method For Manufacturing A Micromechanical System
App 20150375998 - Kautzsch; Thoralf ; et al. | 2015-12-31 |
Microelectromechanical resonators
Grant 9,209,778 - Kautzsch , et al. December 8, 2 | 2015-12-08 |
Method and structure for creating cavities with extreme aspect ratios
Grant 9,136,136 - Kautzsch , et al. September 15, 2 | 2015-09-15 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint
App 20150210533 - Kautzsch; Thoralf ; et al. | 2015-07-30 |
Method And Structure For Creating Cavities With Extreme Aspect Ratios
App 20150079787 - Kautzsch; Thoralf ; et al. | 2015-03-19 |
Methods of stripping resist after metal deposition
Grant 8,962,469 - Stegemann February 24, 2 | 2015-02-24 |
Microelectromechanical Resonators
App 20140266484 - Kautzsch; Thoralf ; et al. | 2014-09-18 |
Method For Manufacturing A Micromechanical System Comprising A Removal Of Sacrificial Material Through A Hole In A Margin Region
App 20140175571 - Kautzsch; Thoralf ; et al. | 2014-06-26 |
Methods of Stripping Resist After Metal Deposition
App 20130217223 - Stegemann; Maik | 2013-08-22 |
Method for contacting parts of a component integrated into a semiconductor substrate
Grant 7,396,749 - Dittmar , et al. July 8, 2 | 2008-07-08 |
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
Grant 7,368,390 - Czech , et al. May 6, 2 | 2008-05-06 |
Method for production of a semiconductor structure
Grant 7,141,507 - Genz , et al. November 28, 2 | 2006-11-28 |
Method for contacting parts of a component integrated into a semiconductor substrate
App 20060094217 - Dittmar; Ludwig ; et al. | 2006-05-04 |
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
App 20050112506 - Czech, Gunter ; et al. | 2005-05-26 |
Method for the production of a semiconductor device
App 20050090114 - Rogalli, Michael ; et al. | 2005-04-28 |
Method for fabricating a semiconductor structure
App 20040192060 - Stegemann, Maik ; et al. | 2004-09-30 |
Method of processing organic antireflection layers
App 20020011462 - Richter, Harald ; et al. | 2002-01-31 |
Method for producing trenches for DRAM cell configurations
App 20010034112 - Brencher, Lothar ; et al. | 2001-10-25 |
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