Smith; Adlai

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smith; Adlai.The latest application filed is for "method and apparatus for self-referenced wafer stage positional error mapping".

Company Profile

0.14.13

Smith; Adlai - San Diego CA
Smith; Adlai - Escondido CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,871,004 - Smith , et al. January 18, 2	2011-01-18
Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attribute Grant 7,442,951 - Smith October 28, 2	2008-10-28
Method And Apparatus For Self-Referenced Wafer Stage Positional Error Mapping App 20070279607 - Smith; Adlai ; et al.	2007-12-06
Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,271,905 - Smith , et al. September 18, 2	2007-09-18
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion Grant 7,262,398 - Smith August 28, 2	2007-08-28
Method and Apparatus for Self-Referenced Dynamic Step and Scan Intra-Field Scanning Distortion App 20070177132 - Smith; Adlai	2007-08-02
Reference wafer and process for manufacturing same Grant 7,160,657 - Smith , et al. January 9, 2	2007-01-09
Method and apparatus for self-referenced projection lens distortion mapping Grant 7,099,011 - McArthur , et al. August 29, 2	2006-08-29
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion Grant 6,975,382 - Smith December 13, 2	2005-12-13
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion App 20050219516 - Smith, Adlai	2005-10-06
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion Grant 6,906,780 - Smith June 14, 2	2005-06-14
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion Grant 6,906,303 - Smith June 14, 2	2005-06-14
Method and apparatus for self-referenced projection lens distortion mapping App 20050117154 - McArthur, Bruce ; et al.	2005-06-02
Method and apparatus for proper ordering of registration data Grant 6,899,982 - McArthur , et al. May 31, 2	2005-05-31
Method and apparatus for proper ordering of registration data Grant 6,833,221 - McArthur , et al. December 21, 2	2004-12-21
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion App 20040233402 - Smith, Adlai	2004-11-25
Method and apparatus for proper ordering of registration data App 20040197678 - McArthur, Bruce ; et al.	2004-10-07
Method and apparatus for self-referenced wafer stage positional error mapping App 20040162687 - Smith, Adlai ; et al.	2004-08-19
Reference wafer and process for manufacturing same App 20040157142 - Smith, Adlai ; et al.	2004-08-12
Method and apparatus for self-referenced wafer stage positional error mapping Grant 6,734,971 - Smith , et al. May 11, 2	2004-05-11
Reference wafer and process for manufacturing same Grant 6,699,627 - Smith , et al. March 2, 2	2004-03-02
Method and apparatus for self-referenced projection lens distortion mapping App 20030202174 - Smith, Adlai ; et al.	2003-10-30
Method and apparatus for self-referenced projection lens distortion mapping Grant 6,573,986 - Smith , et al. June 3, 2	2003-06-03
Method and apparatus for proper ordering of registration data App 20020140917 - McArthur, Bruce ; et al.	2002-10-03
Method and apparatus for self-referenced wafer stage positional error mapping App 20020105649 - Smith, Adlai ; et al.	2002-08-08
Reference wafer and process for manufacturing same App 20020102482 - Smith, Adlai ; et al.	2002-08-01
Method and apparatus for self-referenced projection lens distortion mapping App 20020071112 - Smith, Adlai ; et al.	2002-06-13

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