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Method And Composition For Improving Health Of An Avian App 20220248644 - KARPOL; Alon ;   et al. | 2022-08-11 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 8,079,894 - Tolles , et al. December 20, 2 | 2011-12-20 |
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20100035526 - Tolles; Robert D. ;   et al. | 2010-02-11 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,614,939 - Tolles , et al. November 10, 2 | 2009-11-10 |
Method of forming a damascene structure with integrated planar dielectric layers Grant 7,361,582 - Wu , et al. April 22, 2 | 2008-04-22 |
Chemical Mechanical Polishing With Napped Poromeric App 20080076330 - Birang; Manoocher ;   et al. | 2008-03-27 |
Integrated multi-step gap fill and all feature planarization for conductive materials Grant 7,323,095 - Hsu , et al. January 29, 2 | 2008-01-29 |
Method, System And Medium For Controlling Semiconductor Wafer Processes Using Critical Dimension Measurements App 20070288116 - Al-Bayati; Amir ;   et al. | 2007-12-13 |
Chemical mechanical polishing apparatus with rotating belt Grant 7,303,467 - Birang , et al. December 4, 2 | 2007-12-04 |
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20070238399 - Tolles; Robert D. ;   et al. | 2007-10-11 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,255,632 - Tolles , et al. August 14, 2 | 2007-08-14 |
Polishing apparatus having a trough Grant 7,238,090 - Tolles , et al. July 3, 2 | 2007-07-03 |
Method of forming a damascene structure with integrated planar dielectric layers Grant 7,229,907 - Wu , et al. June 12, 2 | 2007-06-12 |
Method of Forming A Damascene Structure with Integrated Planar Dielectric Layers App 20070123033 - Wu; Tom ;   et al. | 2007-05-31 |
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements Grant 7,225,047 - Al-Bayati , et al. May 29, 2 | 2007-05-29 |
Chemical mechanical polishing apparatus with rotating belt App 20070021043 - Birang; Manoocher ;   et al. | 2007-01-25 |
Chemical mechanical polishing apparatus with rotating belt Grant 7,104,875 - Birang , et al. September 12, 2 | 2006-09-12 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20060194525 - Tolles; Robert D. ;   et al. | 2006-08-31 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,097,544 - Tolles , et al. August 29, 2 | 2006-08-29 |
Method of forming a damascene structure with integrated planar dielectric layers App 20060057829 - Wu; Tom ;   et al. | 2006-03-16 |
Web lift system for chemical mechanical planarization Grant 7,008,303 - White , et al. March 7, 2 | 2006-03-07 |
Linear polishing sheet with window Grant 6,991,517 - Redeker , et al. January 31, 2 | 2006-01-31 |
Conductive polishing article for electrochemical mechanical polishing Grant 6,979,248 - Hu , et al. December 27, 2 | 2005-12-27 |
Method and apparatus for electro-chemical processing Grant 6,896,776 - Hsu , et al. May 24, 2 | 2005-05-24 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20050048880 - Tolles, Robert D. ;   et al. | 2005-03-03 |
Chemical mechanical polishing with multiple polishing pads Grant 6,848,976 - Somekh February 1, 2 | 2005-02-01 |
Integrated multi-step gap fill and all feature planarization for conductive materials App 20040266085 - Hsu, Wei-Yung ;   et al. | 2004-12-30 |
Chemical mechanical polishing apparatus with rotating belt App 20040209559 - Birang, Manoocher ;   et al. | 2004-10-21 |
Linear polishing sheet with window App 20040198185 - Redeker, Fred C. ;   et al. | 2004-10-07 |
Linear polishing sheet with window Grant 6,796,880 - Redeker , et al. September 28, 2 | 2004-09-28 |
Real time defect source identification Grant 6,763,130 - Somekh , et al. July 13, 2 | 2004-07-13 |
Multi-tool control system, method and medium App 20040083021 - Somekh, Sasson ;   et al. | 2004-04-29 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 6,705,924 - Somekh March 16, 2 | 2004-03-16 |
Process and an integrated tool for low k dielectric deposition including a pecvd capping module App 20040020601 - Zhao, Jun ;   et al. | 2004-02-05 |
Method And Apparatus For Electro-chemical Processing App 20040003894 - Hsu, Wei-Yung ;   et al. | 2004-01-08 |
Conductive polishing article for electrochemical mechanical polishing App 20030209448 - Hu, Yongqi ;   et al. | 2003-11-13 |
Multi-tool control system, method and medium Grant 6,640,151 - Somekh , et al. October 28, 2 | 2003-10-28 |
Chemical mechanical polishing with multiple polishing pads App 20030190865 - Somekh, Sasson | 2003-10-09 |
Linear polishing sheet with window App 20030181137 - Redeker, Fred C. ;   et al. | 2003-09-25 |
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements App 20030180972 - Al-Bayati, Amir ;   et al. | 2003-09-25 |
Web lift system for chemical mechanical planarization App 20030171069 - White, John M. ;   et al. | 2003-09-11 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system App 20030139123 - Somekh, Sasson | 2003-07-24 |
In-situ monitoring of linear substrate polishing operations Grant 6,585,563 - Redeker , et al. July 1, 2 | 2003-07-01 |
Chemical mechanical polishing apparatus with rotating belt App 20030060143 - Birang, Manoocher ;   et al. | 2003-03-27 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 6,517,415 - Govzman , et al. February 11, 2 | 2003-02-11 |
Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system Grant 6,427,703 - Somekh August 6, 2 | 2002-08-06 |
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet Grant 6,379,231 - Birang , et al. April 30, 2 | 2002-04-30 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system App 20020031981 - Govzman, Boris ;   et al. | 2002-03-14 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 6,343,973 - Somekh February 5, 2 | 2002-02-05 |
Etch stop layer for dual damascene process Grant 6,291,334 - Somekh September 18, 2 | 2001-09-18 |
Vaporization and deposition apparatus Grant 6,258,170 - Somekh , et al. July 10, 2 | 2001-07-10 |
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet Grant 6,244,935 - Birang , et al. June 12, 2 | 2001-06-12 |
Chemical mechanical polishing with multiple polishing pads App 20010001756 - Somekh, Sasson | 2001-05-24 |
System for chemical mechanical polishing having multiple polishing stations Grant 6,126,517 - Tolles , et al. October 3, 2 | 2000-10-03 |
Integrated electrodeposition and chemical-mechanical polishing tool Grant 6,110,011 - Somekh , et al. August 29, 2 | 2000-08-29 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 6,093,082 - Somekh July 25, 2 | 2000-07-25 |
Underwater wafer storage and wafer picking for chemical mechanical polishing Grant 6,080,046 - Shendon , et al. June 27, 2 | 2000-06-27 |
Electrostatic chuck with improved erosion resistance Grant 6,023,405 - Shamouilian , et al. February 8, 2 | 2000-02-08 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system Grant 5,957,751 - Govzman , et al. September 28, 1 | 1999-09-28 |
Chemical mechanical polishing with multiple polishing pads Grant 5,897,426 - Somekh April 27, 1 | 1999-04-27 |
Multiple chamber integrated process system Grant 5,882,165 - Maydan , et al. March 16, 1 | 1999-03-16 |
Ultra high throughput wafer vacuum processing system Grant 5,855,681 - Maydan , et al. January 5, 1 | 1999-01-05 |
High frequency semiconductor wafer processing apparatus and method Grant 5,849,136 - Mintz , et al. December 15, 1 | 1998-12-15 |
Electrostatic chuck with improved erosion resistance Grant 5,822,171 - Shamouilian , et al. October 13, 1 | 1998-10-13 |
Plasma-inert cover and plasma cleaning process and apparatus employing same Grant 5,810,936 - Leung , et al. September 22, 1 | 1998-09-22 |
Radially oscillating carousel processing system for chemical mechanical polishing Grant 5,804,507 - Perlov , et al. September 8, 1 | 1998-09-08 |
Method of making electrostatic chuck with conformal insulator film Grant 5,753,132 - Shamouilian , et al. May 19, 1 | 1998-05-19 |
Electrostatic chuck with conformal insulator film Grant 5,745,331 - Shamouilian , et al. April 28, 1 | 1998-04-28 |
Continuous processing system for chemical mechanical polishing Grant 5,738,574 - Tolles , et al. April 14, 1 | 1998-04-14 |
Plasma-inert cover and plasma cleaning process Grant 5,705,080 - Leung , et al. January 6, 1 | 1998-01-06 |
Wafer tray and ceramic blade for semiconductor processing apparatus Grant 5,636,964 - Somekh , et al. June 10, 1 | 1997-06-10 |
High-frequency semiconductor wafer processing apparatus and method Grant 5,618,382 - Mintz , et al. April 8, 1 | 1997-04-08 |
Wafer tray and ceramic blade for semiconductor processing apparatus Grant 5,570,994 - Somekh , et al. November 5, 1 | 1996-11-05 |
Wafer tray and ceramic blade for semiconductor processing apparatus Grant 5,556,147 - Somekh , et al. September 17, 1 | 1996-09-17 |
Process and apparatus for full wafer deposition Grant 5,384,008 - Sinha , et al. January 24, 1 | 1995-01-24 |
Apparatus for cleaning a shield in a physical vapor deposition chamber Grant 5,294,320 - Somekh , et al. March 15, 1 | 1994-03-15 |
Multichamber integrated process system Grant 5,292,393 - Maydan , et al. * March 8, 1 | 1994-03-08 |
Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer Grant 5,250,467 - Somekh , et al. October 5, 1 | 1993-10-05 |
Magnetic field-enhanced plasma etch reactor Grant 5,215,619 - Cheng , et al. June 1, 1 | 1993-06-01 |
Staged-vacuum wafer processing system and method Grant 5,186,718 - Tepman , et al. February 16, 1 | 1993-02-16 |
Multi-chamber integrated process system Grant 4,951,601 - Maydan , et al. August 28, 1 | 1990-08-28 |
Magnetic field-enhanced plasma etch reactor Grant 4,842,683 - Cheng , et al. June 27, 1 | 1989-06-27 |
Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition Grant 4,668,365 - Foster , et al. May 26, 1 | 1987-05-26 |
Magnetron-enhanced plasma etching process Grant 4,668,338 - Maydan , et al. May 26, 1 | 1987-05-26 |
Laser interferometer system and method for monitoring and controlling IC processing Grant 4,618,262 - Maydan , et al. October 21, 1 | 1986-10-21 |
Variable thickness self-aligned photoresist process Grant 4,231,811 - Somekh , et al. November 4, 1 | 1980-11-04 |
Process for fabricating small geometry semiconductive devices including integrated components Grant 4,049,944 - Garvin , et al. September 20, 1 | 1977-09-20 |