| Patent | Date |
|---|
Method of destructive testing the dielectric layer of a semiconductor wafer or sample
App 20080290889 - Hillard; Robert J. | 2008-11-27 |
Method and system for measurement of sidewall damage in etched dielectric structures using a near field microwave probe
Grant 7,362,108 - Talanov , et al. April 22, 2 | 2008-04-22 |
Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materials
Grant 7,327,155 - Hillard February 5, 2 | 2008-02-05 |
In-situ wafer and probe desorption using closed loop heating
Grant 7,304,490 - Howland, Jr. , et al. December 4, 2 | 2007-12-04 |
Method and system for automatically determining electrical properties of a semiconductor wafer or sample
Grant 7,295,022 - Hillard , et al. November 13, 2 | 2007-11-13 |
Method and system for measurement of dielectric constant of thin films using a near field microwave probe
Grant 7,285,963 - Talanov , et al. October 23, 2 | 2007-10-23 |
Method of measuring semiconductor wafers with an oxide enhanced probe
Grant 7,282,941 - Howland, Jr. October 16, 2 | 2007-10-16 |
Method of detecting un-annealed ion implants
Grant 7,250,313 - Howland, Jr. July 31, 2 | 2007-07-31 |
Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materials
App 20070109007 - Hillard; Robert J. | 2007-05-17 |
Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer
Grant 7,190,186 - Howland, Jr. , et al. March 13, 2 | 2007-03-13 |
Method and system for automatically determining electrical properties of a semiconductor wafer or sample
App 20070046310 - Hillard; Robert J. ; et al. | 2007-03-01 |
Method of measuring semiconductor wafers with an oxide enhanced probe
App 20060219658 - Howland; William H. JR. | 2006-10-05 |
Semiconductor substrate surface preparation using high temperature convection heating
Grant 7,063,992 - Adams , et al. June 20, 2 | 2006-06-20 |
In-situ wafer and probe desorption using closed loop heating
App 20060097740 - Howland; William H. JR. ; et al. | 2006-05-11 |
Method and apparatus for determining generation lifetime of product semiconductor wafers
Grant 7,037,734 - Hillard May 2, 2 | 2006-05-02 |
Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor wafer
Grant 7,026,837 - Howland, Jr. , et al. April 11, 2 | 2006-04-11 |
Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof
Grant 7,023,231 - Howland, Jr. , et al. April 4, 2 | 2006-04-04 |
Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer
App 20060066323 - Howland; William H. JR. ; et al. | 2006-03-30 |
Method of detecting un-annealed ion implants
App 20060068514 - Howland; William H. JR. | 2006-03-30 |
Method and apparatus for removing and/or preventing surface contamination of a probe
Grant 7,007,408 - Howland, Jr. , et al. March 7, 2 | 2006-03-07 |
Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor wafer
Grant 7,005,307 - Howland, Jr. , et al. February 28, 2 | 2006-02-28 |
Method of electrical characterization of a silicon-on-insulator (SOI) wafer
Grant 6,991,948 - Hillard January 31, 2 | 2006-01-31 |
Method and apparatus for determining generation lifetime of product semiconductor wafers
App 20050287683 - Hillard, Robert J. | 2005-12-29 |
Apparatus And Method For Detecting Soft Breakdown Of A Dielectric Layer Of A Semiconductor Wafer
App 20050287684 - Howland, William H. JR. ; et al. | 2005-12-29 |
Apparatus and method for measuring semiconductor wafer electrical properties
Grant 6,972,582 - Howland , et al. December 6, 2 | 2005-12-06 |
Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof
App 20050253618 - Howland, William H. JR. ; et al. | 2005-11-17 |
Method and apparatus for removing and/or preventing surface contamination of a probe
App 20050241175 - Howland, William H. JR. ; et al. | 2005-11-03 |
Method of testing semiconductor wafers with non-penetrating probes
App 20050225345 - Mazur, Robert G. ; et al. | 2005-10-13 |
Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor wafer
App 20050146348 - Howland, William H. JR. ; et al. | 2005-07-07 |
Flexible membrane probe and method of use thereof
Grant 6,900,652 - Mazur May 31, 2 | 2005-05-31 |
Apparatus and method for determining electrical properties of a semiconductor wafer
Grant 6,894,519 - Howland May 17, 2 | 2005-05-17 |
Method of electrical characterization of a silicon-on-insulator ( SOI) wafer
App 20050095728 - Hillard, Robert J. | 2005-05-05 |
Conductance-voltage (gv) Based Method For Determining Leakage Current In Dielectrics
App 20050093563 - Hillard, Robert J. | 2005-05-05 |
Conductance-voltage (GV) based method for determining leakage current in dielectrics
Grant 6,879,176 - Hillard April 12, 2 | 2005-04-12 |
Semiconductor substrate surface preparation using high temperature convection heating
App 20050028836 - Adams, Michael J. ; et al. | 2005-02-10 |
Method and apparatus for testing semiconductor wafers
Grant 6,851,096 - Alexander February 1, 2 | 2005-02-01 |
Non-invasive electrical measurement of semiconductor wafers
Grant 6,842,029 - Howland January 11, 2 | 2005-01-11 |
Flexible Membrane Probe And Method Of Use Thereof
App 20040251923 - Mazur, Robert G. | 2004-12-16 |
Sample chuck with compound construction
Grant 6,803,780 - Adams , et al. October 12, 2 | 2004-10-12 |
Apparatus for determining doping concentration of a semiconductor wafer
Grant 6,788,076 - Howland September 7, 2 | 2004-09-07 |
Apparatus and method for measuring semiconductor wafer electrical properties
App 20040155240 - Howland, William H. ; et al. | 2004-08-12 |
Method of determining one or more properties of a semiconductor wafer
Grant 6,741,093 - Howland , et al. May 25, 2 | 2004-05-25 |
Non-invasive electrical measurement of semiconductor wafers
App 20030227292 - Howland, William H. | 2003-12-11 |
High speed threshold voltage and average surface doping measurements
Grant 6,657,454 - Howland December 2, 2 | 2003-12-02 |
Apparatus and method for determining electrical properties of a semiconductor wafer
App 20030210066 - Howland, William H. | 2003-11-13 |
Apparatus and method for determining doping concentration of a semiconductor wafer
Grant 6,632,691 - Howland October 14, 2 | 2003-10-14 |
Method and apparatus for testing semiconductor wafers
App 20030071631 - Alexander, William J. | 2003-04-17 |
Sample chuck with compound construction
App 20030011392 - Adams, Michael John ; et al. | 2003-01-16 |
Non-invasive electrical measurement of semiconductor wafers
Grant 6,492,827 - Mazur , et al. December 10, 2 | 2002-12-10 |
Spreading resistance profiling system
Grant 6,052,653 - Mazur , et al. April 18, 2 | 2000-04-18 |
Apparatus for characterization of electrical properties of a semiconductor body
Grant 5,036,271 - Mazur , et al. July 30, 1 | 1991-07-30 |
Measurement of excess carrier lifetime in semiconductor devices
Grant 4,090,132 - Alexander May 16, 1 | 1978-05-16 |
Lapping and polishing apparatus
Grant 3,978,622 - Mazur , et al. September 7, 1 | 1976-09-07 |
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