Simon; Klaus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Simon; Klaus.The latest application filed is for "lithographic apparatus and device manufacturing method".
Company Profile
17.106.91
- Simon; Klaus - Eindhoven NL
- Simon; Klaus - Madison WI
- Simon; Klaus - Eichenau DT
Patent Activity
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
| Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ; et al. | 2020-07-16 |
| Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
| Lithographic apparatus and device manufacturing method Grant 10,656,538 - Streefkerk , et al. | 2020-05-19 |
| Lithographic apparatus and device manufacturing method Grant 10,620,545 - Lof , et al. | 2020-04-14 |
| Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
| Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ; et al. | 2019-10-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20190265596 - LOF; Joeri ; et al. | 2019-08-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ; et al. | 2019-08-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ; et al. | 2019-07-11 |
| Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20190086821 - STREEFKERK; Bob ; et al. | 2019-03-21 |
| Lithographic apparatus and device manufacturing method Grant 10,222,706 - Lof , et al. | 2019-03-05 |
| Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
| Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
| Lithographic apparatus and device manufacturing method Grant 10,151,989 - Streefkerk , et al. Dec | 2018-12-11 |
| Imprint lithography Grant 10,025,206 - Simon July 17, 2 | 2018-07-17 |
| Imprint Lithography App 20180095361 - SIMON; Klaus | 2018-04-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ; et al. | 2018-02-15 |
| Imprint lithography Grant 9,864,271 - Simon January 9, 2 | 2018-01-09 |
| Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ; et al. | 2017-11-30 |
| Lithographic Apparatus And Device Manufacturing Method App 20170329240 - STREEFKERK; Bob ; et al. | 2017-11-16 |
| Imprint Lithography App 20170329218 - SIMON; Klaus | 2017-11-16 |
| Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20170293231 - Vogel; Herman ; et al. | 2017-10-12 |
| Imprint lithography Grant 9,778,563 - Simon October 3, 2 | 2017-10-03 |
| Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
| Lithographic apparatus and device manufacturing method Grant 9,733,575 - Streefkerk , et al. August 15, 2 | 2017-08-15 |
| Immersion photolithography system and method using microchannel nozzles Grant 9,715,178 - Vogel , et al. July 25, 2 | 2017-07-25 |
| Immersion photolithography system and method using microchannel nozzles Grant 9,709,899 - Vogel , et al. July 18, 2 | 2017-07-18 |
| Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ; et al. | 2017-04-13 |
| Imprint lithography Grant 9,610,727 - Kruijt-Stegeman , et al. April 4, 2 | 2017-04-04 |
| Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ; et al. | 2017-01-12 |
| Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
| Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
| Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ; et al. | 2016-10-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ; et al. | 2016-09-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20160282726 - STREEFKERK; Bob ; et al. | 2016-09-29 |
| Lithographic apparatus and device manufacturing method Grant 9,383,655 - Streefkerk , et al. July 5, 2 | 2016-07-05 |
| Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20160062248 - LOF; Joeri ; et al. | 2016-03-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20150362844 - LOF; Joeri ; et al. | 2015-12-17 |
| Lithographic apparatus and device manufacturing method Grant 9,195,153 - Lof , et al. November 24, 2 | 2015-11-24 |
| Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
| Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ; et al. | 2015-09-17 |
| Lithographic apparatus and method involving a fluid inlet and a fluid outlet Grant 9,091,940 - Derksen , et al. July 28, 2 | 2015-07-28 |
| Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ; et al. | 2015-06-18 |
| Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20150070668 - STREEFKERK; Bob ; et al. | 2015-03-12 |
| Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
| Lithographic apparatus and device manufacturing method Grant 8,913,223 - Streefkerk , et al. December 16, 2 | 2014-12-16 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20140333910 - Vogel; Herman ; et al. | 2014-11-13 |
| Imprint Lithography App 20140291879 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2014-10-02 |
| Lithographic apparatus and device manufacturing method Grant 8,823,920 - Streefkerk , et al. September 2, 2 | 2014-09-02 |
| Immersion photolithography system and method using microchannel nozzles Grant 8,817,230 - Vogel , et al. August 26, 2 | 2014-08-26 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20140233003 - VOGEL; Herman ; et al. | 2014-08-21 |
| Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure Grant 8,797,503 - Lof , et al. August 5, 2 | 2014-08-05 |
| Imprint lithography Grant 8,753,557 - Kruijt-Stegeman , et al. June 17, 2 | 2014-06-17 |
| Immersion photolithography system and method using microchannel nozzles Grant 8,730,450 - Vogel , et al. May 20, 2 | 2014-05-20 |
| Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method Grant 8,711,323 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
| Immersion photolithography system and method using microchannel nozzles Grant 8,670,105 - Vogel , et al. March 11, 2 | 2014-03-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20130301017 - Derksen; Antonius Theodorus Anna Maria ; et al. | 2013-11-14 |
| Imprint lithography Grant 8,571,318 - Simon October 29, 2 | 2013-10-29 |
| Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ; et al. | 2013-09-26 |
| Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
| Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20130128256 - LOF; Joeri ; et al. | 2013-05-23 |
| Lithographic apparatus and device manufacturing method Grant 8,344,341 - Lof , et al. January 1, 2 | 2013-01-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ; et al. | 2012-11-01 |
| Lithographic apparatus and device manufacturing method Grant 8,208,120 - Lof , et al. June 26, 2 | 2012-06-26 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20120140200 - Vogel; Herman ; et al. | 2012-06-07 |
| Imprint Lithography App 20120133076 - SIMON; Klaus | 2012-05-31 |
| Imprint Lithography App 20120091629 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2012-04-19 |
| Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
| Imprint lithography Grant 8,131,078 - Simon March 6, 2 | 2012-03-06 |
| Lithographic Apparatus And Device Manufacturing Method App 20120044468 - STREEFKERK; Bob ; et al. | 2012-02-23 |
| Imprint lithography Grant 8,100,684 - Kruijt-Stegeman , et al. January 24, 2 | 2012-01-24 |
| Imprint Lithography App 20110283937 - SIMON; Klaus | 2011-11-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ; et al. | 2011-11-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ; et al. | 2011-11-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ; et al. | 2011-11-17 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20110273680 - Vogel; Herman ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ; et al. | 2011-11-10 |
| Immersion Photolithography System And Method Using Microchannel Nozzles App 20110273676 - VOGEL; Herman ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110228241 - LOF; Joeri ; et al. | 2011-09-22 |
| Imprint lithography Grant 8,011,915 - Simon September 6, 2 | 2011-09-06 |
| Immersion photolithography system and method using microchannel nozzles Grant 8,004,649 - Vogel , et al. August 23, 2 | 2011-08-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ; et al. | 2011-07-28 |
| Immersion lithographic apparatus and device manufacturing method with gas supply Grant 7,982,850 - Lof , et al. July 19, 2 | 2011-07-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ; et al. | 2011-07-14 |
| Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20110027721 - LOF; JOERI ; et al. | 2011-02-03 |
| Imprint lithography Grant 7,878,791 - Simon , et al. February 1, 2 | 2011-02-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ; et al. | 2011-01-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ; et al. | 2011-01-06 |
| Lithographic Apparatus And Device Manufacturing Method App 20100302519 - STREEFKERK; Bob ; et al. | 2010-12-02 |
| Lithographic apparatus and device manufacturing method Grant 7,795,603 - Lof , et al. September 14, 2 | 2010-09-14 |
| Lithographic apparatus and device manufacturing method Grant 7,738,074 - Streefkerk , et al. June 15, 2 | 2010-06-15 |
| Printing apparatus and device manufacturing method Grant 7,730,834 - Simon June 8, 2 | 2010-06-08 |
| Printing apparatus and device manufacturing method Grant 7,698,999 - Simon April 20, 2 | 2010-04-20 |
| Imprint lithography Grant 7,676,088 - Simon March 9, 2 | 2010-03-09 |
| Lithographic apparatus and method Grant 7,675,606 - Van Den Brink , et al. March 9, 2 | 2010-03-09 |
| Imprint Lithography App 20100050893 - SIMON; Klaus | 2010-03-04 |
| Imprint lithography Grant 7,636,475 - Simon December 22, 2 | 2009-12-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ; et al. | 2009-11-26 |
| Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
| Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
| Imprint Lithography App 20090212462 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2009-08-27 |
| Radiation exposure apparatus comprising a gas flushing system Grant 7,570,342 - Simon , et al. August 4, 2 | 2009-08-04 |
| Lithographic apparatus and device manufacturing method App 20090184270 - Lof; Joeri ; et al. | 2009-07-23 |
| Imprint lithography Grant 7,517,211 - Kruijt-Stegeman , et al. April 14, 2 | 2009-04-14 |
| Device manufacturing method and device Grant 7,507,675 - Zuilhof , et al. March 24, 2 | 2009-03-24 |
| Lithographic apparatus and device manufacturing method Grant 7,482,611 - Lof , et al. January 27, 2 | 2009-01-27 |
| Lithographic apparatus and device manufacturing method App 20090002652 - Lof; Joeri ; et al. | 2009-01-01 |
| Lithographic apparatus and device manufacturing method App 20080218726 - Lof; Joeri ; et al. | 2008-09-11 |
| Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ; et al. | 2008-09-11 |
| Immersion photolithography system and method using microchannel nozzles Grant 7,411,650 - Vogel , et al. August 12, 2 | 2008-08-12 |
| Lithographic apparatus and device manufacturing method Grant 7,408,624 - Van De Moosdijk , et al. August 5, 2 | 2008-08-05 |
| Immersion Photolithography System and Method Using Microchannel Nozzles App 20080180645 - Vogel; Herman ; et al. | 2008-07-31 |
| Lithographic projection apparatus Grant 7,388,648 - Lof , et al. June 17, 2 | 2008-06-17 |
| Lithographic apparatus and device manufacturing method Grant 7,372,541 - Lof , et al. May 13, 2 | 2008-05-13 |
| Lithographic apparatus and device manufacturing method Grant 7,359,030 - Simon , et al. April 15, 2 | 2008-04-15 |
| Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ; et al. | 2007-11-22 |
| Lithographic apparatus and method App 20070258080 - Brink; Enno Van Den ; et al. | 2007-11-08 |
| Device manufacturing method and device App 20070178707 - Zuilhof; Johannes Teinus ; et al. | 2007-08-02 |
| Imprint lithography App 20070141191 - Kruijt-Stegeman; Yvonne Wendela ; et al. | 2007-06-21 |
| Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ; et al. | 2007-06-14 |
| Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ; et al. | 2007-06-14 |
| Lithographic apparatus and device manufacturing method App 20070132972 - Streefkerk; Bob ; et al. | 2007-06-14 |
| Imprint lithography App 20070102844 - Simon; Klaus ; et al. | 2007-05-10 |
| Imprint lithography App 20070102838 - Simon; Klaus | 2007-05-10 |
| Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
| Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
| Lithographic apparatus and device manufacturing method with substrate measurement not through liquid Grant 7,193,232 - Lof , et al. March 20, 2 | 2007-03-20 |
| Lithographic apparatus and device manufacturing method App 20070040133 - Lof; Joeri ; et al. | 2007-02-22 |
| Lithographic apparatus and device manufacturing method App 20070002303 - Van De Moosdijk; Michael Josephus Evert ; et al. | 2007-01-04 |
| Lithographic apparatus and device manufacturing method App 20060232756 - Lof; Joeri ; et al. | 2006-10-19 |
| Lithographic apparatus and device manufacturing method Grant 7,081,943 - Lof , et al. July 25, 2 | 2006-07-25 |
| Imprint lithography App 20060159305 - Simon; Klaus | 2006-07-20 |
| Radiation exposure apparatus comprising a gas flushing system App 20060146300 - Simon; Klaus ; et al. | 2006-07-06 |
| Imprint lithography App 20060137555 - Simon; Klaus | 2006-06-29 |
| Radiation exposure apparatus comprising a gas flushing system App 20060119811 - Simon; Klaus | 2006-06-08 |
| Lithographic apparatus and device manufacturing method Grant 7,038,760 - Mulkens , et al. May 2, 2 | 2006-05-02 |
| Lithographic apparatus and device manufacturing method App 20060023189 - Lof; Joeri ; et al. | 2006-02-02 |
| Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ; et al. | 2005-12-01 |
| Lithographic apparatus and device manufacturing method Grant 6,952,253 - Lof , et al. October 4, 2 | 2005-10-04 |
| Printing apparatus and device manufacturing method App 20050211161 - Simon, Klaus | 2005-09-29 |
| Printing apparatus and device manufacturing method App 20050193944 - Simon, Klaus | 2005-09-08 |
| Immersion photolithography system and method using microchannel nozzles App 20050168713 - Vogel, Herman ; et al. | 2005-08-04 |
| Immersion photolithography system and method using microchannel nozzles Grant 6,867,844 - Vogel , et al. March 15, 2 | 2005-03-15 |
| Lithographic apparatus and device manufacturing method App 20050046813 - Streefkerk, Bob ; et al. | 2005-03-03 |
| Lithographic apparatus and device manufacturing method App 20050018156 - Mulkens, Johannes Catharinus Hubertus ; et al. | 2005-01-27 |
| Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices Grant 6,845,145 - Selzer , et al. January 18, 2 | 2005-01-18 |
| Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ; et al. | 2005-01-13 |
| Immersion photolithography system and method using microchannel nozzles App 20040257544 - Vogel, Herman ; et al. | 2004-12-23 |
| Lithographic apparatus and device manufacturing method App 20040207824 - Lof, Joeri ; et al. | 2004-10-21 |
| Lithographic apparatus and device manufacturing method App 20040165159 - Lof, Joeri ; et al. | 2004-08-26 |
| Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ; et al. | 2004-08-19 |
| Lithographic apparatus and device manufacturing method App 20040135099 - Simon, Klaus ; et al. | 2004-07-15 |
| Lithographic apparatus and device manufacturing method App 20040136494 - Lof, Joeri ; et al. | 2004-07-15 |
| Device manufacturing method, device manufactured thereby and computer programs App 20030213921 - Van De Moosdijk, Michael Josephus Evert ; et al. | 2003-11-20 |
| Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices App 20010026606 - Rauch, Franz Ludwig ; et al. | 2001-10-04 |
| Electromagnetic-suspension vehicle system Grant 3,924,538 - Breitling , et al. December 9, 1 | 1975-12-09 |
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