| Patent | Date |
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Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 11,094,532 - Sano , et al. August 17, 2 | 2021-08-17 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,910,214 - Hashimoto , et al. February 2, 2 | 2021-02-02 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 10,720,325 - Nitta , et al. | 2020-07-21 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200152444 - SANO; Atsushi ; et al. | 2020-05-14 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,604,842 - Harada , et al. | 2020-03-31 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,607,833 - Harada , et al. | 2020-03-31 |
Substrate Processing Apparatus
App 20190393057 - SHIMAMOTO; Satoshi ; et al. | 2019-12-26 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,490,400 - Harada , et al. Nov | 2019-11-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190218666 - HARADA; Katsuyoshi ; et al. | 2019-07-18 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,290,492 - Harada , et al. | 2019-05-14 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,199,219 - Shimamoto , et al. Fe | 2019-02-05 |
Method of manufacturing semiconductor device
Grant 10,163,910 - Shimamoto , et al. Dec | 2018-12-25 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180337031 - HASHIMOTO; Yoshitomo ; et al. | 2018-11-22 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,134,586 - Nitta , et al. November 20, 2 | 2018-11-20 |
Method of manufacturing semiconductor device
Grant 10,115,583 - Shimamoto , et al. October 30, 2 | 2018-10-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180308681 - HARADA; Katsuyoshi ; et al. | 2018-10-25 |
Method of manufacturing semiconductor device
Grant 10,090,322 - Shimamoto , et al. October 2, 2 | 2018-10-02 |
Substrate Processing Apparatus
App 20180277405 - SHIMAMOTO; Satoshi ; et al. | 2018-09-27 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,066,298 - Yamamoto , et al. September 4, 2 | 2018-09-04 |
Method Of Manufacturing Semiconductor Device
App 20180233348 - SHIMAMOTO; Satoshi ; et al. | 2018-08-16 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
App 20180218897 - NITTA; Takafumi ; et al. | 2018-08-02 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,032,629 - Nitta , et al. July 24, 2 | 2018-07-24 |
Method Of Manufacturing Semiconductor Device
App 20180197877 - SHIMAMOTO; Satoshi ; et al. | 2018-07-12 |
Method of manufacturing semiconductor device
Grant 9,991,179 - Ohashi , et al. June 5, 2 | 2018-06-05 |
Method of manufacturing semiconductor device including forming a film containing a first element, a second element and carbon, substrate processing apparatus, and recording medium
Grant 9,978,587 - Shimamoto , et al. May 22, 2 | 2018-05-22 |
Method of Manufacturing Semiconductor Device
App 20180090310 - SHIMAMOTO; Satoshi ; et al. | 2018-03-29 |
Method Of Manufacturing Semiconductor Device
App 20180090502 - SHIMAMOTO; Satoshi ; et al. | 2018-03-29 |
Method of manufacturing semiconductor device
Grant 9,929,005 - Shimamoto , et al. March 27, 2 | 2018-03-27 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,899,211 - Kirikihira , et al. February 20, 2 | 2018-02-20 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,890,458 - Yamamoto , et al. February 13, 2 | 2018-02-13 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,865,458 - Yamamoto , et al. January 9, 2 | 2018-01-09 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170365467 - SHIMAMOTO; Satoshi ; et al. | 2017-12-21 |
Method Of Manufacturing Semiconductor Device
App 20170358506 - OHASHI; Naofumi ; et al. | 2017-12-14 |
Method of manufacturing semiconductor device and substrate processing method
Grant 9,837,261 - Hirose , et al. December 5, 2 | 2017-12-05 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170345645 - HARADA; Katsuyoshi ; et al. | 2017-11-30 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
Grant 9,831,082 - Shimamoto , et al. November 28, 2 | 2017-11-28 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,793,107 - Noda , et al. October 17, 2 | 2017-10-17 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,773,661 - Nitta , et al. September 26, 2 | 2017-09-26 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,741,556 - Yamamoto , et al. August 22, 2 | 2017-08-22 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,732,426 - Shimamoto , et al. August 15, 2 | 2017-08-15 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,698,007 - Noda , et al. July 4, 2 | 2017-07-04 |
Method of manufacturing semiconductor device having 3D structure
Grant 9,685,455 - Shimamoto , et al. June 20, 2 | 2017-06-20 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170170004 - HARADA; Katsuyoshi ; et al. | 2017-06-15 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium
Grant 9,673,043 - Noda , et al. June 6, 2 | 2017-06-06 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,640,387 - Yamamoto , et al. May 2, 2 | 2017-05-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170117133 - YAMAMOTO; Ryuji ; et al. | 2017-04-27 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,613,798 - Yamamoto , et al. April 4, 2 | 2017-04-04 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170092486 - NITTA; Takafumi ; et al. | 2017-03-30 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,524,867 - Yamamoto , et al. December 20, 2 | 2016-12-20 |
Method of Manufacturing Semiconductor Device and Substrate Processing Method
App 20160365243 - HIROSE; Yoshiro ; et al. | 2016-12-15 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160358767 - NITTA; Takafumi ; et al. | 2016-12-08 |
Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium
Grant 9,478,413 - Shimamoto , et al. October 25, 2 | 2016-10-25 |
Semiconductor device manufacturing method
Grant 9,472,391 - Shimamoto , et al. October 18, 2 | 2016-10-18 |
Method of manufacturing semiconductor device and substrate processing method
Grant 9,460,911 - Hirose , et al. October 4, 2 | 2016-10-04 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 9,460,916 - Shimamoto , et al. October 4, 2 | 2016-10-04 |
Method of manufacturing semiconductor device
Grant 9,431,240 - Hirose , et al. August 30, 2 | 2016-08-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160225607 - YAMAMOTO; Ryuji ; et al. | 2016-08-04 |
Method Of Forming Fine Pattern, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium
App 20160218012 - SHIMAMOTO; Satoshi ; et al. | 2016-07-28 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System And Recording Medium
App 20160211135 - NODA; Takaaki ; et al. | 2016-07-21 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
App 20160155634 - SHIMAMOTO; Satoshi ; et al. | 2016-06-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160153090 - YAMAMOTO; Ryuji ; et al. | 2016-06-02 |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
Grant 9,355,866 - Suda , et al. May 31, 2 | 2016-05-31 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
Grant 9,349,586 - Shimamoto , et al. May 24, 2 | 2016-05-24 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
App 20160093512 - SUDA; Atsuhiko ; et al. | 2016-03-31 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160071720 - NITTA; Takafumi ; et al. | 2016-03-10 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20160071721 - SHIMAMOTO; Satoshi ; et al. | 2016-03-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160064219 - YAMAMOTO; Ryuji ; et al. | 2016-03-03 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160024659 - SHIMAMOTO; Satoshi ; et al. | 2016-01-28 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,218,959 - Shimamoto , et al. December 22, 2 | 2015-12-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150357181 - YAMAMOTO; Ryuji ; et al. | 2015-12-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150332916 - NODA; Takaaki ; et al. | 2015-11-19 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150255274 - YAMAMOTO; Ryuji ; et al. | 2015-09-10 |
Method of Manufacturing Semiconductor Device and Substrate Processing Method
App 20150243498 - HIROSE; Yoshiro ; et al. | 2015-08-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150243499 - YAMAMOTO; Ryuji ; et al. | 2015-08-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20150214030 - KIRIKIHIRA; Kaori ; et al. | 2015-07-30 |
Method of manufacturing semiconductor device and method of processing substrate
Grant 9,054,046 - Hirose , et al. June 9, 2 | 2015-06-09 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 8,987,146 - Kirikihira , et al. March 24, 2 | 2015-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150072537 - NODA; Takaaki ; et al. | 2015-03-12 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150044881 - SHIMAMOTO; Satoshi ; et al. | 2015-02-12 |
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus And Recording Medium
App 20140349492 - SHIMAMOTO; Satoshi ; et al. | 2014-11-27 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
App 20140287595 - Shimamoto; Satoshi ; et al. | 2014-09-25 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium
App 20140235067 - Shimamoto; Satoshi ; et al. | 2014-08-21 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 8,785,333 - Hashimoto , et al. July 22, 2 | 2014-07-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20140073142 - HIROSE; Yoshiro ; et al. | 2014-03-13 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20140057452 - HASHIMOTO; Yoshitomo ; et al. | 2014-02-27 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20130252435 - SHIMAMOTO; Satoshi ; et al. | 2013-09-26 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20130237064 - KIRIKIHIRA; Kaori ; et al. | 2013-09-12 |
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
App 20130149873 - Hirose; Yoshiro ; et al. | 2013-06-13 |
Semiconductor integrated circuit device and a method of manufacturing the same
Grant 7,022,563 - Ootsuka , et al. April 4, 2 | 2006-04-04 |
Semiconductor device and manufacturing method thereof
App 20050269640 - Shimamoto, Satoshi ; et al. | 2005-12-08 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20040211993 - Ootsuka, Fumio ; et al. | 2004-10-28 |
Semiconductor integrated circuit device and a method of manufacturing the same
Grant 6,762,444 - Ootsuka , et al. July 13, 2 | 2004-07-13 |
Semiconductor integrated circuit device
Grant 6,635,937 - Ootsuka , et al. October 21, 2 | 2003-10-21 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20030082877 - Ootsuka, Fumio ; et al. | 2003-05-01 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20020190399 - Ootsuka, Fumio ; et al. | 2002-12-19 |
Heating and extruding method and device for bulk preform
Grant 5,500,170 - Okumura , et al. March 19, 1 | 1996-03-19 |
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