| Patent | Date |
|---|
Method for conditioning a ceramic coating
Grant 11,384,430 - Shih , et al. July 12, 2 | 2022-07-12 |
Method to selectively pattern a surface for plasma resistant coat applications
Grant 11,124,659 - Yasseri , et al. September 21, 2 | 2021-09-21 |
Method For Conditioning A Ceramic Coating
App 20210280393 - SHIH; Hong ; et al. | 2021-09-09 |
Conditioning Chamber Component
App 20210205858 - YASSERI; Amir A. ; et al. | 2021-07-08 |
Conditioning chamber component
Grant 10,967,407 - Yasseri , et al. April 6, 2 | 2021-04-06 |
Surface coating treatment
Grant 10,422,028 - Huang , et al. Sept | 2019-09-24 |
Electrostatic chuck cleaning fixture
Grant 10,391,526 - Avoyan , et al. A | 2019-08-27 |
Method To Selectively Pattern A Surface For Plasma Resistant Coat Applications
App 20190233658 - YASSERI; Amir A. ; et al. | 2019-08-01 |
Conditioning Chamber Component
App 20180318890 - YASSERI; Amir A. ; et al. | 2018-11-08 |
Plasma Etching Device With Plasma Etch Resistant Coating
App 20180144909 - HUANG; Lihua Li ; et al. | 2018-05-24 |
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus
App 20180127868 - XU; Lin ; et al. | 2018-05-10 |
Method for conditioning silicon part
Grant 9,947,558 - Xu , et al. April 17, 2 | 2018-04-17 |
Method For Conditioning Silicon Part
App 20180047594 - XU; Lin ; et al. | 2018-02-15 |
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
Grant 9,873,940 - Xu , et al. January 23, 2 | 2018-01-23 |
Dual phase cleaning chambers and assemblies comprising the same
Grant 9,748,078 - Avoyan , et al. August 29, 2 | 2017-08-29 |
Surface Coating Treatment
App 20170159164 - HUANG; Lihua Li ; et al. | 2017-06-08 |
Dielectric window cleaning apparatuses
Grant 9,623,449 - Avoyan , et al. April 18, 2 | 2017-04-18 |
Plasma Etching Device With Plasma Etch Resistant Coating
App 20170040146 - HUANG; Lihua Li ; et al. | 2017-02-09 |
Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings
App 20170040147 - Shih; Hong ; et al. | 2017-02-09 |
Use Of Sintered Nanograined Yttrium-based Ceramics As Etch Chamber Components
App 20170018408 - XU; Lin ; et al. | 2017-01-19 |
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
Grant 9,546,432 - Shih , et al. January 17, 2 | 2017-01-17 |
Use Of Atomic Layer Deposition Coatings To Protect Brazing Line Against Corrosion, Erosion, And Arcing
App 20160375515 - XU; Lin ; et al. | 2016-12-29 |
Portable sonic particle removal tool with a chemically controlled working fluid
Grant 9,505,036 - Avoyan , et al. November 29, 2 | 2016-11-29 |
Method For Coating Surfaces
App 20160254125 - HUANG; Lihua Li ; et al. | 2016-09-01 |
Methods for mixed acid cleaning of showerhead electrodes
Grant 9,396,912 - Avoyan , et al. July 19, 2 | 2016-07-19 |
Method of wet cleaning aluminum chamber parts
Grant 9,387,521 - Shih , et al. July 12, 2 | 2016-07-12 |
Dual Phase Cleaning Chambers And Assemblies Comprising The Same
App 20160141153 - Avoyan; Armen ; et al. | 2016-05-19 |
Corrosion resistant aluminum coating on plasma chamber components
Grant 9,337,002 - Daugherty , et al. May 10, 2 | 2016-05-10 |
Mixed acid cleaning assemblies
Grant 9,293,305 - Avoyan , et al. March 22, 2 | 2016-03-22 |
Dual phase cleaning chambers and assemblies comprising the same
Grant 9,245,719 - Avoyan , et al. January 26, 2 | 2016-01-26 |
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof
App 20150337450 - SHIH; Hong ; et al. | 2015-11-26 |
Platen and adapter assemblies for facilitating silicon electrode polishing
Grant 9,120,201 - Avoyan , et al. September 1, 2 | 2015-09-01 |
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
Grant 9,123,651 - Shih , et al. September 1, 2 | 2015-09-01 |
System And Method For Performing Hot Water Seal On Electrostatic Chuck
App 20150235889 - Shih; Hong ; et al. | 2015-08-20 |
Method of removing damaged epoxy from electrostatic chuck
Grant 9,105,676 - Shih , et al. August 11, 2 | 2015-08-11 |
Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber
Grant 9,079,228 - Shih , et al. July 14, 2 | 2015-07-14 |
System and method for testing an electrostatic chuck
Grant 9,082,805 - Shih , et al. July 14, 2 | 2015-07-14 |
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus
App 20150184296 - Xu; Lin ; et al. | 2015-07-02 |
Component Of A Plasma Processing Apparatus Including An Electrically Conductive And Nonmagnetic Cold Sprayed Coating
App 20150187615 - Daugherty; John ; et al. | 2015-07-02 |
Adapter Plate For Polishing And Cleaning Electrodes
App 20150179416 - Zhou; Catherine ; et al. | 2015-06-25 |
Electrostatic Chuck Cleaning Fixture
App 20150165492 - Avoyan; Armen ; et al. | 2015-06-18 |
Method for performing hot water seal on electrostatic chuck
Grant 9,054,148 - Shih , et al. June 9, 2 | 2015-06-09 |
Process chamber component having yttrium--aluminum coating
Grant 9,012,030 - Han , et al. April 21, 2 | 2015-04-21 |
System and method for cleaning gas injectors
Grant 8,945,317 - Avoyan , et al. February 3, 2 | 2015-02-03 |
Cold Spray Barrier Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof
App 20140315392 - Xu; Lin ; et al. | 2014-10-23 |
Bare aluminum baffles for resist stripping chambers
Grant 8,859,432 - Egley , et al. October 14, 2 | 2014-10-14 |
Automated bubble detection apparatus and method
Grant 8,854,451 - Cormier , et al. October 7, 2 | 2014-10-07 |
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof
App 20140295670 - Shih; Hong ; et al. | 2014-10-02 |
Portable Sonic Particle Removal Tool With A Chemically Controlled Working Fluid
App 20140261575 - Avoyan; Armen ; et al. | 2014-09-18 |
Corrosion Resistant Aluminum Coating On Plasma Chamber Components
App 20140272459 - Daugherty; John ; et al. | 2014-09-18 |
Method Of Wet Cleaning Aluminum Chamber Parts
App 20140150819 - Shih; Hong ; et al. | 2014-06-05 |
Actively Heated Aluminum Baffle Component Having Improved Particle Performance And Methods Of Use And Manufacture Thereof
App 20140148013 - Shih; Hong ; et al. | 2014-05-29 |
Palladium Plated Aluminum Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof
App 20140127911 - Shih; Hong ; et al. | 2014-05-08 |
Tungsten Carbide Coated Metal Component Of A Plasma Reactor Chamber And Method Of Coating
App 20140113453 - Shih; Hong ; et al. | 2014-04-24 |
Method Of Removing Damaged Epoxy From Electrostatic Chuck
App 20140083461 - Shih; Hong ; et al. | 2014-03-27 |
Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof
Grant 8,679,252 - Shih , et al. March 25, 2 | 2014-03-25 |
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing
App 20140030966 - Avoyan; Armen ; et al. | 2014-01-30 |
Extending lifetime of yttrium oxide as a plasma chamber material
Grant 8,585,844 - Shih , et al. November 19, 2 | 2013-11-19 |
Electrode carrier assemblies
Grant 8,580,079 - La Croix , et al. November 12, 2 | 2013-11-12 |
Dielectric Window Cleaning Apparatuses
App 20130263897 - Avoyan; Armen ; et al. | 2013-10-10 |
Platen and adapter assemblies for facilitating silicon electrode polishing
Grant 8,550,880 - Avoyan , et al. October 8, 2 | 2013-10-08 |
Method of cleaning aluminum plasma chamber parts
Grant 8,545,639 - Shih , et al. October 1, 2 | 2013-10-01 |
Plasma Processing Devices With Corrosion Resistant Components
App 20130160948 - Shih; Hong ; et al. | 2013-06-27 |
System And Method For Cleaning Gas Injectors
App 20130146095 - Avoyan; Armen ; et al. | 2013-06-13 |
Electrode securing platens and electrode polishing assemblies incorporating the same
Grant 8,444,456 - La Croix , et al. May 21, 2 | 2013-05-21 |
Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying Coatings
App 20130105083 - Shih; Hong ; et al. | 2013-05-02 |
Methods For Mixed Acid Cleaning Of Showerhead Electrodes
App 20130104938 - Avoyan; Armen ; et al. | 2013-05-02 |
Method Of Cleaning Aluminum Plasma Chamber Parts
App 20130104930 - Shih; Hong ; et al. | 2013-05-02 |
Mixed Acid Cleaning Assemblies
App 20130104942 - Avoyan; Armen ; et al. | 2013-05-02 |
Components Of Plasma Processing Chambers Having Textured Plasma Resistant Coatings
App 20130102156 - Stevenson; Tom ; et al. | 2013-04-25 |
Automated Bubble Detection Apparatus And Method
App 20130100278 - Cormier; Josh ; et al. | 2013-04-25 |
Bare Aluminum Baffles For Resist Stripping Chambers
App 20130056022 - Egley; Fred D. ; et al. | 2013-03-07 |
System And Method For Performing Hot Water Seal On Electrostatic Chuck
App 20130052339 - Shih; Hong ; et al. | 2013-02-28 |
Dual Phase Cleaning Chambers and Assemblies Comprising The Same
App 20130019907 - Avoyan; Armen ; et al. | 2013-01-24 |
Bare aluminum baffles for resist stripping chambers
Grant 8,313,635 - Egley , et al. November 20, 2 | 2012-11-20 |
On-line chamber cleaning using dry ice blasting
Grant 8,292,698 - Shih , et al. October 23, 2 | 2012-10-23 |
Method of refurbishing bipolar electrostatic chuck
Grant 8,291,565 - Shih October 23, 2 | 2012-10-23 |
Electrode transporter and fixture sets incorporating the same
Grant 8,276,898 - Avoyan , et al. October 2, 2 | 2012-10-02 |
Peripherally engaging electrode carriers and assemblies incorporating the same
Grant 8,276,604 - Augustino , et al. October 2, 2 | 2012-10-02 |
Cleaning of bonded silicon electrodes
Grant 8,221,552 - Outka , et al. July 17, 2 | 2012-07-17 |
Extending storage time of removed plasma chamber components prior to cleaning thereof
Grant 8,216,388 - Shih , et al. July 10, 2 | 2012-07-10 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
Grant 8,215,321 - Shih , et al. July 10, 2 | 2012-07-10 |
System And Method For Testing An Electrostatic Chuck
App 20120153971 - Shih; Hong ; et al. | 2012-06-21 |
Extending Lifetime Of Yttrium Oxide As A Plasma Chamber Material
App 20120144640 - Shih; Hong ; et al. | 2012-06-14 |
Method Of Forming A Process Chamber Component Having Electroplated Yttrium Containing Coating
App 20120138472 - HAN; Nianci ; et al. | 2012-06-07 |
Process Chamber Component Having Yttrium-aluminum Coating
App 20120135155 - HAN; Nianci ; et al. | 2012-05-31 |
Backside mounted electrode carriers and assemblies incorporating the same
Grant 8,171,877 - Augustino , et al. May 8, 2 | 2012-05-08 |
Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same
App 20120108152 - La Croix; Cliff ; et al. | 2012-05-03 |
System and method for testing an electrostatic chuck
Grant 8,143,904 - Shih , et al. March 27, 2 | 2012-03-27 |
Process chamber component having electroplated yttrium containing coating
Grant 8,114,525 - Han , et al. February 14, 2 | 2012-02-14 |
Method of manufacturing a process chamber component having yttrium-aluminum coating
Grant 8,110,086 - Han , et al. February 7, 2 | 2012-02-07 |
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same
App 20120013242 - Augustino; Jason ; et al. | 2012-01-19 |
Extending lifetime of yttrium oxide as a plasma chamber material
Grant 8,097,105 - Shih , et al. January 17, 2 | 2012-01-17 |
Electrode Carrier Assemblies
App 20110308732 - La Croix; Cliff ; et al. | 2011-12-22 |
Immersive oxidation and etching process for cleaning silicon electrodes
Grant 8,075,703 - Avoyan , et al. December 13, 2 | 2011-12-13 |
Processes for reconditioning multi-component electrodes
Grant 8,075,701 - Avoyan , et al. December 13, 2 | 2011-12-13 |
Extending Storage Time Of Removed Plasma Chamber Components Prior To Cleaning Thereof
App 20110232678 - Shih; Hong ; et al. | 2011-09-29 |
Method for inspecting electrostatic chucks with Kelvin probe analysis
Grant 8,022,718 - Avoyan , et al. September 20, 2 | 2011-09-20 |
Methods And Apparatus For Wet Cleaning Electrode Assemblies For Plasma Processing Apparatuses
App 20110180117 - Shih; Hong ; et al. | 2011-07-28 |
Extending storage time of removed plasma chamber components prior to cleaning thereof
Grant 7,976,641 - Shih , et al. July 12, 2 | 2011-07-12 |
Methodology For Cleaning Of Surface Metal Contamination From An Upper Electrode Used In A Plasma Chamber
App 20110146704 - Shih; Hong ; et al. | 2011-06-23 |
Methods For Wet Cleaning Quartz Surfaces Of Components For Plasma Processing Chambers
App 20110146909 - Shih; Hong ; et al. | 2011-06-23 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
Grant 7,942,973 - Shih , et al. May 17, 2 | 2011-05-17 |
Bare Aluminum Baffles For Resist Stripping Chambers
App 20100319813 - Egley; Fred D. ; et al. | 2010-12-23 |
Electroplating an yttrium-containing coating on a chamber component
Grant 7,833,401 - Han , et al. November 16, 2 | 2010-11-16 |
Bare aluminum baffles for resist stripping chambers
Grant 7,811,409 - Egley , et al. October 12, 2 | 2010-10-12 |
Immersive Oxidation And Etching Process For Cleaning Silicon Electrodes
App 20100139692 - Avoyan; Armen ; et al. | 2010-06-10 |
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing
App 20100144246 - Avoyan; Armen ; et al. | 2010-06-10 |
Method Of Refurbishing Bipolar Electrostatic Chuck
App 20100088872 - Shih; Hong | 2010-04-15 |
System And Method For Testing An Electrostatic Chuck
App 20100090711 - Shih; Hong ; et al. | 2010-04-15 |
Method For Inspecting Electrostatic Chucks With Kelvin Probe Analysis
App 20100045316 - AVOYAN; ARMEN ; et al. | 2010-02-25 |
Processes For Reconditioning Multi-component Electrodes
App 20090325320 - Avoyan; Armen ; et al. | 2009-12-31 |
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same
App 20090322199 - Augustino; Jason ; et al. | 2009-12-31 |
Peripherally Engaging Electrode Carriers And Assemblies Incorporating The Same
App 20090321018 - Augustino; Jason ; et al. | 2009-12-31 |
Method for cleaning microwave applicator tube
Grant 7,638,004 - Shih , et al. December 29, 2 | 2009-12-29 |
Electrode Transporter And Fixture Sets Incorporating The Same
App 20090311079 - Avoyan; Armen ; et al. | 2009-12-17 |
Components For Use In A Plasma Chamber Having Reduced Particle Generation And Method Of Making
App 20090261065 - SINGH; HARMEET ; et al. | 2009-10-22 |
Methodology for cleaning of surface metal contamination from electrode assemblies
Grant 7,578,889 - Shih , et al. August 25, 2 | 2009-08-25 |
Silicon electrode assembly surface decontamination by acidic solution
Grant 7,507,670 - Shih , et al. March 24, 2 | 2009-03-24 |
Cleaning methods for silicon electrode assembly surface contamination removal
Grant 7,498,269 - Ren , et al. March 3, 2 | 2009-03-03 |
Methods for silicon electrode assembly etch rate and etch uniformity recovery
Grant 7,442,114 - Huang , et al. October 28, 2 | 2008-10-28 |
Methodology for cleaning of surface metal contamination from electrode assemblies
App 20080236620 - Shih; Hong ; et al. | 2008-10-02 |
Cleaning of bonded silicon electrodes
App 20080236618 - Outka; Duane ; et al. | 2008-10-02 |
Process chamber component having electroplated yttrium containing coating
App 20080223725 - Han; Nianci ; et al. | 2008-09-18 |
Bare aluminum baffles for resist stripping chambers
App 20080178906 - Egley; Fred D. ; et al. | 2008-07-31 |
Extending lifetime of yttrium oxide as a plasma chamber material
App 20080169588 - Shih; Hong ; et al. | 2008-07-17 |
Process chamber component having yttrium-aluminum coating
App 20080110760 - Han; Nianci ; et al. | 2008-05-15 |
Process chamber component having electroplated yttrium containing coating
Grant 7,371,467 - Han , et al. May 13, 2 | 2008-05-13 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
App 20080092920 - Shih; Hong ; et al. | 2008-04-24 |
Forming A Chamber Component Having A Yttrium-containing Coating
App 20080017516 - Han; Nianci ; et al. | 2008-01-24 |
Cleaning methods for silicon electrode assembly surface contamination removal
App 20080015132 - Ren; Daxing ; et al. | 2008-01-17 |
Fluorine free integrated process for etching aluminum including chamber dry clean
Grant 7,270,761 - Wang , et al. September 18, 2 | 2007-09-18 |
Cleaning methods for silicon electrode assembly surface contamination removal
Grant 7,247,579 - Ren , et al. July 24, 2 | 2007-07-24 |
Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof
App 20070068629 - Shih; Hong ; et al. | 2007-03-29 |
Methods for silicon electrode assembly etch rate and etch uniformity recovery
App 20060138081 - Huang; Tuochuan ; et al. | 2006-06-29 |
Silicon electrode assembly surface decontamination by acidic solution
App 20060141802 - Shih; Hong ; et al. | 2006-06-29 |
Cleaning methods for silicon electrode assembly surface contamination removal
App 20060141787 - Ren; Daxing ; et al. | 2006-06-29 |
Wet Cleaning Of Electrostatic Chucks
App 20060112969 - Shih; Hong ; et al. | 2006-06-01 |
Wet cleaning of electrostatic chucks
Grant 7,052,553 - Shih , et al. May 30, 2 | 2006-05-30 |
Bare aluminum baffles for resist stripping chambers
App 20050284573 - Egley, Fred D. ; et al. | 2005-12-29 |
Methods for wet cleaning quartz surfaces of components for plasma processing chambers
App 20050274396 - Shih, Hong ; et al. | 2005-12-15 |
Process chamber having component with yttrium-aluminum coating
Grant 6,942,929 - Han , et al. September 13, 2 | 2005-09-13 |
Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system
App 20050161061 - Shih, Hong ; et al. | 2005-07-28 |
Coating boron carbide on aluminum
Grant 6,808,747 - Shih , et al. October 26, 2 | 2004-10-26 |
Method and apparatus for cleaning a substrate processing chamber
App 20040200498 - Wang, Xikun ; et al. | 2004-10-14 |
Process chamber component having electroplated yttrium containing coating
App 20040191545 - Han, Nianci ; et al. | 2004-09-30 |
Fluorine free integrated process for etching aluminum including chamber dry clean
App 20040074869 - Wang, Xikun ; et al. | 2004-04-22 |
Methods for etching an organic anti-reflective coating
Grant 6,649,532 - Chen , et al. November 18, 2 | 2003-11-18 |
Methods For Etching An Organic Anti-reflective Coating
App 20030209520 - Chen, Hui ; et al. | 2003-11-13 |
Substrate processing using a member comprising an oxide of a group IIIB metal
Grant 6,641,697 - Han , et al. November 4, 2 | 2003-11-04 |
Cleaning ceramic surfaces
App 20030190870 - Shih, Hong ; et al. | 2003-10-09 |
Wavy and roughened dome in plasma processing reactor
Grant 6,623,595 - Han , et al. September 23, 2 | 2003-09-23 |
Corrosion-resistant protective coating for an apparatus and method for processing a substrate
Grant 6,592,707 - Shih , et al. July 15, 2 | 2003-07-15 |
Process chamber having component with yttrium-aluminum coating
App 20030127049 - Han, Nianci ; et al. | 2003-07-10 |
Diamond coated parts in a plasma reactor
Grant 6,508,911 - Han , et al. January 21, 2 | 2003-01-21 |
Substrate processing using a member comprising an oxide of a group IIIB metal
App 20020100554 - Han, Nianci ; et al. | 2002-08-01 |
Corrosion-resistant protective coating for an apparatus and method for processing a substrate
App 20020066532 - Shih, Hong ; et al. | 2002-06-06 |
Ceramic composition for an apparatus and method for processing a substrate
Grant 6,352,611 - Han , et al. March 5, 2 | 2002-03-05 |
Method of cleaning a semiconductor device processing chamber after a copper etch process
Grant 6,352,081 - Lu , et al. March 5, 2 | 2002-03-05 |
Boron carbide parts and coatings in a plasma reactor
Grant 6,120,640 - Shih , et al. September 19, 2 | 2000-09-19 |
Method for creating a corrosion-resistant aluminum surface
Grant 5,194,138 - Mansfeld , et al. March 16, 1 | 1993-03-16 |
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