Sreenivasan; Sidlgata V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sreenivasan; Sidlgata V..The latest application filed is for "catalyst influenced chemical etching for fabricating three-dimensional sram architectures".

Company Profile

5.153.182

Sreenivasan; Sidlgata V. - Austin TX
Sreenivasan; Sidlgata V - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Catalyst Influenced Chemical Etching For Fabricating Three-dimensional Sram Architectures App 20220270930 - Sreenivasan; Sidlgata V. ; et al.	2022-08-25
Roll-to-roll Nanoimprint Lithography Tools And Processes App 20220229361 - Sreenivasan; Sidlgata V. ; et al.	2022-07-21
Catalyst influenced chemical etching for fabricating three-dimensional SRAM architectures Grant 11,355,397 - Sreenivasan , et al. June 7, 2	2022-06-07
Large Area Metrology And Process Control For Anisotropic Chemical Etching App 20220139717 - Sreenivasan; Sidlgata V. ; et al.	2022-05-05
System And Method For Modification Of Substrates App 20220013417 - Sreenivasan; Sidlgata V. ; et al.	2022-01-13
Wafer-scale Programmable Films For Semiconductor Planarization And For Imprint Lithography App 20210389666 - Sreenivasan; Sidlgata V. ; et al.	2021-12-16
Nanoscale-aligned Three-dimensional Stacked Integrated Circuit App 20210366771 - Sreenivasan; Sidlgata V. ; et al.	2021-11-25
Nanofabrication And Design Techniques For 3d Ics And Configurable Asics App 20210350061 - Sreenivasan; Sidlgata V. ; et al.	2021-11-11
Roll-to-roll Programmable Film Imprint Lithography App 20210341833 - Sreenivasan; Sidlgata V. ; et al.	2021-11-04
Safe separation for nano imprinting Grant 11,020,894 - Im , et al. June 1, 2	2021-06-01
Heterogeneous Integration Of Components Onto Compact Devices Using Moire Based Metrology And Vacuum Based Pick-and-place App 20210134640 - Sreenivasan; Sidlgata V. ; et al.	2021-05-06
Catalyst Influenced Chemical Etching For Fabricating Three-dimensional Sram Architectures And Optical Waveguides App 20200365464 - Sreenivasan; Sidlgata V. ; et al.	2020-11-19
Precision alignment of the substrate coordinate system relative to the inkjet coordinate system Grant 10,717,646 - Sreenivasan , et al.	2020-07-21
Providing Broad Access To Micro- And Nano-scale Technologies App 20200105154 - Sreenivasan; Sidlgata V. ; et al.	2020-04-02
Asymmetric template shape modulation for partial field imprinting Grant 10,578,964 - Ganapathisubramanian , et al.	2020-03-03
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template Grant RE47,483 - Resnick , et al.	2019-07-02
Portable System For Providing Broad Access To Micro- And Nano-scale Technologies App 20190139456 - Sreenivasan; Sidlgata V. ; et al.	2019-05-09
Safe Separation for Nano Imprinting App 20190061228 - Im; Se-Hyuk ; et al.	2019-02-28
Multi-field overlay control in jet and flash imprint lithography Grant 10,191,368 - Sreenivasan , et al. Ja	2019-01-29
Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures Grant 10,026,609 - Sreenivasan , et al. July 17, 2	2018-07-17
Versatile process for precision nanoscale manufacturing Grant 9,987,653 - Sreenivasan , et al. June 5, 2	2018-06-05
Fabricating large area multi-tier nanostructures Grant 9,972,699 - Sreenivasan , et al. May 15, 2	2018-05-15
Fabricating large area multi-tier nanostructures Grant 9,972,698 - Sreenivasan , et al. May 15, 2	2018-05-15
Fabricating large area multi-tier nanostructures Grant 9,941,389 - Sreenivasan , et al. April 10, 2	2018-04-10
Precision Alignment Of The Substrate Coordinate System Relative To The Inkjet Coordinate System App 20170333940 - Sreenivasan; Sidlgata V. ; et al.	2017-11-23
Porous template and imprinting stack for nano-imprint lithography Grant 9,778,562 - Xu , et al. October 3, 2	2017-10-03
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy Grant 9,718,096 - Sreenivasan , et al. August 1, 2	2017-08-01
Multi-field Overlay Control In Jet And Flash Imprint Lithography App 20170131640 - Sreenivasan; Sidlgata V. ; et al.	2017-05-11
Versatile Process For Precision Nanoscale Manufacturing App 20170106399 - Sreenivasan; Sidlgata V. ; et al.	2017-04-20
Large area imprint lithography Grant 9,616,614 - Choi , et al. April 11, 2	2017-04-11
Programmable Deposition Of Thin Films Of A User-defined Profile With Nanometer Scale Accuracy App 20160318066 - Sreenivasan; Sidlgata V. ; et al.	2016-11-03
Reduction Of Backside Particle Induced Out-of-plane Distortions In Semiconductor Wafers App 20160307790 - Sreenivasan; Sidlgata V. ; et al.	2016-10-20
Fabricating Large Area Multi-tier Nanostructures App 20160308020 - Sreenivasan; Sidlgata V. ; et al.	2016-10-20
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy Grant 9,415,418 - Sreenivasan , et al. August 16, 2	2016-08-16
Nanoshape Patterning Techniques That Allow High-speed And Low-cost Fabrication Of Nanoshape Structures App 20160118249 - Sreenivasan; Sidlgata V. ; et al.	2016-04-28
Method of automatic fluid dispensing for imprint lithography processes Grant 9,223,202 - Choi , et al. December 29, 2	2015-12-29
Nanostructured solar cell Grant 9,196,765 - Yang , et al. November 24, 2	2015-11-24
Nanostructured Solar Cell App 20150255640 - Yang; Shuqiang ; et al.	2015-09-10
Asymmetric Template Shape Modulation for Partial Field Imprinting App 20150183151 - Ganapathisubramanian; Mahadevan ; et al.	2015-07-02
Nanostructured solar cell Grant 9,070,803 - Yang , et al. June 30, 2	2015-06-30
Safe Separation For Nano Imprinting App 20150165671 - Im; Se-Hyuk ; et al.	2015-06-18
Methods and systems of material removal and pattern transfer Grant 8,980,751 - Schmid , et al. March 17, 2	2015-03-17
Safe separation for nano imprinting Grant 8,968,620 - Im , et al. March 3, 2	2015-03-03
Functional nanoparticles Grant 8,961,800 - Sreenivasan , et al. February 24, 2	2015-02-24
Programmable Deposition Of Thin Films Of A User-defined Profile With Nanometer Scale Accuracy App 20150048050 - Sreenivasan; Sidlgata V. ; et al.	2015-02-19
Nanoimprint lithography formation of functional nanoparticles using dual release layers Grant 8,916,200 - Singh , et al. December 23, 2	2014-12-23
Imprint lithography template Grant 8,877,073 - Schmid , et al. November 4, 2	2014-11-04
Patterning Of Non-convex Shaped Nanostructures App 20140319727 - Sreenivasan; Sidlgata V. ; et al.	2014-10-30
Imprinting of partial fields at the edge of the wafer Grant 8,865,046 - Sreenivasan , et al. October 21, 2	2014-10-21
Tessellated patterns in imprint lithography Grant 8,850,980 - Sreenivasan , et al. October 7, 2	2014-10-07
Patterning of non-convex shaped nanostructures Grant 8,828,297 - Sreenivasan , et al. September 9, 2	2014-09-09
Method for imprint lithography utilizing an adhesion primer layer Grant 8,808,808 - Xu , et al. August 19, 2	2014-08-19
Nanoimprint lithography processes for forming nanoparticles Grant 8,802,747 - Xu , et al. August 12, 2	2014-08-12
Nanoimprint Lithography Processes For Forming Nanoparticles App 20140100346 - Xu; Frank Y. ; et al.	2014-04-10
Large Area Patterning of Nano-Sized Shapes App 20140021167 - Sreenivasan; Sidlgata V. ; et al.	2014-01-23
Methods for exposure for the purpose of thermal management for imprint lithography processes Grant 8,609,326 - Sreenivasan , et al. December 17, 2	2013-12-17
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template Grant 8,556,616 - Resnick , et al. October 15, 2	2013-10-15
Critical dimension control during template formation Grant 8,545,709 - Brooks , et al. October 1, 2	2013-10-01
Large area patterning of nano-sized shapes Grant 8,529,778 - Sreenivasan , et al. September 10, 2	2013-09-10
Large Area Imprint Lithography App 20130214452 - Choi; Byung-Jin ; et al.	2013-08-22
Adaptive nanotopography sculpting Grant 8,394,282 - Panga , et al. March 12, 2	2013-03-12
Method and system to control movement of a body for nano-scale manufacturing Grant 8,387,482 - Choi , et al. March 5, 2	2013-03-05
Method to arrange features on a substrate to replicate features having minimal dimensional variability Grant 8,349,241 - Sreenivasan , et al. January 8, 2	2013-01-08
Substrate support system having a plurality of contact lands Grant 8,334,967 - Nimmakayala , et al. December 18, 2	2012-12-18
Step and repeat imprint lithography process Grant 8,318,066 - Sreenivasan , et al. November 27, 2	2012-11-27
Method for expelling gas positioned between a substrate and a mold Grant 8,282,383 - Choi , et al. October 9, 2	2012-10-09
High Aspect Ratio Patterning of Silicon App 20120214066 - Miller; Michael N. ; et al.	2012-08-23
Critical Dimension Control During Template Formation App 20120187085 - Brooks; Cynthia B. ; et al.	2012-07-26
Large area roll-to-roll imprint lithography Grant 8,187,515 - Sreenivasan , et al. May 29, 2	2012-05-29
Nanoimprint Lithography Formation Of Functional Nanoparticles Using Dual Release Layers App 20120114559 - Singh; Vikramjit ; et al.	2012-05-10
Patterning Of Non-convex Shaped Nanostructures App 20120112385 - Sreenivasan; Sidlgata V. ; et al.	2012-05-10
Patterning a plurality of fields on a substrate to compensate for differing evaporation times Grant 8,142,850 - Sreenivasan , et al. March 27, 2	2012-03-27
Conforming template for patterning liquids disposed on substrates Grant 8,123,514 - Sreenivasan , et al. February 28, 2	2012-02-28
Double-sided nano-imprint lithography system Grant 8,109,753 - Choi , et al. February 7, 2	2012-02-07
Method and system for double-sided patterning of substrates Grant 8,109,754 - Choi , et al. February 7, 2	2012-02-07
Reduction of stress during template separation Grant 8,075,299 - Xu , et al. December 13, 2	2011-12-13
Forming a layer on a substrate Grant 8,066,930 - Sreenivasan , et al. November 29, 2	2011-11-29
Backside Contact Solar Cell App 20110277833 - Miller; Michael N. ; et al.	2011-11-17
Nanostructured Solar Cell App 20110277827 - Yang; Shuqiang ; et al.	2011-11-17
Capillary imprinting technique Grant 8,057,725 - Choi , et al. November 15, 2	2011-11-15
Safe Deparation For Nano Imprinting App 20110260361 - Im; Se-Hyuk ; et al.	2011-10-27
Device for holding a template for use in imprint lithography Grant 8,033,814 - Bailey , et al. October 11, 2	2011-10-11
Preserving filled features when vacuum wiping Grant 8,021,594 - Shackleton , et al. September 20, 2	2011-09-20
Step and Repeat Imprint Lithography Process App 20110221095 - Sreenivasan; Sidlgata V. ; et al.	2011-09-15
Flexure based macro motion translation stage Grant 8,016,277 - Choi , et al. September 13, 2	2011-09-13
Template pattern density doubling Grant 8,012,394 - Sreenivasan September 6, 2	2011-09-06
Imprinting of Partial Fields at the Edge of the Wafer App 20110212263 - Sreenivasan; Sidlgata V. ; et al.	2011-09-01
Nanoimprint Lithography Processes For Forming Nanoparticles App 20110190463 - Xu; Frank Y. ; et al.	2011-08-04
Solar Cell Fabrication By Nanoimprint Lithography App 20110180127 - Wan; Fen ; et al.	2011-07-28
Methods And Systems Of Material Removal And Pattern Transfer App 20110183521 - Schmid; Gerard M. ; et al.	2011-07-28
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template App 20110171340 - Resnick; Douglas J. ; et al.	2011-07-14
Capillary Imprinting Technique App 20110140302 - Choi; Byung-Jin ; et al.	2011-06-16
Positive tone bi-layer method Grant 7,947,608 - Sreenivasan May 24, 2	2011-05-24
Step and repeat imprint lithography processes Grant 7,943,081 - Sreenivasan , et al. May 17, 2	2011-05-17
Imprinting of partial fields at the edge of the wafer Grant 7,935,292 - Sreenivasan , et al. May 3, 2	2011-05-03
Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography Grant 7,927,541 - Sreenivasan April 19, 2	2011-04-19
Large Area Linear Array Nanoimprinting App 20110084417 - Choi; Byung-Jin ; et al.	2011-04-14
Capillary imprinting technique Grant 7,910,042 - Choi , et al. March 22, 2	2011-03-22
Positive Tone Bi-Layer Method App 20110056911 - Sreenivasan; Sidlgata V.	2011-03-10
Functional Nanoparticles App 20110049096 - Sreenivasan; Sidlgata V. ; et al.	2011-03-03
Method and System to Control Movement of a Body for Nano-Scale Manufacturing App 20110048160 - Choi; Byung-Jin ; et al.	2011-03-03
Nanostructured thin film inorganic solar cells App 20110048518 - Yang; Shuqiang ; et al.	2011-03-03
Methods For Manufacturing Chucking Systems App 20110042345 - Choi; Byung-Jin ; et al.	2011-02-24
Nanostructured Organic Solar Cells App 20110030770 - Sreenivasan; Sidlgata V. ; et al.	2011-02-10
Positive tone bi-layer method Grant 7,858,528 - Sreenivasan December 28, 2	2010-12-28
Self-Aligned Cross-Point Memory Fabrication App 20100323490 - Sreenivasan; Sidlgata V. ; et al.	2010-12-23
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template App 20100291257 - Resnick; Douglas J. ; et al.	2010-11-18
Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks App 20100278954 - Sreenivasan; Sidlgata V. ; et al.	2010-11-04
Real time imprint process diagnostics for defects Grant 7,815,824 - Sreenivasan , et al. October 19, 2	2010-10-19
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques App 20100259745 - Cherala; Anshuman ; et al.	2010-10-14
Imprinting of partial fields at the edge of the wafer Grant 7,802,978 - Sreenivasan , et al. September 28, 2	2010-09-28
Self-aligned cross-point memory fabrication Grant 7,795,132 - Sreenivasan , et al. September 14, 2	2010-09-14
Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks Grant 7,780,893 - Sreenivasan , et al. August 24, 2	2010-08-24
Step and Repeat Imprint Lithography Processes App 20100201042 - Sreenivasan; Sidlgata V. ; et al.	2010-08-12
Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques Grant 7,768,624 - Cherala , et al. August 3, 2	2010-08-03
Forming a Layer on a Substrate App 20100181289 - Sreenivasan; Sidlgata V. ; et al.	2010-07-22
Conforming Template for Patterning Liquids Disposed on Substrates App 20100173034 - Sreenivasan; Sidlgata V. ; et al.	2010-07-08
Separation Methods For Imprint Lithography App 20100154993 - Choi; Byung-Jin ; et al.	2010-06-24
Positive Tone Bi-Layer Method App 20100140218 - Sreenivasan; Sidlgata V.	2010-06-10
Capillary Imprinting Technique App 20100140841 - Choi; Byung-Jin ; et al.	2010-06-10
Method for Expelling Gas Positioned Between a Substrate and a Mold App 20100143521 - Choi; Byung-Jin ; et al.	2010-06-10
Step and repeat imprint lithography processes Grant 7,727,453 - Sreenivasan , et al. June 1, 2	2010-06-01
Method and System for Double-Sided Patterning of Substrates App 20100129486 - Choi; Byung-Jin ; et al.	2010-05-27
Large Area Patterning of Nano-Sized Shapes App 20100120251 - Sreenivasan; Sidlgata V. ; et al.	2010-05-13
Double-Sided Nano-Imprint Lithography System App 20100112116 - Choi; Byung-Jin ; et al.	2010-05-06
Substrate Patterning App 20100112310 - Truskett; Van Nguyen ; et al.	2010-05-06
Capillary imprinting technique Grant 7,708,926 - Choi , et al. May 4, 2	2010-05-04
Device for holding a template for use in imprint lithography Grant 7,708,542 - Bailey , et al. May 4, 2	2010-05-04
Imprint Lithography Template App 20100102029 - Schmid; Gerard M. ; et al.	2010-04-29
Reduction of Stress During Template Separation App 20100096776 - Xu; Frank Y. ; et al.	2010-04-22
Conforming template for patterning liquids disposed on substrates Grant 7,699,598 - Sreenivasan , et al. April 20, 2	2010-04-20
Nano-patterned Active Layers Formed By Nano-imprint Lithography App 20100090341 - Wan; Fen ; et al.	2010-04-15
Method for expelling gas positioned between a substrate and a mold Grant 7,691,313 - Choi , et al. April 6, 2	2010-04-06
Particle Mitigation for Imprint Lithography App 20100078846 - Resnick; Douglas J. ; et al.	2010-04-01
Apparatus for imprint lithography using an electric field App 20100053578 - Sreenivasan; Sidlgata V. ; et al.	2010-03-04
Positive tone bi-layer method Grant 7,670,953 - Sreenivasan March 2, 2	2010-03-02
Method and system for double-sided patterning of substrates Grant 7,670,529 - Choi , et al. March 2, 2	2010-03-02
Patterning substrates employing multiple chucks Grant 7,670,530 - Choi , et al. March 2, 2	2010-03-02
Adaptive Nanotopography Sculpting App 20100012622 - Panga; Avinash ; et al.	2010-01-21
Substrate Support System Having a Plurality of Contact Lands App 20100007868 - Nimmakayala; Pawan Kumar ; et al.	2010-01-14
Method of separating a mold from a solidified layer disposed on a substrate Grant 7,635,445 - Choi , et al. December 22, 2	2009-12-22
Remote Center Compliant Flexure Device App 20090294059 - Choi; Byung-Jin ; et al.	2009-12-03
Imprinting of Partial Fields at the Edge of the Wafer App 20090283934 - Sreenivasan; Sidlgata V. ; et al.	2009-11-19
Preserving Filled Features When Vacuum Wiping App 20090256289 - Shackleton; Steven C. ; et al.	2009-10-15
Large Area Roll-To-Roll Imprint Lithography App 20090243153 - Sreenivasan; Sidlgata V. ; et al.	2009-10-01
Critical Dimension Control During Template Formation App 20090212012 - Brooks; Cynthia B. ; et al.	2009-08-27
Real Time Imprint Process Diagnostics For Defects App 20090214761 - Sreenivasan; Sidlgata V. ; et al.	2009-08-27
Formation of Conductive Templates Employing Indium Tin Oxide App 20090214686 - Sreenivasan; Sidlgata V. ; et al.	2009-08-27
Imprint Lithography Templates Having Alignment Marks App 20090214689 - Bailey; Todd C. ; et al.	2009-08-27
Full-Wafer or Large Area Imprinting with Multiple Separated Sub-Fields for High Throughput Lithography App 20090200709 - Sreenivasan; Sidlgata V.	2009-08-13
Template Pattern Density Doubling App 20090166933 - Sreenivasan; Sidlgata V.	2009-07-02
Pattern reversal employing thick residual layers Grant 7,547,504 - Sreenivasan June 16, 2	2009-06-16
Porous Template And Imprinting Stack For Nano-imprint Lithography App 20090140458 - Xu; Frank Y. ; et al.	2009-06-04
Nanostructured Organic Solar Cells App 20090133751 - Sreenivasan; Sidlgata V. ; et al.	2009-05-28
System and method for improvement of alignment and overlay for microlithography Grant 7,535,549 - Cherala , et al. May 19, 2	2009-05-19
Formation of conductive templates employing indium tin oxide Grant 7,491,637 - Sreenivasan , et al. February 17, 2	2009-02-17
Self-Aligned Cross-Point Memory Fabrication App 20090035934 - Sreenivasan; Sidlgata V. ; et al.	2009-02-05
Method and System to Control Movement of a Body for Nano-Scale Manufacturing App 20090037004 - Choi; Byung-Jin ; et al.	2009-02-05
Remote Center Compliant Flexure Device App 20090025246 - Choi; Byung-Jin ; et al.	2009-01-29
Method for Concurrently Employing Differing Materials to Form a Layer on a Substrate App 20090011139 - Sreenivasan; Sidlgata V. ; et al.	2009-01-08
Apparatus For Fabricating Nanoscale Patterns In Light Curable Compositions Using An Electric Field App 20080305440 - Willson; Carlton G. ; et al.	2008-12-11
Capillary imprinting technique Grant 7,442,336 - Choi , et al. October 28, 2	2008-10-28
Remote center compliant flexure device Grant 7,432,634 - Choi , et al. October 7, 2	2008-10-07
Method of varying dimensions of a substrate during nano-scale manufacturing Grant 7,420,654 - Cherala , et al. September 2, 2	2008-09-02
Substrate Support Method App 20080204693 - Nimmakayala; Pawan Kumar ; et al.	2008-08-28
Capillary Imprinting Technique App 20080174046 - Choi; Byung-Jin ; et al.	2008-07-24
Method of forming stepped structures employing imprint lithography Grant 7,396,475 - Sreenivasan July 8, 2	2008-07-08
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template App 20080160129 - Resnick; Douglas J. ; et al.	2008-07-03
Methods for Exposure for the Purpose of Thermal Management for Imprint Lithography Processes App 20080153312 - Sreenivasan; Sidlgata V. ; et al.	2008-06-26
Positive Tone Bi-Layer Method App 20080118872 - Sreenivasan; Sidlgata V.	2008-05-22
Apparatus to control displacement of a body spaced-apart from a surface Grant 7,374,415 - Choi , et al. May 20, 2	2008-05-20
Eliminating printability of sub-resolution defects in imprint lithography Grant 7,357,876 - Sreenivasan April 15, 2	2008-04-15
Magnification correction employing out-of-plane distortion of a substrate Grant 7,323,130 - Nimmakayala , et al. January 29, 2	2008-01-29
Method of forming a recessed structure employing a reverse tone process Grant 7,323,417 - Sreenivasan January 29, 2	2008-01-29
Method For Obtaining Force Combinations For Template Deformation Using Nullspace And Methods Optimization Techniques App 20070287081 - Cherala; Anshuman ; et al.	2007-12-13
Adaptive shape substrate support system Grant 7,307,697 - GanapathiSubramanian , et al. December 11, 2	2007-12-11
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks Grant 7,303,383 - Sreenivasan , et al. December 4, 2	2007-12-04
System for varying dimensions of a substrate during nanoscale manufacturing Grant 7,298,456 - Cherala , et al. November 20, 2	2007-11-20
Imprint Lithography System To Produce Light To Impinge Upon And Polymerize A Liquid In Superimposition With Template Overlay Marks App 20070264588 - Sreenivasan; Sidlgata V. ; et al.	2007-11-15
Tesselated Patterns in Imprint Lithography App 20070247608 - Sreenivasan; Sidlgata V. ; et al.	2007-10-25
Method of forming a compliant template for UV imprinting Grant 7,279,113 - Watts , et al. October 9, 2	2007-10-09
Imprinting of Partial Fields at the Edge of the Wafer App 20070228609 - Sreenivasan; Sidlgata V. ; et al.	2007-10-04
Patterning a Plurality of Fields on a Substrate to Compensate for Differing Evaporation Times App 20070231981 - Sreenivasan; Sidlgata V. ; et al.	2007-10-04
Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks App 20070228610 - Sreenivasan; Sidlgata V. ; et al.	2007-10-04
Preserving Filled Features when Vacuum Wiping App 20070228608 - Shackleton; Steven C. ; et al.	2007-10-04
Method for Imprint Lithography Utilizing an Adhesion Primer Layer App 20070212494 - Xu; Frank Y. ; et al.	2007-09-13
Positive tone bi-layer imprint lithography method Grant 7,261,831 - Sreenivasan August 28, 2	2007-08-28
Applying imprinting material to substrates employing electromagnetic fields Grant 7,261,830 - Cherala , et al. August 28, 2	2007-08-28
Substrate support method Grant 7,259,833 - Nimmakayala , et al. August 21, 2	2007-08-21
System for dispensing liquids Grant 7,252,715 - Watts , et al. August 7, 2	2007-08-07
Method of forming an in-situ recessed structure Grant 7,252,777 - Vidusek , et al. August 7, 2	2007-08-07
Patterning Substrates Employing Multiple Chucks App 20070170617 - Choi; Byung-Jin ; et al.	2007-07-26
Substrate support system Grant 7,245,358 - Nimmakayala , et al. July 17, 2	2007-07-17
Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom Grant 7,244,386 - Sreenivasan , et al. July 17, 2	2007-07-17
Reverse tone patterning on surfaces having planarity perturbations Grant 7,241,395 - Sreenivasan , et al. July 10, 2	2007-07-10
Method and System for Double-Sided Patterning of Substrates App 20070132152 - Choi; Byung-Jin ; et al.	2007-06-14
Imprint lithography template having a feature size under 250 nm Grant 7,229,273 - Bailey , et al. June 12, 2	2007-06-12
Conforming Template for Patterning Liquids Disposed on Substrates App 20070122942 - Sreenivasan; Sidlgata V. ; et al.	2007-05-31
Imprint lithography substrate processing tool for modulating shapes of substrates Grant 7,224,443 - Choi , et al. May 29, 2	2007-05-29
Method For Expelling Gas Positioned Between A Substrate And A Mold App 20070114686 - Choi; Byung-Jin ; et al.	2007-05-24
Positive Tone Bi-Layer Imprint Lithography Method App 20070099337 - Sreenivasan; Sidlgata V.	2007-05-03
Patterning substrates employing multi-film layers defining etch-differential interfaces Grant 7,205,244 - Stacey , et al. April 17, 2	2007-04-17
Method of Forming a Recessed Structure Employing a Reverse Tone Process App 20070082461 - Sreenivasan; Sidlgata V.	2007-04-12
Method of determining alignment of a template and a substrate having a liquid disposed therebetween Grant 7,186,483 - Sreenivasan , et al. March 6, 2	2007-03-06
Method of forming a recessed structure employing a reverse tone process Grant 7,186,656 - Sreenivasan March 6, 2	2007-03-06
Conforming template for patterning liquids disposed on substrates Grant 7,179,079 - Sreenivasan , et al. February 20, 2	2007-02-20
Positive tone bi-layer imprint lithography method Grant 7,179,396 - Sreenivasan February 20, 2	2007-02-20
Formation Of Conductive Templates Employing Indium Tin Oxide App 20070026542 - Sreenivasan; Sidlgata V. ; et al.	2007-02-01
Apparatus to vary dimensions of a substrate during nano-scale manufacturing Grant 7,170,589 - Cherala , et al. January 30, 2	2007-01-30
Systems for magnification and distortion correction for imprint lithography processes Grant 7,150,622 - Choi , et al. December 19, 2	2006-12-19
Compliant hard template for UV imprinting Grant 7,140,861 - Watts , et al. November 28, 2	2006-11-28
Imprint lithography template having opaque alignment marks Grant 7,136,150 - Sreenivasan , et al. November 14, 2	2006-11-14
Method of planarizing a semiconductor substrate with an etching chemistry Grant 7,105,452 - Sreenivasan September 12, 2	2006-09-12
Apparatus to control displacement of a body spaced-apart from a surface Grant 7,098,572 - Choi , et al. August 29, 2	2006-08-29
Chucking system for modulating shapes of substrates App 20060176466 - Choi; Byung J. ; et al.	2006-08-10
Method of separating a mold from a solidified layer disposed on a substrate App 20060172549 - Choi; Byung-Jin ; et al.	2006-08-03
Step and repeat imprint lithography processes Grant 7,077,992 - Sreenivasan , et al. July 18, 2	2006-07-18
Method for fabricating bulbous-shaped vias Grant 7,071,088 - Watts , et al. July 4, 2	2006-07-04
Alignment systems for imprint lithography Grant 7,070,405 - Sreenivasan , et al. July 4, 2	2006-07-04
Method of orientating a template with respect to a substrate in response to a force exerted on the template Grant 7,060,402 - Choi , et al. June 13, 2	2006-06-13
Method of creating a dispersion of a liquid on a substrate Grant 7,060,324 - Bailey , et al. June 13, 2	2006-06-13
Eliminating printability of sub-resolution defects in imprint lithography App 20060113697 - Sreenivasan; Sidlgata V.	2006-06-01
Methods of exposure for the purpose of thermal management for imprint lithography processes App 20060115999 - Sreenivasan; Sidlgata V. ; et al.	2006-06-01
Method of forming a compliant template for UV imprinting App 20060096949 - Watts; Michael P.C. ; et al.	2006-05-11
System for determining characteristics of substrates employing fluid geometries Grant 7,036,389 - Choi , et al. May 2, 2	2006-05-02
Step and repeat imprint lithography processes App 20060076717 - Sreenivasan; Sidlgata V. ; et al.	2006-04-13
Step and repeat imprint lithography systems App 20060077374 - Sreenivasan; Sidlgata V. ; et al.	2006-04-13
Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom App 20060068120 - Sreenivasan; Sidlgata V. ; et al.	2006-03-30
Chucking system for modulating shapes of substrates Grant 7,019,819 - Choi , et al. March 28, 2	2006-03-28
Method and system to measure characteristics of a film disposed on a substrate Grant 7,019,835 - McMackin , et al. March 28, 2	2006-03-28
Patterning substrates employing multi-film layers defining etch differential interfaces App 20060063359 - Stacey; Nicholas A. ; et al.	2006-03-23
Method of forming an in-situ recessed structure App 20060063277 - Vidusek; David A. ; et al.	2006-03-23
Pattern reversal employing thick residual layers App 20060063112 - Sreenivasan; Sidlgata V.	2006-03-23
Reverse tone patterning on surfaces having surface planarity perturbations App 20060060557 - Sreenivasan; Sidlgata V. ; et al.	2006-03-23
Formation of discontinuous films during an imprint lithography process App 20060062867 - Choi; Byung Jin ; et al.	2006-03-23
Method of planarizing a semiconductor substrate App 20060035464 - Sreenivasan; Sidlgata V.	2006-02-16
System for determining characteristics of substrates employing fluid geometries Grant 6,990,870 - Choi , et al. January 31, 2	2006-01-31
Method of aligning a template with a substrate employing moire patterns Grant 6,986,975 - Sreenivasan , et al. January 17, 2	2006-01-17
Method and system to control movement of a body for nano-scale manufacturing App 20060005657 - Choi; Byung-Jin ; et al.	2006-01-12
System for varying dimensions of a substrate during nanoscale manufacturing App 20060001194 - Cherala; Anshuman ; et al.	2006-01-05
Apparatus to vary dimensions of a substrate during nano-scale manufacturing App 20060001857 - Cherala; Anshuman ; et al.	2006-01-05
Chucking system for modulating shapes of substrates Grant 6,982,783 - Choi , et al. January 3, 2	2006-01-03
Method for modulating shapes of substrates Grant 6,980,282 - Choi , et al. December 27, 2	2005-12-27
Compliant device for nano-scale manufacturing App 20050275251 - Choi, Byung-Jin ; et al.	2005-12-15
Compliant device for nano-scale manufacturing App 20050275311 - Choi, Byung-Jin ; et al.	2005-12-15
Method and system to control movement of a body for nano-scale manufacturing App 20050274219 - Choi, Byung-Jin ; et al.	2005-12-15
System for magnification and distortion correction during nano-scale manufacturing App 20050270516 - Cherala, Anshuman ; et al.	2005-12-08
System and method for improvement of alignment and overlay for microlithography App 20050271955 - Cherala, Anshuman ; et al.	2005-12-08
Method of varying dimensions of a substrate during nano-scale manufacturing App 20050269745 - Cherala, Anshuman ; et al.	2005-12-08
Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing App 20050270312 - Lad, Pankaj B. ; et al.	2005-12-08
Adaptive shape substrate support method App 20050263077 - GanapathiSubramanian, Mahadevan ; et al.	2005-12-01
Apparatus to control displacement of a body spaced-apart from a surface App 20050264132 - Choi, Byung Jin ; et al.	2005-12-01
Substrate support method App 20050266587 - Nimmakayala, Pawan Kumar ; et al.	2005-12-01
Adaptive shape substrate support system App 20050264134 - GanapathiSubramanian, Mahadevan ; et al.	2005-12-01
Substrate support system App 20050263249 - Nimmakayala, Pawan Kumar ; et al.	2005-12-01
Method of forming a recessed structure employing a reverse tone process App 20050260848 - Sreenivasan, Sidlgata V.	2005-11-24
Remote center compliant flexure device App 20050260295 - Choi, Byung-Jin ; et al.	2005-11-24
Method of patterning a conductive layer on a substrate App 20050253307 - Sreenivasan, Sidlgata V.	2005-11-17
Method for fabricating nanoscale patterns in light curable compositions using an electric field Grant 6,964,793 - Willson , et al. November 15, 2	2005-11-15
Compliant hard template for UV imprinting App 20050236360 - Watts, Michael P.C. ; et al.	2005-10-27
Method to control the relative position between a body and a surface Grant 6,955,868 - Choi , et al. October 18, 2	2005-10-18
Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography App 20050189676 - Sreenivasan, Sidlgata V.	2005-09-01
Method and system to measure characteristics of a film disposed on a substrate App 20050185169 - McMackin, Ian M. ; et al.	2005-08-25
System and method for dispensing liquids Grant 6,926,929 - Watts , et al. August 9, 2	2005-08-09
Apparatus to orientate a body with respect to a surface Grant 6,922,906 - Choi , et al. August 2, 2	2005-08-02
High-resolution overlay alignment methods for imprint lithography Grant 6,921,615 - Sreenivasan , et al. July 26, 2	2005-07-26
Method for concurrently employing differing materials to form a layer on a substrate App 20050160011 - Sreenivasan, Sidlgata V. ; et al.	2005-07-21
Alignment methods for imprint lithography Grant 6,916,584 - Sreenivasan , et al. July 12, 2	2005-07-12
Method of varying template dimensions to achieve alignment during imprint lithography Grant 6,916,585 - Sreenivasan , et al. July 12, 2	2005-07-12
Method for imprint lithography using an electric field Grant 6,908,861 - Sreenivasan , et al. June 21, 2	2005-06-21
Dual wavelength method of determining a relative position of a substrate and a template Grant 6,902,853 - Sreenivasan , et al. June 7, 2	2005-06-07
Step and repeat imprint lithography systems Grant 6,900,881 - Sreenivasan , et al. May 31, 2	2005-05-31
Dispense geometery to achieve high-speed filling and throughput App 20050106321 - McMackin, Ian M. ; et al.	2005-05-19
Formation of conductive templates employing indium tin oxide App 20050098534 - Sreenivasan, Sidlgata V. ; et al.	2005-05-12
Method To Control The Relative Position Between A Body And A Surface App 20050089774 - Choi, Byung Jin ; et al.	2005-04-28
Applying imprinting material to substrates employing electromagnetic fields App 20050082253 - Cherala, Anshuman ; et al.	2005-04-21
Imprint lithography template having opaque alignment marks App 20050067379 - Sreenivasan, Sidlgata V. ; et al.	2005-03-31
High precision orientation alignment and gap control stages for imprint lithography processes Grant 6,873,087 - Choi , et al. March 29, 2	2005-03-29
Method for determining characteristics of substrate employing fluid geometries Grant 6,871,558 - Choi , et al. March 29, 2	2005-03-29
Imprint lithography templates having alignment marks App 20050064344 - Bailey, Todd C. ; et al.	2005-03-24
Capillary imprinting technique App 20050061773 - Choi, Byung-Jin ; et al.	2005-03-24
Method of separating a template from a substrate during imprint lithography Grant 6,870,301 - Choi , et al. March 22, 2	2005-03-22
Conforming template for patterning liquids disposed on substrates App 20050051698 - Sreenivasan, Sidlgata V. ; et al.	2005-03-10
System for determining characteristics of substrates employing fluid geometries App 20050028618 - Chol, Byung J. ; et al.	2005-02-10
Systems for magnification and distortion correction for imprint lithography processes App 20050006343 - Choi, Byung Jin ; et al.	2005-01-13
Imprint lithography template comprising alignment marks Grant 6,842,229 - Sreenivasan , et al. January 11, 2	2005-01-11
Apparatus to control displacement of a body spaced-apart from a surface App 20040251775 - Choi, Byung-Jin ; et al.	2004-12-16
System for dispensing liquids App 20040241324 - Watts, Michael P.C. ; et al.	2004-12-02
System for determining characteristics of substrates employing fluid geometries App 20040223883 - Choi, Byung J. ; et al.	2004-11-11
Chucking system for modulating shapes of substrates App 20040223131 - Choi, Byung J. ; et al.	2004-11-11
Method of forming stepped structures employing imprint lithography App 20040211754 - Sreenivasan, Sidlgata V.	2004-10-28
Apparatus for fabricating nanoscale patterns in light curable compositions using an electric field App 20040200411 - Willson, Carlton Grant ; et al.	2004-10-14
Positive tone bi-layer imprint lithography method App 20040188381 - Sreenivasan, Sidlgata V.	2004-09-30
Method of orientating a template with respect to a substrate in response to a force exerted on the template App 20040168588 - Choi, Byung Jin ; et al.	2004-09-02
Apparatus to orientate a body with respect to a surface App 20040169441 - Choi, Byung Jin ; et al.	2004-09-02
Method of manufacturing a vacuum chuck used in imprint lithography App 20040149687 - Choi, Byung Jin ; et al.	2004-08-05
Magnification correction employing out-of-plane distortion of a substrate App 20040146792 - Nimmakayala, Pawan K. ; et al.	2004-07-29
Step and repeat imprint lithography processes App 20040124566 - Sreenivasan, Sidlgata V. ; et al.	2004-07-01
Method and system for determining characteristics of substrates employing fluid geometries App 20040112153 - Choi, Byung J. ; et al.	2004-06-17
Method for modulating shapes of substrates App 20040112861 - Choi, Byung J. ; et al.	2004-06-17
Method of separating a template from a substrate during imprint lithography App 20040104641 - Choi, Byung Jin ; et al.	2004-06-03
Chucking system for modulating shapes of substrates App 20040090611 - Choi, Byung J. ; et al.	2004-05-13
Method of forming a layer on a substrate to facilitate fabrication of metrology standards App 20040065252 - Sreenivasan, Sidlgata V. ; et al.	2004-04-08
Method and a mold to arrange features on a substrate to replicate features having minimal dimensional variability App 20040065976 - Sreenivasan, Sidlgata V. ; et al.	2004-04-08
Method For Fabricating Bulbous-shaped Vias App 20040038552 - Watts, Michael P.C. ; et al.	2004-02-26
Alignment methods for imprint lithography App 20040021254 - Sreenivasan, Sidlgata V. ; et al.	2004-02-05
Alignment systems for imprint lithography App 20040022888 - Sreenivasan, Sidlgata V. ; et al.	2004-02-05
Step and repeat imprint lithography systems App 20040008334 - Sreenivasan, Sidlgata V. ; et al.	2004-01-15
Method and system for imprint lithography using an electric field App 20040009673 - Sreenivasan, Sidlgata V. ; et al.	2004-01-15
System and method for dispensing liquids App 20040010341 - Watts, Michael P.C. ; et al.	2004-01-15
Method and system for fabricating nanoscale patterns in light curable compositions using an electric field App 20030215577 - Willson, Carlton Grant ; et al.	2003-11-20

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