Sriram; Mandyam
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sriram; Mandyam.The latest application filed is for "mosfet gate engineerinng with dipole films".
Company Profile
6.49.53
- Sriram; Mandyam - San Jose CA
- Sriram; Mandyam - Beaverton OR
Patent Activity
| Patent | Date |
|---|---|
| Mosfet Gate Engineerinng With Dipole Films App 20220254900 - Yang; Yong ; et al. | 2022-08-11 |
| Injector For Batch Processing And Methods Of Use App 20220162748 - Yudovsky; Joseph ; et al. | 2022-05-26 |
| Paired Dynamic Parallel Plate Capacitively Coupled Plasmas App 20220165540 - Ponnekanti; Hari ; et al. | 2022-05-26 |
| Method Of Reducing Titanium Nitride Etching During Tungsten Film Formation App 20220098731 - Wu; Kedi ; et al. | 2022-03-31 |
| Susceptor Wafer Chucks For Bowed Wafers App 20220093443 - Chowdhury; Abhishek ; et al. | 2022-03-24 |
| Paired dynamic parallel plate capacitively coupled plasmas Grant 11,282,676 - Ponnekanti , et al. March 22, 2 | 2022-03-22 |
| Pmos High-k Metal Gates App 20220077298 - GANDIKOTA; SRINIVAS ; et al. | 2022-03-10 |
| Injector for batch processing and methods of use Grant 11,261,525 - Yudovsky , et al. March 1, 2 | 2022-03-01 |
| Fluorine-Free Tungsten ALD And Tungsten Selective CVD For Dielectrics App 20210384035 - Fisher; Ilanit ; et al. | 2021-12-09 |
| Fluorine-free Tungsten Ald For Dielectric Selectivity Improvement App 20210384036 - Fisher; Ilanit ; et al. | 2021-12-09 |
| Method Of Tuning Film Properties Of Metal Nitride Using Plasma App 20210351071 - LIU; Wenyi ; et al. | 2021-11-11 |
| Enhanced Spatial Ald Of Metals Through Controlled Precursor Mixing App 20210305052 - Chan; Kelvin ; et al. | 2021-09-30 |
| Wafer out of pocket detection Grant 11,133,205 - Kim , et al. September 28, 2 | 2021-09-28 |
| Sequential Pulse And Purge For Ald Processes App 20210262092 - Rasheed; Muhammad M. ; et al. | 2021-08-26 |
| Enhanced spatial ALD of metals through controlled precursor mixing Grant 11,043,386 - Chan , et al. June 22, 2 | 2021-06-22 |
| Bottom-up gap-fill by surface poisoning treatment Grant 11,028,477 - Saly , et al. June 8, 2 | 2021-06-08 |
| In-situ tungsten deposition without barrier layer Grant 10,991,586 - Wu , et al. April 27, 2 | 2021-04-27 |
| Wafer Out Of Pocket Detection App 20200373178 - Kim; Sanggyum ; et al. | 2020-11-26 |
| In-situ Tungsten Deposition Without Barrier Layer App 20200243341 - Wu; Yong ; et al. | 2020-07-30 |
| Paired Dynamic Parallel Plate Capacitively Coupled Plasmas App 20190385819 - Ponnekanti; Hari ; et al. | 2019-12-19 |
| Single Wafer Processing Environments With Spatial Separation App 20190131167 - Rice; Michael ; et al. | 2019-05-02 |
| Top lamp module for carousel deposition chamber Grant 10,273,578 - Yudovsky , et al. | 2019-04-30 |
| Processing system containing an isolation region separating a deposition chamber from a treatment chamber Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
| Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing App 20180240676 - Chan; Kelvin ; et al. | 2018-08-23 |
| Plasma activated conformal dielectric film deposition Grant 10,043,655 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
| Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing App 20170306490 - Chan; Kelvin ; et al. | 2017-10-26 |
| In-Situ Film Annealing With Spatial Atomic Layer Deposition App 20170170009 - Tanaka; Keiichi ; et al. | 2017-06-15 |
| Plasma Activated Conformal Dielectric Film Deposition App 20170148628 - Swaminathan; Shankar ; et al. | 2017-05-25 |
| Bottom-Up Gap-Fill by Surface Poisoning Treatment App 20170114459 - Saly; Mark ; et al. | 2017-04-27 |
| Plasma activated conformal dielectric film deposition Grant 9,611,544 - LaVoie , et al. April 4, 2 | 2017-04-04 |
| Plasma Module With Slotted Ground Plate App 20170076917 - Yudovsky; Joseph ; et al. | 2017-03-16 |
| High Temperature Thermal ALD Silicon Nitride Films App 20170053792 - Lu; Xinliang ; et al. | 2017-02-23 |
| Plasma activated conformal dielectric film deposition Grant 9,570,274 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
| Injector For Batch Processing And Methods Of Use App 20160369398 - Yudovsky; Joseph ; et al. | 2016-12-22 |
| Precise critical dimension control using bilayer ALD Grant 9,443,716 - Takeshita , et al. September 13, 2 | 2016-09-13 |
| Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
| Precise Critical Dimension Control Using Bilayer ALD App 20160104613 - Takeshita; Kenji ; et al. | 2016-04-14 |
| Top Lamp Module For Carousel Deposition Chamber App 20160097122 - Yudovsky; Joseph ; et al. | 2016-04-07 |
| Plasma activated conformal film deposition Grant 9,230,800 - LaVoie , et al. January 5, 2 | 2016-01-05 |
| Pecvd Deposition Of Smooth Silicon Films App 20150325435 - Hollister; Alice G. ; et al. | 2015-11-12 |
| PECVD deposition of smooth silicon films Grant 9,117,668 - Hollister , et al. August 25, 2 | 2015-08-25 |
| Plasma Activated Conformal Dielectric Film Deposition App 20150206719 - Swaminathan; Shankar ; et al. | 2015-07-23 |
| In-situ deposition of film stacks Grant 9,028,924 - Haverkamp , et al. May 12, 2 | 2015-05-12 |
| Carbon deposition-etch-ash gap fill process Grant 9,023,731 - Ji , et al. May 5, 2 | 2015-05-05 |
| Plasma activated conformal dielectric film deposition Grant 8,999,859 - Swaminathan , et al. April 7, 2 | 2015-04-07 |
| Conformal doping via plasma activated atomic layer deposition and conformal film deposition Grant 8,956,983 - Swaminathan , et al. February 17, 2 | 2015-02-17 |
| Plasma Activated Conformal Dielectric Film Deposition App 20140216337 - Swaminathan; Shankar ; et al. | 2014-08-07 |
| Plasma Activated Conformal Film Deposition App 20140209562 - LaVoie; Adrien ; et al. | 2014-07-31 |
| In-situ deposition of film stacks Grant 8,741,394 - Haverkamp , et al. June 3, 2 | 2014-06-03 |
| Plasma activated conformal film deposition Grant 8,728,956 - LaVoie , et al. May 20, 2 | 2014-05-20 |
| Smooth silicon-containing films Grant 8,709,551 - Fox , et al. April 29, 2 | 2014-04-29 |
| Carbon Deposition-etch-ash Gap Fill Process App 20140094035 - Ji; Chunhai ; et al. | 2014-04-03 |
| Plasma activated conformal dielectric film deposition Grant 8,637,411 - Swaminathan , et al. January 28, 2 | 2014-01-28 |
| Plasma-activated Deposition Of Conformal Films App 20130319329 - Li; Ming ; et al. | 2013-12-05 |
| Selective Capping of Metal Interconnect Lines during Air Gap Formation App 20130323930 - Chattopadhyay; Kaushik ; et al. | 2013-12-05 |
| Pecvd Deposition Of Smooth Silicon Films App 20130316518 - HOLLISTER; Alice ; et al. | 2013-11-28 |
| Plasma-activated deposition of conformal films Grant 8,524,612 - Li , et al. September 3, 2 | 2013-09-03 |
| Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer Grant 8,479,683 - Antonelli , et al. July 9, 2 | 2013-07-09 |
| Silicon Nitride Films For Semiconductor Device Applications App 20130157466 - Fox; Keith ; et al. | 2013-06-20 |
| Conformal Doping Via Plasma Activated Atomic Layer Deposition And Conformal Film Deposition App 20130040447 - Swaminathan; Shankar ; et al. | 2013-02-14 |
| High compressive stress carbon liners for MOS devices Grant 8,362,571 - Wu , et al. January 29, 2 | 2013-01-29 |
| Depositing Conformal Boron Nitride Films App 20130008378 - Antonelli; George Andrew ; et al. | 2013-01-10 |
| Protective self-aligned buffer layers for damascene interconnects Grant 8,317,923 - Chattopadhyay , et al. November 27, 2 | 2012-11-27 |
| Depositing conformal boron nitride film by CVD without plasma Grant 8,288,292 - Antonelli , et al. October 16, 2 | 2012-10-16 |
| Remote plasma processing of interface surfaces Grant 8,217,513 - Antonelli , et al. July 10, 2 | 2012-07-10 |
| Pecvd Deposition Of Smooth Polysilicon Films App 20120142172 - FOX; Keith ; et al. | 2012-06-07 |
| Plasma-activated Deposition Of Conformal Films App 20120077349 - Li; Ming ; et al. | 2012-03-29 |
| Plasma Activated Conformal Dielectric Film Deposition App 20120028454 - Swaminathan; Shankar ; et al. | 2012-02-02 |
| Plasma-activated deposition of conformal films Grant 8,101,531 - Li , et al. January 24, 2 | 2012-01-24 |
| Plasma Activated Conformal Dielectric Film Deposition App 20120009802 - LaVoie; Adrien ; et al. | 2012-01-12 |
| Remote plasma processing of interface surfaces Grant 8,084,339 - Antonelli , et al. December 27, 2 | 2011-12-27 |
| Plasma Activated Conformal Film Deposition App 20110256726 - LaVoie; Adrien ; et al. | 2011-10-20 |
| Silicon Nitride Films And Methods App 20110256734 - Hausmann; Dennis M. ; et al. | 2011-10-20 |
| Depositing Conformal Boron Nitride Films App 20110244694 - Antonelli; George Andrew ; et al. | 2011-10-06 |
| In-Situ Deposition of Film Stacks App 20110236594 - Haverkamp; Jason ; et al. | 2011-09-29 |
| Smooth Silicon-Containing Films App 20110236600 - Fox; Keith ; et al. | 2011-09-29 |
| Protective self-aligned buffer layers for damascene interconnects Grant 8,021,486 - Yu , et al. September 20, 2 | 2011-09-20 |
| Method for making high stress boron-doped carbon films Grant 7,998,881 - Wu , et al. August 16, 2 | 2011-08-16 |
| Remote Plasma Processing Of Interface Surfaces App 20110120377 - Antonelli; George Andrew ; et al. | 2011-05-26 |
| High compressive stress carbon liners for MOS devices Grant 7,906,817 - Wu , et al. March 15, 2 | 2011-03-15 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,858,510 - Banerji , et al. December 28, 2 | 2010-12-28 |
| Remote Plasma Processing Of Interface Surfaces App 20100317198 - Antonelli; George Andrew ; et al. | 2010-12-16 |
| Remote Plasma Processing Of Interface Surfaces App 20100317178 - Antonelli; George Andrew ; et al. | 2010-12-16 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,799,671 - Banerji , et al. September 21, 2 | 2010-09-21 |
| Protective self-aligned buffer layers for damascene interconnects Grant 7,727,880 - Chattopadhyay , et al. June 1, 2 | 2010-06-01 |
| Protective self-aligned buffer layers for damascene interconnects Grant 7,704,873 - Yu , et al. April 27, 2 | 2010-04-27 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,648,899 - Banerji , et al. January 19, 2 | 2010-01-19 |
| Protective self-aligned buffer layers for damascene interconnects Grant 7,576,006 - Yu , et al. August 18, 2 | 2009-08-18 |
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