SHONO; Eric Kihara
Patent Applications and Registrations
Patent applications and USPTO patent grants for SHONO; Eric Kihara.The latest application filed is for "process system with variable flow valve".
- SHONO; Eric Kihara - San Mateo CA
| Patent | Date |
|---|---|
| Process System With Variable Flow Valve App 20220223383 - SHONO; Eric Kihara ; et al. | 2022-07-14 |
| Novel And Effective Homogenize Flow Mixing Design App 20220165547 - PANDEY; Vishwas Kumar ; et al. | 2022-05-26 |
| Half-angle Nozzle App 20220081767 - SHONO; Eric Kihara | 2022-03-17 |
| Half-angle nozzle Grant 11,220,746 - Shono January 11, 2 | 2022-01-11 |
| Gas Injector With Baffle App 20210322934 - PANDEY; Vishwas Kumar ; et al. | 2021-10-21 |
| Gas supply member with baffle Grant 11,124,878 - Shah , et al. September 21, 2 | 2021-09-21 |
| Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20210272776 - PANDEY; Vishwas Kumar ; et al. | 2021-09-02 |
| Gas Supply Member With Baffle App 20210262093 - SHAH; Kartik ; et al. | 2021-08-26 |
| Gas injector with baffle Grant 11,077,410 - Pandey , et al. August 3, 2 | 2021-08-03 |
| Argon addition to remote plasma oxidation Grant 11,081,340 - Lo , et al. August 3, 2 | 2021-08-03 |
| Chamber inlet Grant D924,825 - Shono , et al. July 13, 2 | 2021-07-13 |
| Dogbone inlet cone profile for remote plasma oxidation chamber Grant 11,049,696 - Pandey , et al. June 29, 2 | 2021-06-29 |
| Side Inject Designs For Improved Radical Concentrations App 20210074505 - SHONO; Eric Kihara ; et al. | 2021-03-11 |
| Half-angle Nozzle App 20200407844 - SHONO; Eric Kihara | 2020-12-31 |
| Side inject designs for improved radical concentrations Grant 10,847,337 - Shono , et al. November 24, 2 | 2020-11-24 |
| Half-angle nozzle Grant 10,752,991 - Shono A | 2020-08-25 |
| Argon Addition To Remote Plasma Oxidation App 20200251331 - Kind Code | 2020-08-06 |
| Asymmetric Injection For Better Wafer Uniformity App 20200240014 - Shono; Eric Kihara ; et al. | 2020-07-30 |
| Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20200219703 - PANDEY; Vishwas Kumar ; et al. | 2020-07-09 |
| Method And Apparatus For Supplying Improved Gas Flow To A Processing Volume Of A Processing Chamber App 20200199748 - PANDEY; Vishwas Kumar ; et al. | 2020-06-25 |
| Plasma source liner Grant D882,536 - Shono | 2020-04-28 |
| Argon addition to remote plasma oxidation Grant 10,636,650 - Lo , et al. | 2020-04-28 |
| Dogbone inlet cone profile for remote plasma oxidation chamber Grant 10,636,626 - Pandey , et al. | 2020-04-28 |
| Plasma connector liner Grant D875,054 - Shono Feb | 2020-02-11 |
| Plasma connector liner Grant D875,055 - Shono Feb | 2020-02-11 |
| Plasma connector liner Grant D875,053 - Shono Feb | 2020-02-11 |
| Method And Apparatus For Providing Radical Species To A Processing Volume Of A Processing Chamber App 20190295822 - OLSEN; Christopher S. ; et al. | 2019-09-26 |
| Side Inject Designs For Improved Radical Concentrations App 20190228942 - SHONO; Eric Kihara ; et al. | 2019-07-25 |
| Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20190228951 - PANDEY; Vishwas Kumar ; et al. | 2019-07-25 |
| Argon Addition To Remote Plasma Oxidation App 20190221427 - LO; Hansel ; et al. | 2019-07-18 |
| Gas Injector With Baffle App 20190105614 - PANDEY; Vishwas Kumar ; et al. | 2019-04-11 |
| Plasma chamber liner Grant D842,259 - Shono | 2019-03-05 |
| Gas Supply Member With Baffle App 20190032216 - SHAH; Kartik ; et al. | 2019-01-31 |
| Plasma chamber liner Grant D838,681 - Shono Ja | 2019-01-22 |
| Plasma chamber liner Grant D837,754 - Shono J | 2019-01-08 |
| Remote Plasma Oxidation Chamber App 20180347045 - OLSEN; Christopher S. ; et al. | 2018-12-06 |
| Half-angle Nozzle App 20180223426 - SHONO; Eric Kihara | 2018-08-09 |
| Plasma feedthrough flange Grant D818,447 - Shono May 22, 2 | 2018-05-22 |
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