| Patent | Date |
|---|
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
Grant 10,962,890 - Simons , et al. March 30, 2 | 2021-03-30 |
Positioning Device, Lithographic Apparatus, Method for Compensating a Balance Mass Torque and Device Manufacturing Method
App 20200363732 - SIMONS; Wilhelmus Franciscus Johannes ; et al. | 2020-11-19 |
Object holder and lithographic apparatus
Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Lithographic apparatus and device manufacturing method
Grant 10,268,127 - Riepen , et al. | 2019-04-23 |
Projection system
Grant 10,248,027 - Butler , et al. | 2019-04-02 |
Lithographic apparatus and a device manufacturing method
Grant 10,222,707 - Polet , et al. | 2019-03-05 |
Object Holder And Lithographic Apparatus
App 20180267412 - LAURENT; Thibault Simon Mathieu ; et al. | 2018-09-20 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
Grant 9,927,721 - Butler , et al. March 27, 2 | 2018-03-27 |
Object holder and lithographic apparatus
Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Object Holder And Lithographic Apparatus
App 20170315454 - LAURENT; Thibault Simon Mathieu ; et al. | 2017-11-02 |
Object holder and lithographic apparatus
Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20170242348 - RIEPEN; Michel ; et al. | 2017-08-24 |
Object Positioning System, Control System, Lithographic Apparatus, Object Positioning Method And Device Manufacturing Method
App 20170199468 - BUTLER; Hans ; et al. | 2017-07-13 |
Lithographic apparatus and device manufacturing method
Grant 9,645,506 - Riepen , et al. May 9, 2 | 2017-05-09 |
Lithographic Apparatus And A Device Manufacturing Method
App 20160179015 - POLET; Theodorus Wilhelmus ; et al. | 2016-06-23 |
Lithographic apparatus and a device manufacturing method
Grant 9,274,436 - Polet , et al. March 1, 2 | 2016-03-01 |
Object Holder And Lithographic Apparatus
App 20150131064 - Laurent; Thibault Simon Mathieu ; et al. | 2015-05-14 |
Lithographic apparatus and device manufacturing method
Grant 8,913,228 - Wijckmans , et al. December 16, 2 | 2014-12-16 |
Position control system, lithographic apparatus, and method to control a position of a movable object
Grant 8,825,182 - Simons , et al. September 2, 2 | 2014-09-02 |
Lithographic Apparatus And Device Manufacturing Method
App 20140098353 - RIEPEN; Michel ; et al. | 2014-04-10 |
Lithographic apparatus and device manufacturing method
Grant 8,681,308 - Berkvens , et al. March 25, 2 | 2014-03-25 |
Lithographic apparatus and device manufacturing method
Grant 8,634,053 - Riepen , et al. January 21, 2 | 2014-01-21 |
Fluid handling structure, lithographic apparatus and device manufacturing method
Grant 8,472,003 - Patel , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And A Device Manufacturing Method
App 20130149649 - POLET; Theodorus Wilhelmus ; et al. | 2013-06-13 |
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
Grant 8,452,442 - Heertjes , et al. May 28, 2 | 2013-05-28 |
Immersion lithographic apparatus and device manufacturing method
Grant 8,259,283 - Direcks , et al. September 4, 2 | 2012-09-04 |
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
Grant 8,135,488 - Heertjes , et al. March 13, 2 | 2012-03-13 |
Position Control System, Lithographic Apparatus, And Method To Control A Position Of A Movable Object
App 20120019801 - SIMONS; Wilhelmus Franciscus Johannes ; et al. | 2012-01-26 |
Lithographic apparatus, stage system and stage control method
Grant 7,948,609 - Schneiders , et al. May 24, 2 | 2011-05-24 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method
App 20110005603 - Patel; Hrishikesh ; et al. | 2011-01-13 |
Lithographic apparatus and device manufacturing method
Grant 7,710,540 - Loopstra , et al. May 4, 2 | 2010-05-04 |
Lithographic apparatus and device manufacturing method
Grant 7,630,059 - Butler , et al. December 8, 2 | 2009-12-08 |
Immersion Lithographic Apparatus And Device Manufacturing Method
App 20090237632 - Direcks; Daniel Jozef Maria ; et al. | 2009-09-24 |
Lithographic Apparatus, Stage System and Stage Control Method
App 20090231566 - SCHNEIDERS; Mauritius Gerardus Elisabeth ; et al. | 2009-09-17 |
Lithographic apparatus having parts with a coated film adhered thereto
Grant 7,561,250 - Liebregts , et al. July 14, 2 | 2009-07-14 |
Lithographic apparatus having parts with a coated film adhered thereto
App 20080316441 - Liebregts; Paulus Martinus Maria ; et al. | 2008-12-25 |
Lithographic apparatus and device manufacturing method
App 20080246936 - Loopstra; Erik Roelof ; et al. | 2008-10-09 |
Lithographic apparatus and device manufacturing method
App 20080212046 - Riepen; Michel ; et al. | 2008-09-04 |
Lithographic apparatus and device manufacturing method
App 20070242245 - Wijckmans; Maurice ; et al. | 2007-10-18 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
Grant 7,205,741 - Simons , et al. April 17, 2 | 2007-04-17 |
Planar motor initialization method, planar motro, lithographic apparatus and device manufacturing method
App 20050285550 - Simons, Wilhelmus Franciscus Johannes ; et al. | 2005-12-29 |
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