SOKUDO CO., LTD.

Patent Applications and Registrations

Patent applications and USPTO patent grants for SOKUDO CO., LTD..The latest application filed is for "substrate processing apparatus".

Company Profile

0.64.90

SOKUDO CO., LTD. - Kyoto N/A JP
SOKUDO CO., LTD. -
Sokudo Co., Ltd. - JP JP
Sokudo Co., Ltd - Kyoto JP
Sokudo Co., Ltd. - Shimogyo-ku JP
SOKUDO Co., Ltd. - Shijodori-Muromachi-Higashiiru JP
SOKUDO CO., LTD. - K-I Shijo Building, 88 kankoboko-cho, Shijodori- Kyoto JP
Sokudo Co., Ltd. - K-I Shijo Building, 88 Kankoboko-cho Shijodori-M Shimogyo-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate treating apparatus Grant 10,109,513 - Nishiyama October 23, 2	2018-10-23
Substrate processing apparatus and substrate processing method Grant 9,539,607 - Kuwahara , et al. January 10, 2	2017-01-10
Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section Grant 9,436,087 - Morioka , et al. September 6, 2	2016-09-06
Substrate treating apparatus with substrate reordering Grant 9,368,383 - Ogura , et al. June 14, 2	2016-06-14
Negative developing method and negative developing apparatus Grant 9,063,429 - Miyagi , et al. June 23, 2	2015-06-23
Substrate Processing Apparatus App 20150013603 - MORIOKA; Kazuo ; et al.	2015-01-15
Substrate Processing Apparatus, Storage Device, And Method Of Transporting Substrate Storing Container App 20140341681 - INAGAKI; Yukihiko ; et al.	2014-11-20
Substrate Treating Apparatus With Substrate Reordering App 20140342558 - OGURA; Hiroyuki ; et al.	2014-11-20
Substrate processing method Grant 8,851,769 - Kaneyama October 7, 2	2014-10-07
Parallel substrate treatment for a plurality of substrate treatment lines Grant 8,851,008 - Fukutomi , et al. October 7, 2	2014-10-07
Substrate Treating Apparatus App 20140285790 - NISHIYAMA; Koji	2014-09-25
Substrate Cleaning And Drying Method And Substrate Developing Method App 20140261571 - GOTO; Tomohiro ; et al.	2014-09-18
Substrate processing apparatus, storage device, and method of transporting substrate storing container Grant 8,827,621 - Inagaki , et al. September 9, 2	2014-09-09
Substrate processing apparatus with heater element held by vacuum Grant 8,785,821 - Herchen July 22, 2	2014-07-22
Negative Developing Method And Negative Developing Apparatus App 20140199638 - MIYAGI; Tadashi ; et al.	2014-07-17
Apparatus for and method of heat-treating film formed on surface of substrate Grant 8,781,308 - Harumoto July 15, 2	2014-07-15
Substrate Processing Apparatus App 20140120477 - Yasuda; Shuichi ; et al.	2014-05-01
Substrate treating apparatus with inter-unit buffers Grant 8,708,587 - Ogura , et al. April 29, 2	2014-04-29
Substrate processing apparatus and substrate processing method Grant 8,635,968 - Kaneyama January 28, 2	2014-01-28
Substrate Processing Apparatus And Substrate Processing Method App 20140023776 - KUWAHARA; Joji ; et al.	2014-01-23
Substrate processing apparatus Grant 8,631,809 - Hamada , et al. January 21, 2	2014-01-21
Substrate Treating Apparatus With Inter-unit Buffers App 20140000514 - Ogura; Hiroyuki ; et al.	2014-01-02
Substrate processing apparatus and substrate processing method Grant 8,585,830 - Yasuda , et al. November 19, 2	2013-11-19
Substrate processing apparatus and substrate processing method Grant 8,580,340 - Imamura , et al. November 12, 2	2013-11-12
Substrate treating apparatus with inter-unit buffers Grant 8,545,118 - Ogura , et al. October 1, 2	2013-10-01
Substrate processing method Grant 8,540,824 - Kaneyama , et al. September 24, 2	2013-09-24
Substrate processing apparatus and substrate processing method Grant 8,496,761 - Kaneyama , et al. July 30, 2	2013-07-30
Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus Grant 8,477,301 - Kashiyama , et al. July 2, 2	2013-07-02
Apparatus for and method of processing substrate subjected to exposure process Grant 8,460,476 - Hamada June 11, 2	2013-06-11
Substrate transport apparatus and heat treatment apparatus Grant 8,383,990 - Morita , et al. February 26, 2	2013-02-26
Substrate processing apparatus Grant 8,286,576 - Tamada , et al. October 16, 2	2012-10-16
Substrate cleaning device and substrate processing apparatus including the same Grant 8,286,293 - Nishiyama , et al. October 16, 2	2012-10-16
Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form Grant 8,218,124 - Miyagi , et al. July 10, 2	2012-07-10
Substrate Treating Apparatus App 20120156380 - Fukutomi; Yoshiteru ; et al.	2012-06-21
Substrate Treating Apparatus App 20120145073 - Fukutomi; Yoshiteru ; et al.	2012-06-14
Substrate Treating Apparatus App 20120145074 - Fukutomi; Yoshiteru ; et al.	2012-06-14
Developing Apparatus App 20120122038 - Harumoto; Masahiko ; et al.	2012-05-17
Substrate cleaning and processing apparatus with magnetically controlled spin chuck holding pins Grant 8,166,985 - Nishiyama , et al. May 1, 2	2012-05-01
Substrate developing method and developing apparatus Grant 8,137,576 - Harumoto , et al. March 20, 2	2012-03-20
Method And System For Thermal Treatment Of Substrates App 20120055916 - Volfovski; Leon ; et al.	2012-03-08
Multi-channel developer system Grant 8,127,713 - Britcher , et al. March 6, 2	2012-03-06
Temperature measurement in a substrate processing apparatus Grant 8,122,851 - Hamada February 28, 2	2012-02-28
Method And System For Removal Of Films From Peripheral Portions Of A Substrate App 20120037593 - Miyagi; Tadashi ; et al.	2012-02-16
Substrate processing apparatus Grant 8,040,488 - Yasuda , et al. October 18, 2	2011-10-18
Substrate processing apparatus and substrate processing method Grant 8,034,190 - Yasuda , et al. October 11, 2	2011-10-11
Substrate processing apparatus with integrated cleaning unit Grant 8,031,324 - Fukutomi , et al. October 4, 2	2011-10-04
Substrate processing apparatus and substrate processing method using the same Grant 8,015,985 - Hamada , et al. September 13, 2	2011-09-13
Method and apparatus for monitoring and control of suck back level in a photoresist dispense system Grant 7,935,948 - Porras , et al. May 3, 2	2011-05-03
First detecting sheet and first thermometric system for detecting and measuring temperature of an object under test, second detecting sheet and second thermometric system for detecting and measuring temperature of a dummy substrate, and heat treatment apparatus using same Grant 7,914,202 - Kamei March 29, 2	2011-03-29
Substrate Processing Apparatus With Heater Element Held By Vacuum App 20110000426 - Herchen; Harald	2011-01-06
Method and system for controlling bake plate temperature in a semiconductor processing chamber Grant 7,831,135 - Herchen November 9, 2	2010-11-09
Substrate Processing Apparatus App 20100239986 - Kaneyama; Koji ; et al.	2010-09-23
Substrate drying apparatus, substrate cleaning apparatus and substrate processing system Grant 7,766,565 - Kaneyama August 3, 2	2010-08-03
Substrate Processing Apparatus And Substrate Processing Method App 20100190116 - Kaneyama; Koji ; et al.	2010-07-29
Substrate Processing Apparatus And Substrate Processing Method App 20100159142 - Yasuda; Shuichi ; et al.	2010-06-24
Integrated thermal unit having a shuttle with two-axis movement Grant 7,741,585 - Quach , et al. June 22, 2	2010-06-22
Multi-channel Developer System App 20100151690 - Britcher; Eric B. ; et al.	2010-06-17
Substrate Processing Apparatus And Substrate Processing Method App 20100136492 - Yasuda; Shuichi ; et al.	2010-06-03
Substrate Processing Apparatus App 20100136257 - Yasuda; Shuichi ; et al.	2010-06-03
Substrate processing apparatus and substrate processing method Grant 7,726,891 - Kaneyama , et al. June 1, 2	2010-06-01
Apparatus For And Method Of Processing Substrate Subjected To Exposure Process App 20100126527 - Hamada; Tetsuya	2010-05-27
Substrate Processing Apparatus App 20100129526 - Yasuda; Shuichi ; et al.	2010-05-27
Substrate processing apparatus Grant 7,722,267 - Hamada May 25, 2	2010-05-25
Cluster tool substrate throughput optimization Grant 7,699,021 - Volfovski , et al. April 20, 2	2010-04-20
Substrate processing apparatus Grant 7,690,853 - Hamada April 6, 2	2010-04-06
Substrate Processing Apparatus App 20100081097 - Kaneyama; Koji ; et al.	2010-04-01
Substrate Processing Apparatus App 20100075054 - Kaneyama; Koji ; et al.	2010-03-25
Substrate processing apparatus with integrated top and edge cleaning unit Grant 7,641,405 - Fukutomi January 5, 2	2010-01-05
Bevel inspection apparatus for substrate processing Grant 7,641,406 - Nishimura , et al. January 5, 2	2010-01-05
Methods And Systems For Controlling Critical Dimensions In Track Lithography Tools App 20090275149 - Michaelson; Timothy ; et al.	2009-11-05
Substrate Processing Apparatus App 20090269936 - Tamada; Osamu ; et al.	2009-10-29
Substrate processing apparatus Grant 7,604,424 - Shigemori , et al. October 20, 2	2009-10-20
Integrated thermal unit having a shuttle with a temperature controlled surface Grant 7,601,934 - Quach , et al. October 13, 2	2009-10-13
Double Exposure Lithography Using Low Temperature Oxide And Uv Cure Process App 20090253078 - Bekiaris; Nikolaos ; et al.	2009-10-08
Method and system for determining object height Grant 7,567,885 - Herchen , et al. July 28, 2	2009-07-28
Apparatus For Supporting A Substrate During Semiconductor Processing Operations App 20090179366 - Herchen; Harald ; et al.	2009-07-16
Substrate Processing Apparatus And Substrate Processing Method Using The Same App 20090173364 - Hamada; Tetsuya ; et al.	2009-07-09
Substrate Treating Apparatus With Substrate Reordering App 20090165711 - Ogura; Hiroyuki ; et al.	2009-07-02
Substrate Treating Apparatus With Parallel Substrate Treatment Lines App 20090165712 - OGURA; Hiroyuki ; et al.	2009-07-02
Multi-story Substrate Treating Apparatus With Flexible Transport Mechanisms App 20090139450 - Ogura; Hiroyuki ; et al.	2009-06-04
Multi-line Substrate Treating Apparatus App 20090139833 - Ogura; Hiroyuki ; et al.	2009-06-04
Substrate Treating Apparatus With Inter-unit Buffers App 20090142162 - Ogura; Hiroyuki ; et al.	2009-06-04
Methods and systems for controlling critical dimensions in track lithography tools Grant 7,534,627 - Michaelson , et al. May 19, 2	2009-05-19
Substrate Cleaning And Processing Apparatus With Magnetically Controlled Spin Chuck Holding Pins App 20090120472 - Nishiyama; Koji ; et al.	2009-05-14
Temperature Measurement In A Substrate Processing Apparatus App 20090120362 - Hamada; Tetsuya	2009-05-14
Method And Apparatus For Providing Wafer Centering On A Track Lithography Tool App 20090110532 - Salek; Mohsen S.	2009-04-30
Method And System For Performing Electrostatic Chuck Clamping In Track Lithography Tools App 20090109595 - Herchen; Harald ; et al.	2009-04-30
Method And System For Chemically Enhanced Laser Trimming Of Substrate Edges App 20090107519 - Ishikawa; Tetsuya ; et al.	2009-04-30
Developing Apparatus App 20090103960 - Harumoto; Masahiko ; et al.	2009-04-23
Thermal processing apparatus, thermal processing method, and substrate processing apparatus Grant 7,522,823 - Fukumoto , et al. April 21, 2	2009-04-21
Wafer bevel particle detection Grant 7,521,915 - Herchen , et al. April 21, 2	2009-04-21
Method and system to measure flow velocity and volume Grant 7,517,469 - Herchen , et al. April 14, 2	2009-04-14
Apparatus For And Method Of Processing Substrate App 20090070946 - Tamada; Osamu ; et al.	2009-03-19
Multi-speed Substrate Processing Apparatus And Substrate Processing Method App 20090071940 - Miyagi; Tadashi ; et al.	2009-03-19
Substrate Processing Apparatus And Substrate Processing Method App 20090074402 - Miyagi; Tadashi ; et al.	2009-03-19
Substrate Processing Apparatus With Multi-speed Drying App 20090073394 - Miyagi; Tadashi ; et al.	2009-03-19
Method and apparatus for detecting substrate temperature in a track lithography tool Grant 7,500,781 - Herchen March 10, 2	2009-03-10
Substrate Transport Apparatus And Heat Treatment Apparatus App 20090060686 - Morita; Akihiko ; et al.	2009-03-05
Method And System For Controlling Bake Plate Temperature In A Semiconductor Processing Chamber App 20090060480 - Herchen; Harald	2009-03-05
Method and system for detection of wafer centering in a track lithography tool Grant 7,497,026 - Herchen , et al. March 3, 2	2009-03-03
Substrate processing apparatus and substrate processing method Grant 7,497,633 - Kaneyama , et al. March 3, 2	2009-03-03
Method and System for Determining Object Height App 20090055124 - Herchen; Harald ; et al.	2009-02-26
Zone Control Heater Plate For Track Lithography Systems App 20090032522 - Salinas; Martin Jeff ; et al.	2009-02-05
Substrate Cleaning Device And Substrate Processing Apparatus Including The Same App 20090025155 - Nishiyama; Koji ; et al.	2009-01-29
Bevel Inspection Apparatus For Substrate Processing App 20090027634 - Nishimura; Joichi ; et al.	2009-01-29
Method And Apparatus For Hmds Treatment Of Substrate Edges App 20090023297 - Salek; Mohsen	2009-01-22
Substrate Processing Apparatus And Substrate Processing Method App 20090014126 - Ohtani; Masami ; et al.	2009-01-15
Substrate Treating Apparatus App 20090000543 - Fukutomi; Yoshiteru ; et al.	2009-01-01
Method and System for Cooling a Bake Plate in a Track Lithography Tool App 20090001071 - Kulkarni; Mayur G.	2009-01-01
Coat/develop Module With Shared Dispense App 20080296316 - Ishikawa; Tetsuya ; et al.	2008-12-04
Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates Grant 7,460,972 - Somayaji , et al. December 2, 2	2008-12-02
First Detecting Sheet And First Thermometric System For Detecting And Measuring Temperature Of An Object Under Test, Second Detecting Sheet And Second Thermometric System For Detecting And Measuring Temperature Of A Dummy Substrate, And Heat Treatment Apparatus Using Same App 20080279250 - Kamei; Kenji	2008-11-13
Method and System for Detecting Substrate Temperature in a Track Lithography Tool App 20080267257 - Herchen; Harald	2008-10-30
Method To Cool Bake Plates In A Track Lithography Tool App 20080236787 - Herchen; Harald ; et al.	2008-10-02
Zone control heater plate for track lithography systems Grant 7,427,728 - Salinas , et al. September 23, 2	2008-09-23
Interlaced Rtd Sensor For Zone/average Temperature Sensing App 20080224817 - Vellore; Kim R. ; et al.	2008-09-18
Cluster Tool Architecture For Processing A Substrate App 20080223293 - Ishikawa; Tetsuya ; et al.	2008-09-18
Method and system for removal of films from peripheral portions of a substrate App 20080226830 - Miyagi; Tadashi ; et al.	2008-09-18
Substrate Processing Apparatus With High Throughput Development Units App 20080212049 - Fukutomi; Yoshiteru ; et al.	2008-09-04
Substrate Developing Method And Developing Apparatus App 20080203058 - Harumoto; Masahiko ; et al.	2008-08-28
Substrate Processing Apparatus With Integrated Cleaning Unit App 20080198341 - Fukutomi; Yoshiteru ; et al.	2008-08-21
Substrate Processing Apparatus With Integrated Top And Edge Cleaning Unit App 20080198342 - Fukutomi; Yoshiteru	2008-08-21
Substrate Processing Apparatus Including A Substrate Reversing Region App 20080196658 - Fukutomi; Yoshiteru ; et al.	2008-08-21
Method And System For Detection Of Wafer Centering In A Track Lithography Tool App 20080168673 - Herchen; Harald ; et al.	2008-07-17
Coat/develop module with shared dispense Grant 7,396,412 - Ishikawa , et al. July 8, 2	2008-07-08
Method And System For Bake Plate Heat Transfer Control In Track Lithography Tools App 20080160462 - Herchen; Harald ; et al.	2008-07-03
Method And System To Measure And Compensate For Substrate Warpage During Thermal Processing App 20080153182 - Herchen; Harald ; et al.	2008-06-26
Substrate For Temperature Measurement And Temperature Measuring System App 20080144695 - Hamada; Tetsuya	2008-06-19
Actively Chilled Substrate Transport Module App 20080145191 - Salinas; Martin Jeff ; et al.	2008-06-19
Developer endpoint detection in a track lithography system Grant 7,371,022 - Herchen May 13, 2	2008-05-13
Method To Cool A Bake Plate Using An Actively Chilled Transfer Shuttle App 20080099181 - Ramanan; Natarajan ; et al.	2008-05-01
Methods And Systems For Performing Real-time Wireless Temperature Measurement For Semiconductor Substrates App 20080097714 - Somayaji; Sharathchandra ; et al.	2008-04-24
Method and apparatus for rinsing a substrate during lithographic development processing App 20080090185 - Harumoto; Masahiko ; et al.	2008-04-17
Method and system for performing development processing during photolithography App 20080090186 - Harumoto; Masahiko ; et al.	2008-04-17
Cluster tool architecture for processing a substrate Grant 7,357,842 - Ishikawa , et al. April 15, 2	2008-04-15
Method And Apparatus For Dispense Of Chemical Vapor In A Track Lithography Tool App 20080069954 - Lin; Y. Sean	2008-03-20
Integrated Thermal Unit Having A Shuttle With Two-axis Movement App 20080047950 - Quach; David H. ; et al.	2008-02-28
Methods And Systems For Performing Immersion Processing During Lithography App 20080050679 - Salek; Mohsen S. ; et al.	2008-02-28
Method And Apparatus For Monitoring And Control Of Suck Back Level In A Photoresist Dispense System App 20080035666 - Porras; Erica R. ; et al.	2008-02-14
Methods And Systems For Controlling Critical Dimensions In Track Lithography Tools App 20080032426 - Michaelson; Timothy ; et al.	2008-02-07
Wafer backside particle removal for track tools App 20080032491 - Herchen; Harald	2008-02-07
Integrated Thermal Unit Having A Shuttle With A Temperature Controlled Surface App 20080023656 - Quach; David H. ; et al.	2008-01-31
Bake Plate Having Engageable Thermal Mass App 20070295276 - Quach; David H. ; et al.	2007-12-27
Integrated thermal unit having a shuttle with two-axis movement Grant 7,297,906 - Quach , et al. November 20, 2	2007-11-20
Integrated thermal unit having laterally adjacent bake and chill plates on different planes Grant 7,288,746 - Quach , et al. October 30, 2	2007-10-30
Integrated thermal unit having a shuttle with a temperature controlled surface Grant 7,282,675 - Quach , et al. October 16, 2	2007-10-16
Bake plate having engageable thermal mass Grant 7,274,005 - Quach , et al. September 25, 2	2007-09-25
Coat/develop module with independent stations Grant 7,255,747 - Ishikawa , et al. August 14, 2	2007-08-14

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