Patent | Date |
---|
Communication System, Communication Method, And Server App 20220248299 - MURASAME; Azusa ;   et al. | 2022-08-04 |
Substrate Treatment Method And Substrate Treatment System App 20210318618 - SHIMURA; Satoru ;   et al. | 2021-10-14 |
Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium Grant 10,998,183 - Kaneko , et al. May 4, 2 | 2021-05-04 |
Film forming system, film forming method, and computer storage medium Grant 10,964,606 - Shimura , et al. March 30, 2 | 2021-03-30 |
Film Forming System, Film Forming Method, And Computer Storage Medium App 20190355573 - SHIMURA; Satoru ;   et al. | 2019-11-21 |
Exposure apparatus, resist pattern forming method, and storage medium Grant 10,101,669 - Nagahara , et al. October 16, 2 | 2018-10-16 |
Substrate treatment system Grant 10,025,190 - Nagahara , et al. July 17, 2 | 2018-07-17 |
Film forming method, computer storage medium, and film forming system Grant 9,741,559 - Shimura , et al. August 22, 2 | 2017-08-22 |
Substrate Treatment System App 20170031245 - NAGAHARA; Seiji ;   et al. | 2017-02-02 |
Exposure Apparatus, Resist Pattern Forming Method, And Storage Medium App 20160327869 - NAGAHARA; Seiji ;   et al. | 2016-11-10 |
Substrate Cleaning Apparatus, Substrate Cleaning System, Substrate Cleaning Method And Memory Medium App 20160163534 - KANEKO; Miyako ;   et al. | 2016-06-09 |
Substrate treatment method, non-transitory computer storage medium and substrate treatment system Grant 9,341,952 - Iwao , et al. May 17, 2 | 2016-05-17 |
Film forming method, non-transitory computer storage medium and film forming apparatus Grant 9,329,483 - Iwao , et al. May 3, 2 | 2016-05-03 |
Substrate treatment method, non-transitory computer storage medium and substrate treatment system Grant 9,280,052 - Iwao , et al. March 8, 2 | 2016-03-08 |
Film Forming Method, Computer Storage Medium, And Film Forming System App 20150357188 - SHIMURA; Satoru ;   et al. | 2015-12-10 |
Substrate Treatment Method, Non-transitory Computer Storage Medium And Substrate Treatment System App 20140255852 - IWAO; Fumiko ;   et al. | 2014-09-11 |
Substrate Treatment Method, Non-transitory Computer Storage Medium And Substrate Treatment System App 20140255844 - IWAO; Fumiko ;   et al. | 2014-09-11 |
Coating treatment method and coating treatment apparatus Grant 8,791,030 - Iwao , et al. July 29, 2 | 2014-07-29 |
Film Forming Method, Non-transitory Computer Storage Medium And Film Forming Apparatus App 20140170332 - IWAO; Fumiko ;   et al. | 2014-06-19 |
Substrate Cleaning Apparatus, Substrate Cleaning System, Substrate Cleaning Method And Memory Medium App 20140041685 - KANEKO; Miyako ;   et al. | 2014-02-13 |
Coating Treatment Method And Coating Treatment Apparatus App 20140038423 - IWAO; Fumiko ;   et al. | 2014-02-06 |
Semiconductor Device Manufacturing Apparatus App 20120312472 - Yaegashi; Hidetami ;   et al. | 2012-12-13 |
Semiconductor Device Manufacturing Apparatus App 20120305183 - Yaegashi; Hidetami ;   et al. | 2012-12-06 |
Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus Grant 8,283,253 - Yaegashi , et al. October 9, 2 | 2012-10-09 |
Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus Grant 8,273,661 - Yaegashi , et al. September 25, 2 | 2012-09-25 |
Method of manufacturing semiconductor device, and resist coating and developing system Grant 8,202,682 - Iwao , et al. June 19, 2 | 2012-06-19 |
Apparatus For Manufacturing A Semiconductor Device App 20120034779 - SHIMURA; Satoru ;   et al. | 2012-02-09 |
Substrate Cleaning Device And Substrate Cleaning Method App 20120006362 - Yamamoto; Taro ;   et al. | 2012-01-12 |
Apparatus for manufacturing a semiconductor device Grant 8,075,730 - Shimura , et al. December 13, 2 | 2011-12-13 |
Substrate cleaning device and substrate cleaning method Grant 8,037,890 - Yamamoto , et al. October 18, 2 | 2011-10-18 |
Substrate Treatment Method And Substrate Treatment Apparatus App 20100307683 - IWASHITA; Mitsuaki ;   et al. | 2010-12-09 |
Substrate treatment method for etching a base film using a resist pattern Grant 7,781,342 - Iwashita , et al. August 24, 2 | 2010-08-24 |
Method Of Manufacturing Semiconductor Device, And Resist Coating And Developing System App 20090220892 - IWAO; Fumiko ;   et al. | 2009-09-03 |
Pattern Forming Method, Semiconductor Device Manufacturing Method And Semiconductor Device Manufacturing Apparatus App 20090208852 - Shimura; Satoru | 2009-08-20 |
Pattern Forming Method, Semiconductor Device Manufacturing Method And Semiconductor Device Manufacturing Apparatus App 20090209105 - Yaegashi; Hidetami ;   et al. | 2009-08-20 |
Pattern Forming Method, Semiconductor Device Manufacturing Method And Semiconductor Device Manufacturing Apparatus App 20090209109 - Yaegashi; Hidetami ;   et al. | 2009-08-20 |
Method for forming wiring of semiconductor device Grant 7,485,568 - Shimura , et al. February 3, 2 | 2009-02-03 |
Substrate processing apparatus and substrate processing method Grant 7,401,988 - Katano , et al. July 22, 2 | 2008-07-22 |
Exposure And Developing Method App 20080070167 - TAKAHASHI; Nobuhiro ;   et al. | 2008-03-20 |
Process For Fabricating Semiconductor Device App 20080057728 - Shimura; Satoru ;   et al. | 2008-03-06 |
Substrate Treatment Method and Substrate Treatment Apparatus App 20070243711 - Iwashita; Mitsuaki ;   et al. | 2007-10-18 |
Peeling-off method and reworking method of resist film App 20070184379 - Ashigaki; Shigeo ;   et al. | 2007-08-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20070127916 - Kitano; Junichi ;   et al. | 2007-06-07 |
Substrate processing apparatus and substrate processing method Grant 7,208,066 - Kitano , et al. April 24, 2 | 2007-04-24 |
Substrate cleaning device and substrate cleaning method App 20070044823 - Yamamoto; Taro ;   et al. | 2007-03-01 |
Substrate processing method App 20060068337 - Tanouchi; Keiji ;   et al. | 2006-03-30 |
Method for forming wiring of semiconductor device App 20050196953 - Shimura, Satoru ;   et al. | 2005-09-08 |
Substrate processing apparatus and substrate processing method App 20040050321 - Kitano, Junichi ;   et al. | 2004-03-18 |
Substrate processing method and substrate processing apparatus Grant 6,485,203 - Katano , et al. November 26, 2 | 2002-11-26 |
Substrate processing apparatus and substrate processing method App 20010013161 - Kitano, Junichi ;   et al. | 2001-08-16 |
Substrate processing method and substrate processing apparatus App 20010014372 - Katano, Takayuki ;   et al. | 2001-08-16 |