| Patent | Date |
|---|
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 11,442,357 - Maeda , et al. September 13, 2 | 2022-09-13 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,435,662 - Ohkubo , et al. September 6, 2 | 2022-09-06 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20220214608 - SHISHIDO; Hiroaki ; et al. | 2022-07-07 |
Chirality Detection Device, Chirality Detection Method, Separation Device, Separation Method, And Chiral Substance Device
App 20220214308 - TOGAWA; Yoshihiko ; et al. | 2022-07-07 |
Mask Blank, Transfer Mask, And Method Of Manufacturing Semiconductor Device
App 20220206381 - TANIGUCHI; Kazutake ; et al. | 2022-06-30 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20220179300 - SHISHIDO; Hiroaki ; et al. | 2022-06-09 |
Mask Blank, Method For Manufacturing Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20220163880 - NOZAWA; Osamu ; et al. | 2022-05-26 |
Mask Blank, Phase Shift Mask, Method Of Manufacturing Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20220128898 - MAEDA; Hitoshi ; et al. | 2022-04-28 |
Mask blank, transfer mask, and method of manufacturing semiconductor device
Grant 11,314,162 - Taniguchi , et al. April 26, 2 | 2022-04-26 |
Mask blank, phase shift mask, and method of manufacturing semiconductor device
Grant 11,314,161 - Shishido , et al. April 26, 2 | 2022-04-26 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,281,089 - Nozawa , et al. March 22, 2 | 2022-03-22 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,231,645 - Shishido , et al. January 25, 2 | 2022-01-25 |
Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device
Grant 11,226,549 - Nozawa , et al. January 18, 2 | 2022-01-18 |
Mask Blank, Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20210373432 - SHISHIDO; Hiroaki | 2021-12-02 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20210364910 - OHKUBO; Ryo ; et al. | 2021-11-25 |
Mask Blank, Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20210286254 - HASHIMOTO; Masahiro ; et al. | 2021-09-16 |
Mask blank, phase shift mask and method for manufacturing semiconductor device
Grant 11,119,399 - Matsumoto , et al. September 14, 2 | 2021-09-14 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,119,400 - Ohkubo , et al. September 14, 2 | 2021-09-14 |
Mask blank, transfer mask, and method for manufacturing semiconductor device
Grant 11,112,690 - Shishido September 7, 2 | 2021-09-07 |
Mask Blank, Phase-shift Mask, And Semiconductor Device Manufacturing Method
App 20210208497 - MAEDA; Hitoshi ; et al. | 2021-07-08 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 11,054,735 - Kajiwara , et al. July 6, 2 | 2021-07-06 |
Mask blank, phase shift mask and method for manufacturing semiconductor device
Grant 11,048,160 - Hashimoto , et al. June 29, 2 | 2021-06-29 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20210149294 - NOZAWA; Osamu ; et al. | 2021-05-20 |
Mask Blank, Phase Shift Mask And Method For Producing Semiconductor Device
App 20210149293 - HASHIMOTO; Masahiro ; et al. | 2021-05-20 |
Mask Blank, Transfer Mask, And Method Of Manufacturing Semiconductor Device
App 20210141305 - TANIGUCHI; Kazutake ; et al. | 2021-05-13 |
Mask Blank, Phase-shift Mask, And Semiconductor Device Manufacturing Method
App 20210132488 - SHISHIDO; Hiroaki ; et al. | 2021-05-06 |
Mask Blank, Method For Producing Transfer Mask, And Method For Producing Semiconductor Device
App 20210109436 - OHKUBO; Ryo ; et al. | 2021-04-15 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,942,441 - Nozawa , et al. March 9, 2 | 2021-03-09 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10,942,442 - Nozawa , et al. March 9, 2 | 2021-03-09 |
Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method
Grant 10,935,881 - Kajiwara , et al. March 2, 2 | 2021-03-02 |
Mask Blank, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20210048740 - SHISHIDO; Hiroaki ; et al. | 2021-02-18 |
Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,915,016 - Nozawa , et al. February 9, 2 | 2021-02-09 |
Mask Blank, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20200379338 - SHISHIDO; Hiroaki ; et al. | 2020-12-03 |
Mask Blank, Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20200285144 - MAEDA; Hitoshi ; et al. | 2020-09-10 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,712,655 - Shishido , et al. | 2020-07-14 |
Mask blank having a resist layer, method for manufacturing mask blank having resist layer, and method for manufacturing transfer mask
Grant 10,712,652 - Hiromatsu , et al. | 2020-07-14 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20200150524 - NOZAWA; Osamu ; et al. | 2020-05-14 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,606,164 - Nozawa , et al. | 2020-03-31 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20200064725 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Thereof, And Method For Manufacturing Semiconductor Device
App 20200064726 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask Blank, Phase-shift Mask, And Method Of Manufacturing Semiconductor Device
App 20200064727 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,571,797 - Nozawa , et al. Feb | 2020-02-25 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,551,734 - Shishido , et al. Fe | 2020-02-04 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20200033718 - NOZAWA; Osamu ; et al. | 2020-01-30 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10,539,866 - Nozawa , et al. Ja | 2020-01-21 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,527,931 - Nozawa , et al. J | 2020-01-07 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10495966 - | 2019-12-03 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,481,486 - Nozawa , et al. Nov | 2019-11-19 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190317394 - SHISHIDO; Hiroaki ; et al. | 2019-10-17 |
Mask blank, phase-shift mask and method for manufacturing semiconductor device
Grant 10,444,620 - Matsumoto , et al. Oc | 2019-10-15 |
Mask Blank, Phase Shift Mask, Method Of Manufacturing Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20190302604 - HORIGOME; Yasutaka ; et al. | 2019-10-03 |
Mask blank, transfer mask and methods of manufacturing the same
Grant 10,365,555 - Shishido , et al. July 30, 2 | 2019-07-30 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,365,556 - Shishido , et al. July 30, 2 | 2019-07-30 |
Mask Blank, Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190204728 - SHISHIDO; Hiroaki | 2019-07-04 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190187550 - Shishido; Hiroaki ; et al. | 2019-06-20 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190163047 - KAJIWARA; Takenori ; et al. | 2019-05-30 |
Mask Blank, Phase-shift Mask, And Method Of Manufacturing Semiconductor Device
App 20190146327 - NOZAWA; Osamu ; et al. | 2019-05-16 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,261,409 - Shishido , et al. | 2019-04-16 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190064651 - Shishido; Hiroaki ; et al. | 2019-02-28 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190040516 - OHKUBO; Ryo ; et al. | 2019-02-07 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190018312 - NOZAWA; Osamu ; et al. | 2019-01-17 |
Mask blank, phase-shift mask, method of manufacturing mask blank, method of manufacturing phase-shift mask and method of manufacturing semiconductor device
Grant 10,180,622 - Shishido , et al. Ja | 2019-01-15 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190004419 - NOZAWA; Osamu ; et al. | 2019-01-03 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,146,123 - Shishido , et al. De | 2018-12-04 |
Mask Blank Having Resist Layer, Method For Manufacturing Mask Blank Having Resist Layer, And Method For Manufacturing Transfer Mask
App 20180335693 - HIROMATSU; Takahiro ; et al. | 2018-11-22 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,114,281 - Nozawa , et al. October 30, 2 | 2018-10-30 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180299767 - NOZAWA; Osamu ; et al. | 2018-10-18 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,101,650 - Nozawa , et al. October 16, 2 | 2018-10-16 |
Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device
Grant 10,088,744 - Shishido , et al. October 2, 2 | 2018-10-02 |
Mask Blank, Phase Shift Mask And Method For Manufacturing Semiconductor Device
App 20180252995 - MATSUMOTO; Atsushi ; et al. | 2018-09-06 |
Mask Blank, Phase Shift Mask, Phase Shift Mask Manufacturing Method, And Semiconductor Device Manufacturing Method
App 20180210331 - KAJIWARA; Takenori ; et al. | 2018-07-26 |
Mask Blank, Phase-shift Mask And Method For Manufacturing Semiconductor Device
App 20180180987 - MATSUMOTO; Atsushi ; et al. | 2018-06-28 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180149961 - NOZAWA; Osamu ; et al. | 2018-05-31 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180143528 - NOZAWA; Osamu ; et al. | 2018-05-24 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180129130 - SHISHIDO; Hiroaki ; et al. | 2018-05-10 |
Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device
Grant 9,939,723 - Shishido , et al. April 10, 2 | 2018-04-10 |
Mask blank, phase-shift mask and method for manufacturing semiconductor device
Grant 9,933,698 - Matsumoto , et al. April 3, 2 | 2018-04-03 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20180052387 - NOZAWA; Osamu ; et al. | 2018-02-22 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 9,864,268 - Shishido , et al. January 9, 2 | 2018-01-09 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20170285458 - SHISHIDO; Hiroaki ; et al. | 2017-10-05 |
Mask blank, transfer mask, and method for manufacturing transfer mask
Grant 9,726,972 - Shishido , et al. August 8, 2 | 2017-08-08 |
Mask Blank, Phase-shift Mask, Method Of Manufacturing Mask Blank, Method Of Manufacturing Phase-shift Mask And Method Of Manufacturing Semiconductor Device
App 20170176848 - SHISHIDO; Hiroaki ; et al. | 2017-06-22 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20170168384 - SHISHIDO; Hiroaki ; et al. | 2017-06-15 |
Method of manufacturing mask blank and method of manufacturing transfer mask
Grant 9,664,997 - Kominato , et al. May 30, 2 | 2017-05-30 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20170139316 - SHISHIDO; Hiroaki ; et al. | 2017-05-18 |
Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device
Grant 9,625,807 - Shishido , et al. April 18, 2 | 2017-04-18 |
Mask blank, phase-shift mask, and method for manufacturing the same
Grant 9,625,806 - Nozawa , et al. April 18, 2 | 2017-04-18 |
Mask Blank, Method Of Manufacturing Phase Shift Mask, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20170075210 - SHISHIDO; Hiroaki ; et al. | 2017-03-16 |
Mask Blank, Method Of Manufacturing Phase Shift Mask, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20170068155 - SHISHIDO; Hiroaki ; et al. | 2017-03-09 |
Mask Blank, Phase-shift Mask And Method For Manufacturing Semiconductor Device
App 20160377975 - MATSUMOTO; Atsushi ; et al. | 2016-12-29 |
Phase shift mask blank, method of manufacturing the same, and phase shift mask
Grant 9,436,079 - Nozawa , et al. September 6, 2 | 2016-09-06 |
Mask Blank, Transfer Mask, And Method For Manufacturing Transfer Mask
App 20160202603 - SHISHIDO; Hiroaki ; et al. | 2016-07-14 |
Mask Blank, Transfer Mask And Methods Of Manufacturing The Same
App 20160202602 - SHISHIDO; Hiroaki ; et al. | 2016-07-14 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20160187769 - NOZAWA; Osamu ; et al. | 2016-06-30 |
Mask Blank, Phase-shift Mask, And Method For Manufacturing The Same
App 20150338731 - NOZAWA; Osamu ; et al. | 2015-11-26 |
Method Of Manufacturing Mask Blank And Method Of Manufacturing Transfer Mask
App 20150331311 - KOMINATO; Atsushi ; et al. | 2015-11-19 |
Mask Blank, Transfer Mask, Method Of Manufacturing Mask Blank, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device
App 20150293441 - Shishido; Hiroaki ; et al. | 2015-10-15 |
Photomask blank, photomask, and method for manufacturing photomask blank
Grant 9,075,314 - Iwashita , et al. July 7, 2 | 2015-07-07 |
Phase Shift Mask Blank, Method Of Manufacturing The Same, And Phase Shift Mask
App 20150168823 - NOZAWA; Osamu ; et al. | 2015-06-18 |
Phase shift mask blank and phase shift mask
Grant 9,005,851 - Iwashita , et al. April 14, 2 | 2015-04-14 |
Phase shift mask blank, method of manufacturing the same, and phase shift mask
Grant 8,999,609 - Nozawa , et al. April 7, 2 | 2015-04-07 |
Phase Shift Mask Blank And Phase Shift Mask
App 20150056539 - Iwashita; Hiroyuki ; et al. | 2015-02-26 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 8,865,378 - Iwashita , et al. October 21, 2 | 2014-10-21 |
Mask blank, transfer mask and process for manufacturing semiconductor devices
Grant 8,846,274 - Shishido , et al. September 30, 2 | 2014-09-30 |
Photomask Blank, Photomask, And Method For Manufacturing Photomask Blank
App 20140057199 - IWASHITA; Hiroyuki ; et al. | 2014-02-27 |
Method Of Manufacturing A Transfer Mask And Method Of Manufacturing A Semiconductor Device
App 20130316271 - NOZAWA; Osamu ; et al. | 2013-11-28 |
Method and equipment for detecting pattern defect
Grant 8,553,214 - Shishido , et al. October 8, 2 | 2013-10-08 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20130230795 - IWASHITA; Hiroyuki ; et al. | 2013-09-05 |
Mask blank, transfer mask, methods of manufacturing the same and method of manufacturing a semiconductor device
Grant 8,524,421 - Nozawa , et al. September 3, 2 | 2013-09-03 |
Photomask blank, photomask, and method for manufacturing photomask blank
Grant 8,512,916 - Iwashita , et al. August 20, 2 | 2013-08-20 |
Photomask blank, photomask, and method for manufacturing photomask blank
Grant 8,507,155 - Iwashita , et al. August 13, 2 | 2013-08-13 |
Mask blank, transfer mask, and methods of manufacturing the same
Grant 8,435,704 - Nozawa , et al. May 7, 2 | 2013-05-07 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 8,431,290 - Iwashita , et al. April 30, 2 | 2013-04-30 |
Photomask blank and method for manufacturing the same
Grant 8,404,406 - Iwashita , et al. March 26, 2 | 2013-03-26 |
Phase Shift Mask Blank, Method Of Manufacturing The Same, And Phase Shift Mask
App 20130071777 - Nozawa; Osamu ; et al. | 2013-03-21 |
Phase Shift Mask Blank And Phase Shift Mask
App 20130065166 - Iwashita; Hiroyuki ; et al. | 2013-03-14 |
Mask Blank, Transfer Mask And Process For Manufacturing Semiconductor Devices
App 20130059236 - SHISHIDO; Hiroaki ; et al. | 2013-03-07 |
Phase shift mask blank and phase shift mask
Grant 8,329,364 - Iwashita , et al. December 11, 2 | 2012-12-11 |
Photomask blank, photomask, and method for manufacturing photomask blank
Grant 8,304,147 - Iwashita , et al. November 6, 2 | 2012-11-06 |
Photomask Blank, Photomask, And Method Of Manufacturing Photomask Blank
App 20110305978 - Iwashita; Hiroyuki ; et al. | 2011-12-15 |
Mask Blank, Transfer Mask, Methods Of Manufacturing The Same And Method Of Manufacturing A Semiconductor Device
App 20110244375 - NOZAWA; Osamu ; et al. | 2011-10-06 |
Mask Blank, Transfer Mask, And Methods Of Manufacturing The Same
App 20110244373 - NOZAWA; Osamu ; et al. | 2011-10-06 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20110212392 - Iwashita; Hiroyuki ; et al. | 2011-09-01 |
Phase Shift Mask Blank And Phase Shift Mask
App 20110111332 - Iwashita; Hiroyuki ; et al. | 2011-05-12 |
Photomask Blank, Photomask, And Method For Manufacturing Photomask Blank
App 20110104592 - Iwashita; Hiroyuki ; et al. | 2011-05-05 |
Photomask Blank And Method For Manufacturing The Same
App 20110081605 - Iwashita; Hiroyuki ; et al. | 2011-04-07 |
Photomask Blank, Photomask , And Method For Manufacturing Photomask Blank
App 20110070533 - Iwashita; Hiroyuki ; et al. | 2011-03-24 |
Method And Equipment For Detecting Pattern Defect
App 20110001972 - Shishido; Hiroaki ; et al. | 2011-01-06 |
Method and equipment for detecting pattern defect
Grant 7,791,725 - Shishido , et al. September 7, 2 | 2010-09-07 |
Semiconductor device
Grant 7,573,109 - Kunori , et al. August 11, 2 | 2009-08-11 |
Method And Equipment For Detecting Pattern Defect
App 20090073443 - Shishido; Hiroaki ; et al. | 2009-03-19 |
Method and equipment for detecting pattern defect
Grant 7,456,963 - Shishido , et al. November 25, 2 | 2008-11-25 |
Semiconductor device and method for manufacturing thereof
Grant 7,365,391 - Kurosaki , et al. April 29, 2 | 2008-04-29 |
Semiconductor device
Grant 7,282,764 - Kunori , et al. October 16, 2 | 2007-10-16 |
Defect inspection method and apparatus therefor
Grant 7,251,024 - Maeda , et al. July 31, 2 | 2007-07-31 |
Semiconductor device
Grant 7,208,375 - Kurosaki , et al. April 24, 2 | 2007-04-24 |
Semiconductor device
App 20070069323 - Kunori; Shinji ; et al. | 2007-03-29 |
Trench-type power MOSFET with embedded region at the bottom of the gate and increased breakdown voltage
Grant 7,196,376 - Kurosaki , et al. March 27, 2 | 2007-03-27 |
Method and equipment for detecting pattern defect
App 20070052955 - Shishido; Hiroaki ; et al. | 2007-03-08 |
Semiconductor device and method for manufacturing thereof
App 20070045726 - Kurosaki; Toru ; et al. | 2007-03-01 |
Semiconductor device
App 20070045776 - Kunori; Shinji ; et al. | 2007-03-01 |
Method and equipment for detecting pattern defect
Grant 7,132,669 - Shishido , et al. November 7, 2 | 2006-11-07 |
Semiconductor device
App 20060063335 - Kurosaki; Toru ; et al. | 2006-03-23 |
Method and equipment for detecting pattern defect
App 20050253081 - Shishido, Hiroaki ; et al. | 2005-11-17 |
Semiconductor device and method for manufacturing semiconductor device
App 20050224848 - Kurosaki, Toru ; et al. | 2005-10-13 |
Method and equipment for detecting pattern defect
Grant 6,921,905 - Shishido , et al. July 26, 2 | 2005-07-26 |
Semiconductor device
Grant 6,906,355 - Kurosaki , et al. June 14, 2 | 2005-06-14 |
Defect inspection method and apparatus therefor
App 20050083519 - Maeda, Shunji ; et al. | 2005-04-21 |
Semiconductor device having active grooves
Grant 6,876,034 - Kurosaki , et al. April 5, 2 | 2005-04-05 |
Method and equipment for detecting pattern defect
App 20050045830 - Shishido, Hiroaki ; et al. | 2005-03-03 |
Semiconductor device
Grant 6,841,825 - Kurosaki , et al. January 11, 2 | 2005-01-11 |
Defect inspection method and apparatus therefor
Grant 6,819,416 - Maeda , et al. November 16, 2 | 2004-11-16 |
Method and equipment for detecting pattern defect
Grant 6,800,859 - Shishido , et al. October 5, 2 | 2004-10-05 |
Semiconductor device
App 20040070002 - Kurosaki, Toru ; et al. | 2004-04-15 |
Semiconductor device
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Semiconductor device
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Method and apparatus for inspecting defects in a patterned specimen
Grant 6,621,571 - Maeda , et al. September 16, 2 | 2003-09-16 |
Defect inspection method and apparatus therefor
App 20030095251 - Maeda, Shunji ; et al. | 2003-05-22 |
Defect inspection method and apparatus therefor
Grant 6,556,290 - Maeda , et al. April 29, 2 | 2003-04-29 |
Defect inspection method and apparatus therefor
App 20020030807 - Maeda, Shunji ; et al. | 2002-03-14 |
Method of and apparatus for inspecting reticle for defects
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Method of and apparatus for inspecting reticle for defects
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Foreign particle inspection apparatus and method with front and back illumination
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