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Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article
Grant 10,401,744 - Sentoku , et al. Sep | 2019-09-03 |
Photoacoustic Apparatus
App 20180206728 - Sentoku; Koichi | 2018-07-26 |
Ultrasonic Probe
App 20180146950 - Ohishi; Shinji ; et al. | 2018-05-31 |
Lithography apparatus, lithography method, and method of manufacturing article
Grant 9,257,262 - Sentoku , et al. February 9, 2 | 2016-02-09 |
Detection Apparatus, Lithography Apparatus, And Article Manufacturing Method
App 20150331331 - Sentoku; Koichi ; et al. | 2015-11-19 |
Method For Measuring Inclination Of Beam, Drawing Method, Drawing Apparatus, And Method Of Manufacturing Object
App 20150155137 - Sentoku; Koichi ; et al. | 2015-06-04 |
Drawing Apparatus, And Method Of Manufacturing Article
App 20150044614 - SENTOKU; Koichi ; et al. | 2015-02-12 |
Calibration Method, Measurement Apparatus, Exposure Apparatus, And Method Of Manufacturing Article
App 20150015861 - Sentoku; Koichi ; et al. | 2015-01-15 |
Method of manufacturing device, and substrate
Grant 08922774 - | 2014-12-30 |
Method of manufacturing device, and substrate
Grant 8,922,774 - Sentoku , et al. December 30, 2 | 2014-12-30 |
Lithography Apparatus, And Method For Manufacturing Article
App 20140322654 - Sentoku; Koichi ; et al. | 2014-10-30 |
Lithography Apparatus, Lithography Method, And Method Of Manufacturing Article
App 20140322831 - Sentoku; Koichi ; et al. | 2014-10-30 |
Lithography Apparatus, Lithography Method, And Method For Manufacturing Device
App 20140320836 - Yamaguchi; Wataru ; et al. | 2014-10-30 |
Alignment method, imprint method, alignment apparatus, and position measurement method
Grant 8,845,317 - Suehira , et al. September 30, 2 | 2014-09-30 |
Lithography apparatus and device manufacturing method
Grant 8,618,515 - Sentoku December 31, 2 | 2013-12-31 |
Drawing Apparatus, And Method Of Manufacturing Article
App 20130216954 - Oishi; Satoru ; et al. | 2013-08-22 |
Lithography Apparatus, And Method Of Manufacturing Article
App 20130188165 - OGAWA; Shigeki ; et al. | 2013-07-25 |
Drawing Apparatus, And Method Of Manufacturing Article
App 20130171570 - Sentoku; Koichi ; et al. | 2013-07-04 |
Method Of Manufacturing Device, And Substrate
App 20130148122 - SENTOKU; Koichi ; et al. | 2013-06-13 |
Lithography Apparatus And Method, And Method Of Manufacturing Article
App 20130148091 - Sentoku; Koichi ; et al. | 2013-06-13 |
Reticle manufacturing method, surface shape measuring apparatus and signal processor
Grant 8,338,805 - Sentoku December 25, 2 | 2012-12-25 |
Position detection apparatus, position detection method, exposure apparatus, and device fabrication method
Grant 8,089,612 - Matsumoto , et al. January 3, 2 | 2012-01-03 |
Lithography Apparatus And Device Manufacturing Method
App 20110310373 - SENTOKU; Koichi | 2011-12-22 |
Surface shape measurement apparatus and exposure apparatus
Grant 7,952,725 - Sentoku , et al. May 31, 2 | 2011-05-31 |
Pattern transfer apparatus, imprint apparatus, and pattern transfer method
Grant 7,884,935 - Suehira , et al. February 8, 2 | 2011-02-08 |
Reticle Manufacturing Method, Surface Shape Measuring Apparatus And Signal Processor
App 20100209828 - Sentoku; Koichi | 2010-08-19 |
Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing method
Grant 7,771,905 - Sentoku , et al. August 10, 2 | 2010-08-10 |
Measurement method and apparatus, exposure apparatus, and device fabrication method
Grant 7,670,729 - Takagi , et al. March 2, 2 | 2010-03-02 |
Imaging Optical System, Exposure Apparatus, And Device Manufacturing Method
App 20100002215 - Sentoku; Koichi | 2010-01-07 |
Surface Shape Measurement Apparatus And Exposure Apparatus
App 20090286172 - Sentoku; Koichi ; et al. | 2009-11-19 |
Position Detection Apparatus, Position Detection Method, Exposure Apparatus, And Device Fabrication Method
App 20090244513 - Matsumoto; Takahiro ; et al. | 2009-10-01 |
Exposure apparatus
Grant 7,586,582 - Ina , et al. September 8, 2 | 2009-09-08 |
Imprint apparatus and imprint method including dual movable image pick-up device
Grant 7,531,821 - Suehira , et al. May 12, 2 | 2009-05-12 |
Alignment Method, Imprint Method, Alignment Apparatus, And Position Measurement Method
App 20090108483 - Suehira; Nobuhito ; et al. | 2009-04-30 |
Imaging optical system and exposure apparatus
Grant 7,435,984 - Sentoku , et al. October 14, 2 | 2008-10-14 |
Exposure method and exposure management system
Grant 7,396,620 - Sentoku July 8, 2 | 2008-07-08 |
Management system, apparatus, and method, exposure apparatus, and control method therefor
Grant 7,385,700 - Matsumoto , et al. June 10, 2 | 2008-06-10 |
Management system and apparatus, method therefor, and device manufacturing method
Grant 7,373,213 - Oishi , et al. May 13, 2 | 2008-05-13 |
Imprint Apparatus And Imprint Method
App 20080073604 - Suehira; Nobuhito ; et al. | 2008-03-27 |
Pattern Transfer Apparatus, Imprint Apparatus, And Pattern Transfer Method
App 20070242272 - Suehira; Nobuhito ; et al. | 2007-10-18 |
Shape measuring apparatus, shape measuring method, and aligning method
Grant 7,271,882 - Ina , et al. September 18, 2 | 2007-09-18 |
Position detection method and apparatus
Grant 7,247,868 - Suzuki , et al. July 24, 2 | 2007-07-24 |
Method And Program For Calculating Exposure Dose And Focus Position In Exposure Apparatus, And Device Manufacturing Method
App 20070154824 - Sentoku; Koichi ; et al. | 2007-07-05 |
Exposure Apparatus
App 20070035708 - Ina; Hideki ; et al. | 2007-02-15 |
Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices
Grant 7,173,716 - Oishi , et al. February 6, 2 | 2007-02-06 |
Imaging Optical System And Exposure Apparatus
App 20070007471 - SENTOKU; Koichi ; et al. | 2007-01-11 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method
Grant 7,148,973 - Sentoku , et al. December 12, 2 | 2006-12-12 |
Method for producing library
Grant 7,123,414 - Sentoku , et al. October 17, 2 | 2006-10-17 |
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices
Grant 7,110,116 - Oishi , et al. September 19, 2 | 2006-09-19 |
Management system, management apparatus, management method, and device manufacturing method
App 20060195215 - Suzuki; Takehiko ; et al. | 2006-08-31 |
Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method
Grant 7,075,618 - Ina , et al. July 11, 2 | 2006-07-11 |
Management system, management apparatus, management method, and device manufacturing method
Grant 7,069,104 - Suzuki , et al. June 27, 2 | 2006-06-27 |
Position detection method and apparatus
Grant 7,067,826 - Suzuki , et al. June 27, 2 | 2006-06-27 |
Management system, apparatus, and method, exposure apparatus, and control method therefor
App 20060050274 - Matsumoto; Takahiro ; et al. | 2006-03-09 |
Management system, management method and apparatus, and management apparatus control method
Grant 7,010,380 - Sentoku , et al. March 7, 2 | 2006-03-07 |
Management system, apparatus, and method, exposure apparatus, and control method therefor
Grant 6,992,767 - Matsumoto , et al. January 31, 2 | 2006-01-31 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method
Grant 6,992,780 - Sentoku , et al. January 31, 2 | 2006-01-31 |
Measurement method and apparatus, exposure apparatus, and device fabrication method
App 20050270504 - Takagi, Atsushi ; et al. | 2005-12-08 |
Position detection method and apparatus
App 20050264781 - Suzuki, Takehiko ; et al. | 2005-12-01 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method
App 20050243296 - Sentoku, Koichi ; et al. | 2005-11-03 |
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices
App 20050211918 - Oishi, Satoru ; et al. | 2005-09-29 |
Shape measuring apparatus, shape measuring method, and aligning method
Grant 6,950,179 - Ina , et al. September 27, 2 | 2005-09-27 |
Shape measuring apparatus, shape measuring method, and aligning method
App 20050206877 - Ina, Hideki ; et al. | 2005-09-22 |
Management system and apparatus method therefor, and device manufacturing method
App 20050137837 - Oishi, Satoru ; et al. | 2005-06-23 |
Exposure method and exposure management system
App 20050084782 - Sentoku, Koichi | 2005-04-21 |
Method for producing library
App 20050004778 - Sentoku, Koichi ; et al. | 2005-01-06 |
Management system and apparatus, method therefor, and device manufacturing method
Grant 6,785,583 - Oishi , et al. August 31, 2 | 2004-08-31 |
Management system and apparatus, method therefor, and device manufacturing method
App 20030204282 - Oishi, Satoru ; et al. | 2003-10-30 |
Management system, management apparatus, management method, and device manufacturing method
App 20030204348 - Suzuki, Takehiko ; et al. | 2003-10-30 |
Management system, apparatus, and method, exposure apparatus, and control method therefor
App 20030202182 - Matsumoto, Takahiro ; et al. | 2003-10-30 |
Management system, management method and apparatus, and management apparatus control method
App 20030204488 - Sentoku, Koichi ; et al. | 2003-10-30 |
Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus
Grant 6,636,303 - Ina , et al. October 21, 2 | 2003-10-21 |
Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
Grant 6,559,924 - Ina , et al. May 6, 2 | 2003-05-06 |
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices
App 20030081213 - Oishi, Satoru ; et al. | 2003-05-01 |
Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method
App 20030071980 - Ina, Hideki ; et al. | 2003-04-17 |
Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by using separate reference member having alignment marks
Grant 6,529,625 - Sentoku , et al. March 4, 2 | 2003-03-04 |
Shape measuring apparatus, shape measuring method, and aligning method
App 20020180983 - Ina, Hideki ; et al. | 2002-12-05 |
Position detection method and apparatus
App 20020175300 - Suzuki, Takehiko ; et al. | 2002-11-28 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method
App 20020176096 - Sentoku, Koichi ; et al. | 2002-11-28 |
Position detecting system and device manufacturing method using the same
Grant 6,421,124 - Matsumoto , et al. July 16, 2 | 2002-07-16 |
Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
App 20020018207 - Ina, Hideki ; et al. | 2002-02-14 |
Position Detecting Method And Position Detecting Device For Detecting Relative Positions Of Objects Having Position Detecting Marks By Separate Reference Member Having Alignment Marks
App 20010046315 - SENTOKU, KOICHI ; et al. | 2001-11-29 |
Foreign substance inspecting method and apparatus, and exposure apparatus using this inspecting apparatus
App 20010043326 - Ina, Hideki ; et al. | 2001-11-22 |
Position detecting system and device manufacturing method using the same
Grant 6,154,281 - Sentoku , et al. November 28, 2 | 2000-11-28 |
Exposure device and method for producing a mask for use in the device
Grant 6,124,922 - Sentoku September 26, 2 | 2000-09-26 |
X-ray mask and X-ray exposure method using the same
Grant 6,101,237 - Miyachi , et al. August 8, 2 | 2000-08-08 |
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
Grant 5,751,426 - Nose , et al. May 12, 1 | 1998-05-12 |
Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus
Grant 5,717,492 - Sentoku , et al. February 10, 1 | 1998-02-10 |
Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters
Grant 5,682,239 - Matsumoto , et al. October 28, 1 | 1997-10-28 |
System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating
Grant 5,625,453 - Matsumoto , et al. April 29, 1 | 1997-04-29 |
Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means
Grant 5,585,923 - Nose , et al. December 17, 1 | 1996-12-17 |
Measuring method and apparatus for meausring the positional relationship of first and second gratings
Grant 5,333,050 - Nose , et al. July 26, 1 | 1994-07-26 |
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