loadpatents
Patent applications and USPTO patent grants for Sprey; Hessel.The latest application filed is for "substrate rack and a substrate processing system and method".
Patent | Date |
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Substrate rack and a substrate processing system and method Grant 11,088,002 - Pierreux , et al. August 10, 2 | 2021-08-10 |
Atomic layer deposition of antimony oxide films Grant 10,699,899 - Matero , et al. | 2020-06-30 |
Substrate Rack And A Substrate Processing System And Method App 20190304821 - Pierreux; Dieter ;   et al. | 2019-10-03 |
Atomic Layer Deposition Of Antimony Oxide Films App 20190103266 - Matero; Raija H. ;   et al. | 2019-04-04 |
Atomic layer deposition of antimony oxide films Grant 10,056,249 - Matero , et al. August 21, 2 | 2018-08-21 |
Atomic Layer Deposition Of Antimony Oxide Films App 20170140918 - Matero; Raija H. ;   et al. | 2017-05-18 |
Cyclic aluminum nitride deposition in a batch reactor Grant 9,552,979 - Knaepen , et al. January 24, 2 | 2017-01-24 |
Atomic layer deposition of antimony oxide films Grant 9,514,934 - Matero , et al. December 6, 2 | 2016-12-06 |
Atomic Layer Deposition Of Antimony Oxide Films App 20150249005 - MATERO; RAIJA H. ;   et al. | 2015-09-03 |
Atomic layer deposition of antimony oxide films Grant 9,006,112 - Matero , et al. April 14, 2 | 2015-04-14 |
Cyclic Aluminum Nitride Deposition In A Batch Reactor App 20140357090 - Knaepen; Werner ;   et al. | 2014-12-04 |
Method of CVD-depositing a film having a substantially uniform film thickness Grant 8,652,573 - Stokhof , et al. February 18, 2 | 2014-02-18 |
Atomic Layer Deposition Of Antimony Oxide Films App 20130095664 - Matero; Raija H. ;   et al. | 2013-04-18 |
Method Of Cvd-depositing A Film Having A Substantially Uniform Film Thickness App 20120015105 - Stokhof; Maarten ;   et al. | 2012-01-19 |
Thin Films App 20110256718 - Haukka; Suvi P. ;   et al. | 2011-10-20 |
Thin films Grant 7,981,791 - Haukka , et al. July 19, 2 | 2011-07-19 |
Liner materials and related processes for 3-D integration Grant 7,884,016 - Sprey , et al. February 8, 2 | 2011-02-08 |
Liner Materials And Related Processes For 3-d Integration App 20100200989 - Sprey; Hessel ;   et al. | 2010-08-12 |
Cyclical Oxidation Process App 20090269939 - Sprey; Hessel | 2009-10-29 |
Thin Films App 20090068832 - Haukka; Suvi P. ;   et al. | 2009-03-12 |
Plasma pre-treating surfaces for atomic layer deposition Grant 7,498,242 - Kumar , et al. March 3, 2 | 2009-03-03 |
Process Of Filling Deep Vias For 3-d Integration Of Substrates App 20080242078 - Sprey; Hessel ;   et al. | 2008-10-02 |
Thin films Grant 7,419,903 - Haukka , et al. September 2, 2 | 2008-09-02 |
Plasma pre-treating surfaces for atomic layer deposition App 20060216932 - Kumar; Devendra ;   et al. | 2006-09-28 |
Thin films App 20050181555 - Haukka, Suvi P. ;   et al. | 2005-08-18 |
Method and installation for etching a substrate Grant 6,884,317 - Sprey , et al. April 26, 2 | 2005-04-26 |
In situ reduction of copper oxide prior to silicon carbide deposition Grant 6,878,628 - Sophie , et al. April 12, 2 | 2005-04-12 |
Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
Sealing porous structures App 20030143839 - Raaijmakers, Ivo ;   et al. | 2003-07-31 |
In situ reduction of copper oxide prior to silicon carbide deposition App 20020098685 - Sophie, Auguste J.L. ;   et al. | 2002-07-25 |
Method and installation for etching a substrate App 20010015343 - Sprey, Hessel ;   et al. | 2001-08-23 |
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