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Patent applications and USPTO patent grants for Shikami, Satoshi.The latest application filed is for "substrate cleaning apparatus".
Patent | Date |
---|---|
Substrate cleaning apparatus App 20050183749 - Matsuno, Kousaku ;   et al. | 2005-08-25 |
Substrate cleaning apparatus App 20050183750 - Matsuno, Kousaku ;   et al. | 2005-08-25 |
Substrate cleaning apparatus App 20050150530 - Matsuno, Kousaku ;   et al. | 2005-07-14 |
Substrate cleaning apparatus Grant 6,874,516 - Matsuno , et al. April 5, 2 | 2005-04-05 |
Slurry mixing feeder and slurry mixing and feeding method Grant 6,767,124 - Shikami , et al. July 27, 2 | 2004-07-27 |
Supporting fixture of substrate and drying method of substrate surface using the same Grant 6,722,055 - Shikami April 20, 2 | 2004-04-20 |
Supporting fixture of substrate and drying method of substrate surface using the same App 20030056391 - Shikami, Satoshi | 2003-03-27 |
Slurry mixing feeder and slurry mixing and feeding method App 20030031086 - Shikami, Satoshi ;   et al. | 2003-02-13 |
Substrate Cleaning apparatus App 20030005948 - Matsuno, Kousaku ;   et al. | 2003-01-09 |
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