Patent | Date |
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Polishing pad Grant D600,989 - Tano , et al. September 29, 2 | 2009-09-29 |
Polishing pad Grant D592,030 - Tano , et al. May 12, 2 | 2009-05-12 |
Polishing pad Grant D592,029 - Tano , et al. May 12, 2 | 2009-05-12 |
Polishing pad Grant D584,591 - Tano , et al. January 13, 2 | 2009-01-13 |
Polishing pad Grant D581,237 - Okamoto , et al. November 25, 2 | 2008-11-25 |
Chemical mechanical polishing pad Grant 7,442,116 - Miyauchi , et al. October 28, 2 | 2008-10-28 |
Polishing pad Grant D576,855 - Okamoto , et al. September 16, 2 | 2008-09-16 |
Chemical mechanical polishing pad and chemical mechanical polishing process Grant 7,354,527 - Tano , et al. April 8, 2 | 2008-04-08 |
Method of manufacturing chemical mechanical polishing pad Grant 7,329,174 - Hosaka , et al. February 12, 2 | 2008-02-12 |
Polishing pad for semiconductor wafer, polishing multilayered body for semiconductor wafer having same, and method for polishing semiconductor wafer Grant 7,323,415 - Shiho , et al. January 29, 2 | 2008-01-29 |
Polishing pad Grant D560,457 - Miyauchi , et al. January 29, 2 | 2008-01-29 |
Polishing pad Grant D559,648 - Miyauchi , et al. January 15, 2 | 2008-01-15 |
Polishing pad Grant D559,064 - Okamoto , et al. January 8, 2 | 2008-01-08 |
Polishing pad Grant D559,065 - Miyauchi , et al. January 8, 2 | 2008-01-08 |
Polishing pad Grant D559,063 - Okamoto , et al. January 8, 2 | 2008-01-08 |
Polishing pad Grant D559,066 - Tano , et al. January 8, 2 | 2008-01-08 |
Method of manufacturing chemical mechanical polishing pad App 20070082587 - Hosaka; Yukio ;   et al. | 2007-04-12 |
Chemical mechanical polishing pad and chemical mechanical polishing method Grant 7,183,213 - Shiho , et al. February 27, 2 | 2007-02-27 |
Silane composition, silicon film forming method and solar cell production method Grant 7,173,180 - Shiho , et al. February 6, 2 | 2007-02-06 |
Silane composition, silicon film forming method and solar cell production method App 20060185712 - Shiho; Hiroshi ;   et al. | 2006-08-24 |
Silane composition, silicon film forming method and solar cell production method Grant 7,067,069 - Shiho , et al. June 27, 2 | 2006-06-27 |
Polishing pad for semiconductor wafer and laminated body for polishing of semiconductor wafer equipped with the same as well as method for polishing of semiconductor wafer App 20060128271 - Shiho; Hiroshi ;   et al. | 2006-06-15 |
Chemical mechanical polishing pad and chemical mechanical polishing process App 20060060569 - Tano; Hiroyuki ;   et al. | 2006-03-23 |
Polishing pad Grant 6,992,123 - Shiho , et al. January 31, 2 | 2006-01-31 |
Polishing pad Grant 6,976,910 - Hosaka , et al. December 20, 2 | 2005-12-20 |
Chemical mechanical polishing pad and chemical mechanical polishing method App 20050260929 - Shiho, Hiroshi ;   et al. | 2005-11-24 |
Chemical mechanical polishing pad, manufacturing process thereof and chemical mechanical polishing method for semiconductor wafers App 20050245171 - Hosaka, Yukio ;   et al. | 2005-11-03 |
Chemical mechanical polishing pad, manufacturing process thereof and chemical mechanical polishing method App 20050239380 - Hosaka, Yukio ;   et al. | 2005-10-27 |
Aqueous dispersion, process for production thereof and coated substances Grant 6,953,821 - Tamori , et al. October 11, 2 | 2005-10-11 |
Chemical mechanical polishing pad, production method thereof, and chemical mechanical polishing process App 20050222336 - Okamoto, Takahiro ;   et al. | 2005-10-06 |
Chemical mechanical polishing pad App 20050113011 - Miyauchi, Hiroyuki ;   et al. | 2005-05-26 |
Ruthenium film, ruthenium oxide film and process for forming the same Grant 6,875,518 - Shiho , et al. April 5, 2 | 2005-04-05 |
Chemical mechanical polishing pad and chemical mechanical polishing method App 20050014376 - Shiho, Hiroshi ;   et al. | 2005-01-20 |
Polishing pad App 20050003749 - Hosaka, Yukio ;   et al. | 2005-01-06 |
Method of machining semiconductor wafer-use polishing pad and semiconductor wafer-use polishing pad App 20040266326 - Shiho, Hiroshi ;   et al. | 2004-12-30 |
Polishing pad and method of polishing a semiconductor wafer App 20040224611 - Aoi, Hiromi ;   et al. | 2004-11-11 |
Polishing pad and chemical mechanical polishing method App 20040224616 - Shiho, Hiroshi ;   et al. | 2004-11-11 |
Tantalum oxide film, use thereof, process for forming the same and composition Grant 6,806,210 - Shiho , et al. October 19, 2 | 2004-10-19 |
Abrasive pad, method and metal mold for manufacturing the same, and semiconductor wafer polishing method App 20040203320 - Hosaka, Yukio ;   et al. | 2004-10-14 |
Polishing pad App 20040118051 - Shiho, Hiroshi ;   et al. | 2004-06-24 |
Polishing pad and multi-layer polishing pad App 20040014413 - Kawahashi, Nobuo ;   et al. | 2004-01-22 |
Coating composition and hardened film obtained therefrom Grant 6,660,394 - Ishizuki , et al. December 9, 2 | 2003-12-09 |
Gas barrier coating composition, process for producing the same, and gas barrier coating film Grant 6,656,602 - Ishikawa , et al. December 2, 2 | 2003-12-02 |
Gas barrier coating composition and method for manufacturing same App 20030187113 - Shiho, Hiroshi ;   et al. | 2003-10-02 |
Aqueous dispersion, process for production thereof and coated substances App 20030045626 - Tamori, Kouji ;   et al. | 2003-03-06 |
Silane composition, silicon film forming method and solar cell production method App 20030045632 - Shiho, Hiroshi ;   et al. | 2003-03-06 |
Rutenium film rutenium oxide film, and method for formation thereof App 20030008157 - Shiho, Hiroshi ;   et al. | 2003-01-09 |
Tantalum oxide film, use thereof, and method and composition for forming the same App 20030003235 - Shiho, Hiroshi ;   et al. | 2003-01-02 |
Coating composition, and a coated film and glass each having a coating layer comprised thereof Grant 6,485,838 - Shimada , et al. November 26, 2 | 2002-11-26 |