loadpatents
Patent applications and USPTO patent grants for Sengers; Timotheus Franciscus.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 11,003,096 - Sengers , et al. May 11, 2 | 2021-05-11 |
Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic Apparatus And Device Manufacturing Method App 20200124990 - SENGERS; Timotheus Franciscus ;   et al. | 2020-04-23 |
Lithographic apparatus and device manufacturing method Grant 10,514,618 - Sengers , et al. Dec | 2019-12-24 |
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ;   et al. | 2019-10-24 |
Lithographic apparatus and device manufacturing method Grant 10,444,644 - Sengers , et al. Oc | 2019-10-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2 | 2019-07-09 |
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic Apparatus And Device Manufacturing Method App 20190086820 - SENGERS; Timotheus Franciscus ;   et al. | 2019-03-21 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic apparatus and device manufacturing method Grant 10,146,143 - Sengers , et al. De | 2018-12-04 |
Lithographic Apparatus And Device Manufacturing Method App 20180314169 - SENGERS; Timotheus Franciscus ;   et al. | 2018-11-01 |
Lithographic Apparatus And Device Manufacturing Method App 20180203364 - STREEFKERK; Bob ;   et al. | 2018-07-19 |
Lithographic apparatus and device manufacturing method Grant 10,025,204 - Sengers , et al. July 17, 2 | 2018-07-17 |
Lithographic method and apparatus Grant 9,958,787 - Loopstra , et al. May 1, 2 | 2018-05-01 |
Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2 | 2018-04-24 |
Lithographic Apparatus And Device Manufacturing Method App 20180046095 - SENGERS; Timotheus Franciscus ;   et al. | 2018-02-15 |
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic apparatus and device manufacturing method Grant 9,804,509 - Sengers , et al. October 31, 2 | 2017-10-31 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Lithographic Apparatus And Device Manufacturing Method App 20170176876 - SENGERS; Timotheus Franciscus ;   et al. | 2017-06-22 |
Lithographic Apparatus And Device Manufacturing Method App 20170153556 - SENGERS; Timotheus Franciscus ;   et al. | 2017-06-01 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method Grant 9,594,308 - Sengers , et al. March 14, 2 | 2017-03-14 |
Lithographic apparatus and device manufacturing method Grant 9,568,841 - Sengers , et al. February 14, 2 | 2017-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
Lithographic Apparatus And Device Manufacturing Method App 20160282727 - LOF; Joeri ;   et al. | 2016-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160209761 - SENGERS; Timotheus Franciscus ;   et al. | 2016-07-21 |
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Lithographic apparatus and device manufacturing method Grant 9,316,919 - Sengers , et al. April 19, 2 | 2016-04-19 |
Lithographic Apparatus And Device Manufacturing Method App 20160070178 - SENGERS; Timotheus Franciscus ;   et al. | 2016-03-10 |
Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ;   et al. | 2016-01-07 |
Lithographic apparatus and device manufacturing method Grant 9,213,247 - Sengers , et al. December 15, 2 | 2015-12-15 |
Projection system and lithographic apparatus Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
Lithographic Method and Apparatus App 20150253679 - Loopstra; Erik Roelof ;   et al. | 2015-09-10 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20150116683 - SENGERS; Timotheus Franciscus ;   et al. | 2015-04-30 |
Lithographic apparatus and device manufacturing method Grant 8,947,637 - Sengers , et al. February 3, 2 | 2015-02-03 |
Lithographic Apparatus And Device Manufacturing Method App 20140313494 - SENGERS; Timotheus Franciscus ;   et al. | 2014-10-23 |
Exposure apparatus Grant 8,830,446 - Boogaard , et al. September 9, 2 | 2014-09-09 |
Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ;   et al. | 2014-08-21 |
Lithographic apparatus and device manufacturing method Grant 8,711,333 - Sengers , et al. April 29, 2 | 2014-04-29 |
Lithographic Apparatus And Device Manufacturing Method App 20140098357 - STREEFKERK; Bob ;   et al. | 2014-04-10 |
Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2 | 2014-01-21 |
Lithographic apparatus and sensor therefor Grant 8,629,418 - Van De Kerkhof , et al. January 14, 2 | 2014-01-14 |
Exposure Apparatus App 20130286374 - BOOGAARD; Arjen ;   et al. | 2013-10-31 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2 | 2013-10-01 |
Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ;   et al. | 2013-09-26 |
Exposure apparatus Grant 8,542,341 - Boogaard , et al. September 24, 2 | 2013-09-24 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ;   et al. | 2012-11-01 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110317143 - SENGERS; Timotheus Franciscus ;   et al. | 2011-12-29 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ;   et al. | 2011-11-10 |
Lithographic apparatus and device manufacturing method Grant 8,054,445 - Jansen , et al. November 8, 2 | 2011-11-08 |
Lithographic apparatus and device manufacturing method Grant 8,035,798 - Sengers , et al. October 11, 2 | 2011-10-11 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Projection System and Lithographic Apparatus App 20110170078 - Loopstra; Erik Roelof ;   et al. | 2011-07-14 |
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels Grant 7,924,406 - Loopstra , et al. April 12, 2 | 2011-04-12 |
Lithographic apparatus and device manufacturing method Grant 7,907,255 - Sengers , et al. March 15, 2 | 2011-03-15 |
Lithographic apparatus, device manufacturing method and computer program product Grant 7,903,234 - Stoeldraijer , et al. March 8, 2 | 2011-03-08 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ;   et al. | 2011-01-06 |
Lithographic apparatus having masking parts and device manufacturing method Grant 7,671,968 - Loopstra , et al. March 2, 2 | 2010-03-02 |
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ;   et al. | 2009-11-26 |
Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device Grant 7,619,747 - Sengers , et al. November 17, 2 | 2009-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20090251674 - Sengers; Timotheus Franciscus ;   et al. | 2009-10-08 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ;   et al. | 2009-08-20 |
Lithographic apparatus and method for manufacturing a device Grant 7,542,127 - Sengers , et al. June 2, 2 | 2009-06-02 |
Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2 | 2009-05-05 |
Exposure apparatus App 20090027642 - Boogaard; Arjen ;   et al. | 2009-01-29 |
Sensor for use in a lithographic apparatus Grant 7,453,078 - Kok , et al. November 18, 2 | 2008-11-18 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,450,217 - Boogaard , et al. November 11, 2 | 2008-11-11 |
Lithographic apparatus, device manufacturing method and computer program product App 20080158528 - Stoeldraijer; Judocus Marie Dominicus ;   et al. | 2008-07-03 |
Sensor for use in a lithographic apparatus App 20080007844 - Kok; Haico Victor ;   et al. | 2008-01-10 |
Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ;   et al. | 2007-11-22 |
Sensor for use in a lithographic apparatus Grant 7,282,701 - Kok , et al. October 16, 2 | 2007-10-16 |
Lithographic apparatus and method for manufacturing a device App 20070139629 - Sengers; Timotheus Franciscus ;   et al. | 2007-06-21 |
Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132971 - Sengers; Timotheus Franciscus ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,224,436 - Derksen , et al. May 29, 2 | 2007-05-29 |
Sensor for use in a lithographic apparatus App 20070108377 - Kok; Haico Victor ;   et al. | 2007-05-17 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus and device manufacturing method App 20070041001 - Jansen; Hans ;   et al. | 2007-02-22 |
Stage apparatus, lithographic apparatus and device manufacturing method App 20070013890 - Loopstra; Erik Roelof ;   et al. | 2007-01-18 |
Stage apparatus, lithographic apparatus and device manufacturing method App 20070013885 - Loopstra; Erik Roelof ;   et al. | 2007-01-18 |
Sensor for use in a lithographic apparatus App 20060192093 - Kok; Haico Victor ;   et al. | 2006-08-31 |
Lithographic apparatus and device manufacturing method App 20060176458 - Maria Derksen; Antonius Theodorus Anna ;   et al. | 2006-08-10 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060152696 - Boogaard; Arjen ;   et al. | 2006-07-13 |
Lithographic apparatus and device manufacturing method Grant 7,075,616 - Derksen , et al. July 11, 2 | 2006-07-11 |
Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device App 20060132775 - Sengers; Timotheus Franciscus ;   et al. | 2006-06-22 |
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ;   et al. | 2005-12-01 |
Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ;   et al. | 2005-08-11 |
Lithographic apparatus and device manufacturing method App 20050078287 - Sengers, Timotheus Franciscus ;   et al. | 2005-04-14 |
Lithographic apparatus and device manufacturing method App 20040211920 - Maria Derksen, Antonius Theodorus Anna ;   et al. | 2004-10-28 |
Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ;   et al. | 2004-08-19 |
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