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Shimada; Tomoharu Patent Filings

Shimada; Tomoharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shimada; Tomoharu.The latest application filed is for "thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate".

Company Profile
0.4.8
  • Shimada; Tomoharu - Komatsu JP
  • Shimada; Tomoharu - Nagasaki JP
  • Shimada; Tomoharu - Ishikawa JP
  • Shimada; Tomoharu - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Heat treatment apparatus and method of manufacturing substrates
Grant 8,963,051 - Shimada , et al. February 24, 2
2015-02-24
Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
App 20100148415 - Nakamura; Naoto ;   et al.
2010-06-17
Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
Grant 7,667,301 - Nakamura , et al. February 23, 2
2010-02-23
Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
App 20090186489 - Nakamura; Naoto ;   et al.
2009-07-23
Heat Treatment Apparatus and Method of Manufacturing Substrates
App 20080190910 - Shimada; Tomoharu ;   et al.
2008-08-14
Heat Treatment Apparatus
App 20070275570 - Nakamura; Naoto ;   et al.
2007-11-29
Thermal Treatment Apparatus, Method For Manufacturing Semiconductor Device, And Method For Manufacturing Substrate
App 20070194411 - Nakamura; Naoto ;   et al.
2007-08-23
Apparatus for fabricating a semiconductor device
Grant 7,077,913 - Shimada July 18, 2
2006-07-18
Fabricating a semiconductor device
App 20030221623 - Shima, Nobuhito ;   et al.
2003-12-04
Heat treatment apparatus and a method for fabricating substrates
App 20030170583 - Nakashima, Sadao ;   et al.
2003-09-11
Apparatus for fabricating a semiconductor device
App 20030150386 - Shimada, Tomoharu
2003-08-14

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